US6526191B1 — Integrated circuits using optical fiber interconn…

Claim 1

Independent Claim 105 words

An electronic system, comprising: at least one semiconductor wafer; a number of integrated circuits with at least one integrated circuit formed on the at least one semiconductor wafer; the at least one semiconductor wafer including at least one optical fiber formed in a high aspect ratio hole that extends through the thickness of the at least one semiconductor wafer wherein each optical fiber comprises a polysilicon core surrounded by an oxide cladding layer; and at least one optical transmitter and at least one optical receiver associated with the at least one optical fiber that transmit optical signals between selected integrated circuits of the electronic system.

Claim 2

Dependent Claim 105 words

An electronic system, comprising: at least one semiconductor wafer; a number of integrated circuits with at least one integrated circuit formed on the at least one semiconductor wafer; the at least one semiconductor wafer including at least one optical fiber formed in a high aspect ratio hole that extends through the thickness of the at least one semiconductor wafer wherein each optical fiber comprises a polysilicon core surrounded by an oxide cladding layer; and at least one optical transmitter and at least one optical receiver associated with the at least one optical fiber that transmit optical signals between selected integrated circuits of the electronic system.

Claim 3

Dependent Claim 20 words

The electronic system of claim 1 , wherein the number of integrated circuits includes a microprocessor and a memory device.

Claim 4

Dependent Claim 16 words

The electronic system of claim 1 , wherein the oxide cladding layer comprises SiO 2 .

Claim 5

Dependent Claim 18 words

The electronic system of claim 1 , wherein the oxide cladding layer comprises Al 2 O 3 .

Claim 6

Dependent Claim 49 words

The electronic system of claim 1 , wherein each optical fiber core includes a hole that runs substantially along the center of the optical fiber wherein the hole has a diameter that is less than 0.59 times the wavelength of the light to be transmitted in the optical fiber.

Claim 7

Dependent Claim 25 words

The electronic system of claim 1 , wherein each optical transmitter comprises a gallium arsenide transmitter and each optical receiver comprises a silicon photodiode detector.

Claim 8

Dependent Claim 92 words

An integrated circuit, comprising: first and second functional circuits formed on respective first and second sides of a wafer, the wafer having a given width; a number of high aspect ratio holes that extend through the wafer, each hole including a single optical fiber formed therein and having a length substantially equal to the width of the wafer so as to optically couple the first and second circuits; and wherein the optical fibers include a cladding layer and a passive center core that are formed from materials with different indices of refraction.

Claim 9

Dependent Claim 92 words

An integrated circuit, comprising: first and second functional circuits formed on respective first and second sides of a wafer, the wafer having a given width; a number of high aspect ratio holes that extend through the wafer, each hole including a single optical fiber formed therein and having a length substantially equal to the width of the wafer so as to optically couple the first and second circuits; and wherein the optical fibers include a cladding layer and a passive center core that are formed from materials with different indices of refraction.

Claim 10

Dependent Claim 21 words

The integrated circuit of claim 7 , wherein the cladding layer includes SiO 2 and the passive core includes doped polysilicon.

Claim 11

Dependent Claim 22 words

The integrated circuit of claim 7 , wherein the cladding layer includes Al 2 O 3 and the passive core includes polysilicon.

Claim 12

Dependent Claim 24 words

The integrated circuit of claim 7 , wherein the cladding layer includes SiO 2 and the passive core includes Al 2 O 3 .

Claim 13

Dependent Claim 48 words

The integrated circuit of claim 7 , wherein each optical fiber core includes a hole that runs substantially along the center of the optical fiber but that has a diameter that is less than 0.59 times the wavelength of the light to be transmitted in the optical fiber.

Claim 14

Dependent Claim 26 words

The integrated circuit of claim 7 , wherein the core layer has an index of refraction greater than the index of refraction of the cladding layer.

Claim 15

Dependent Claim 60 words

An electronic system comprising: a first functional circuit formed on a top surface of a semiconductor wafer; a second functional circuit formed on a bottom surface of the semiconductor wafer; a passive optical fiber coupled to the first and second functional circuits through a high-aspect ratio hole formed through the semiconductor wafer from the top surface to the bottom surface.

Claim 16

Dependent Claim 60 words

An electronic system comprising: a first functional circuit formed on a top surface of a semiconductor wafer; a second functional circuit formed on a bottom surface of the semiconductor wafer; a passive optical fiber coupled to the first and second functional circuits through a high-aspect ratio hole formed through the semiconductor wafer from the top surface to the bottom surface.

