Patent US6969837B2 successfully refreshed from Google Patents.
US6969837B2
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System and method for lithography process monitoring and control
Assignee: ASML Netherlands BV
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Filing: 2004-06-09
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Granted: 2005-11-29
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Expires: 2024-06-09
Abstract
Abstract A system and sensor for measuring, inspecting, characterizing, evaluating and/or controlling optical lithographic equipment and/or materials used therewith, for example, photomasks. In one embodiment, the system and sensor measures, collects and/or detects an aerial image (or portion thereof) produced or generated by the interaction between the photomask and lithographic equipment. An image sensor unit may measure, collect, sense and/or detect the aerial image in situ—that is, the aerial image at the wafer plane produced, in part, by a production-type photomask (i.e., a wafer having integrated circuits formed therein/thereon) and/or by associated lithographic equipment used, or to be used, to manufacture of integrated circuits. A processing unit, coupled to the image sensor unit, may generate image data which is representative of the aerial image by interleaving the intensity of light sampled by each sensor cell at the plurality of location of the platform.
Inventors
- 👤 Jun Ye
- 👤 R. Fabian W. Pease
- 👤 Xun Chen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 06:31
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/708; G03F7/7085; G03F7/70483; G03F7/70591; G03F7/70605; G03F7/70616; G03F7/7065
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
210 words
A system to collect image data which is representative of an aerial image of a mask used in the manufacture of integrated circuits, wherein the image of the mask is produced by an optical system having a platform moveable between a plurality of locations in a first direction and a plurality of locations in a second direction, the system comprising: an image sensor unit disposed on or within the moveable platform, the image sensor unit includes: a sensor array, located in a wafer plane of the optical system, including a plurality of sensor cells wherein each sensor cell includes an active area to sample the intensity of light of a predetermined wavelength that is incident thereon; and a film, disposed over selected portions of the active areas of the plurality of sensor cells, to increase the spatial resolution of each sensor cell wherein the film is comprised of a material that impedes passage of light of the predetermined wavelength; and a processing unit, coupled to the image sensor unit, to generate image data which is representative of the aerial image, wherein the processing unit generates the aerial image of the mask by interleaving the intensity of light sampled by each sensor cell at the plurality of location of the platform.
Claim 2
Independent Claim
210 words
A system to collect image data which is representative of an aerial image of a mask used in the manufacture of integrated circuits, wherein the image of the mask is produced by an optical system having a platform moveable between a plurality of locations in a first direction and a plurality of locations in a second direction, the system comprising: an image sensor unit disposed on or within the moveable platform, the image sensor unit includes: a sensor array, located in a wafer plane of the optical system, including a plurality of sensor cells wherein each sensor cell includes an active area to sample the intensity of light of a predetermined wavelength that is incident thereon; and a film, disposed over selected portions of the active areas of the plurality of sensor cells, to increase the spatial resolution of each sensor cell wherein the film is comprised of a material that impedes passage of light of the predetermined wavelength; and a processing unit, coupled to the image sensor unit, to generate image data which is representative of the aerial image, wherein the processing unit generates the aerial image of the mask by interleaving the intensity of light sampled by each sensor cell at the plurality of location of the platform.
Claim 3
Dependent Claim
29 words
The system of claim 1 wherein the image sensor unit further includes a substrate having a wafer-shaped profile, wherein the sensor array is disposed on or in the substrate.
Claim 4
Dependent Claim
38 words
The system of claim 1 wherein the processing unit generates a first data set using the intensity of light sampled by each sensor cell when the platform is positioned at a first location relative to the aerial image.
Claim 5
Dependent Claim
38 words
The system of claim 3 wherein the processing unit generates a second data set using the intensity of light sampled by each sensor cell when the platform is positioned at a second location relative to the aerial image.
Claim 6
Dependent Claim
67 words
The system of claim 4 wherein the first location and the second location are adjacent locations along an axis in the first direction and wherein the distance between the first location and the second location is less than the distance between the two opposing edges of each exposed active area of each sensor cell of the sensor array, wherein the opposing edges are transverse to the axis.
Claim 7
Dependent Claim
49 words
The system of claim 4 wherein the first location and the second location are adjacent locations along an axis in the first direction and wherein the distance between the first location and the second location is less than the diameter of the exposed active area of each sensor cell.
Claim 8
Dependent Claim
49 words
The image sensor unit of claim 1 further including: a substrate having a wafer-shaped profile, wherein the sensor array is disposed on or in the substrate; and at least one battery, disposed on, in, or within a cavity in the substrate, to provide electrical power to the sensor array.
Claim 9
Dependent Claim
24 words
The image sensor unit of claim 7 further including communications circuitry, disposed on the substrate, to provide data to external circuitry using wireless communication.
Claim 10
Dependent Claim
25 words
The image sensor unit of claim 8 wherein the communications circuitry provides data using wireless communication during collection of data by the image sensor unit.
