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US4917462A Expired / Lapsed US ⏱️ 0.0 years remaining

Near field scanning optical microscopy

Assignee: Cornell Research Foundation Inc
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Filing: 1989-08-16
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Granted: 1990-04-17
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Expires: 2009-08-16
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Abstract

Abstract An aperture probe in the form of a tapered metal-coated glass pipette having a thin tip provides near-field access to a sample for near-field microscopy. The pipette is formed from a glass tube drawn down to a fine tip, and then coated, as by evaporation, by a metallic layer. The central opening of the tube is drawn down to a submicron diameter, and the metal coating is formed with an aperture at that opening. Aperture diameters down to 500 Angstroms diameter are provided. Also disclosed is a microscope utilizing the pipette aperture for scanning near-field imaging of samples.

Inventors

  • 👤 Aaron Lewis
  • 👤 Michael Isaacson
  • 👤 R. Eric Betzig
  • 👤 Alec Harootunian

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-31 11:56
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/18; G01Q60/22; G02; G02B; G02B6/00

Claims Analysis

Total Claims: 28
Claim 1
Independent Claim 129 words
Apparatus for near-field microscopy, comprising: a tapered, generally tubular pipette having an axial central opening, an upper body portion and a lower tip portion, a tapered glass wall coated with an opaque, metallic layer, and a submicron aperture at the end of said tip portion; means for mounting said pipette for controlled axial motion, in a z direction; stage means for receiving a sample to be observed; means for moving said stage means in an x-y plane with respect to said aperture; and means for determining the proximity of said aperture to the surface of a sample, and for activating said means for mounting said pipette to move said aperture with respect to a sample to position the surface of the sample within the near-field region of said aperture.
Claim 2
Dependent Claim 129 words
Apparatus for near-field microscopy, comprising: a tapered, generally tubular pipette having an axial central opening, an upper body portion and a lower tip portion, a tapered glass wall coated with an opaque, metallic layer, and a submicron aperture at the end of said tip portion; means for mounting said pipette for controlled axial motion, in a z direction; stage means for receiving a sample to be observed; means for moving said stage means in an x-y plane with respect to said aperture; and means for determining the proximity of said aperture to the surface of a sample, and for activating said means for mounting said pipette to move said aperture with respect to a sample to position the surface of the sample within the near-field region of said aperture.
Claim 3
Dependent Claim 21 words
The apparatus of claim 12, further including vibration-absorbing means for supporting said stage means and said means for mounting said pipette.
Claim 4
Dependent Claim 28 words
The apparatus of claim 2, wherein said vibration-absorbing means includes a support plate carried by pneumatic support means for absorbing vibrations having a frequency above about 5 Hz.
Claim 5
Dependent Claim 56 words
The apparatus of claim 12, wherein said means for mounting said pipette includes: a housing; and positioning means mounted on said housing and supporting said pipette, said positioning means being responsive to control signals for incrementally moving said pipette in said z direction in steps less than the extent of the near-field region of said aperture.
Claim 6
Dependent Claim 24 words
The apparatus of claim 4, wherein said positioning means comprises a piezoelectric positioner for moving said aperture in incremental steps of about 20 Angstroms.
Claim 7
Dependent Claim 42 words
The apparatus of claim 5, wherein said means for moving said stage means includes a coarse x-y positioner for locating a sample with respect to said aperture, and a fine x-y positioner for incrementally scanning a sample with respect to said aperture.
Claim 8
Dependent Claim 35 words
The apparatus of claim 6, wherein said fine x-y positioner includes a piezoelectric positioning means for moving said stage means in incremental steps of about 20 Angstroms in an x direction and a y direction.
Claim 9
Dependent Claim 22 words
The apparatus of claim 4, further including optical means for visually monitoring the position of said pipette with respect to a sample.
Claim 10
Dependent Claim 37 words
The apparatus of claim 1, further including means for directing intense visible light onto a sample on said stage means, and optical means for visually monitoring the position of said pipette with respect to such a sample.
Claim 11
Dependent Claim 75 words
The apparatus of claim 9, wherein said means for directing light onto a sample includes a source of light, an objective lens located to direct light from said source through said stage means and toward said pipette, whereby a sample on said stage means will be illuminated from one side and light emitted from its opposite side will be detected within the near filled region of the surface of the sample by said pipette aperture.
Claim 12
Dependent Claim 57 words