Claim 17

Dependent Claim 46 words

The electronic system of claim 13 , further including an optical transmitter coupled to a first end of the optical fiber and to the first functional circuit, and an optical receiver coupled to a second end of the optical fiber and to the second functional circuit.

Claim 18

Dependent Claim 14 words

The electronic system of claim 14 , wherein the optical transmitter comprises gallium arsenide.

Claim 19

Dependent Claim 24 words

The electronic system of claim 14 , wherein the optical receiver comprises a silicon photodiode detector formed in the bottom surface of the wafer.

Claim 20

Dependent Claim 21 words

The electronic system of claim 13 , wherein the first and second functional circuits include a microprocessor and a memory device.

Claim 21

Dependent Claim 26 words

The electronic system according to claim 13 , wherein the optical fiber includes a core comprising polysilicon and a cladding surrounding the core comprising an oxide.

Claim 22

Dependent Claim 26 words

The electronic system according to claim 13 , wherein the optical fiber includes a core comprising polysilicon and a cladding surrounding the core comprising a nitride.

Claim 23

Dependent Claim 30 words

The electronic system according to claim 13 , wherein the optical fiber includes a core comprising Al 2 O 3 and a cladding surrounding the core comprising an silicon dioxide.

Claim 24

Dependent Claim 108 words

An electronic system comprising: a first functional circuit formed on a first surface of a first semiconductor wafer having an opposite second surface; a second functional circuit formed on a first surface of a second semiconductor wafer having an opposite second surface; wherein the first and second semiconductor wafers are stacked by interfacing and bonding the respective second surfaces of the first and second semiconductor wafers; and a passive optical fiber coupled to the first and second functional circuits through a high-aspect ratio hole formed through the first and second semiconductor wafers from the first surface of the first wafer to the first surface of the second wafer.

Claim 25

Dependent Claim 108 words

An electronic system comprising: a first functional circuit formed on a first surface of a first semiconductor wafer having an opposite second surface; a second functional circuit formed on a first surface of a second semiconductor wafer having an opposite second surface; wherein the first and second semiconductor wafers are stacked by interfacing and bonding the respective second surfaces of the first and second semiconductor wafers; and a passive optical fiber coupled to the first and second functional circuits through a high-aspect ratio hole formed through the first and second semiconductor wafers from the first surface of the first wafer to the first surface of the second wafer.

Claim 26

Dependent Claim 46 words

The electronic system of claim 21 , further including an optical transmitter coupled to a first end of the optical fiber and to the first functional circuit, and an optical receiver coupled to a second end of the optical fiber and to the second functional circuit.

Claim 27

Dependent Claim 14 words

The electronic system of claim 22 , wherein the optical transmitter comprises gallium arsenide.

Claim 28

Dependent Claim 16 words

The electronic system of claim 22 , wherein the optical receiver comprises a silicon photodiode detector.

Claim 29

Dependent Claim 21 words

The electronic system of claim 21 , wherein the first and second functional circuits include a microprocessor and a memory device.

Claim 30

Dependent Claim 92 words

An electronic system comprising: a first functional circuit formed on a first surface of a first semiconductor wafer having an opposite second surface; a second functional circuit formed on first surface of a second semiconductor wafer having an opposite second surface; wherein the first and second semiconductor wafers are stacked by interfacing and bonding the second surface of the first wafer to the first surface of the second wafer; and a passive optical fiber coupled to the first and second functional circuits through a high-aspect ratio hole formed through the first wafer.

Claim 31

Dependent Claim 92 words

An electronic system comprising: a first functional circuit formed on a first surface of a first semiconductor wafer having an opposite second surface; a second functional circuit formed on first surface of a second semiconductor wafer having an opposite second surface; wherein the first and second semiconductor wafers are stacked by interfacing and bonding the second surface of the first wafer to the first surface of the second wafer; and a passive optical fiber coupled to the first and second functional circuits through a high-aspect ratio hole formed through the first wafer.

Claim 32

Dependent Claim 46 words

The electronic system of claim 26 , further including an optical transmitter coupled to a first end of the optical fiber and to the first functional circuit, and an optical receiver coupled to a second end of the optical fiber and to the second functional circuit.

Claim 33

Dependent Claim 79 words

An electronic system comprising: a plurality of integrated circuits formed on both sides of a substrate; a plurality of high-aspect-ratio holes formed in the substrate that connect both sides of the substrate; a single passive optical fiber housed in each of the plurality of holes, the single optical fiber adapted so as to optically connect one of the integrated circuits on one side of the substrate with one of the integrated circuits on the opposite side of the substrate.

