US5597868A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polymeric anti-reflective compounds
Assignee: Massachusetts Institute of Technology
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Filing: 1994-03-04
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Granted: 1997-01-28
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Expires: 2014-03-04
Abstract
Abstract Anti-reflective coatings and methods for forming these anti-reflective coatings are disclosed that have a polymer chemistry and optical characteristics suitable for suppressing the light that reflects off a circuit substrate during a photolithographic process. These anti-reflective coatings include a phenolic polymer material and an epoxide-containing polymer material that can be combined in a select proportion to form a thermally curable polymeric anti-reflective coating. The select proportions of the combined materials tailors the optical characteristic of the anti-reflective coating to attenuate energy about a select range of wavelengths.
Inventors
- 👤 Roderick R. Kunz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 16:01
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/091; C; C09; C09D; C09D133/00; C09D133/04; C09D133/06; C09D133/10; C09D133/12; G03F7/038; C08; C08L; C08L61/00; C08L61/04; C08L61/06
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
93 words
An anti-reflective, light-attenuating, photolithography coating composition comprising: a phenol-formaldehyde novolac polymer which attenuates actinic radiation to inhibit reflection artifacts during photolithography; and a polymer having a first repeating unit of methylmethacrylate, and having a second repeating unit selected from the group consisting of: ##STR1## wherein R 1 represents a hydrogen, a halogen, a lower alkyl, or a halogenated lower alkyl and, R 2 represents a moiety containing an epoxide and selected from a group including alkyls, alkenyls, alkynyls, aryls, heterocycles, and polycycles; said composition being about 30-70 percent by weight phenol-formaldehyde novolac polymer.
Claim 2
Dependent Claim
93 words
An anti-reflective, light-attenuating, photolithography coating composition comprising: a phenol-formaldehyde novolac polymer which attenuates actinic radiation to inhibit reflection artifacts during photolithography; and a polymer having a first repeating unit of methylmethacrylate, and having a second repeating unit selected from the group consisting of: ##STR1## wherein R 1 represents a hydrogen, a halogen, a lower alkyl, or a halogenated lower alkyl and, R 2 represents a moiety containing an epoxide and selected from a group including alkyls, alkenyls, alkynyls, aryls, heterocycles, and polycycles; said composition being about 30-70 percent by weight phenol-formaldehyde novolac polymer.
Claim 3
Dependent Claim
32 words
An anti-reflective coating composition according to claim 1 wherein said second repeating unit is dicyclopentadienyloxy methacrylate, and wherein the ratio of dicyclopentadienyloxy methacrylate to methyl methacrylate ranges between about 1:5 to 4:5.
Claim 4
Dependent Claim
32 words
An anti-reflective coating composition according to claim 1 wherein said second repeating unit is dicyclopentadienyloxy acrylate, and wherein the ratio of dicyclopentadienyloxy acrylate to methyl methacrylate ranges between about 1:5 to 4:5.
Claim 5
Dependent Claim
32 words
An anti-reflective coating composition according to claim 1 wherein said second repeating unit is 2,3-epoxypropyl methacrylate, and wherein the ratio of 2,3-epoxypropyl methacrylate to methyl methacrylate ranges between about 1:5 to 4:5.
Claim 6
Dependent Claim
32 words
An anti-reflective coating composition according to claim 1 wherein said second repeating unit is 2,3-epoxypropyl acrylate, and wherein the ratio of 2,3-epoxypropyl acrylate to methyl methacrylate ranges between about 1:5 to 4:5.
Claim 7
Dependent Claim
15 words
An anti-reflective coating composition according to claim 1 wherein said phenol-formaldehyde polymer is meta-cresol novolac.
Claim 8
Dependent Claim
15 words
An anti-reflective coating composition according to claim 1 further comprising an acid generator cross-linking catalyst.
Claim 9
Dependent Claim
15 words
An anti-reflective coating composition according to claim 7 having a cross-linking catalyst that is photo-activated.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-01-28 | 2000-07-29 | 2001-01-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-01-28 | 2004-07-29 | 2005-01-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-01-28 | 2008-07-29 | 2009-01-28 | $7700.00 | Window Closed / Lapsed |