US5152834A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Spin-on glass composition
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
•
Filing: 1991-07-18
•
Granted: 1992-10-06
•
Expires: 2011-07-18
Abstract
Abstract There is disclosed spin-on glass compositions, preferably for use as coating layers on substrates such as semiconductor silicon wafers, which comprise a solution of a crosslinked polyorganosiloxane having a silane adhesion promoter incorporated therein preferably with a glycoether, glycolether acetate or similar solvent. Also provided are methods for preparing these spin-on glass compositions from polyorganosiloxanes preferably having at least 30 wt. % carbon. These spin-on glass compositions (a) provide layers with improved resistance to O2 concentration variations during etching and are stable at temperatures of up to 500 DEG C. without decomposition, (b) have an extended shelf-life of more than one year, and (c) can fill small spaces with high aspect ratios with low shrinkage and low stress.
Inventors
- 👤 Derryl D. J. Allman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 07:59
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/45; H10W20/48; C; C08; C08G; C08G77/00; C08G77/04; C08G77/06; C09; C09D; C09D183/00; C09D183/04; G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/091; G03F7/094; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6342; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6926
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
101 words
A process for producing a spin-on glass composition, which comprises: providing a solution of crosslinked polyorganosiloxane polymer having an atomic carbon content of at least 30 weight percent in an inert organic solvent which does not contain a gel, reacting the crosslinked polyorganosiloxane with a silane adhesion promoter under alkaline conditions in the absence of a platinum catalyst in an amount which provides from 1 wt. % to less than about 10 wt. % of the resulting polyorganosiloxane product; and reducing the pH of the reaction medium sufficiently to arrest the reaction between the crosslinked polyorganosiloxane and the silane adhesion promoter.
Claim 2
Dependent Claim
101 words
A process for producing a spin-on glass composition, which comprises: providing a solution of crosslinked polyorganosiloxane polymer having an atomic carbon content of at least 30 weight percent in an inert organic solvent which does not contain a gel, reacting the crosslinked polyorganosiloxane with a silane adhesion promoter under alkaline conditions in the absence of a platinum catalyst in an amount which provides from 1 wt. % to less than about 10 wt. % of the resulting polyorganosiloxane product; and reducing the pH of the reaction medium sufficiently to arrest the reaction between the crosslinked polyorganosiloxane and the silane adhesion promoter.
Claim 3
Dependent Claim
37 words
A process as in claim 1, wherein the silane adhesion promoter has at least one C 1 -C 4 -alkoxy group or C 2 -C 4 -acetoxy group and at least one aminoorgano, ureidoorgano or glycidoxyorgano group.
Claim 4
Dependent Claim
25 words
A process as in claim 1, wherein the silane adhesion promoter is an aminoorganotrialkoxysilane wherein the alkoxy groups have from one to four carbon atoms.
Claim 5
Dependent Claim
124 words
A process for producing a spin-on glass composition, which comprises: providing a solution of crosslinked polyorganosiloxane polymers having an atomic carbon content of at least 30 weight percent in an inert organic solvent having a boiling point of from 80° C. to 250° C. which does not contain a gel, reacting the crosslinked polyorganosiloxane with an aminoorganotrialkoxysilane in an amount which provides from 1 to 5 wt. % of the resulting polyorganosiloxane product under alkaline conditions in the absence of a platinum catalyst for about 4-8 hours wherein the alkoxy groups have one to four carbon atoms, and reducing the pH of the reaction medium to a value below 7 to arrest the reaction between the crosslinked polyorganosiloxane and aminoorganotrialkoxysilane after about 4-8 hours.