Claim 11
Dependent Claim
60 words
The image sensor unit of claim 1 wherein the image sensor unit further includes: a data storage device, coupled to the sensor array, to receive and store data which is representative of the intensity of light sampled by the sensor cells; and at least one rechargeable battery to provide electrical power to the data storage device and the sensor array.
Claim 12
Dependent Claim
94 words
The system of claim 1 wherein the film is disposed between the active areas of the sensor cells and a protective outer layer of the sensor array and includes a plurality of apertures which are arranged such that one aperture of the plurality of apertures overlies a corresponding active area of a corresponding sensor cell to expose a portion of the active area of the corresponding sensor cell and wherein light of the predetermined wavelength is capable of being sensed by the portion of the active area that is exposed by the corresponding aperture.
Claim 13
Dependent Claim
45 words
The system of claim 11 wherein the distance between adjacent locations along an axis in the first direction is less than the distance between the two opposing sides of each aperture of the plurality of apertures, wherein the opposing sides are transverse to the axis.
Claim 14
Dependent Claim
29 words
The system of claim 11 wherein the distance between adjacent locations along an axis in a first direction is less than the diameters of the apertures in the film.
Claim 15
Independent Claim
225 words
A system to collect image data which is representative of an aerial image of a mask used in the manufacture of integrated circuits, wherein the image of the mask is produced by an optical system having a platform moveable between a plurality of locations, the system comprising: an image sensor unit disposed on or within the moveable platform, the image sensor unit includes: a sensor array located in a wafer plane of the optical system, wherein the sensor array includes a plurality of sensor cells wherein each sensor cell includes an active area to sample the intensity of light of a predetermined wavelength that is incident thereon; and a film, disposed over selected portions of the active areas of the plurality of sensor cells to enhance the spatial resolution of each sensor cell wherein the film is comprised of a material that impedes passage of light of the predetermined wavelength; and a processing unit, coupled to the image sensor unit, to generate image data which is representative of a portion of the aerial image of the mask wherein the portion of the aerial image includes a plurality of non-contiguous sub-images, and wherein the processing unit generates each sub-image using the intensity of light sampled by one or more sensor cells when the platform is positioned at a plurality of locations relative to the aerial image.
Claim 16
Independent Claim
225 words
A system to collect image data which is representative of an aerial image of a mask used in the manufacture of integrated circuits, wherein the image of the mask is produced by an optical system having a platform moveable between a plurality of locations, the system comprising: an image sensor unit disposed on or within the moveable platform, the image sensor unit includes: a sensor array located in a wafer plane of the optical system, wherein the sensor array includes a plurality of sensor cells wherein each sensor cell includes an active area to sample the intensity of light of a predetermined wavelength that is incident thereon; and a film, disposed over selected portions of the active areas of the plurality of sensor cells to enhance the spatial resolution of each sensor cell wherein the film is comprised of a material that impedes passage of light of the predetermined wavelength; and a processing unit, coupled to the image sensor unit, to generate image data which is representative of a portion of the aerial image of the mask wherein the portion of the aerial image includes a plurality of non-contiguous sub-images, and wherein the processing unit generates each sub-image using the intensity of light sampled by one or more sensor cells when the platform is positioned at a plurality of locations relative to the aerial image.
Claim 17
Dependent Claim
89 words
The system of claim 14 wherein the film is disposed between the active areas of the sensor cells and a protective outer layer of the sensor array and includes a plurality of apertures which are arranged such that one aperture of the plurality of apertures overlies a corresponding active area of a corresponding sensor cell to expose a portion of the active area and wherein light of the predetermined wavelength is capable of being sensed by the portion of the active area that is exposed by the corresponding aperture.
Claim 18
Dependent Claim
33 words
The system of claim 15 wherein the processing unit generates each sub-image using the intensity of light sampled by a given sensor cell at a plurality of adjacent locations along a first axis.
Claim 19
Dependent Claim
27 words
The system of claim 16 wherein the image sensor unit further includes a wafer-shaped substrate, wherein the sensor array is integrated in, or disposed on the substrate.
Claim 20
Dependent Claim
51 words
The system of claim 17 wherein the distance between adjacent locations of the plurality of locations along the first axis is less than the distance between the two opposing sides of a plurality of the plurality of apertures in the film, wherein the opposing sides are transverse to the first axis.
Claim 21
Dependent Claim
36 words
The system of claim 17 wherein the distance between adjacent locations of the plurality of locations along the first axis is less than the diameters of the apertures of the plurality of apertures in the film.
Claim 22
Dependent Claim
59 words
The image sensor unit of claim 14 wherein the image sensor unit further includes: data storage circuitry, coupled to the sensor array, to receive and store data which is representative of the intensity of light sampled by each sensor cell; and at least one rechargeable battery to provide electrical power to the data storage circuitry and the sensor array.
