US7053355B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
System and method for lithography process monitoring and control
Assignee: ASML Netherlands BV
•
Filing: 2005-08-25
•
Granted: 2006-05-30
•
Expires: 2025-08-25
Abstract
Abstract A system and sensor for measuring, inspecting, characterizing, evaluating and/or controlling optical lithographic equipment and/or materials used therewith, for example, photomasks. In one embodiment, the system and sensor measures, collects and/or detects an aerial image (or portion thereof) produced or generated by the interaction between the photomask and lithographic equipment. An image sensor unit may measure, collect, sense and/or detect the aerial image in situ—that is, the aerial image at the wafer plane produced, in part, by a production-type photomask (i.e., a wafer having integrated circuits formed therein/thereon) and/or by associated lithographic equipment used, or to be used, to manufacture of integrated circuits. A processing unit, coupled to the image sensor unit, may generate image data which is representative of the aerial image by, in one embodiment, interleaving the intensity of light sampled by each sensor cell at the plurality of location of the platform. Notably, there are many inventions/embodiments disclosed herein.
Inventors
- 👤 Jun Ye
- 👤 R. Fabian W. Pease
- 👤 Xun Chen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 06:05
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/68; G03F1/82; G03F1/84; G03F7/00; G03F7/70; G03F7/70483; G03F7/70591; G03F7/70605; G03F7/70653; G03F7/70666; G03F7/708; G03F7/7085; H; H10; H10P; H10P72/00; H10P72/06; H10P72/0604
Claims Analysis
Total Claims: 37
Claim 1
Independent Claim
149 words
An image sensor unit, for use with photolithographic equipment, the image sensor unit comprising: a substrate having a wafer or wafer-like shaped profile; a sensor array, integrated into the substrate, the sensor array including: a plurality of sensor cells wherein each sensor cell includes an active area to sense light of a predetermined wavelength that is incident thereon; and a film, disposed over the active areas of the plurality of sensor cells and comprised of a material that impedes passage of light of the predetermined wavelength, wherein the film includes a plurality of apertures which are arranged such that an aperture of the plurality of apertures overlies an active area of a corresponding sensor cell to expose a portion of the active area and wherein light of the predetermined wavelength is capable of being sensed by the portion of the active area that is exposed by the corresponding aperture.
Claim 2
Dependent Claim
149 words
An image sensor unit, for use with photolithographic equipment, the image sensor unit comprising: a substrate having a wafer or wafer-like shaped profile; a sensor array, integrated into the substrate, the sensor array including: a plurality of sensor cells wherein each sensor cell includes an active area to sense light of a predetermined wavelength that is incident thereon; and a film, disposed over the active areas of the plurality of sensor cells and comprised of a material that impedes passage of light of the predetermined wavelength, wherein the film includes a plurality of apertures which are arranged such that an aperture of the plurality of apertures overlies an active area of a corresponding sensor cell to expose a portion of the active area and wherein light of the predetermined wavelength is capable of being sensed by the portion of the active area that is exposed by the corresponding aperture.
Claim 3
Dependent Claim
22 words
The image sensor unit of claim 1 further including a transparent medium, having a predetermined refractive index, disposed on the sensor array.
Claim 4
Dependent Claim
26 words
The image sensor unit of claim 1 further including electrical contacts, disposed on or in the substrate, to provide a communication path with an external device.
Claim 5
Dependent Claim
25 words
The image sensor unit of claim 1 further including electrical contacts, disposed on or in the substrate, to receive electrical power from an external device.
Claim 6
Dependent Claim
24 words
The image sensor unit of claim 1 further including electrical contacts, disposed on or in the substrate, to output data to an external device.
Claim 7
Dependent Claim
25 words
The image sensor unit of claim 1 further including electrical contacts, disposed on or in the substrate, to input control signals from an external device.
Claim 8
Dependent Claim
29 words
The image sensor unit of claim 1 wherein the film is disposed between the active areas of the sensor cells and a protective outer layer of the sensor array.
Claim 9
Dependent Claim
21 words
The image sensor unit of claim 1 wherein the film is disposed on a protective outer layer of the sensor array.
