US5604835A
Expired / Lapsed
US
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Integrated optical waveguide device
Assignee: Hitachi Ltd
•
Filing: 1994-12-22
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Granted: 1997-02-18
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Expires: 2014-12-22
Abstract
Abstract An integrated optical waveguide device includes a substrate, and an optical waveguide which is formed in the form of projection or is formed in a trench formed in the substrate. Each optical waveguide has a first optical area made of a first optical material and a second optical area which is made of a second optical material and is surrounded by the first optical area. The optical waveguides are arranged on both side faces of the projection or trench.
Inventors
- 👤 Tohru Nakamura
- 👤 Tomonori Tanoue
- 👤 Takeshi Kato
- 👤 Mitsuo Takeda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 09:08
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/125; G02B6/12004; G02B6/13; G02B6/132; G02B6/24; G02B6/42
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
187 words
An integrated optical waveguide device comprising: a substrate; and an optical waveguide including a first optical area which is made of a first optical material and is formed in the form of projection on a surface of said substrate or is provided in a trench formed in said substrate, and a second optical area which is made of a second optical material, and is provided on a side face of said projection or trench, and is surrounded by said first optical area, wherein refractive index of said second optical material is larger than that of said first optical material, and a length h eff , parallel to said substrate, of said first optical area is expressed by the following relation, ##EQU2## and a length h, parallel to said substrate, of said second optical area is expressed by the following relation, ##EQU3## where H represents a normalized thickness of said first optical area, V represents a normalized thickness of said second optical area, λ represents a wavelength, n s represents refractive index of said first optical area, and n f represents refractive index of said second optical area.
Claim 2
Dependent Claim
187 words
An integrated optical waveguide device comprising: a substrate; and an optical waveguide including a first optical area which is made of a first optical material and is formed in the form of projection on a surface of said substrate or is provided in a trench formed in said substrate, and a second optical area which is made of a second optical material, and is provided on a side face of said projection or trench, and is surrounded by said first optical area, wherein refractive index of said second optical material is larger than that of said first optical material, and a length h eff , parallel to said substrate, of said first optical area is expressed by the following relation, ##EQU2## and a length h, parallel to said substrate, of said second optical area is expressed by the following relation, ##EQU3## where H represents a normalized thickness of said first optical area, V represents a normalized thickness of said second optical area, λ represents a wavelength, n s represents refractive index of said first optical area, and n f represents refractive index of said second optical area.
Claim 3
Dependent Claim
35 words
A device according to claim 1, wherein the optical waveguides are formed in pairs on both side faces of said projection formed on the surface of said substrate or said trench formed in said substrate.
Claim 4
Dependent Claim
39 words
A device according to claim 1, wherein the size, of said second optical area having the larger refractive index, perpendicular to the surface of said substrate is larger than the size thereof parallel to the surface of said substrate.
Claim 5
Dependent Claim
50 words
A device according to claim 1, further comprising: the pair of waveguides which are formed in pairs on both side faces of said projection formed on the surface of said substrate, or said trench formed in said substrate; and a single optical waveguide connected to said pair of optical waveguides.
Claim 6
Dependent Claim
55 words
A device according to claim 4, wherein a distance between said pair of optical waveguides, which are formed in pairs on both the side faces of said projection formed on the surface of said substrate, or said trench formed in said substrate, changes gradually to be zero to be said single optical waveguide connected thereto.
Claim 7
Dependent Claim
28 words
A device according to claim 1, wherein the optical waveguides are connected to semiconductor light emitting/photosensitive devices and are located over the upper surface of the semiconductor substrate.
Claim 8
Dependent Claim
28 words
A device according to claim 1, wherein the optical waveguides are formed in said trench formed in the semiconductor substrate and are connected to semiconductor light emitting/photosensitive devices.
Claim 9
Dependent Claim
42 words
A device according to claim 1, wherein said trench in which the optical waveguides are formed is formed in the semiconductor substrate, and said trench is a trench through which semiconductor devices formed on the same substrate are electrically and optically separated.
Claim 10
Dependent Claim
14 words
A computer system comprising said integrated optical waveguide device as defined in claim 1.
Claim 11
Dependent Claim
14 words
A communication system comprising said integrated optical waveguide device as defined in claim 1.
Claim 12
Dependent Claim
133 words
An integrated optical waveguide device comprising: a substrate; and an optical waveguide including a first optical area which is made of a first optical material and is formed in the form of projection on a surface of said substrate or is provided in a trench formed in said substrate, and a pair of second optical areas which are made of a second optical material, and is provided on both side faces of said projection or trench and are surrounded by said first optical area, wherein refractive index of said second optical material is larger than that of said first optical material; wherein said substrate is a semiconductor substrate, said trench is formed in the semiconductor substrate, and said trench is also used as electrically isolated regions for semiconductor devices on the same substrate.
Claim 13
Dependent Claim
133 words
An integrated optical waveguide device comprising: a substrate; and an optical waveguide including a first optical area which is made of a first optical material and is formed in the form of projection on a surface of said substrate or is provided in a trench formed in said substrate, and a pair of second optical areas which are made of a second optical material, and is provided on both side faces of said projection or trench and are surrounded by said first optical area, wherein refractive index of said second optical material is larger than that of said first optical material; wherein said substrate is a semiconductor substrate, said trench is formed in the semiconductor substrate, and said trench is also used as electrically isolated regions for semiconductor devices on the same substrate.
