US4885262A
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Chemical modification of spin-on glass for improved performance in IC fabrication
Assignee: Intel Corp
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Filing: 1989-03-08
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Granted: 1989-12-05
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Expires: 2009-03-08
Abstract
Abstract A process for chemically modifying spin-on-glass (SOG) for improved performance in semiconductor device fabrication is disclosed. To compensate for severe surface topographies associated with very large scale integration (VLSI) technology, a thicker non-etch back SOG process is utilized for forming a SOG layer over a chemical vapor deposition (CVD) layer. A single layer of SOG is formed over the CVD layer, providing planarizing coverage over formational or growth defects. The silylation of the SOG layer provides for the formation thicker single layers of SOG and significantly reduces the wet etching rate in diluted HF.
Inventors
- 👤 Chiu H. Ting
- 👤 Thomas G. Rucker
- 👤 Zbigniew P. Sobczak
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 18:36
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/092; H10P; H10P95/00; H10P95/06; H10P95/08
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
75 words
A process for silylating spin-on-glass comprising the steps of: depositing a first conductive layer on a semiconductor body; forming said first conductive layer such that openings are created between patterned sections of said first conductive layer; depositing a first dielectric layer on said first conductive layer; depositing a glass layer on said first dielectric layer; annealing said glass layer in an ambient; cooling said semiconductor device in an nitrogen flow bubbled through an organosilicon compound.
Claim 2
Dependent Claim
75 words
A process for silylating spin-on-glass comprising the steps of: depositing a first conductive layer on a semiconductor body; forming said first conductive layer such that openings are created between patterned sections of said first conductive layer; depositing a first dielectric layer on said first conductive layer; depositing a glass layer on said first dielectric layer; annealing said glass layer in an ambient; cooling said semiconductor device in an nitrogen flow bubbled through an organosilicon compound.
Claim 3
Dependent Claim
18 words
The process as recited in claim 1, wherein said annealing step is in the range of 350°-450° C.
Claim 4
Dependent Claim
35 words
The process as recited in claim 2, wherein said organo-silicon compound is selected from a group consisting of hexamethyldisilazane (HMDS), dimethyldichlorosilane (DMDCS), trimethylchlorosilane (TMCS), dimethyldimethoxysilane (DMDMOS), bis(dimethylamino)-dimethylsilane (BDADMS) and any other functionally equivalent organosilicon compound.
Claim 5
Dependent Claim
20 words
The process as recited in claim 3, wherein said ambient is selected from a group consisting of oxygen and nitrogen.
Claim 6
Dependent Claim
20 words
The process as recited in claim 4, wherein said nitrogen flow is approximately 5 standard cubic feet per hour (scfh).
Claim 7
Dependent Claim
23 words
The process as recited in claim 5, further including the step of soaking said semiconductor device in HMDS prior to said annealing step.
Claim 8
Dependent Claim
15 words
The process as recited in claim 6, wherein said soaking step lasts for 12-14 hours.
Claim 9
Dependent Claim
138 words
A process for chemically modifying spin-on-glass for improved performance of a semiconductor device comprising the steps of: depositing a first metal layer on said semiconductor body; etching said first metal layer such that openings are formed between patterned sections of said first metal layer; utilizing a chemical vapor deposition (CVD) technique to deposit a first oxide layer on said first metal layer; depositing a spin-on-glass (SOG) layer having a thickness of approximately 3000-8000 Å on said first oxide layer; soaking said semiconductor device in hexamethyldisilizane (HMDS) for approximately 12-14 hours; annealing said SOG layer at an annealing temperature of approximately 350°-450° C. in an oxygen ambient; cooling said semiconductor device from said annealing temperature to room temperature in a nitrogen flow bubbled through a container filled with dimethyldichlorosilane (DMDCS) and heated to a temperature of approximately 50° C.
Claim 10
Dependent Claim
138 words
A process for chemically modifying spin-on-glass for improved performance of a semiconductor device comprising the steps of: depositing a first metal layer on said semiconductor body; etching said first metal layer such that openings are formed between patterned sections of said first metal layer; utilizing a chemical vapor deposition (CVD) technique to deposit a first oxide layer on said first metal layer; depositing a spin-on-glass (SOG) layer having a thickness of approximately 3000-8000 Å on said first oxide layer; soaking said semiconductor device in hexamethyldisilizane (HMDS) for approximately 12-14 hours; annealing said SOG layer at an annealing temperature of approximately 350°-450° C. in an oxygen ambient; cooling said semiconductor device from said annealing temperature to room temperature in a nitrogen flow bubbled through a container filled with dimethyldichlorosilane (DMDCS) and heated to a temperature of approximately 50° C.
Claim 11
Dependent Claim
125 words
An improved non-etch-back planarization process using a chemically modified spin-on-glass (SOG) comprising the steps of: depositing a first metal layer on said semiconductor body; forming said first metal layer such that openings are created between patterned sections of said first metal layer; utilizing a chemical vapor deposition (CVD) technique to deposit a first oxide layer on said first metal layer; depositing a spin-on-glass (SOG) layer having a thickness of approximately 3000-8000 Å on said first oxide layer; annealing said SOG layer at an annealing temperature of approximately 350°-450° C. in an oxygen ambient; cooling said semiconductor device from said annealing temperature to room temperature in an nitrogen flow bubbled through a container filled with dimethyldichlorosilane (DMDCS) and heated to a temperature of approximately 50° C.
Claim 12
Dependent Claim
125 words
An improved non-etch-back planarization process using a chemically modified spin-on-glass (SOG) comprising the steps of: depositing a first metal layer on said semiconductor body; forming said first metal layer such that openings are created between patterned sections of said first metal layer; utilizing a chemical vapor deposition (CVD) technique to deposit a first oxide layer on said first metal layer; depositing a spin-on-glass (SOG) layer having a thickness of approximately 3000-8000 Å on said first oxide layer; annealing said SOG layer at an annealing temperature of approximately 350°-450° C. in an oxygen ambient; cooling said semiconductor device from said annealing temperature to room temperature in an nitrogen flow bubbled through a container filled with dimethyldichlorosilane (DMDCS) and heated to a temperature of approximately 50° C.
Claim 13
Dependent Claim
28 words
The improved non-etch-back planarization process as recited in claim 9, wherein said annealing step in proceed by soaking said semiconductor device in hexamethyldisilizane (HMDS) for approximately 12-14 hours.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-12-04 | 1993-06-05 | 1993-12-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-12-04 | 1997-06-05 | 1997-12-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-12-04 | 2001-06-05 | 2001-12-05 | $7700.00 | Window Closed / Lapsed |