US4152286A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Composition and method for forming a doped oxide film
Assignee: Texas Instruments Inc
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Filing: 1977-09-13
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Granted: 1979-05-01
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Expires: 1997-09-13
Abstract
Abstract A boron doped, silicon oxide-forming film is produced on a semiconductor wafer by coating the wafer with a solution of a silicon compound and a boron compound, in a blend of two polar organic solvents, one of which has a low boiling point, and the other has a high boiling point, between 185° and 300° C. During a subsequent heating step, the high boiling point solvent redissolves any crystalline precipitate that forms during spin-on, giving a more uniform film for diffusion, and consequently a damage-free wafer surface.
Inventors
- 👤 Carol A. Crosson
- 👤 Terry L. Brewer
- 👤 Robert F. Aycock
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 19:09
CPC Classifications
H; H10; H10P; H10P32/00; H10P32/10; H10P32/19; Y; Y10; Y10S; Y10S252/00; Y10S252/95
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
72 words
A composition comprising a blend of first and second polar organic solvents, a silicon oxide-forming compound and a dopant compound dissolved therein; said first solvent having a boiling point of 50°-150° C. and comprising about 60% to 90% by weight of said composition; said second solvent comprising an alkyl ester of an aromatic acid, having a boiling point of 185°-300° C. and comprising about 0.5% to 30% by weight of said composition.
Claim 2
Dependent Claim
72 words
A composition comprising a blend of first and second polar organic solvents, a silicon oxide-forming compound and a dopant compound dissolved therein; said first solvent having a boiling point of 50°-150° C. and comprising about 60% to 90% by weight of said composition; said second solvent comprising an alkyl ester of an aromatic acid, having a boiling point of 185°-300° C. and comprising about 0.5% to 30% by weight of said composition.
Claim 3
Dependent Claim
13 words
A composition as in claim 1 wherein said first solvent is an alkoxyalcohol.
Claim 4
Dependent Claim
12 words
A composition as in claim 1 wherein said first solvent is ethoxyethanol.
Claim 5
Dependent Claim
14 words
A composition as in claim 1 wherein said second solvent is a dialkyl phthalate.
Claim 6
Dependent Claim
20 words
A composition as in claim 1 wherein said silicon oxide-forming compound is a reaction product of tetraethylorthosilicate and acetic anhydride.
Claim 7
Dependent Claim
13 words
A composition as in claim 1 wherein said dopant compound is boron oxide.
Claim 8
Dependent Claim
24 words
A composition as in claim 1 wherein said first solvent is ethoxyethanol, said second solvent is diethylphthalate, and said dopant is a boron compound.
Claim 9
Dependent Claim
30 words
A compound as in claim 7 wherein said boron compound is B 2 O 3 and said silicon oxide-forming compound is a product obtained by reacting acetate anhydride with tetraethylorthosilicate.
References Cited (Backward Citations)
US3928225A
Cited
US3915766A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-04-30 | 1982-10-30 | 1983-05-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-04-30 | 1986-10-30 | 1987-05-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-04-30 | 1990-10-30 | 1991-05-01 | $7700.00 | Window Closed / Lapsed |