US6285020B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Enhanced optical transmission apparatus with improved inter-surface coupling
Assignee: NEC Corp
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Filing: 1999-11-05
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Granted: 2001-09-04
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Expires: 2019-11-05
Abstract
Abstract An apparatus for enhanced light transmission through a perforated metal film is provided. The apparatus comprises a metal film having a first surface and a second surface, at least one aperture provided in the metal film and extending from the first surface to the second surface, and first and second dielectric layers. The first dielectric layer is provided substantially adjacent to the first metal film surface, and the second dielectric layer is provided substantially adjacent to the second metal film surface. The respective refractive indices of the first and second dielectric layers are substantially equal. Light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film. The apparatus may have a single aperture or a plurality of periodically arranged apertures, and the metal film surface may be provided with or without a periodic surface topography for further enhanced transmission. Wavelength-selective optical filters, spatial optical filters, light collectors, near-field scanning optical microscope probes and photolithographic masks are also provided.
Inventors
- 👤 Tae Jin Kim
- 👤 Ajit Krishnan
- 👤 Tineke Thio
- 👤 Henri Joseph Lezec
- 👤 Thomas W. Ebbesen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 14:57
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/18; G01Q60/22; B; B82; B82Y; B82Y20/00; B82Y35/00; G02; G02B; G02B5/00; G02B5/18; G02B5/1866; G02B5/20; G02B5/204; G01Q80/00
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
144 words
An apparatus for enhanced light transmission comprising: a metal film having a first surface and a second surface, at least one aperture provided in the metal film and extending from the first surface to the second surface; a first dielectric layer having a first refractive index, the first dielectric layer being substantially adjacent to the first surface of the metal film; and a second dielectric layer having a second refractive index, the second dielectric layer being substantially adjacent to the second surface of the metal film, wherein the second refractive index is substantially equal to the first refractive index, and whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film.
Claim 2
Independent Claim
144 words
An apparatus for enhanced light transmission comprising: a metal film having a first surface and a second surface, at least one aperture provided in the metal film and extending from the first surface to the second surface; a first dielectric layer having a first refractive index, the first dielectric layer being substantially adjacent to the first surface of the metal film; and a second dielectric layer having a second refractive index, the second dielectric layer being substantially adjacent to the second surface of the metal film, wherein the second refractive index is substantially equal to the first refractive index, and whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film.
Claim 3
Dependent Claim
27 words
The apparatus for enhanced light transmission of claim 1 , wherein the first dielectric layer and the second dielectric layer are comprised of the same dielectric medium.
Claim 4
Dependent Claim
26 words
The apparatus for enhanced light transmission of claim 1 , wherein the first dielectric layer and the second dielectric layer are comprised of different dielectric media.
Claim 5
Dependent Claim
31 words
The apparatus for enhanced light transmission of claim 1 , further comprising a periodic surface topography provided on at least one of the first and second surface of the metal film.
Claim 6
Dependent Claim
21 words
The apparatus for enhanced light transmission of claim 4 , wherein the periodic surface topography comprises a plurality of surface features.
Claim 7
Dependent Claim
20 words
The apparatus for enhanced light transmission of claim 1 , wherein the at least one aperture comprises a single aperture.
Claim 8
Dependent Claim
21 words
The apparatus for enhanced light transmission of claim 1 , wherein the at least one aperture comprises a plurality of apertures.
Claim 9
Dependent Claim
18 words
The apparatus for enhanced light transmission of claim 7 , wherein the plurality of apertures are periodically arranged.
Claim 10
Dependent Claim
19 words
The apparatus for enhanced light transmission of claim 1 , wherein the at least one aperture is cylindrically shaped.
Claim 11
Dependent Claim
18 words
The apparatus for enhanced light transmission of claim 1 , wherein the at least one aperture is slit-shaped.
Claim 12
Dependent Claim
19 words
The apparatus for enhanced light transmission of claim 1 , wherein the at least one aperture is rectangularly shaped.
