Confocal method and apparatus for focusing in projection lithography

Claim 2

Apparatus for projecting and focusing an image of an object to be patterned in an electromagnetic radiation sensitive layer, the image of the object being projected by object imaging means onto an imaging surface and the object being located in an object plane, comprising: first means for projecting electromagnetic radiation through the object imaging means and towards the imaging surface to pattern the electromagnetic radiation sensitive layer in conformity with the image of the object; an electromagnetic radiation barrier having a subresolution aperture therethrough; second means for projecting electromagnetic radiation through the aperture towards the imaging surface; confocal imaging means for forming from the projected radiation of said second means an image of said aperture in an image plane of the object imaging means, part of the projected radiation reflecting back from a localized region of the imaging surface through the confocal imaging means and the aperture; means for detecting power of radiation reflected back through the aperture; and means for adjusting the distance between the object imaging and the imaging surface to maximize said detected power.

Claim 3

The apparatus of claim 1 wherein the object comprises a projection lithography mask.

Claim 4

The apparatus of claim 2 wherein the imaging surface comprises a photoresist layer on a semiconductor wafer.

Claim 5

The apparatus of claim 3 wherein the localized region comprises sacrificial region of an integrated circuit site on the wafer.

Claim 6

The apparatus of claim 3 wherein the means for projecting radiation through the aperture comprises means for projecting radiation with an intensity below an exposure threshold of the photoresist layer.

Claim 7

The apparatus of claim 3 wherein the localized region comprises a kerf region between integrated circuit sites on the wafer.

Claim 8

The apparatus of claim 1 wherein the barrier having the subresolution aperture is located in the object plane.

Claim 9

The apparatus of claim 7 further comprising a plurality of subresolution apertures located in the object plane; means for projecting radiation through each of said apertures; confocal imaging means for forming an image of each of said apertures in the image plane of the object imaging means; and means for detecting the power of radiation reflected back through each of said apertures, whereby the distance between the object imaging means and the imaging surface can be adjusted to maximize the detected power of radiation reflected back through all of the apertures.

Claim 10

The apparatus of claim 8 wherein the plurality of subresolution apertures located in the object plane are closely spaced but reflectively separate, and wherein said detecting means comprises means for combining the detected reflected radiation from each of said apertures and for detecting power of the combined radiation, whereby the distance between the object imaging means and the imaging surface can be adjusted to maximize the detected power of the combined radiation.

Claim 11

The apparatus of claim 1 wherein the confocal imaging means comprises the object imaging means.

Claim 12

The apparatus of claim 1 wherein the radiation projected through the aperture comprises radiation from the same source as that used to image the object on the imaging surface.

Claim 13

The apparatus of claim 1 wherein the radiation projected through the aperture has a frequency equal to that of radiation used to form the image of the object.

Claim 14

The apparatus of claim 1 wherein the means for projecting radiation through the aperture and the detecting means share a common beam splitter.

Claim 15

The apparatus of claim 1 wherein the detecting means further comprises the means for distinguishing between reflected radiation originating from the aperture and other detected radiation.

Claim 16

The apparatus of claim 14 wherein the means for projecting radiation through the aperture comprises means for pulsing the projected radiation; and the detecting means comprises synchronous detection means synchronized with said pulsing means.

Claim 17

The apparatus of claim 15 wherein the means for projecting radiation through the aperture further comprises means for projecting the radiation in pulses at a rate different from but synchronized with a pulse rate of radiation used to project the image of the object.

Claim 18

The apparatus of claim 14, further comprising means for simultaneously projecting the image of the object onto the imaging surface and the electromagnetic radiation through the aperture towards the imaging surface.

Claim 19

The apparatus of claim 1, further comprising means for calibrating a nonconfocal focusing mechanism.

Claim 20

The apparatus of claim 18 wherein said nonconfocal focusing mechanism comprises one of: an oblique focusing system, a capacitance gauge and an air gauge.

Claim 21

The apparatus of claim 7 wherein the confocal imaging means comprises the object imaging means, and the radiation projected through the aperture has a frequency equal to the frequency of radiation used to form the image of the object.

Claim 22

Apparatus for projecting and focusing an image of an object to be patterned in an electromagnetic radiation sensitive layer, the image of the object being projected by object imaging means onto an imaging surface and the object being located in an object plane, comprising: first means for projecting electromagnetic radiation through the object imaging means and towards the imaging surface to pattern the electromagnetic radiation sensitive layer in conformity with the image of the object; an electromagnetic radiation barrier having a subresolution aperture therethrough; second means for projecting electromagnetic radiation through the aperture towards the imaging surface; confocal imaging means for forming from the projected radiation of said second means an image of said aperture in an image plane of the object imaging means; means for directing projected radiation which strikes the imaging surface towards one of the aperture of origin and a conjugate subresolution aperture; means for detecting power of directed radiation passing through the aperture of origin or the conjugate aperture; and means for adjusting the distance between the object imaging means and the imaging surface to maximize said detected power.

Claim 23

Apparatus for projecting and focusing an image of an object to be patterned in an electromagnetic radiation sensitive layer, the image of the object being projected by object imaging means onto an imaging surface and the object being located in an object plane, comprising: first means for projecting electromagnetic radiation through the object imaging means and towards the imaging surface to pattern the electromagnetic radiation sensitive layer in conformity with the image of the object; an electromagnetic radiation barrier having a subresolution aperture therethrough; second means for projecting electromagnetic radiation through the aperture towards the imaging surface; confocal imaging means for forming from the projected radiation of said second means an image of said aperture in an image plane of the object imaging means; means for directing projected radiation which strikes the imaging surface towards one of the aperture of origin and a conjugate subresolution aperture; means for detecting power of directed radiation passing through the aperture of origin or the conjugate aperture; and means for adjusting the distance between the object imaging means and the imaging surface to maximize said detected power.

Claim 26

The method of claim 22 wherein the step of forming the image of the subresolution aperture comprises projecting electromagnetic radiation from the aperture through confocal imaging means; and wherein the step of bringing the image of the aperture and the imaging surface into coincidence comprises: detecting power of radiation reflected back from the localized region of the imaging surface through the aperture, and adjusting the distance between the object imaging means and the imaging surface to maximize the detected power.

Claim 27

The method of claim 23 wherein the image of the aperture is formed by the object imaging means.

Claim 28

The method of claim 24 further comprising the steps of: locating the aperture in the object plane; and employing electromagnetic radiation of the same frequency to form the image of the aperture and the image of the object.

Claim 29

The method of claim 25 wherein the detecting step further comprises distinguishing between reflected radiation originally emanating from the aperture and other detected radiation.

Claim 30

The method of claim 25 wherein the object comprises a projection lithography mask, the imaging surface comprises a photoresist layer on a semiconductor wafer having multiple integrated circuit sites, and the localized region comprises a kerf region between adjacent integrated circuit sites.

Claim 31

The method of claim 25 further comprising the step of forming multiple subresolution aperture images in the image plane of the object imaging means.

Claim 34

The method of claim 29 further comprising projecting the radiation through a plurality of subresolution apertures in the object plane and detecting power of radiation reflected back through each aperture; and adjusting the distance between the imaging surface and imaging device to maximize the detected power of radiation reflected back through each aperture.

Claim 35

The method of claim 29 further comprising projecting the radiation through a plurality of closely spaced but reflectively separate subresolution apertures in the object plane, detecting total power of radiation reflected back through the apertures; and adjusting said distance to maximize the detected total power of radiation.