Claim 14
Dependent Claim
160 words
An integrated optical waveguide device comprising: a substrate; and an optical waveguide including a first optical area which is made of a first optical material and is formed in the form of projection on a surface of said substrate or is provided in a trench formed in said substrate, and a pair of second optical areas which are made of a second optical material, and is provided on both side faces of said projection or trench and are surrounded by said first optical area, wherein a refractive index of said second optical material is larger than a refractive index of said first optical material, and wherein a size of each of said second optical areas having said second optical material of the larger index of refraction in a direction extending perpendicular to the surface of said substrate is larger than a size of each of said second optical areas in a direction extending parallel to the surface of said substrate.
Claim 15
Dependent Claim
160 words
An integrated optical waveguide device comprising: a substrate; and an optical waveguide including a first optical area which is made of a first optical material and is formed in the form of projection on a surface of said substrate or is provided in a trench formed in said substrate, and a pair of second optical areas which are made of a second optical material, and is provided on both side faces of said projection or trench and are surrounded by said first optical area, wherein a refractive index of said second optical material is larger than a refractive index of said first optical material, and wherein a size of each of said second optical areas having said second optical material of the larger index of refraction in a direction extending perpendicular to the surface of said substrate is larger than a size of each of said second optical areas in a direction extending parallel to the surface of said substrate.
Claim 16
Dependent Claim
28 words
A device according to claim 12, wherein the optical waveguides are connected to semiconductor light emitting/photosensitive devices and are located over the upper surface of the semiconductor substrate.
Claim 17
Dependent Claim
28 words
A device according to claim 12, wherein the optical waveguides are formed in said trench formed in the semiconductor substrate and are connected to semiconductor light emitting/photosensitive devices.
Claim 18
Dependent Claim
14 words
A computer system comprising said integrated optical waveguide device as defined in claim 12.
Claim 19
Dependent Claim
14 words
A communication system comprising said integrated optical waveguide device as defined in claim 12.
Claim 20
Dependent Claim
145 words
An integrated optical waveguide device comprising: a substrate; an optical waveguide including a first optical area which is made of a first optical material and is formed in the form of projection on a surface of said substrate or is provided in a trench formed in said substrate, and a pair of second optical areas which are made of a second optical material, and is provided on both side walls of said projection or trench and are surrounded by said first optical area, wherein a refractive index of said second optical material is larger than that of said first optical material; wherein a pair of optical waveguides are formed at the both side walls of said projection formed on the surface of said substrate, or said trench formed in said substrate; and wherein a single optical waveguide is connected to said pair of optical waveguides.
Claim 21
Dependent Claim
145 words
An integrated optical waveguide device comprising: a substrate; an optical waveguide including a first optical area which is made of a first optical material and is formed in the form of projection on a surface of said substrate or is provided in a trench formed in said substrate, and a pair of second optical areas which are made of a second optical material, and is provided on both side walls of said projection or trench and are surrounded by said first optical area, wherein a refractive index of said second optical material is larger than that of said first optical material; wherein a pair of optical waveguides are formed at the both side walls of said projection formed on the surface of said substrate, or said trench formed in said substrate; and wherein a single optical waveguide is connected to said pair of optical waveguides.
Claim 22
Dependent Claim
55 words
A device according to claim 17, wherein a distance between said pair of optical waveguides, which are formed in pairs on both the side faces of said projection formed on the surface of said substrate, or said trench formed in said substrate, changes gradually to be zero to be said single optical waveguide connected thereto.
Claim 23
Dependent Claim
148 words
An integrated optical waveguide device comprising: a substrate; and an optical waveguide structure including: a first optical area, made of a first optical material, formed at a predetermined location on said substrate, said predetermined location having first and second side faces, and a pair of second optical areas, made of a second optical material, provided respectively on said first and second side faces, said second optical areas contacting different portions of said first optical area to form therewith respective first and second optical waveguides, said second optical material having a refractive index larger than a refractive index of said first optical material, and wherein each of said second optical areas has, in a direction extending substantially perpendicular to a surface of said substrate, a size which is larger than a size of said second optical area in a direction extending substantially parallel to the surface of said substrate.
Claim 24
Dependent Claim
148 words
An integrated optical waveguide device comprising: a substrate; and an optical waveguide structure including: a first optical area, made of a first optical material, formed at a predetermined location on said substrate, said predetermined location having first and second side faces, and a pair of second optical areas, made of a second optical material, provided respectively on said first and second side faces, said second optical areas contacting different portions of said first optical area to form therewith respective first and second optical waveguides, said second optical material having a refractive index larger than a refractive index of said first optical material, and wherein each of said second optical areas has, in a direction extending substantially perpendicular to a surface of said substrate, a size which is larger than a size of said second optical area in a direction extending substantially parallel to the surface of said substrate.
Claim 25
Dependent Claim
43 words
The integrated optical waveguide device recited in claim 19, further comprising: a third optical waveguide connected to said first and second optical waveguides, said third optical waveguide being formed when a distance between said first and second optical waveguides gradually change to zero.
Claim 26
Dependent Claim
28 words
The integrated optical waveguide device recited in claim 19, wherein said predetermined location is one of a trench and a projection formed on said surface of said substrate.
Claim 27
Dependent Claim
27 words
The integrated optical waveguide device of claim 21, wherein said trench is a trench through which semiconductor devices formed on said substrate are electrically and optically separated.
Claim 28
Dependent Claim
15 words
The integrated optical waveguide device of claim 19, wherein the substrate is a semiconductor substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-02-18 | 2000-08-19 | 2001-02-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-02-18 | 2004-08-19 | 2005-02-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-02-18 | 2008-08-19 | 2009-02-18 | $7700.00 | Window Closed / Lapsed |