EP1139174A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Illuminance measurement apparatus and exposure apparatus
Assignee: Nikon Corp
•
Filing: 2001-03-23
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Granted: —
•
Expires: 2021-03-23
Abstract
Abstract An illuminance measurement apparatus for measuring the illuminance of illumination light on an image plane of a projection optical system of an exposure apparatus designed to project the image of a pattern from an illuminated mask on a substrate held on a substrate stage by the projection optical system, including an illuminance meter detachably attached to the substrate stage, the illuminance meter having an illuminance detector, a transmitter for wirelessly transmitting a measurement result of the illuminance detector, a storage cell, and a photoelectric converter for converting part of the illumination light photoelectrically and storing it in the storage cell, and a receiver for receiving the wireless signal including the measurement results transmitted by the transmitter. <IMAGE>
Inventors
- 👤 Tsuyoshi Fujinaka
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 03:05
CPC Classifications
H; H10; H10P; H10P76/00; G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/7055; G03F7/70558; G03F7/70058; G03F7/70133; G03F7/70691; G03F7/70716; G03F7/708; G03F7/70808; G03F7/70825; G03F7/70991
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
97 words
An illuminance measurement apparatus which
measures the illuminance of illumination light on an
image plane of a projection optical system of an
exposure apparatus designed to project the image of a
pattern from an illuminated mask on to a substrate
held on a substrate stage by said projection optical
system, characterized by comprising an illuminance meter detachably attached to
said substrate stage, said illuminance meter having an
illuminance detector and a transmitter for wirelessly
transmitting measurement results of said illuminance
detector, and a receiver which receives a wireless signal
including the measurement results transmitted from
said transmitter.
Claim 2
Dependent Claim
41 words
An illuminance measurement apparatus as set
forth in claim 1, characterized in that the
illuminance meter has a storage cell and a
photoelectric converter for converting at least part
of the illumination light photoelectrically and
storing it in the storage cell.
Claim 3
Dependent Claim
81 words
An illuminance measurement apparatus which
measures the illuminance of illumination light on an
image plane of a projection optical system of an
exposure apparatus designed to project the image of a
pattern from an illuminated mask on to a substrate
held on a substrate stage by said projection optical
system, characterized in that the illuminance meter has a storage cell
and a photoelectric converter for converting at least
part of the illumination light photoelectrically and
storing it in said storage cell.
Claim 4
Dependent Claim
21 words
An exposure apparatus characterized by comprising an illuminance measurement apparatus as set
forth in any one of claims 1 to 3.
Claim 5
Dependent Claim
33 words
A method of production of a device characterized by including the step of transferring a
device pattern on to a sensitive substrate using an
exposure apparatus as set forth in of claim 4.
Claim 6
Dependent Claim
85 words
An exposure apparatus which emits a first
beam for exposure on a mask and exposes a substrate
through the mask by the first beam, characterized by comprising: a photodetector provided on a movable
member moving relative with respect to the first beam
or a second beam used for other than exposure of the
substrate and wirelessly transmitting information
obtained by receiving at least part of the first beam
or the second beam and a receiver arranged separate from the
movable member and receiving said information.
Claim 7
Dependent Claim
25 words
An exposure apparatus as set forth in claim
6, characterized in that the movable member includes a
stage for holding the mask or the substrate.
Claim 8
Dependent Claim
31 words
An exposure apparatus as set forth in claim
6 or 7, characterized in that said movable member
includes a built-in storage device for storing energy
to be supplied to the photodetector.
Claim 9
Dependent Claim
37 words
An exposure apparatus as set forth in claim
8, characterized by further comprising an energy
generator which receives at least one of the first and
second beams and generates energy to be stored in said
storage device.
Claim 10
Dependent Claim
35 words
A method of production of a device characterized by including the step of transferring a
device pattern on to a sensitive substrate using an
exposure apparatus as set forth in of claim 6 or 7.
Claim 11
Dependent Claim
72 words
An illuminance measurement apparatus characterized by comprising a holder type illuminance
meter comprised of a dummy holder configured to be
able to be detachably attached to a substrate stage
interchangeably with a substrate holder for holding a
substrate and a probe for measurement of the
illuminance, a transmitter for wirelessly transmitting
measurement results of the probe, and a battery for
supplying power to the probe and the transmitter
provided on the same.
Claim 12
Dependent Claim
28 words
An illuminance measurement apparatus as set
forth in claim 11, characterized in that said probe is
configured to be able to be attached detachably to the
dummy holder.
Claim 13
Dependent Claim
29 words
An illuminance measurement apparatus as set
forth in claim 11, characterized by further comprising
a receiver which receives a wireless signal including
the measurement results transmitted from the
transmitter.
Claim 14
Dependent Claim
34 words
An illuminance measurement apparatus as set
forth in claim 11, characterized in that said holder
type illuminance meter has a photoelectric converter
for converting the received light photoelectrically
and storing it in the battery.
Claim 15
Dependent Claim
136 words
An exposure apparatus which emits a first
beam for exposure on a mask and exposes a substrate
through the mask by the first beam, characterized by comprising: a substrate stage to which a substrate
holder for holding the substrate can be detachably
attached, a holder type illuminance meter comprised
of a dummy holder configured to be able to be attached
to the substrate stage interchangeably with a
substrate holder and a probe for receiving at least
part of the first beam or second beam and converting
it photoelectrically, a transmitter for wirelessly
transmitting information obtained from the probe, and
a battery for supplying power to the probe and the
transmitter provided on the same, and a receiver arranged separate from the
substrate stage and receiving a wireless signal
including the measurement results transmitted from the
transmitter.
Claim 16
Dependent Claim
27 words
An exposure apparatus as set forth in claim
15, characterized in that said probe is configured to
be able to be detachably attached to the dummy holder.
Claim 17
Dependent Claim
36 words
An exposure apparatus as set forth in claim
15, characterized by further comprising an energy
generator which receives at least one of the first and
second beams and generates energy to be stored in the
battery.
Claim 18
Independent Claim
37 words
A method of production of a device characterized by including a step of transferring a
device pattern on to a sensitive substrate using an
exposure apparatus as set forth in any one of claims
15 to 17.
References Cited (Backward Citations)
No citation records indexed.
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