Claim 10
Dependent Claim
25 words
The image sensor unit of claim 1 further including wireless communications circuitry, disposed on or in the substrate, to provide data to an external device.
Claim 11
Dependent Claim
23 words
The image sensor unit of claim 9 wherein the wireless communications circuitry provides data during collection of image data by the sensor array.
Claim 12
Dependent Claim
19 words
The image sensor unit of claim 1 wherein the sensor cells are charge coupled devices, CMOS devices or photodiodes.
Claim 13
Dependent Claim
41 words
The image sensor unit of claim 1 further including photon-conversion material, disposed: (i) over the sensor array and between the film and the plurality of sensors, (ii) within the plurality of apertures of the film or (iii) on the sensor array.
Claim 14
Dependent Claim
35 words
The image sensor unit of claim 1 wherein the image sensor unit further includes data storage circuitry, coupled to the sensor array and integrated into the substrate, to store the data from the sensor array.
Claim 15
Dependent Claim
30 words
The image sensor unit of claim 1 further including a controller, integrated into or disposed on the substrate, to instruct the sensor array when to sample the intensity of light.
Claim 16
Independent Claim
218 words
A system to collect image data which is representative of an aerial image of a mask that is projected, by an optical system, on a wafer plane of lithographic equipment, the system comprising: an image sensor unit, disposed on the moveable platform, to collect data which is representative of the aerial image of the mask, the image sensor unit includes: a substrate adapted to be disposed on a platform of the lithographic equipment; a sensor array, disposed on or in, or integrated into the substrate, wherein the sensor array is capable of being located in the wafer plane, the sensor array includes: a plurality of sensor cells wherein each sensor cell includes an active area to sense light of a predetermined wavelength that is incident thereon; and a film, disposed over the active areas of the plurality of sensor cells and including a material that impedes passage of light of the predetermined wavelength, wherein the film includes a plurality of apertures which are arranged such that an aperture of the plurality of apertures overlies an associated active area of a corresponding sensor cell to expose a portion of the associated active area and wherein light of the predetermined wavelength is capable of being sensed by the portion of the active area that is exposed by the associated aperture.
Claim 17
Independent Claim
218 words
A system to collect image data which is representative of an aerial image of a mask that is projected, by an optical system, on a wafer plane of lithographic equipment, the system comprising: an image sensor unit, disposed on the moveable platform, to collect data which is representative of the aerial image of the mask, the image sensor unit includes: a substrate adapted to be disposed on a platform of the lithographic equipment; a sensor array, disposed on or in, or integrated into the substrate, wherein the sensor array is capable of being located in the wafer plane, the sensor array includes: a plurality of sensor cells wherein each sensor cell includes an active area to sense light of a predetermined wavelength that is incident thereon; and a film, disposed over the active areas of the plurality of sensor cells and including a material that impedes passage of light of the predetermined wavelength, wherein the film includes a plurality of apertures which are arranged such that an aperture of the plurality of apertures overlies an associated active area of a corresponding sensor cell to expose a portion of the associated active area and wherein light of the predetermined wavelength is capable of being sensed by the portion of the active area that is exposed by the associated aperture.
Claim 18
Dependent Claim
30 words
The system of claim 15 further including a controller, disposed in the lithographic equipment and coupled to the image sensor unit, to control the operation of the image sensor unit.
Claim 19
Dependent Claim
31 words
The system of claim 15 further including a controller, coupled to the image sensor unit and disposed externally to the lithographic equipment, to control the operation of the image sensor unit.
Claim 20
Dependent Claim
36 words
The system of claim 15 wherein the image sensor unit further includes a controller, coupled to the sensor array and integrated into or disposed on the substrate, to control the operation of the image sensor unit.
Claim 21
Dependent Claim
29 words
The system of claim 15 wherein the image sensor unit further includes electrical contacts, disposed on or in the substrate, to provide a communication path with the lithographic equipment.
Claim 22
Dependent Claim
27 words
The system of claim 15 wherein the image sensor unit further includes electrical contacts, disposed on or in the substrate, to receive electrical power from lithographic equipment.
Claim 23
Dependent Claim
32 words
The system of claim 15 wherein the film of the image sensor unit is disposed between the active areas of the sensor cells and a protective outer layer of the sensor array.
