US4798629A
Expired / Lapsed
US
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Spin-on glass for use in semiconductor processing
Assignee: Motorola Solutions Inc
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Filing: 1987-10-22
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Granted: 1989-01-17
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Expires: 2007-10-22
Abstract
Abstract A spin-on glass consisting of, by volume: 1.0 parts tetraethoxysilane (TEOS, also known as tetraethylorthosilicate), methyltriethoxysilane, and dimethyldiethoxysilane in a 2/1/1 ratio; 1.1 parts ethanol (EtOH, also known as ethyl alcohol); 0.0002 parts hydrochloric acid (HCl); and 0.26 parts water (H 2 O).
Inventors
- 👤 Thomas E. Wood
- 👤 Henry G. Hughes
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 08:44
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; C; C08; C08G; C08G77/00; C08G77/04; C08G77/06; C09; C09D; C09D183/00; C09D183/04; H10P14/66; H10P14/668; H10P14/6681; H10P14/6684; H10P14/6686; H10P14/63; H10P14/6326; H10P14/6342; H10P14/6682
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
31 words
A spin-on glass for use in processing semiconductor devices, said spin-on glass comprising: a first compound of tetraethoxysilane, methyltriethoxysilane, and dimethyldiethoxysilane combined in a 2/1/1 ratio; ethanol; hydrochloric acid; and water.
Claim 2
Dependent Claim
31 words
A spin-on glass for use in processing semiconductor devices, said spin-on glass comprising: a first compound of tetraethoxysilane, methyltriethoxysilane, and dimethyldiethoxysilane combined in a 2/1/1 ratio; ethanol; hydrochloric acid; and water.
Claim 3
Dependent Claim
19 words
The spin-on glass of claim 1 wherein said 2/1/1 compound is 1.0 parts by volume of said spin-on glass.
Claim 4
Dependent Claim
18 words
The spin-on glass of claim 1 wherein said ethanol is 1.1 parts by volume of said spin-on glass.
Claim 5
Dependent Claim
19 words
The spin-on glass of claim 1 wherein said hydrochloric acid is 0.0002 parts by volume of said spin-on glass.
Claim 6
Dependent Claim
18 words
The spin-on glass of claim 1 wherein said water is 0.26 parts by volume of said spin-on glass.
Claim 7
Dependent Claim
28 words
The spin-on glass of claim 1 wherein a mixture of tetraethoxysilane, methyltriethoxysilane, and dimethyldiethoxysilane between approximately 25.0 and 8.0 atomic weight percent carbon based on hydrolyzed organo silanes.
Claim 8
Dependent Claim
29 words
The spin-on glass of claim 1 wherein a mixture of tetraethoxysilane, methyltriethoxysilane, and dimethyldiethoxysilane having between approximately 11.0 and 9.0 atomic weight percent carbon based on hydrolyzed organo silanes.
Claim 9
Dependent Claim
27 words
The spin-on glass of claim 1 wherein a mixture of tetraethoxysilane, methyltriethoxysilane, and dimethyldiethoxysilane having approximately a 9.5 atomic weight percent carbon based on hydrolyzed organo silanes.
Claim 10
Dependent Claim
60 words
A spin-on glass for use in processing a semiconductor device, said spin-on glass comprising: a first compound, being 1.0 parts by volume, of tetraethoxysilane, methyltriethoxysilane, and dimethyldiethoxysilane in a 2/1/1 composition; ethanol being between 0.1 and 2.7 parts by volume; hydrochloric acid being between 0.0001 and 0.004 parts by volume; and water being between 0.05 and 0.40 parts by volume.
Claim 11
Dependent Claim
60 words
A spin-on glass for use in processing a semiconductor device, said spin-on glass comprising: a first compound, being 1.0 parts by volume, of tetraethoxysilane, methyltriethoxysilane, and dimethyldiethoxysilane in a 2/1/1 composition; ethanol being between 0.1 and 2.7 parts by volume; hydrochloric acid being between 0.0001 and 0.004 parts by volume; and water being between 0.05 and 0.40 parts by volume.
