US5973316A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sub-wavelength aperture arrays with enhanced light transmission
Assignee: NEC Corp
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Filing: 1997-11-26
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Granted: 1999-10-26
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Expires: 2017-11-26
Abstract
Abstract A metallic film has apertures located therein in an array arranged in a pattern so that when light is incident on the apertures, surface plasmons on the metallic film are perturbed resulting in an enhanced transmission of the light emitted from individual apertures in the array. The aperture array is used: to filter light of predetermined wavelength traversing the apertures, to collect light over a distance after traversing the apertures, to improve operation of near-field scanning optical microscopes, and to enhance light transmission through masks useable in photolithography.
Inventors
- 👤 Thomas W. Ebbesen
- 👤 Hadi F. Ghaemi
- 👤 Tineke Thio
- 👤 Peter A. Wolff
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 18:31
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/107; B; B82; B82Y; B82Y20/00; B82Y35/00; G01; G01Q; G01Q60/00; G01Q60/18; G01Q60/22; G02B5/00; G02B5/008; G02B6/12; G02B6/122; G02B6/1226; G02B6/24; G02B6/42; G02B6/4201; G02B6/4204; G02B6/4206; G02B6/4249; G02B6/425; G03; G03F; G03F1/00; G03F1/50; G03F7/00; G03F7/20; G03F7/2002; G03F7/2014; G03F7/2045; B82Y10/00
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
73 words
An apparatus for enhanced light transmission comprising: a metallic film; and an array of apertures in said film; said apertures in the array being spaced apart by a distance P, where P is selected dependent upon the wavelength of light incident on said array whereby incident light at a predetermined wavelength will perturb the metallic film in a surface plasmon energy band for enhancing transmission of light through individual apertures in said array.
Claim 2
Independent Claim
73 words
An apparatus for enhanced light transmission comprising: a metallic film; and an array of apertures in said film; said apertures in the array being spaced apart by a distance P, where P is selected dependent upon the wavelength of light incident on said array whereby incident light at a predetermined wavelength will perturb the metallic film in a surface plasmon energy band for enhancing transmission of light through individual apertures in said array.
Claim 3
Dependent Claim
32 words
An apparatus for enhanced light transmission as set forth in claim 1, where said film has a thickness in the range of approximately 0.05 to 10 times the diameter of said apertures.
Claim 4
Dependent Claim
22 words
An apparatus for enhanced light transmission as set forth in claim 1, where at least one aperture is missing from the array.
Claim 5
Dependent Claim
28 words
An apparatus for enhanced light transmission as set forth in claim 1, where the spacing of said apertures is such that a Fresnel zone lens pattern is formed.
Claim 6
Dependent Claim
17 words
An apparatus for enhanced light transmission as set forth in claim 1, where said apertures are cylindrical.
Claim 7
Dependent Claim
17 words
An apparatus for enhanced light transmission as set forth in claim 1, where said apertures are slits.
Claim 8
Dependent Claim
103 words
An optical filter comprising: a metallic film; an array of apertures in said film; said apertures in the array being spaced apart by a distance P, where P is selected dependent upon the wavelength of light incident on said array whereby incident light at a predetermined wavelength will perturb the metallic film in a surface plasmon energy band for enhancing transmission of light through individual apertures in said array; and means for adjusting the angle of said array whereby when light is incident on said array at a predetermined angle only light of specific wavelength will travel through the apertures in said array.
Claim 9
Dependent Claim
103 words
An optical filter comprising: a metallic film; an array of apertures in said film; said apertures in the array being spaced apart by a distance P, where P is selected dependent upon the wavelength of light incident on said array whereby incident light at a predetermined wavelength will perturb the metallic film in a surface plasmon energy band for enhancing transmission of light through individual apertures in said array; and means for adjusting the angle of said array whereby when light is incident on said array at a predetermined angle only light of specific wavelength will travel through the apertures in said array.
Claim 10
Dependent Claim
90 words
A light collector comprising: a metallic film; an array of apertures in said film; said apertures in the array being spaced apart by a distance P, where P is selected dependent upon the wavelength of light incident on said array whereby incident light at a predetermined wavelength will perturb the metallic film in a surface plasmon energy band for enhancing transmission of light through individual apertures in said array; and optic fiber disposed in juxtaposition to said array of apertures so that light traveling through said apertures enters said fiber.
Claim 11
Dependent Claim
90 words
A light collector comprising: a metallic film; an array of apertures in said film; said apertures in the array being spaced apart by a distance P, where P is selected dependent upon the wavelength of light incident on said array whereby incident light at a predetermined wavelength will perturb the metallic film in a surface plasmon energy band for enhancing transmission of light through individual apertures in said array; and optic fiber disposed in juxtaposition to said array of apertures so that light traveling through said apertures enters said fiber.
Claim 12
Independent Claim
96 words
An apparatus for use in photolithography comprising: a metallic film; an array of apertures in said film; said apertures in the array being spaced apart by a distance P, where P is selected dependent upon the wavelength of light incident on said array whereby incident light at a predetermined wavelength will perturb the metallic film in a surface plasmon energy band for enhancing transmission of light through individual apertures in said array; and actuator means for causing said array to undergo motion relative to a photoresist coated substrate to be disposed in proximity to said array.
Claim 13
Independent Claim
96 words
An apparatus for use in photolithography comprising: a metallic film; an array of apertures in said film; said apertures in the array being spaced apart by a distance P, where P is selected dependent upon the wavelength of light incident on said array whereby incident light at a predetermined wavelength will perturb the metallic film in a surface plasmon energy band for enhancing transmission of light through individual apertures in said array; and actuator means for causing said array to undergo motion relative to a photoresist coated substrate to be disposed in proximity to said array.
Claim 14
Dependent Claim
43 words
An apparatus for use in photolithography as set forth in claim 9, further comprising a polarized light source disposed for transmitting light through said array of apertures for writing lines in a photoresist coated substrate to be disposed in proximity to said array.
Claim 15
Dependent Claim
17 words
An apparatus for use in photolithography as set forth in claim 9, where said apertures are slits.
Claim 16
Dependent Claim
28 words
An apparatus for use in photolithography as set forth in claim 9, where the spacing of said apertures is such that a Fresnel zone lens pattern is formed.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-10-25 | 2003-04-26 | 2003-10-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-10-25 | 2007-04-26 | 2007-10-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-10-25 | 2011-04-26 | 2011-10-26 | $7700.00 | Window Closed / Lapsed |