US5866935A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Tunneling device
Assignee: Nikon Precision Inc
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Filing: 1996-11-25
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Granted: 1999-02-02
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Expires: 2016-11-25
Abstract
Abstract A method and apparatus to analyze the aerial image of an optical system using a subwavelength slit. A slit configuration yields a higher signal-to-noise ratio than that achievable with a round aperture. The slit also allows the polarization of the aerial image to be analyzed. In an alternative embodiment a tunneling slit is used. The tunneling slit comprises an optically transparent ridge-like structure mounted to a substrate, the combined structure covered by a thin, planar metal film.
Inventors
- 👤 Michael R. Sogard
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 08:46
CPC Classifications
G; G01; G01J; G01J1/00; G01J1/42; G01J1/4257; G01J3/00; G01J3/02; G01J3/04; G01J4/00; G01Q; G01Q60/00; G01Q60/18; G01Q60/22; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/70358; G03F7/70483; G03F7/7055; G03F7/70566; G03F7/70591; G03F7/706
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
73 words
A tunneling device for use at a wavelength R, comprising: a substrate comprising a first surface and a second surface; an optically transparent upstanding structure coupled to and extending nominally upwardly from said first surface of said substrate; and a metal film that covers said first surface of said substrate and said structure, said metal film having a thickness, measured at the highest portion of said structure, much less than the wavelength R.
Claim 2
Dependent Claim
73 words
A tunneling device for use at a wavelength R, comprising: a substrate comprising a first surface and a second surface; an optically transparent upstanding structure coupled to and extending nominally upwardly from said first surface of said substrate; and a metal film that covers said first surface of said substrate and said structure, said metal film having a thickness, measured at the highest portion of said structure, much less than the wavelength R.
Claim 3
Dependent Claim
15 words
The tunneling device of claim 1, wherein said structure is manufactured from optically transparent material.
Claim 4
Dependent Claim
14 words
The tunneling device of claim 1, wherein said structure is manufactured from fluorescent material.
Claim 5
Dependent Claim
13 words
The tunneling device of claim 1, wherein said substrate is a fluorescent detector.
Claim 6
Dependent Claim
13 words
The tunneling device of claim 1, wherein said substrate is a light pipe.
Claim 7
Dependent Claim
21 words
The tunneling device of claim 1 wherein said structure is an elongate ridge so that the device is a tunneling slit.
Claim 8
Dependent Claim
20 words
The tunneling device of claim 1 wherein said structure is a protuberance so that the device is a tunneling dot.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-02-01 | 2002-08-03 | 2003-02-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-02-01 | 2006-08-03 | 2007-02-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-02-01 | 2010-08-03 | 2011-02-02 | $7700.00 | Window Closed / Lapsed |