Claim 24
Dependent Claim
24 words
The system of claim 15 wherein the film of the image sensor unit is disposed on a protective outer layer of the sensor array.
Claim 25
Dependent Claim
39 words
The system of claim 15 wherein the image sensor unit further includes wireless communications circuitry, disposed on or in the substrate, to provide data to the lithographic equipment during or after collection of image data by the sensor array.
Claim 26
Dependent Claim
43 words
The system of claim 15 wherein the image sensor unit further includes wireless communications circuitry, disposed on or in the substrate, to provide data to a processor/controller disposed in the lithographic equipment during or after collection of image data by the sensor array.
Claim 27
Dependent Claim
22 words
The system of claim 15 wherein the sensor cells of the image sensor unit are charge coupled devices, CMOS devices or photodiodes.
Claim 28
Dependent Claim
41 words
The system of claim 15 wherein the image sensor unit further includes data storage circuitry, coupled to the sensor array and disposed on or integrated into the substrate of the sensor array unit, to store the data from the sensor array.
Claim 29
Dependent Claim
29 words
The system of claim 15 wherein the image sensor unit further includes a controller, integrated into or disposed on the substrate, to control the operation of the sensor array.
Claim 30
Dependent Claim
158 words
An image sensor unit, for use with photolithographic equipment, the image sensor unit comprising: a substrate adapted to be disposed on a platform of the lithographic equipment; a sensor array, disposed on or in, or integrated into the substrate, the sensor array including: a plurality of sensor cells wherein each sensor cell includes an active area to sense light of a predetermined wavelength that is incident thereon; and a film, disposed over the active areas of the plurality of sensor cells and comprised of a material that impedes passage of light of the predetermined wavelength, wherein the film includes a plurality of apertures which are arranged such that an aperture of the plurality of apertures overlies an active area of a corresponding sensor cell to expose a portion of the active area and wherein light of the predetermined wavelength is capable of being sensed by the portion of the active area that is exposed by the corresponding aperture.
Claim 31
Dependent Claim
158 words
An image sensor unit, for use with photolithographic equipment, the image sensor unit comprising: a substrate adapted to be disposed on a platform of the lithographic equipment; a sensor array, disposed on or in, or integrated into the substrate, the sensor array including: a plurality of sensor cells wherein each sensor cell includes an active area to sense light of a predetermined wavelength that is incident thereon; and a film, disposed over the active areas of the plurality of sensor cells and comprised of a material that impedes passage of light of the predetermined wavelength, wherein the film includes a plurality of apertures which are arranged such that an aperture of the plurality of apertures overlies an active area of a corresponding sensor cell to expose a portion of the active area and wherein light of the predetermined wavelength is capable of being sensed by the portion of the active area that is exposed by the corresponding aperture.
Claim 32
Dependent Claim
25 words
The image sensor unit of claim 28 further including electrical contacts, disposed on or in the substrate, to receive electrical power from an external device.
Claim 33
Dependent Claim
26 words
The image sensor unit of claim 28 further including electrical contacts, disposed on or in the substrate, to provide a communication path with an external device.
Claim 34
Dependent Claim
29 words
The image sensor unit of claim 28 wherein the film is disposed between the active areas of the sensor cells and a protective outer layer of the sensor array.
Claim 35
Dependent Claim
21 words
The image sensor unit of claim 28 wherein the film is disposed on a protective outer layer of the sensor array.
Claim 36
Dependent Claim
19 words
The image sensor unit of claim 28 wherein the sensor cells are charge coupled devices, CMOS devices or photodiodes.
Claim 37
Dependent Claim
69 words
The image sensor unit of claim 28 wherein the image sensor unit further includes: a controller, integrated into or disposed on the substrate, to instruct the sensor array when to sample the intensity of light; and data storage circuitry, coupled to the sensor array and integrated into or disposed on the substrate, to store the data which is representative of the intensity of light sampled by the sensor array.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2009-05-29 | 2009-11-28 | 2010-05-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2013-05-29 | 2013-11-28 | 2014-05-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2017-05-29 | 2017-11-28 | 2018-05-30 | $7700.00 | Window Closed / Lapsed |