Claim 6
Dependent Claim
124 words
A process for producing a spin-on glass composition, which comprises: providing a solution of crosslinked polyorganosiloxane polymers having an atomic carbon content of at least 30 weight percent in an inert organic solvent having a boiling point of from 80° C. to 250° C. which does not contain a gel, reacting the crosslinked polyorganosiloxane with an aminoorganotrialkoxysilane in an amount which provides from 1 to 5 wt. % of the resulting polyorganosiloxane product under alkaline conditions in the absence of a platinum catalyst for about 4-8 hours wherein the alkoxy groups have one to four carbon atoms, and reducing the pH of the reaction medium to a value below 7 to arrest the reaction between the crosslinked polyorganosiloxane and aminoorganotrialkoxysilane after about 4-8 hours.
Claim 7
Dependent Claim
18 words
A process as in claim 4, wherein the aminoorganotrialkoxysilane is selected from gamma-aminopropyltriethoxysilane, gamma-aminopropyltrimethoxysilane, N-beta-(amino-ethyl)-gamma-aminopropyltrimethoxysilane and N-beta-(amino-ethyl)-N-beta-(amino ethyl)-gamma-aminopropyltrimethoxysilane.
Claim 8
Dependent Claim
26 words
A process as in claim 4, wherein the crosslinked polyorganosiloxane has less than 13 weight percent silanol groups and less than 10 weight percent alkoxy groups.
Claim 9
Dependent Claim
22 words
A process as in claim 4, wherein the crosslinked polyorganosiloxane has an atomic carbon content of from 40 to 50 weight percent.
Claim 10
Dependent Claim
12 words
A process as in claim 4, wherein the polyorganosiloxane is a polymethylphenylsiloxane.
Claim 11
Dependent Claim
22 words
A process as in claim 8, wherein the ratio of methyl to phenyl radicals falls within the range of 1:1 to 1:3.
Claim 12
Dependent Claim
22 words
A process as in claim 9, wherein a portion of the methyl and phenyl radicals are bonded to the same silicon atom.
Claim 13
Dependent Claim
34 words
A process as in claim 4 comprising the additional step of filtering the polyorganosiloxane solution with a filter of submicron pore size following the reduction of the pH with the addition of organic acid.
Claim 14
Dependent Claim
164 words
A process for producing a spin-on glass composition comprising: providing a solution of crosslinked polymethylphenylsilsesquioxane polymers in an inert organic solvent having a boiling point of form 80° C. to 250° C. which does not contain a gel, reacting the crosslinked polymethylphenylsilsesquioxane polymers with gamma-aminopropyltriethoxysilane under alkaline conditions in the absence of a platinum catalyst for about 4-8 hours in an amount which provides 1 wt. % to less than about 10 wt. % of the resulting polyorganosiloxane polymer, and adjusting the pH of the solution to a value between 6 and 6.7 after 4-8 hours with an organic acid, wherein the polymethylphenylsilsesquioxane polymers have an atomic carbon content in the range of 40 to 50 weight percent, has less than 13 wt. % silanol groups, less than 10 wt. % alkoxy groups and the ratio of methyl to phenyl groups falls within the range of 1:1 to 1:3, with a portion of the methyl and phenyl radicals bonded to the same silicon atom.
Claim 15
Dependent Claim
164 words
A process for producing a spin-on glass composition comprising: providing a solution of crosslinked polymethylphenylsilsesquioxane polymers in an inert organic solvent having a boiling point of form 80° C. to 250° C. which does not contain a gel, reacting the crosslinked polymethylphenylsilsesquioxane polymers with gamma-aminopropyltriethoxysilane under alkaline conditions in the absence of a platinum catalyst for about 4-8 hours in an amount which provides 1 wt. % to less than about 10 wt. % of the resulting polyorganosiloxane polymer, and adjusting the pH of the solution to a value between 6 and 6.7 after 4-8 hours with an organic acid, wherein the polymethylphenylsilsesquioxane polymers have an atomic carbon content in the range of 40 to 50 weight percent, has less than 13 wt. % silanol groups, less than 10 wt. % alkoxy groups and the ratio of methyl to phenyl groups falls within the range of 1:1 to 1:3, with a portion of the methyl and phenyl radicals bonded to the same silicon atom.