Claim 23
Independent Claim
252 words
A system to collect image data which is representative of an aerial image of a mask used in the manufacture of integrated circuits, wherein the image of the mask is produced by an optical system having a platform moveable between a plurality of locations, the system comprising: an image sensor unit disposed on or within the moveable platform, the image sensor unit includes: a sensor array, wherein the sensor array includes a plurality of sensor cells wherein each sensor cell includes an active area to sample the intensity of light of a predetermined wavelength that is incident thereon; and a film, disposed over the active areas of the plurality of sensor cells and comprised of a material that impedes passage of light of the predetermined wavelength, wherein the film includes a plurality of apertures which are arranged such that one aperture of the plurality of apertures overlies an associated active area of a corresponding sensor cell to expose a portion of the active area and wherein light of the predetermined wavelength is capable of being sensed by the portion of the active area that is exposed by the associated aperture; and a processing unit, coupled to the image sensor unit, to generate image data which is representative of at least a portion of the aerial image of the mask, wherein the processing unit generates the portion of the aerial image of the mask by interleaving the intensity of light sampled by the sensor cells at the plurality of locations of the platform.
Claim 24
Independent Claim
252 words
A system to collect image data which is representative of an aerial image of a mask used in the manufacture of integrated circuits, wherein the image of the mask is produced by an optical system having a platform moveable between a plurality of locations, the system comprising: an image sensor unit disposed on or within the moveable platform, the image sensor unit includes: a sensor array, wherein the sensor array includes a plurality of sensor cells wherein each sensor cell includes an active area to sample the intensity of light of a predetermined wavelength that is incident thereon; and a film, disposed over the active areas of the plurality of sensor cells and comprised of a material that impedes passage of light of the predetermined wavelength, wherein the film includes a plurality of apertures which are arranged such that one aperture of the plurality of apertures overlies an associated active area of a corresponding sensor cell to expose a portion of the active area and wherein light of the predetermined wavelength is capable of being sensed by the portion of the active area that is exposed by the associated aperture; and a processing unit, coupled to the image sensor unit, to generate image data which is representative of at least a portion of the aerial image of the mask, wherein the processing unit generates the portion of the aerial image of the mask by interleaving the intensity of light sampled by the sensor cells at the plurality of locations of the platform.
Claim 25
Dependent Claim
81 words
The system of claim 21 wherein the processing unit generates: a first data set using the intensity of light sampled by the sensor cells when the platform is positioned at a first location relative to the aerial image; and a second data set using the intensity of light sampled by the sensor cells when the platform is positioned at a second location relative to the aerial image, wherein the first location and the second location are locations on a first axis.
Claim 26
Dependent Claim
63 words
The system of claim 22 wherein the first location and the second location are adjacent locations along the first axis and wherein the distance between the first location and the second location is less than the distance between the two opposing sides of each aperture of the plurality of apertures in the film, wherein the opposing sides are transverse to the first axis.
Claim 27
Dependent Claim
47 words
The system of claim 22 wherein the first location and the second location are adjacent locations along the first axis and wherein the distance between the first location and the second location is less than the diameters of apertures of the plurality of apertures in the film.
Claim 28
Dependent Claim
65 words
The system of claim 22 wherein the processing unit generates: a third data set using the intensity of light sampled by sensor cells when the platform is positioned at a third location relative to the aerial image; and a fourth data set using the intensity of light sampled by sensor cells when the platform is positioned at a fourth location relative to the aerial image.
Claim 29
Dependent Claim
65 words
The system of claim 25 wherein the second location and the third location are adjacent locations along a second axis and wherein the distance between the second location and the third location is less than the distance between two other opposing sides of each aperture of the plurality of apertures in the film, wherein the two other opposing sides are transverse to the second axis.
Claim 30
Dependent Claim
66 words
The system of claim 25 wherein the third location and the fourth location are adjacent locations along a third axis and wherein the distance between the third location and the fourth location is less than the distance between the two other opposing sides of each aperture of the plurality of apertures in the film, wherein the two other opposing sides are transverse to the third axis.
Claim 31
Dependent Claim
48 words
The system of claim 25 wherein the second location and the third location are adjacent locations along a second axis and wherein the distance between the second location and the third location is less than the diameters of the apertures of the plurality of apertures in the film.
Claim 32
Dependent Claim
48 words
The system of claim 25 wherein the third location and the fourth location are adjacent locations along a third axis and wherein the distance between the third location and the fourth location is less than the diameters of the apertures of the plurality of apertures in the film.
Claim 33
Dependent Claim
27 words
The system of claim 21 wherein the film is disposed between the active areas of the sensor cells and a protective outer layer of the sensor array.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2008-11-28 | 2009-05-30 | 2009-11-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2012-11-28 | 2013-05-30 | 2013-11-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2016-11-28 | 2017-05-30 | 2017-11-29 | $7700.00 | Window Closed / Lapsed |