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US6542835B2 Expired / Lapsed US ⏱️ 0.0 years remaining

Data collection methods and apparatus

Assignee: KLA Corp
•
Filing: 2001-03-22
•
Granted: 2003-04-01
•
Expires: 2021-03-22
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Abstract

Abstract Information transfer is effected using a network of electrical signal conductors and sensors forming crosspoint connections. The sensors are capable of representing a measurement parameter as an electrical impedance. One embodiment of the present invention includes output electrical conductors, input electrical conductors, and sensors. Each of the sensors is connected with one of the output electrical conductors and one of the input electrical conductors so as to form an array of crosspoint connections. Application of electrical signals to the sensors and measurement of electrical signals from the sensors provide sufficient information to derive relative information from each sensor using algorithms based on equations for combining impedance. The embodiment may further include one or more reference elements connected with the output electrical conductors and with the input electrical conductors so as to form crosspoint connections. The reference elements have predetermined impedances and may be used to determine the impedance values for particular sensors.

Inventors

  • 👤 Randall S. Mundt

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-07 04:31
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; H10P72/0604

Claims Analysis

Total Claims: 30
Claim 1
Independent Claim 171 words
An apparatus comprising: at least two output electrical conductors; at least one input electrical conductor; at least two sensors, the sensors being capable of sensing a parameter and indicating the parameter as an electrical impedance; the sensors being connected with the output electrical conductors and with the input electrical conductor so as to form an array of crosspoint connections; a controller, the controller being connected with the output electrical conductors and with the input electrical conductor, the controller being capable of applying electrical signals to the output electrical conductors, the controller being capable of measuring electrical signals received from the input electrical conductor; the controller being capable of at least one of: a) storing information representative of the measurements of the electrical signals received from the input electrical conductors, b) calculating the electrical impedance of each of the sensors using an algorithm, information of the electrical signals applied to the output electrical conductors, and measured electrical signals received from the input electrical conductors, and c) transmitting information received from the sensors.
Claim 2
Independent Claim 171 words
An apparatus comprising: at least two output electrical conductors; at least one input electrical conductor; at least two sensors, the sensors being capable of sensing a parameter and indicating the parameter as an electrical impedance; the sensors being connected with the output electrical conductors and with the input electrical conductor so as to form an array of crosspoint connections; a controller, the controller being connected with the output electrical conductors and with the input electrical conductor, the controller being capable of applying electrical signals to the output electrical conductors, the controller being capable of measuring electrical signals received from the input electrical conductor; the controller being capable of at least one of: a) storing information representative of the measurements of the electrical signals received from the input electrical conductors, b) calculating the electrical impedance of each of the sensors using an algorithm, information of the electrical signals applied to the output electrical conductors, and measured electrical signals received from the input electrical conductors, and c) transmitting information received from the sensors.
Claim 3
Dependent Claim 20 words
The apparatus of claim 1 wherein the at least one input electrical conductor comprises a plurality of input electrical conductors.
Claim 4
Dependent Claim 22 words
The apparatus of claim 2 further comprising a substrate for supporting the output electrical conductors, the input electrical conductors, and the sensors.
Claim 5
Dependent Claim 34 words
The apparatus of claim 2 further comprising a plurality of reference elements, the reference elements being connected with the output electrical conductors and with the input electrical conductors so as to form crosspoint connections.
Claim 6
Dependent Claim 20 words
The apparatus of claim 4 wherein each of the input electrical conductors has at least one reference element connected thereto.
Claim 7
Dependent Claim 20 words
The apparatus of claim 1 wherein the algorithm includes equations for summing impedances in series and summing impedances in parallel.
Claim 8
Dependent Claim 28 words
The apparatus of claim 1 wherein the sensors are capable of indicating the parameter as an electrical impedance that includes at least one of resistance, capacitance, and inductance.
Claim 9
Dependent Claim 13 words
The apparatus of claim 1 wherein the sensors comprise a parameter sensitive resistor.
Claim 10
Dependent Claim 11 words
The apparatus of claim 1 wherein the sensors comprise a thermistor.
Claim 11
Dependent Claim 11 words
The apparatus of claim 1 wherein the sensors comprise a photoresistor.