Claim 16
Dependent Claim
41 words
A coating solution for forming glassy layers comprising a solution of crosslinked polyorganosiloxane which has at least 30 atomic weight percent carbon and from 1 wt % to less than about 10 wt. % of a silane adhesion promoter incorporated therein.
Claim 17
Dependent Claim
41 words
A coating solution for forming glassy layers comprising a solution of crosslinked polyorganosiloxane which has at least 30 atomic weight percent carbon and from 1 wt % to less than about 10 wt. % of a silane adhesion promoter incorporated therein.
Claim 18
Dependent Claim
52 words
A spin-on glass composition comprising a solution of crosslinked polyorganosiloxane which has at least 30 atomic weight percent carbon and from 1 wt. % to less than about 10 wt. %, based on the weight of the polymer, of an aminoorganotrialkoxysilane incorporated therein, wherein the alkoxy groups have from 1-4 carbon atoms.
Claim 19
Dependent Claim
52 words
A spin-on glass composition comprising a solution of crosslinked polyorganosiloxane which has at least 30 atomic weight percent carbon and from 1 wt. % to less than about 10 wt. %, based on the weight of the polymer, of an aminoorganotrialkoxysilane incorporated therein, wherein the alkoxy groups have from 1-4 carbon atoms.
Claim 20
Dependent Claim
24 words
A spin-on glass composition as in claim 14, wherein from 1 to 5 weight percent of the crosslinked polyorganosiloxane is derived from the aminoorgano-trialkoxysilane.
Claim 21
Dependent Claim
30 words
A spin-on glass composition as in claim 14, wherein the silanol content is below 1.5 weight percent and the alkoxy content is below 0.1 weight percent in the crosslinked polyorganosiloxane.
Claim 22
Dependent Claim
52 words
A spin-on glass composition comprising a solution of polymethylphenylsilsesquioxane having a carbon content of at least 30 weight percent and from 1 wt. % to less than about 10 wt. %, based on the weight of the polymer, of an aminoorganotrialkoxysilane incorporated therein, wherein the alkoxy groups have from 1-4 carbon atoms.
Claim 23
Dependent Claim
52 words
A spin-on glass composition comprising a solution of polymethylphenylsilsesquioxane having a carbon content of at least 30 weight percent and from 1 wt. % to less than about 10 wt. %, based on the weight of the polymer, of an aminoorganotrialkoxysilane incorporated therein, wherein the alkoxy groups have from 1-4 carbon atoms.
Claim 24
Dependent Claim
25 words
A spin-on glass composition as in claim 17, wherein the aminoorganotrialkoxysilane is gamma-aminopropyltriethoxysilane and polymethylphenylsilsesquioxane has from 1 to 5 wt. % gamma-aminopropyltriethoxysilane incorporated therein.
Claim 25
Dependent Claim
36 words
A spin-on glass composition as in claim 17, wherein the polymethylphenylsilsesquioxane has from 40 to 50 atomic weight percent carbon and a portion of the methyl and phenyl radicals are bonded to the same silicon atom.
Claim 26
Dependent Claim
16 words
A spin-on glass composition as in claim 17, which additionally comprises n-butyl alcohol and acetic acid.
References Cited (Backward Citations)
US3402191A
Cited
US3544498A
Cited
US3615943A
Cited
US3832202A
Cited
US3905823A
Cited
US3975294A
Cited
US3986997A
Cited
US4173490A
Cited
US4338375A
Cited
DE3014675A1
Cited
US4447498A
Cited
US4439239A
Cited
SU1097576A1
Cited
EP0112168A2
Cited
US4509981A
Cited
US4652618A
Cited
US4847120A
Cited
US4865649A
Cited
US4898907A
Cited
US4808653A
Cited
US4842901A
Cited
US4798629A
Cited
US4885262A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-10-06 | 1996-04-06 | 1996-10-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-10-06 | 2000-04-06 | 2000-10-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-10-06 | 2004-04-06 | 2004-10-06 | $7700.00 | Window Closed / Lapsed |