US4412133A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrostatic cassette
Assignee: Applied Materials Inc
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Filing: 1982-01-05
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Granted: 1983-10-25
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Expires: 2002-01-05
Abstract
Abstract An electrostatic cassette assembly comprising, a cassette body having a central opening for receiving a wafer to be processed in a particle beam lithographic system, a charge plate with a top surface having a coating of dielectric (nonconductive) material or a plurality of nonconductive means, or both, on which the wafer is supported, means for forcing said charge plate and wafer into contact with stop means to hold the wafer rigidly in said cassette assembly, and means for applying a potential difference between the wafer and the charge plate to flatten said wafer by Coulombic force so that the wafer is held both mechanically and electrostatically in said cassette assembly. Means are also provided for insuring a good electrical contact with the wafer and for aligning the wafer in the cassette assembly.
Inventors
- 👤 William A. Eckes
- 👤 Russell H. Rhoades
- 👤 John W. Vorreiter
- 👤 John C. Wiesner
- 👤 Charles E. Shepard
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 16:57
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/72; H02; H02N; H02N13/00; H10P72/722
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
170 words
An electrostatic cassette assembly for securing and positioning a wafer in a particle beam lithography system so that the upper surface of the wafer is exposed to the particle beam, comprising, a cassette body having a central opening for receiving said wafer, retainer means secured in fixed relationship and extending into said opening, a charge plate fabricated with extreme flatness with a top surface having a relatively thin dielectric formed to be extremely uniform on which the wafer is positioned so that the bottom surface of the wafer engages the dielectric, holding means cooperable with said cassette body to force said wafer into contact with said retaining means whereby the wafer is held rigidly in said cassette assembly, and, means for applying a first potential to the wafer and a second potential of a different value to said charge plate on the side opposite said charge plate from said dielectric to flatten said wafer by Coulombic force whereby the wafer is held both mechanically and electrostatically in said cassette assembly.
Claim 2
Dependent Claim
170 words
An electrostatic cassette assembly for securing and positioning a wafer in a particle beam lithography system so that the upper surface of the wafer is exposed to the particle beam, comprising, a cassette body having a central opening for receiving said wafer, retainer means secured in fixed relationship and extending into said opening, a charge plate fabricated with extreme flatness with a top surface having a relatively thin dielectric formed to be extremely uniform on which the wafer is positioned so that the bottom surface of the wafer engages the dielectric, holding means cooperable with said cassette body to force said wafer into contact with said retaining means whereby the wafer is held rigidly in said cassette assembly, and, means for applying a first potential to the wafer and a second potential of a different value to said charge plate on the side opposite said charge plate from said dielectric to flatten said wafer by Coulombic force whereby the wafer is held both mechanically and electrostatically in said cassette assembly.
Claim 3
Dependent Claim
25 words
The electrostatic cassette assembly as claimed in claim 1 wherein said dielectric comprises a coating extending across substantially the entire surface of the charge plate.
Claim 4
Dependent Claim
23 words
The electrostatic cassette assembly as claimed in claim 2 wherein said dielectric further includes pin means of nonconductive material extending above said coating.
Claim 5
Dependent Claim
27 words
The electrostatic cassette assembly as claimed in claim 1 wherein said dielectric comprises pin means positioned in and extending above the top surface of said charge plate.
Claim 6
Dependent Claim
25 words
The electrostatic cassette assembly as claimed in claim 1 wherein said retainer means comprises fingers fixedly secured to the top surface of the cassette body.
Claim 7
Dependent Claim
69 words
The electrostatic cassette assembly as claimed in claim 1 wherein the top surface of said charge plate is provided with at least one pump out groove to allow any residual gas which may otherwise accumulate in the area between the bottom of the wafer and the top surface of the charge plate to escape and permitting gases to return after release of the clamping force of the holding means.
Claim 8
Dependent Claim
40 words
The electrostatic cassette assembly as claimed in claim 6 wherein said top surface is provided with a plurality of pump out grooves which extend radially to the edge of said top surface to define said top surface in pie-shaped segments.
Claim 9
Dependent Claim
32 words
The electrostatic cassette assembly as claimed in claim 6 wherein said top surface is provided with a plurality of pump out grooves which extend from edge to edge of said top surface.
Claim 10
Dependent Claim
57 words
The electrostatic cassette assembly as claimed in claim 1 wherein said means cooperable with said cassette body to force the wafer into contact with the retaining means comprising a leaf spring attached to the bottom surface of said charge plate, key ways in said cassette body, said spring means engaging said key ways in said cassette body.
Claim 11
Dependent Claim
36 words
The electrostatic cassette assembly as claimed in claim 1 wherein said means for applying a first potential to the wafer includes a retractable pin which engages the wafer when the latter is held in said assembly.
Claim 12
Dependent Claim
21 words
The electrostatic cassette assembly as claimed in claim 10 wherein said pin is spring biased in operative position against the wafer.
Claim 13
Dependent Claim
239 words
In a particle beam lithographic system having a focused particle beam capable of being directed to a workpiece for writing predetermined configurations thereon, said beam being movable in X and Y directions across said workpiece, a movable supporting table on which said workpiece is placed and capable of moving in a direction X at right right angles to the movement of said particle beam to provide scanning of said workpiece by said particle electron beam in both the X and Y directions, cassette means having holding means for clamping said workpiece mechanically in said cassette while supported on said table, said workpiece being supported on a dielectric which is affixed to a charge plate mechanically clamped in said cassette means before being placed in said work table, said cassette means having means for aligning said cassette means with alignment means in said table, said system including chamber means in which the pressure in the area around said table and cassette is reduced to a very low pressure, means for applying a potential difference between the workpiece and said charge plate to clamp said workpiece electrostatically in said cassette after the pressure in said chamber has been reduced, said charge plate having means for allowing any residual gas beneath said wafer to escape, means for disconnecting said potential difference before said pressure in said work chamber is returned to ambient pressure and for allowing gases to return beneath said wafer.
Claim 14
Dependent Claim
239 words
In a particle beam lithographic system having a focused particle beam capable of being directed to a workpiece for writing predetermined configurations thereon, said beam being movable in X and Y directions across said workpiece, a movable supporting table on which said workpiece is placed and capable of moving in a direction X at right right angles to the movement of said particle beam to provide scanning of said workpiece by said particle electron beam in both the X and Y directions, cassette means having holding means for clamping said workpiece mechanically in said cassette while supported on said table, said workpiece being supported on a dielectric which is affixed to a charge plate mechanically clamped in said cassette means before being placed in said work table, said cassette means having means for aligning said cassette means with alignment means in said table, said system including chamber means in which the pressure in the area around said table and cassette is reduced to a very low pressure, means for applying a potential difference between the workpiece and said charge plate to clamp said workpiece electrostatically in said cassette after the pressure in said chamber has been reduced, said charge plate having means for allowing any residual gas beneath said wafer to escape, means for disconnecting said potential difference before said pressure in said work chamber is returned to ambient pressure and for allowing gases to return beneath said wafer.
Claim 15
Dependent Claim
24 words
The electrostatic cassette assembly as claimed in claim 1 wherein the electric potentials applied constitute an electric square wave with suitable short transition times.
Claim 16
Dependent Claim
24 words
The electrostatic cassette assembly as claimed in claim 12 whereby the electric potentials applied constitute an electric square wave with suitable short transition times.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-10-24 | 1987-04-25 | 1987-10-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-10-24 | 1991-04-25 | 1991-10-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-10-24 | 1995-04-25 | 1995-10-25 | $7700.00 | Window Closed / Lapsed |