Claim 34

Dependent Claim 79 words

An electronic system comprising: a plurality of integrated circuits formed on both sides of a substrate; a plurality of high-aspect-ratio holes formed in the substrate that connect both sides of the substrate; a single passive optical fiber housed in each of the plurality of holes, the single optical fiber adapted so as to optically connect one of the integrated circuits on one side of the substrate with one of the integrated circuits on the opposite side of the substrate.

Claim 35

Dependent Claim 44 words

The electronic system of claim 28 , wherein each optical fiber is connected at one end to a receiver and at an opposite end to a transmitter, the receiver and transmitter being electrically coupled to respective integrated circuits on opposite sides of the substrate.

Claim 36

Dependent Claim 20 words

The electronic system of claim 28 , wherein the optical fibers have an oxide cladding that lines the high-aspect-ratio holes.

Claim 37

Dependent Claim 17 words

The electronic system of claim 30 , wherein the optical fibers have a core that includes polysilicon.

Claim 38

Dependent Claim 21 words

The electronic system of claim 30 , wherein the optical fibers have a core that includes Al 2 O 3 .

Claim 39

Dependent Claim 46 words

The electronic system of claim 28 , wherein one or more of the optical fibers includes a core with a core hole that extends substantially along the length of the fiber and that has a diameter that is less than 0.59 times the wavelength of light.

Claim 40

Dependent Claim 73 words

An electronic system for connecting functional circuits on opposites sides of a semiconductor substrate, comprising: at least one high-aspect ratio hole connecting the opposite sides of the substrate for each pair of functional circuits to be connected; a single passive optical fiber formed in each high-aspect ratio hole, each optical fiber adapted to provide communication between functional circuits on each side of the substrate associated with the at least one high-aspect ratio hole.

Claim 41

Dependent Claim 73 words

An electronic system for connecting functional circuits on opposites sides of a semiconductor substrate, comprising: at least one high-aspect ratio hole connecting the opposite sides of the substrate for each pair of functional circuits to be connected; a single passive optical fiber formed in each high-aspect ratio hole, each optical fiber adapted to provide communication between functional circuits on each side of the substrate associated with the at least one high-aspect ratio hole.

Claim 42

Dependent Claim 20 words

The electronic system of claim 34 , wherein each optical fiber transmits light with a wavelength greater than 1.1 microns.

Claim 43

Dependent Claim 15 words

The electronic system of claim 34 , wherein the substrate includes two interfaced semiconductor wafers.

Claim 44

Dependent Claim 112 words

An electronic system comprising: a first functional circuit formed on a first side of a semiconductor substrate; a transmitter for transmitting an optical signal based on a corresponding electrical signal, the transmitter electronically coupled to the first functional circuit; a second functional circuit formed on a second side of the semiconductor substrate; a receiver for receiving an optical signal and transmitting a corresponding electrical signal, the receiver electronically coupled to the second functional circuit; and a passive optical fiber operatively connecting the transmitter and receiver through a hole formed between the first and second sides of the substrate so as to optically connect the first functional circuit to the second functional circuit.

Claim 45

Dependent Claim 112 words

An electronic system comprising: a first functional circuit formed on a first side of a semiconductor substrate; a transmitter for transmitting an optical signal based on a corresponding electrical signal, the transmitter electronically coupled to the first functional circuit; a second functional circuit formed on a second side of the semiconductor substrate; a receiver for receiving an optical signal and transmitting a corresponding electrical signal, the receiver electronically coupled to the second functional circuit; and a passive optical fiber operatively connecting the transmitter and receiver through a hole formed between the first and second sides of the substrate so as to optically connect the first functional circuit to the second functional circuit.

Claim 46

Dependent Claim 17 words

The electronic system of claim 37 , wherein the semiconductor substrate comprises two semiconductor wafers bonded together.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2006-02-24	2006-08-26	2007-02-25	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2010-02-24	2010-08-26	2011-02-25	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2014-02-24	2014-08-26	2015-02-25	$7700.00	Window Closed / Lapsed

Integrated circuits using optical fiber interconnects formed through a semiconductor wafer and methods for forming same

Abstract

Inventors

Bibliographic Details

Claims Analysis

References Cited (Backward Citations)

USPTO Annuity & Maintenance Windows

Assigned Categories & Tags

Assign Category Tag