EP0351701B1
Expired / Lapsed
EP
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Pressure transducer and its manufacturing process
Assignee: Endress and Hauser SE and Co KG
•
Filing: 1989-07-12
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Granted: 1993-06-02
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Expires: 2009-07-12
Abstract
No abstract record available.
Inventors
- 👤 Frank Dr. Hegner
- 👤 Gerhard Dr. Dittrich
- 👤 Thomas Klähn
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-26 06:42
CPC Classifications
G; G01; G01L; G01L9/00; G01L9/0041; G01L9/0072; G01L9/0075; Y; Y10; Y10T; Y10T29/00; Y10T29/43
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
71 words
Pressure sensor comprising a base body (12) and a diaphragm (11) which are assembled at a defined distance (d) apart parallel to each other to form a chamber (13), at least one of the two assembled parts consisting of ceramic, glass, metal or a monocrystalline material, characterized in that the base body (12) and the diaphragm (11) are thermally joined together by a shaped part (20) of active solder or copper.
Claim 2
Dependent Claim
22 words
Pressure sensor according to claim 1, characterized in that the active solder is a silver-copper alloy which contains titanium as reactive element.
Claim 3
Dependent Claim
45 words
Pressure sensor according to claim 1, characterized in that the two joined parts (11, 12) consist of oxide ceramic or sapphire and that the shaped part (20) consists of copper which is bonded to the two parts by a eutectic melt forming at the surface.
Claim 4
Dependent Claim
24 words
Pressure sensor according to any one of the preceding claims, characterized in that the shaped part (20) is a ring enclosing the chamber (13).
Claim 5
Dependent Claim
51 words
Pressure sensor according to any one of the preceding claims, characterized in that the facing surfaces of the base body (12) and the diaphragm (11) are planar and that the distance (d) between the base body (12) and the diaphragm (11) is determined solely by the shaped part (20) disposed therebetween.
Claim 6
Dependent Claim
61 words
Method of manufacturing a pressure sensor according to claim 1 or 2 with a shaped part (20) of active solder, characterized in that the base body (12) and the diaphragm (11) without previous metallization and with the shaped part (20) of active solder disposed therebetween are introduced into a vacuum and heated therein until complete melting through of the active solder.
Claim 7
Dependent Claim
20 words
Method according to claim 6, characterized in that the vacuum has a residual gas pressure of less than 10⁻⁵ mbar.
Claim 8
Dependent Claim
72 words
Method of manufacturing a pressure sensor according to claim 1 or 2 with a shaped part (20) of active solder, characterized in that the base body (12) and the diaphragm (11) without previous metallization and with the shaped part (20) of active solder disposed therebetween are introduced into a defined gas atmosphere with a pressure of at the most 0.1 mbar and heated therein until complete melting through of the active solder.
Claim 9
Dependent Claim
16 words
Method according to claim 8, characterized in that the gas atmosphere consists of an inert gas.
Claim 10
Dependent Claim
16 words
Method according to claim 8, characterized in that the gas atmosphere consists of a reactive gas.
Claim 11
Dependent Claim
20 words
Method according to claim 8, characterized in that the gas atmosphere consists of a mixture of inert and/or reactive gases.
Claim 12
Dependent Claim
72 words
Method of manufacturing a pressure sensor according to claim 3, characterized in that the base body (12) and the diaphragm (11) without previous metallization and with the shaped part (20) of copper disposed therebetween are introduced into an inert atmosphere with low oxygen content and heated therein to a temperature which lies beneath the melting point of copper and at which a eutectic melt forms at the surface of the shaped part.
Claim 13
Dependent Claim
18 words
Method according to claim 12, characterized in that the parts are heated to a temperature of about 1070°C.
Claim 14
Dependent Claim
18 words
Method according to claim 12 or 13, characterized in that the inert atmosphere consists of argon or nitrogen.
Claim 15
Dependent Claim
24 words
Method according to any one of claims 12 to 14, characterized in that the oxygen content of the inert atmosphere is about 500 ppm.
References Cited (Backward Citations)
No citation records indexed.
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