US6244121B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sensor device for non-intrusive diagnosis of a semiconductor processing system
Assignee: Applied Materials Inc
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Filing: 1998-03-06
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Granted: 2001-06-12
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Expires: 2018-03-06
Abstract
Abstract A sensor device, for diagnosing a processing system, generally includes a support platform and one or more sensors mounted on the support platform. The sensor senses a condition, such as direction or inclination or acceleration in one or two axes, of the sensor device and outputs a signal indicative thereof, which is then sent to a transmitter, also mounted to the support platform, for wireless transmission of the signal to a receiver mounted on or near the processing system. The support platform generally has physical characteristics, such as size, profile height, mass, flexibility and/or strength, substantially similar to those of the substrates that are to be processed in the processing system, so the sensor device can be transferred through the processing system in a manner similar to the manner in which production substrates are transferred through the processing system.
Inventors
- 👤 Reginald Hunter
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 10:12
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/50; H10P72/53; G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/707; G03F7/70708; G03F7/708; G03F7/7085; H10P72/04; H10P72/0451; H10P72/0452; H10P72/0454; H10P72/0464; H10P72/06; H10P72/0602; H10P72/0604; H10P72/0606; H10P72/0616; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49004; Y10T29/49764; Y10T29/49769
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
65 words
A movable wireless sensor device for performing diagnostics within a substrate processing system, comprising: a support platform having physical dimensions substantially similar to dimensions of a substrate being processed; and at least one electronic device mounted to the support platform and including a sensor adapted to sense a condition of the support platform and provide condition signals indicative of the condition of the support platform.
Claim 2
Dependent Claim
65 words
A movable wireless sensor device for performing diagnostics within a substrate processing system, comprising: a support platform having physical dimensions substantially similar to dimensions of a substrate being processed; and at least one electronic device mounted to the support platform and including a sensor adapted to sense a condition of the support platform and provide condition signals indicative of the condition of the support platform.
Claim 3
Dependent Claim
49 words
The sensor device of claim 1 wherein the at least one electronic device further includes a transmitter electrically coupled to the sensor and adapted to receive the condition signals from the sensor and transmit the condition signals to a receiver for transmission to a controller of the processing system.
Claim 4
Dependent Claim
52 words
The sensor device of claim 2 wherein the at least one electronic device further includes a signal conversion circuit coupled to the sensor and the transmitter adapted to receive the condition signals, convert the condition signals to transmittable signals and send the transmittable signals to the transmitter for transmission to the receiver.
Claim 5
Dependent Claim
12 words
The sensor device of claim 1 wherein the sensor is an inclinometer.
Claim 6
Dependent Claim
13 words
The sensor device of claim 4 wherein the inclinometer is a two-axis inclinometer.
Claim 7
Dependent Claim
16 words
The sensor device of claim 4 wherein the inclinometer senses an acceleration of the support platform.
Claim 8
Dependent Claim
12 words
The sensor device of claim 1 wherein the sensor is an accelerometer.
Claim 9
Dependent Claim
13 words
The sensor device of claim 7 wherein the accelerometer is a two-axis accelerometer.
Claim 10
Dependent Claim
12 words
The sensor device of claim 1 wherein the sensor is a compass.
Claim 11
Dependent Claim
13 words
The sensor device of claim 1 wherein the sensor is a magnetic probe.
Claim 12
Dependent Claim
13 words
The sensor device of claim 1 wherein the sensor is an electrostatic probe.
Claim 13
Dependent Claim
13 words
The sensor device of claim 1 wherein the sensor is a temperature probe.
Claim 14
Dependent Claim
13 words
The sensor device of claim 1 wherein the sensor is a distance probe.
Claim 15
Dependent Claim
14 words
The sensor device of claim 1 wherein the sensor is an optical detection probe.
Claim 16
Dependent Claim
30 words
The sensor device of claim 1 wherein the support platform has a mass substantially similar to a mass of a substrate which is to be processed in the processing system.
Claim 17
Dependent Claim
46 words
The sensor device of claim 1 wherein a combination of a mass of the support platform and a mass of the at least one electronic device has a mass substantially similar to a mass of a substrate which is to be processed in the processing system.
Claim 18
Dependent Claim
30 words
The sensor device of claim 1 wherein the support platform has a flexibility substantially similar to a flexibility of a substrate which is to be processed in the processing system.
Claim 19
Dependent Claim
13 words
The sensor device of claim 1 wherein the support platform is a substrate.
Claim 20
Dependent Claim
14 words
The sensor device of claim 1 wherein the support platform is a composite board.
Claim 21
Dependent Claim
14 words
The sensor device of claim 19 wherein the composite board comprises a graphite composite.
Claim 22
Dependent Claim
14 words
The sensor device of claim 19 wherein the composite board comprises a resin/fiber composite.
Claim 23
Dependent Claim
70 words
The sensor device of claim 1 wherein: the processing system has a plurality of interconnected chambers, an opening between interconnected chambers, and a substrate handler having a substrate support for inserting a substrate through the opening between the interconnected chambers; and the support platform and the at least one electronic device have a combined profile height low enough to be inserted through the opening while supported on the substrate support.
Claim 24
Dependent Claim
19 words
The sensor device of claim 1 wherein the at least one electronic device is micro-machined onto the support platform.
Claim 25
Dependent Claim
38 words
The sensor device of claim 1 wherein the at least one electronic device is constructed of a ceramic chip carrier mounted to the support platform, with a die for the electronic device formed into the ceramic chip carrier.
Claim 26
Dependent Claim
26 words
The sensor device of claim 1 wherein the at least one electronic device is constructed of a surface-mount integrated circuit chip mounted to the support platform.
Claim 27
Dependent Claim
30 words
The sensor device of claim 1 wherein the support platform has a size substantially similar to a size of a substrate which is to be processed in the processing system.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-06-11 | 2004-12-11 | 2005-06-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-06-11 | 2008-12-11 | 2009-06-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-06-11 | 2012-12-11 | 2013-06-12 | $7700.00 | Window Closed / Lapsed |