US4753866A
Expired / Lapsed
US
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Method for processing an interlevel dielectric suitable for VLSI metallization schemes
Assignee: Texas Instruments Inc
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Filing: 1986-02-24
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Granted: 1988-06-28
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Expires: 2006-02-24
Abstract
Abstract A method of processing an interlevel dielectric layer in a VLSI device having a plurality of leads which includes depositing a layer of photoresist over the dielectric layer. The photoresist is then patterned to open areas where interlevel contacts are to be formed and then heated to a sufficiently high temperature and for a sufficient time to remove solvents and obtain a desired slope surrounding the open areas. The photoresist and dielectric is etched to planarize the dielectric surface, to expose the underlying leads and to remove all of the photoresist.
Inventors
- 👤 Michael T. Welch
- 👤 Willard E. Lones
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 02:00
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/40; H; H10; H10P; H10P95/00; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; H10W20/082; H10W20/092
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
143 words
A method for processing an interlevel dielectric layer having an upper and a lower surface in a VLSI device, and having a substantially equal thickness over each of a plurality of leads lying under said lower surface and having a non-planar upper surface, comprising: depositing a layer of photoresist over said dielectric layer; patterning said photoresist to open an area where an interlevel contact is to be formed; heating said photoresist to an sufficiently high temperature and for a sufficient time to remove solvents and obtain a desired slope surrounding the open area; and etching the photoresist and underlying dielectric etchant until said underlying lead is exposed, all of the photoresist is etched and the shape of a top surface of the dielectric is substantially the same as the shape of a top surface of the dielectric of the flowed photoresist before etching.
Claim 2
Independent Claim
143 words
A method for processing an interlevel dielectric layer having an upper and a lower surface in a VLSI device, and having a substantially equal thickness over each of a plurality of leads lying under said lower surface and having a non-planar upper surface, comprising: depositing a layer of photoresist over said dielectric layer; patterning said photoresist to open an area where an interlevel contact is to be formed; heating said photoresist to an sufficiently high temperature and for a sufficient time to remove solvents and obtain a desired slope surrounding the open area; and etching the photoresist and underlying dielectric etchant until said underlying lead is exposed, all of the photoresist is etched and the shape of a top surface of the dielectric is substantially the same as the shape of a top surface of the dielectric of the flowed photoresist before etching.
Claim 3
Dependent Claim
44 words
A method according to claim 1, wherein sufficient photoresist is deposited so that following said etching step after all the photoresist is removed said dielectric has a minimum thickness of at least 7,000 angstroms, except in an area where the interlevel contact is formed.
Claim 4
Dependent Claim
12 words
A method according to claim 1, wherein said dielectric is plasma oxide.
Claim 5
Dependent Claim
25 words
A method according to claim 3, wherein said slope is sufficient so that no significant sidewall thinning of metal deposited over said open areas occurs.
Claim 6
Dependent Claim
26 words
A method according to claim 1, wherein said heating step elevates the temperature of said photoresist to 160° C. and is maintained for approximately 15 minutes.
Claim 7
Dependent Claim
19 words
A method according to claim 1, wherein said etching step is done with an etchant that is substantially non-selective.
Claim 8
Dependent Claim
34 words
A method according to claim 3, wherein said slope is sufficient so that the resistance of an interconnect metal deposited over the sidewall is substantially less than the interconnect resistance of the entire interconnect.
Claim 9
Independent Claim
111 words
A method for establishing a metal interconnect to a lead on a surface of a VLSI device, comprising: depositing a conformal layer of dielectric over said lead and surrounding surface of a thickness of at least approximately 21/2 microns; depositing a layer of photoresist over said dielectric layer; patterning said photoresist to open an area above said lead; heating said photoresist to a sufficiently high temperature and for a sufficient time to remove solvents and obtain a desired slope surrounding the open area; etching the photoresist and underlying dielectric etchant until said underlying leads are exposed and dielectric surface is planar; and depositing and patterning a metal interconnect over said lead.
Claim 10
Independent Claim
111 words
A method for establishing a metal interconnect to a lead on a surface of a VLSI device, comprising: depositing a conformal layer of dielectric over said lead and surrounding surface of a thickness of at least approximately 21/2 microns; depositing a layer of photoresist over said dielectric layer; patterning said photoresist to open an area above said lead; heating said photoresist to a sufficiently high temperature and for a sufficient time to remove solvents and obtain a desired slope surrounding the open area; etching the photoresist and underlying dielectric etchant until said underlying leads are exposed and dielectric surface is planar; and depositing and patterning a metal interconnect over said lead.
Claim 11
Dependent Claim
26 words
A method according to claim 8, wherein a lowest level of said dielectric surface is at least 7,000 Angstroms above an upper level of said lead.
Claim 12
Dependent Claim
25 words
A method according to claim 9, wherein said slope is sufficient so that no significant sidewall thinning of metal deposited over said open area occurs.
Claim 13
Dependent Claim
24 words
A method according to claim 10, wherein said heating step elevates the temperature of said photoresist to about 160° C. for about 15 minutes.
Claim 14
Dependent Claim
19 words
A method according to claim 8, wherein said etching step is done with an etchant that is substantially non-selective.
Claim 15
Dependent Claim
34 words
A method according to claim 9, wherein said slope is sufficient so that the resistance of an interconnect metal deposited over the sidewall is substantially less than the interconnect resistance of the entire interconnect.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-06-28 | 1991-12-28 | 1992-06-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-06-28 | 1995-12-28 | 1996-06-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-06-28 | 1999-12-28 | 2000-06-28 | $7700.00 | Window Closed / Lapsed |