US5600530A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrostatic chuck
Assignee: Morgan Advanced Materials PLC
•
Filing: 1994-06-10
•
Granted: 1997-02-04
•
Expires: 2014-06-10
Abstract
Abstract Electrostatic chucks and methods of forming the chucks are disclosed. The chucks include ceramic materials directly bonded with a layer of active braze alloy. The active alloy operates as both a conductive layer of the electrostatic chuck and a mechanism for bonding the dielectric layer to the base of the chuck. Electrical feedthroughs to the electrode may also be formed using the active alloy.
Inventors
- 👤 Peter C. Smith
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 19:50
CPC Classifications
B; B23; B23K; B23K1/00; B23K1/0008; H; H10; H10P; H10P72/00; H10P72/50; H05; H05K; H05K3/00; H05K3/40; H05K3/4038; H05K3/4046; H10P72/70; H10P72/72; H10W; H10W70/00; H10W70/01; H10W70/05; H10W70/095; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K2201/00; H05K2201/10; H05K2201/10227; H05K2201/10295; H05K2201/10303; H05K3/30; H05K3/32; H05K3/34; H05K3/3447
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
63 words
An electrostatic chuck comprising: a. first and second members; b. an electrode comprising a metal interposed between and bonding portions of the first and second members by chemically reacting with them; and c. a non-conductive material, selected from the group consisting of inorganic dielectric filler and organic dielectric filler, interposed between portions of the first and second members not bonded by the metal.
Claim 2
Dependent Claim
63 words
An electrostatic chuck comprising: a. first and second members; b. an electrode comprising a metal interposed between and bonding portions of the first and second members by chemically reacting with them; and c. a non-conductive material, selected from the group consisting of inorganic dielectric filler and organic dielectric filler, interposed between portions of the first and second members not bonded by the metal.
Claim 3
Dependent Claim
24 words
An electrostatic chuck according to claim 1 further comprising means, extending through the second member, for electrically connecting the electrode to a power supply.
Claim 4
Dependent Claim
29 words
An electrostatic chuck according to claim 2 in which the electrically connecting means comprises an opening defined by the second member and an active alloy inserted into the opening.
Claim 5
Dependent Claim
19 words
An electrostatic chuck according to claim 1 in which the non-conductive material is a dielectric filler consisting of epoxy.
Claim 6
Independent Claim
120 words
An apparatus for securing a semiconductor wafer for processing, comprising: a. first and second ceramic members, the first ceramic member defining a conductive feedthrough and a pork; b. an active braze alloy interposed between and bonding portions of the first and second ceramic members, the active braze alloy having a coefficient of thermal expansion greater than that of the first and second ceramic members; c. dielectric filler injected through the port and interposed between the portions of the first and second members not bonded by the active braze alloy; and d. means, electrically connected to the conductive feedthrough, for applying an electrical potential difference between the semiconductor wafer and active braze alloy and immobilizing the semiconductor wafer by electrostatic force.
Claim 7
Independent Claim
120 words
An apparatus for securing a semiconductor wafer for processing, comprising: a. first and second ceramic members, the first ceramic member defining a conductive feedthrough and a pork; b. an active braze alloy interposed between and bonding portions of the first and second ceramic members, the active braze alloy having a coefficient of thermal expansion greater than that of the first and second ceramic members; c. dielectric filler injected through the port and interposed between the portions of the first and second members not bonded by the active braze alloy; and d. means, electrically connected to the conductive feedthrough, for applying an electrical potential difference between the semiconductor wafer and active braze alloy and immobilizing the semiconductor wafer by electrostatic force.
Claim 8
Dependent Claim
36 words
An apparatus according to claim 5 in which at least one of the first and second ceramic members comprises material selected from the group consisting of silicon nitride, aluminum nitride, barium titanate, calcium titanate, and sapphire.
Claim 9
Dependent Claim
67 words
An electrostatic chuck comprising: a. first and second ceramic members, the first ceramic member defining a port; b. an electrode comprising a metal interposed between and bonding at least portions of the first and second ceramic members by chemically reacting with them; and c. dielectric filler injected through the port and interposed between the portions of the first and second ceramic members not bonded by the metal.
Claim 10
Dependent Claim
67 words
An electrostatic chuck comprising: a. first and second ceramic members, the first ceramic member defining a port; b. an electrode comprising a metal interposed between and bonding at least portions of the first and second ceramic members by chemically reacting with them; and c. dielectric filler injected through the port and interposed between the portions of the first and second ceramic members not bonded by the metal.
Claim 11
Dependent Claim
24 words
An electrostatic chuck according to claim 7 further comprising means, extending through the second member, for electrically connecting the electrode to a power supply.
Claim 12
Dependent Claim
29 words
An electrostatic chuck according to claim 8 in which the electrically connecting means comprises an opening defined by the second member and an active alloy inserted into the opening.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-02-04 | 2000-08-05 | 2001-02-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-02-04 | 2004-08-05 | 2005-02-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-02-04 | 2008-08-05 | 2009-02-04 | $7700.00 | Window Closed / Lapsed |