US4480284A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrostatic chuck plate
Assignee: Toshiba Corp
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Filing: 1982-09-29
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Granted: 1984-10-30
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Expires: 2002-09-29
Abstract
Abstract An electrostatic chuck plate comprises an electrode plate made of electrically conductive material and a dielectric layer formed on one surface of the electrode plate by flame-spraying dielectric material. The surface region of the dielectric layer is impregnated with plastic material, and the surface of the dielectric layer is smooth and flat. A sample is electrostatically attracted toward the electrode plate and is thus held on the smooth and flat surface of the dielectric layer.
Inventors
- 👤 Toru Tojo
- 👤 Ichiro Mori
- 👤 Shunichi Sano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 04:39
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/72; H10P72/722
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
72 words
An electrostatic chuck plate for holding a sample with an electrostatic force, comprising: an electrode made of electrically conductive material and having a flat surface; and a dielectric layer formed on the flat surface of the electrode by flame-spraying dielectric material, said dielectric layer having a flat surface to be electrically charged to electrostatically attract a sample; wherein at least said flat surface of said dielectric layer is impregnated with plastic material.
Claim 2
Dependent Claim
72 words
An electrostatic chuck plate for holding a sample with an electrostatic force, comprising: an electrode made of electrically conductive material and having a flat surface; and a dielectric layer formed on the flat surface of the electrode by flame-spraying dielectric material, said dielectric layer having a flat surface to be electrically charged to electrostatically attract a sample; wherein at least said flat surface of said dielectric layer is impregnated with plastic material.
Claim 3
Dependent Claim
28 words
An electrostatic chuck plate according to claim 1, further comprising means for generating an electric field which extends substantially perpendicular to the flat surface of the dielectric layer.
Claim 4
Dependent Claim
31 words
An electrostatic chuck plate according to claim 1, wherein said dielectric layer is made of alumina, titanium dioxide, barium titanate, ceramics or a mixture of at least two of these materials.
Claim 5
Dependent Claim
28 words
An electrostatic chuck plate according to claim 1, wherein said plastic material contains a high-molecular material selected from the group consisting of methacryl resin, epoxy resin and fluororesin.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-10-30 | 1988-04-30 | 1988-10-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-10-30 | 1992-04-30 | 1992-10-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-10-30 | 1996-04-30 | 1996-10-30 | $7700.00 | Window Closed / Lapsed |