Claim 12
Dependent Claim
16 words
The spin-on glass of claim 9 wherein said ethanol is 1.1 parts of said spin-on glass.
Claim 13
Dependent Claim
17 words
The spin-on glass of claim 9 wherein said hydrochloric acid is 0.0002 parts of said spin-on glass.
Claim 14
Dependent Claim
16 words
The spin-on glass of claim 9 wherein said water is 0.26 parts of said spin-on glass.
Claim 15
Dependent Claim
25 words
The spin-on glass of claim 9 wherein a hydrolyzed solution of said first compound comprises between approximately 25.0 and 8.0 atomic weight percent of carbon.
Claim 16
Dependent Claim
25 words
The spin-on glass of claim 10 wherein a hydrolyzed solution of said first compound comprises between approximately 11.0 and 9.0 atomic weight percent of carbon.
Claim 17
Dependent Claim
22 words
The spin-on glass of claim 9 wherein a hydrolyzed solution of said first compound comprises approximately 9.5 atomic weight percent of carbon.
Claim 18
Dependent Claim
67 words
A spin-on glass for processing semiconductor devices, said spin-on glass comprising: a first compound being 1.0 parts by volume of said spin-on glass, said first compound comprising tetraethoxysilane, methyltriethoxysilane, and dimethyldiethoxysilane in a 2/1/1 ratio; ethanol being 1.1 parts by volume of said spin-on glass; hydrochloric acid being 0.0002 parts by volume of said spin-on glass; and water being 0.26 parts by volume of said spin-on glass.
Claim 19
Dependent Claim
67 words
A spin-on glass for processing semiconductor devices, said spin-on glass comprising: a first compound being 1.0 parts by volume of said spin-on glass, said first compound comprising tetraethoxysilane, methyltriethoxysilane, and dimethyldiethoxysilane in a 2/1/1 ratio; ethanol being 1.1 parts by volume of said spin-on glass; hydrochloric acid being 0.0002 parts by volume of said spin-on glass; and water being 0.26 parts by volume of said spin-on glass.
Claim 20
Dependent Claim
25 words
A spin-on glass of claim 16 wherein a hydrolyzed solution of said first compound comprises between approximately 11.0 and 9.0 atomic weight precent of carbon.
Claim 21
Dependent Claim
22 words
A spin-on glass of claim 16 wherein a hydrolyzed solution of said first compound comprises approximately 9.5 atomic weight percent of carbon.
Claim 22
Dependent Claim
31 words
A spin-on glass for use in processing semiconductor devices, said spin-on glass comprising: a first compound of tetraethoxysilane, methyltriethoxysilane, and dimethyldiethoxysilane combined in a 2/2/1 ratio; ethanol; hydrochloric acid; and water.
Claim 23
Dependent Claim
31 words
A spin-on glass for use in processing semiconductor devices, said spin-on glass comprising: a first compound of tetraethoxysilane, methyltriethoxysilane, and dimethyldiethoxysilane combined in a 2/2/1 ratio; ethanol; hydrochloric acid; and water.
Claim 24
Dependent Claim
31 words
A spin-on glass for use in processing semiconductor devices, said spin-on glass comprising: a first compound of tetraethoxysilane, methyltriethoxysilane, and dimethyldiethoxysilane combined in a 2/2/1 ratio; ethanol; hydrochloric acid; and water.
Claim 25
Dependent Claim
31 words
A spin-on glass for use in processing semiconductor devices, said spin-on glass comprising: a first compound of tetraethoxysilane, methyltriethoxysilane, and dimethyldiethoxysilane combined in a 2/2/1 ratio; ethanol; hydrochloric acid; and water.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-01-17 | 1992-07-18 | 1993-01-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-01-17 | 1996-07-18 | 1997-01-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-01-17 | 2000-07-18 | 2001-01-17 | $7700.00 | Window Closed / Lapsed |