Claim 13
Dependent Claim
19 words
The apparatus for enhanced light transmission of claim 1 , wherein the at least one aperture is arbitrarily shaped.
Claim 14
Dependent Claim
27 words
The apparatus for enhanced light transmission of claim 1 , wherein at least one of the first and second dielectric layers has a selectively variable refractive index.
Claim 15
Dependent Claim
176 words
An optical filter comprising: a metal film having a first surface and a second surface, at least one aperture provided in the metal film and extending from the first surface to the second surface; a first dielectric layer having a first refractive index, the first dielectric layer being substantially adjacent to the first surface of the metal film; and a second dielectric layer having a second refractive index, the second dielectric layer being substantially adjacent to the second surface of the metal film, wherein the second refractive index is substantially equal to the first refractive index, and whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film; and means for adjusting the orientation of the metal film with respect to light incident thereon, such that only light of a specific range of wavelengths is transmitted through the apertures in the metal film.
Claim 16
Dependent Claim
176 words
An optical filter comprising: a metal film having a first surface and a second surface, at least one aperture provided in the metal film and extending from the first surface to the second surface; a first dielectric layer having a first refractive index, the first dielectric layer being substantially adjacent to the first surface of the metal film; and a second dielectric layer having a second refractive index, the second dielectric layer being substantially adjacent to the second surface of the metal film, wherein the second refractive index is substantially equal to the first refractive index, and whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film; and means for adjusting the orientation of the metal film with respect to light incident thereon, such that only light of a specific range of wavelengths is transmitted through the apertures in the metal film.
Claim 17
Dependent Claim
163 words
A light collector comprising: a metal film having a first surface and a second surface, at least one aperture provided in the metal film and extending from the first surface to the second surface; a first dielectric layer having a first refractive index, the first dielectric layer being substantially adjacent to the first surface of the metal film; and a second dielectric layer having a second refractive index, the second dielectric layer being substantially adjacent to the second surface of the metal film, wherein the second refractive index is substantially equal to the first refractive index, and whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film; and an optic fiber disposed in communication with each aperture such that light traveling through each aperture enters a corresponding optic fiber.
Claim 18
Dependent Claim
163 words
A light collector comprising: a metal film having a first surface and a second surface, at least one aperture provided in the metal film and extending from the first surface to the second surface; a first dielectric layer having a first refractive index, the first dielectric layer being substantially adjacent to the first surface of the metal film; and a second dielectric layer having a second refractive index, the second dielectric layer being substantially adjacent to the second surface of the metal film, wherein the second refractive index is substantially equal to the first refractive index, and whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film; and an optic fiber disposed in communication with each aperture such that light traveling through each aperture enters a corresponding optic fiber.
Claim 19
Dependent Claim
210 words
A near-field scanning optical microscope probe for use in a collection mode in a near-field scanning optical microscope including a light source and a photodetector, the near-field scanning optical microscope probe comprising: a light conveying device having a frontal surface disposed in proximity to the light source for receiving light from the light source, the frontal surface comprising a first dielectric layer having a first refractive index; a metal film having a first surface substantially adjacent to the first dielectric layer and a second surface facing the light source; at least one aperture provided in the metal film and extending from the first surface to the second surface; and a second dielectric layer having a second refractive index, the second dielectric layer being substantially adjacent to the second surface of the metal film, wherein the second refractive index is substantially equal to the first refractive index, and whereby light from the light source incident on the second surface of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film, such that the enhanced transmitted light is conveyed through the light conveying device to the photodetector.