The apparatus of claim 10, wherein said means for directing light onto a sample includes a source of light, means for directing light from said source through said pipette and toward the upper surface of said stage means, said pipette collecting reflected light within the near-field region of the surface of a sample on said stage means.
Claim 13
Dependent Claim 72 words
The apparatus of claim 1, wherein said means for determining the proximity of said aperture to the surface of a sample on said stage means includes means for applying a voltage between said metallic layer on said pipette and said stage means, and means for measuring the current flow therebetween, the current flow providing a measure of the distance between said aperture and the surface of a sample on said stage means.
Claim 14
Dependent Claim 21 words
The apparatus of claim 1, further including means for directing intense, visible light onto a sample carried on said stage means.
Claim 15
Dependent Claim 14 words
The apparatus of claim 13, wherein said means for directing light is a laser.
Claim 16
Dependent Claim 33 words
The apparatus of claim 13, wherein said means for directing light onto a sample comprises means for directing light through said stage means and toward said pipette for transmission illumination of a sample.
Claim 17
Dependent Claim 31 words
The apparatus of claim 13, wherein said means for directing light onto a sample comprises means for directing light through said pipette toward said stage means for epiillumination of a sample.
Claim 18
Dependent Claim 20 words
The apparatus of claim 13, wherein said submicron aperture has a diameter less than the wavelength of said visible light.
Claim 19
Dependent Claim 123 words
The apparatus of claim 17, wherein said tapered glass wall has at its lower tip portion an outer diameter equal to or greater than the wavelength of said visible light, and an inner diameter less than the wavelength of said visible light, said metallic layer covering the wall of said lower tip portion surrounding said axial central opening of said pipette to provide said submicron aperture, whereby light travelling in said pipette toward said aperture travels in a propagating mode throughout the length of the pipette, travels through said aperture in a decaying mode, and thereafter again travels in a propagating mode, said pipette and aperture producing collimated light in the projected image of said aperture within the near-field region of said aperture.
Claim 20
Dependent Claim 23 words
The apparatus of claim 18, wherein said near-field region extends a distance equal to at least one-half the diameter of said submicron aperture.
Claim 21
Dependent Claim 93 words
Apparatus for near-field microscopy, comprising: a pipette having a glass wall forming an upper body portion and a lower elongated tip portion and including an axially extending opening terminating in a submicron aperture at the lower end of said tip portion; an opaque metallic layer on the outer surface of said glass wall and surrounding said submicron aperture; means for mounting said pipette for motion with respect to a sample; and means for moving said pipette to position at least a portion of said sample within the near field region of said aperture.
Claim 22
Dependent Claim 93 words
Apparatus for near-field microscopy, comprising: a pipette having a glass wall forming an upper body portion and a lower elongated tip portion and including an axially extending opening terminating in a submicron aperture at the lower end of said tip portion; an opaque metallic layer on the outer surface of said glass wall and surrounding said submicron aperture; means for mounting said pipette for motion with respect to a sample; and means for moving said pipette to position at least a portion of said sample within the near field region of said aperture.
Claim 23
Dependent Claim 30 words
The apparatus of claim 20, further including light source means for illuminating said sample, whereby light from said sample will be detected by said pipette within its near field region.
Claim 24
Dependent Claim 20 words
The apparatus of claim 21, wherein said aperture has a diameter less than the wavelength of light from said sample.
Claim 25
Dependent Claim 24 words
The apparatus of claim 20, wherein said near field region extends a distance equal to at least one-half the diameter of said submicron aperture.
Claim 26
Dependent Claim 22 words
The apparatus of claim 20, wherein said pipette glass wall tapers in thickness from said upper body portion to said tip portion.
Claim 27
Dependent Claim 36 words
The apparatus of claim 24, wherein the lower end of said tip portion includes an annular bottom tip wall surrounding said aperture, and wherein the outer surface of said annular tip wall includes said metallic layer.
Claim 28
Dependent Claim 41 words
The apparatus of claim 24, wherein the outer diameter of said elongated tip portion is greater than the wavelength of light from said sample, and wherein the diameter of said aperture is smaller than the wavelength of light from said sample.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1993-04-16 1993-10-16 1994-04-17 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1997-04-16 1997-10-16 1998-04-17 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2001-04-16 2001-10-16 2002-04-17 $7700.00 Window Closed / Lapsed

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