US4411013A
Expired / Lapsed
US
⏱️ 0.0 years remaining
System for transferring a fine pattern onto a target
Assignee: Toshiba Corp
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Filing: 1981-12-18
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Granted: 1983-10-18
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Expires: 2001-12-18
Abstract
Abstract An X-ray system for transferring a fine pattern onto a target has a mask, on the surface of which is formed an X-ray absorbing layer in a predetermined pattern and which is made of a single crystal of high regularity. Parallel monochromic X-rays become incident on the lattice plane of the single crystal at an angle θ. Diffraction X-rays emerging from the lattice plane are projected onto the surface of a wafer in the normal direction. An X-ray resist layer is formed on the surface of the wafer. Since incident X-rays and diffraction X-rays are absorbed by the X-ray absorbing layer on the mask, the pattern defined by the layer is projected on the X-ray resist layer.
Inventors
- 👤 Shinichiro Takasu
- 👤 Toshiaki Shinozaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 05:06
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/22; G03F7/00; G03F7/20; G03F7/2037; G03F7/2039; G03F7/70; G03F7/70216; G03F7/70283; G03F7/70316; G03F7/7035; H; H10; H10P; H10P95/00
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
92 words
A system for transferring a fine pattern onto a target, comprising: means for emitting X-rays; and a mask on which are incident the X-rays at a predetermined angle and which emits diffraction X-rays, the mask including a single crystal having lattice planes of a predetermined orientation and a layer of a predetermined pattern which absorbs incident X-rays and diffraction X-rays, so that the diffraction X-rays which are not absorbed by the absorber layer are projected to the target and the pattern defined by the X-ray absorbing layer is transferred to the target.
Claim 2
Independent Claim
92 words
A system for transferring a fine pattern onto a target, comprising: means for emitting X-rays; and a mask on which are incident the X-rays at a predetermined angle and which emits diffraction X-rays, the mask including a single crystal having lattice planes of a predetermined orientation and a layer of a predetermined pattern which absorbs incident X-rays and diffraction X-rays, so that the diffraction X-rays which are not absorbed by the absorber layer are projected to the target and the pattern defined by the X-ray absorbing layer is transferred to the target.
Claim 3
Dependent Claim
38 words
A system according to claim 1, wherein the diffraction X-rays emerge from the lattice plane of the single crystal in the regular reflecting direction relative to the surface of the single crystal and come incident on the target.
Claim 4
Dependent Claim
79 words
A system according to claim 1, wherein the diffraction X-rays emerge from the lattice plane of the single crystal in the regular reflecting direction relative to the surface of the single crystal, the single crystal has a lattice plane such that the diffraction X-rays come incident on the target in the direction of the normal to the surface of the target, and a surface of the single crystal on which is formed the X-ray absorbing layer faces the target.
Claim 5
Dependent Claim
38 words
A system according to claim 3, wherein a Fresnel zone plate is arranged in a travelling path of the X-rays, so that the X-rays are focused, converged by the Fresnel zone plate to be projected on the target.
Claim 6
Dependent Claim
27 words
A system according to claim 1, wherein the X-ray emitting means includes an X-ray source for emitting X-rays and means for converting the X-rays into monochromatic X-rays.
References Cited (Backward Citations)
US4088896A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-10-17 | 1987-04-18 | 1987-10-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-10-17 | 1991-04-18 | 1991-10-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-10-17 | 1995-04-18 | 1995-10-18 | $7700.00 | Window Closed / Lapsed |