US6052238A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Near-field scanning optical microscope having a sub-wavelength aperture array for enhanced light transmission
Assignee: NEC Corp
•
Filing: 1999-04-01
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Granted: 2000-04-18
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Expires: 2019-04-01
Abstract
Abstract A metallic film has apertures located therein in an array arranged in a pattern so that when light is incident on the apertures, surface plasmons on the metallic film are perturbed resulting in an enhanced transmission of the light emitted from individual apertures in the array. The aperture array is used: to filter light of predetermined wavelength traversing the apertures, to collect light over a distance after traversing the apertures, to improve operation of near-field scanning optical microscopes, and to enhance light transmission through masks useable in photolithography.
Inventors
- 👤 Thomas W. Ebbesen
- 👤 Hadi F. Ghaemi
- 👤 Tineke Thio
- 👤 Peter A. Wolff
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 13:34
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/107; B; B82; B82Y; B82Y20/00; B82Y35/00; G01; G01Q; G01Q60/00; G01Q60/18; G01Q60/22; G02B5/00; G02B5/008; G02B6/12; G02B6/122; G02B6/1226; G02B6/24; G02B6/42; G02B6/4201; G02B6/4204; G02B6/4206; G02B6/4249; G02B6/425; G03; G03F; G03F1/00; G03F1/50; G03F7/00; G03F7/20; G03F7/2002; G03F7/2014; G03F7/2045; B82Y10/00
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
108 words
A near-field scanning optical microscope comprising: a light source; a probe having a frontal surface disposed relative to said light source for receiving light from said light source; said frontal surface having a metallic film containing an array of apertures therein disposed thereon, said apertures in the array being spaced apart by a distance P, where P is selected dependent upon the wavelength of light incident on said array, whereby incident light at a predetermined wavelength will perturb the metallic film in a surface plasmon energy band for enhancing transmission of light through individual apertures in said array; and photodetector means for receiving light traversing said metallic film.
Claim 2
Dependent Claim
108 words
A near-field scanning optical microscope comprising: a light source; a probe having a frontal surface disposed relative to said light source for receiving light from said light source; said frontal surface having a metallic film containing an array of apertures therein disposed thereon, said apertures in the array being spaced apart by a distance P, where P is selected dependent upon the wavelength of light incident on said array, whereby incident light at a predetermined wavelength will perturb the metallic film in a surface plasmon energy band for enhancing transmission of light through individual apertures in said array; and photodetector means for receiving light traversing said metallic film.
Claim 3
Dependent Claim
109 words
A near-field scanning optical microscope comprising: a light source; a probe including a frontal surface having a metallic film containing an array of apertures therein disposed thereon coupled to said light source for emitting light from said apertures, said apertures in the array being spaced apart by a distance P, where P is selected dependent upon the wavelength of light incident on said array, whereby incident light at a predetermined wavelength will perturb the metallic film in a surface plasmon energy band for enhancing transmission of light through individual apertures in said array; and detector means disposed relative to said frontal surface for receiving light emitted from said apertures.
Claim 4
Dependent Claim
109 words
A near-field scanning optical microscope comprising: a light source; a probe including a frontal surface having a metallic film containing an array of apertures therein disposed thereon coupled to said light source for emitting light from said apertures, said apertures in the array being spaced apart by a distance P, where P is selected dependent upon the wavelength of light incident on said array, whereby incident light at a predetermined wavelength will perturb the metallic film in a surface plasmon energy band for enhancing transmission of light through individual apertures in said array; and detector means disposed relative to said frontal surface for receiving light emitted from said apertures.
Claim 5
Dependent Claim
17 words
A near-field scanning optical microscope as set forth in claim 1, where said metallic film is Ag.
Claim 6
Dependent Claim
19 words
A near-field scanning optical microscope as set forth in claim 1, where said light source is a He--Cd laser.
Claim 7
Dependent Claim
22 words
A near-field scanning optical microscope as set forth in claim 1, where said array of apertures comprises two or more subwavelength apertures.
Claim 8
Dependent Claim
17 words
A near-field scanning optical microscope as set forth in claim 2, where said metallic film is Ag.
Claim 9
Dependent Claim
19 words
A near-field scanning optical microscope as set forth in claim 2, where said light source is a He--Cd laser.
Claim 10
Dependent Claim
22 words
A near-field scanning optical microscope as set forth in claim 2, where said array of apertures comprises two or more subwavelength apertures.
References Cited (Backward Citations)
US3866037A
Cited
US4360273A
Cited
US4411013A
Cited
US4405238A
Cited
US4659429A
Cited
US4662747A
Cited
US4891830A
Cited
US4815854A
Cited
JPH05240787A
Cited
US5250812A
Cited
US5351127A
Cited
US5306902A
Cited
US5354985A
Cited
US5451980A
Cited
US5570139A
Cited
US5933233A
Cited
US5663798A
Cited
US5633972A
Cited
US5789742A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-04-18 | 2003-10-18 | 2004-04-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-04-18 | 2007-10-18 | 2008-04-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-04-18 | 2011-10-18 | 2012-04-18 | $7700.00 | Window Closed / Lapsed |