Claim 20
Dependent Claim
210 words
A near-field scanning optical microscope probe for use in a collection mode in a near-field scanning optical microscope including a light source and a photodetector, the near-field scanning optical microscope probe comprising: a light conveying device having a frontal surface disposed in proximity to the light source for receiving light from the light source, the frontal surface comprising a first dielectric layer having a first refractive index; a metal film having a first surface substantially adjacent to the first dielectric layer and a second surface facing the light source; at least one aperture provided in the metal film and extending from the first surface to the second surface; and a second dielectric layer having a second refractive index, the second dielectric layer being substantially adjacent to the second surface of the metal film, wherein the second refractive index is substantially equal to the first refractive index, and whereby light from the light source incident on the second surface of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film, such that the enhanced transmitted light is conveyed through the light conveying device to the photodetector.
Claim 21
Dependent Claim
219 words
A near-field scanning optical microscope probe for use in an emission mode in a near-field scanning optical microscope including a light source and a photodetector, the near-field scanning optical microscope probe comprising: a light conveying device having a frontal surface disposed in proximity to the photodetector for transmitting light to the photodetector, the frontal surface comprising a first dielectric layer having a first refractive index; a metal film having a first surface substantially adjacent to the first dielectric layer and a second surface facing the photodetector; at least one aperture provided in the metal film and extending from the first surface to the second surface; and a second dielectric layer having a second refractive index, the second dielectric layer being substantially adjacent to the second surface of the metal film, wherein the second refractive index is substantially equal to the first refractive index, and whereby light from the light source is conveyed through the light conveying device to the frontal surface and is incident on the first surface of the metal film so as to interact with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of the light through the at least one aperture in the metal film, such that the enhanced transmitted light is transmitted to the photodetector.
Claim 22
Dependent Claim
219 words
A near-field scanning optical microscope probe for use in an emission mode in a near-field scanning optical microscope including a light source and a photodetector, the near-field scanning optical microscope probe comprising: a light conveying device having a frontal surface disposed in proximity to the photodetector for transmitting light to the photodetector, the frontal surface comprising a first dielectric layer having a first refractive index; a metal film having a first surface substantially adjacent to the first dielectric layer and a second surface facing the photodetector; at least one aperture provided in the metal film and extending from the first surface to the second surface; and a second dielectric layer having a second refractive index, the second dielectric layer being substantially adjacent to the second surface of the metal film, wherein the second refractive index is substantially equal to the first refractive index, and whereby light from the light source is conveyed through the light conveying device to the frontal surface and is incident on the first surface of the metal film so as to interact with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of the light through the at least one aperture in the metal film, such that the enhanced transmitted light is transmitted to the photodetector.
Claim 23
Dependent Claim
187 words
A photolithographic mask for transferring an image to a photoresist-coated substrate, the mask comprising: a metal film having a first surface and a second surface, at least one aperture provided in the metal film and extending from the first surface to the second surface, the at least one aperture being disposed in a pattern corresponding to the image to be transferred; a first dielectric layer having a first refractive index, the first dielectric layer being substantially adjacent to the first surface of the metal film; and a second dielectric layer having a second refractive index, the second dielectric layer being substantially adjacent to the second surface of the metal film, wherein the second refractive index is substantially equal to the first refractive index, and whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film so as to expose the photoresist-coated substrate according to the pattern in the metal film, thereby transferring the image.
Claim 24
Dependent Claim
187 words
A photolithographic mask for transferring an image to a photoresist-coated substrate, the mask comprising: a metal film having a first surface and a second surface, at least one aperture provided in the metal film and extending from the first surface to the second surface, the at least one aperture being disposed in a pattern corresponding to the image to be transferred; a first dielectric layer having a first refractive index, the first dielectric layer being substantially adjacent to the first surface of the metal film; and a second dielectric layer having a second refractive index, the second dielectric layer being substantially adjacent to the second surface of the metal film, wherein the second refractive index is substantially equal to the first refractive index, and whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film so as to expose the photoresist-coated substrate according to the pattern in the metal film, thereby transferring the image.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-09-03 | 2005-03-05 | 2005-09-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-09-03 | 2009-03-05 | 2009-09-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-09-03 | 2013-03-05 | 2013-09-04 | $7700.00 | Window Closed / Lapsed |