Claim 12
Dependent Claim 13 words
The apparatus of claim 1 wherein the sensors comprise a nonlinear electronic junction.
Claim 13
Dependent Claim 11 words
The apparatus of claim 1 wherein the sensors comprise a photodiode.
Claim 14
Dependent Claim 13 words
The apparatus of claim 1 wherein the sensors comprise an active electronic device.
Claim 15
Dependent Claim 12 words
The apparatus of claim 1 wherein the sensors comprise a MOSFET device.
Claim 16
Dependent Claim 23 words
The apparatus of claim 14 wherein the sensor impedance is a function of a voltage applied to the gate of the MOSFET device.
Claim 17
Dependent Claim 25 words
The apparatus of claim 1 wherein the sensors comprise a substantially continuous layer of parameter sensitive material shared by at least two of the sensors.
Claim 18
Dependent Claim 11 words
The apparatus of claim 1 wherein the controller comprises a microprocessor.
Claim 19
Dependent Claim 27 words
The apparatus of claim 1 further comprising a substrate, and wherein the sensors, the output electrical conductors, and the input electrical conductors are formed on the substrate.
Claim 20
Dependent Claim 17 words
The apparatus of claim 1 wherein the plurality of sensors comprise at least two types of sensors.
Claim 21
Dependent Claim 24 words
The apparatus of claim 1 wherein at least one of the sensors includes circuitry for converting the measured parameter into a corresponding electrical impedance.
Claim 22
Independent Claim 63 words
A method for obtaining data from an array of sensors in a crosspoint network, the method being performed using sensors capable of representing parameters as electrical impedance, the method comprising the steps of: applying a pattern of electrical signals to the sensors; measuring electrical signals from the sensors; deriving measurement data for each of the sensors using the measured electrical signals and algorithms.
Claim 23
Independent Claim 63 words
A method for obtaining data from an array of sensors in a crosspoint network, the method being performed using sensors capable of representing parameters as electrical impedance, the method comprising the steps of: applying a pattern of electrical signals to the sensors; measuring electrical signals from the sensors; deriving measurement data for each of the sensors using the measured electrical signals and algorithms.
Claim 24
Dependent Claim 33 words
The method of claim 21 wherein the individual response of one of the sensors is calculated from measuring electrical signals when the pattern of electrical signals comprises a plurality of electrical source states.
Claim 25
Dependent Claim 19 words
The method of claim 21 wherein the pattern of electrical signals includes voltages having at least two discrete magnitudes.
Claim 26
Dependent Claim 19 words
The method of claim 21 wherein the pattern of electrical signals includes currents having at least two discrete magnitudes.
Claim 27
Dependent Claim 26 words
The method of claim 21 wherein the method is carried out using input electrical conductors and output electrical conductors arranged to form the cross point network.
Claim 28
Dependent Claim 15 words
The method of claim 21 wherein the pattern of electrical signals includes alternating electrical signals.
Claim 29
Independent Claim 118 words
An apparatus comprising: a plurality of output electrical conductors; a plurality of input electrical conductors; a plurality of sensors capable of presenting a parameter as an electrical impedance, each of the sensors being connected with one of the output electrical conductors and one of the input electrical conductors so as to form an array of crosspoint connections; and a plurality of reference elements, the reference elements being connected with the output electrical conductors and with the input electrical conductors so as to form crosspoint connections; whereby application of electrical signals to the output electrical conductors and measurement of electrical signals at the input electrical conductors provide sufficient information to derive the measured property of each sensor using algorithms.
Claim 30
Independent Claim 118 words
An apparatus comprising: a plurality of output electrical conductors; a plurality of input electrical conductors; a plurality of sensors capable of presenting a parameter as an electrical impedance, each of the sensors being connected with one of the output electrical conductors and one of the input electrical conductors so as to form an array of crosspoint connections; and a plurality of reference elements, the reference elements being connected with the output electrical conductors and with the input electrical conductors so as to form crosspoint connections; whereby application of electrical signals to the output electrical conductors and measurement of electrical signals at the input electrical conductors provide sufficient information to derive the measured property of each sensor using algorithms.

References Cited (Backward Citations)

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US4973956A Cited
US5469154A Cited
US5429006A Cited
US5729905A Cited
US5967661A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2006-03-31 2006-09-30 2007-04-01 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2010-03-31 2010-09-30 2011-04-01 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2014-03-31 2014-09-30 2015-04-01 $7700.00 Window Closed / Lapsed

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