Patent US6498369B1 successfully refreshed from Google Patents.
US6498369B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electro-optical device and electronic equipment
Assignee: Semiconductor Energy Laboratory Co Ltd
•
Filing: 2000-04-11
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Granted: 2002-12-24
•
Expires: 2020-04-11
Abstract
Abstract An electro-optical device having high operation performance and high reliability, and electronic equipment which include the electro-optical device, are provided. A TFT structure that is strong against hot carrier injection is realized by placing an LDD region which overlaps a gate electrode in an n-channel TFT forming a driver circuit. Furthermore, a TFT structure having a low off current value is realized by placing LDD regions which do not overlap a gate electrode in a pixel TFT forming a pixel section. In addition, the electro-optical device has a memory section on the same insulator, the memory section having a memory transistor and storing data.
Inventors
- 👤 Shunpei Yamazaki
- 👤 Hidehito Kitakado
- 👤 Takeshi Fukunaga
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 15:10
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/60; H10D30/67; G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1345; G02F1/13454; H10D30/01; H10D30/021; H10D30/031; H10D30/0312; H10D30/0314; H10D30/0321; H10D30/6704; H10D30/6713; H10D30/6715; H10D30/6719; H10D30/6729; H10D30/673; H10D30/6731; H10D30/674; H10D30/6741; H10D30/6743; H10D30/6745; H10D62/00; H10D62/40; H10D62/405; H10D86/00; H10D86/01; H10D86/021; H10D86/0221; H10D86/0223; H10D86/0225; H10D86/40; H10D86/431; H10D86/60; H10K; H10K59/00; H10K59/10; H10K59/12; H10K59/121; H10K59/1213; H10K59/1216
Claims Analysis
Total Claims: 101
Claim 1
Independent Claim
151 words
A display device comprising: a driver TFT provided in a driver circuit; a pixel TFT provided in a pixel; and a memory TFT provided in a memory; said memory TFT comprising: a source region; a drain region; a channel formation region provided between said source region and said drain region; a floating gate electrode provided adjacent to said channel formation region with a first gate insulating film between said channel formation region and said floating gate electrode; a control gate electrode provided adjacent to said floating gate electrode with a second gate insulating film between said floating gate electrode and said control gate electrode; and an LDD region provided between said channel formation region and at least one of said source region and said drain region, wherein said LDD region overlaps with said floating gate electrode, and said driver circuit, said pixel and said memory are formed over a same insulator.
Claim 2
Dependent Claim
151 words
A display device comprising: a driver TFT provided in a driver circuit; a pixel TFT provided in a pixel; and a memory TFT provided in a memory; said memory TFT comprising: a source region; a drain region; a channel formation region provided between said source region and said drain region; a floating gate electrode provided adjacent to said channel formation region with a first gate insulating film between said channel formation region and said floating gate electrode; a control gate electrode provided adjacent to said floating gate electrode with a second gate insulating film between said floating gate electrode and said control gate electrode; and an LDD region provided between said channel formation region and at least one of said source region and said drain region, wherein said LDD region overlaps with said floating gate electrode, and said driver circuit, said pixel and said memory are formed over a same insulator.
Claim 3
Dependent Claim
92 words
A device according to claim 1 , wherein an n-type impurity element is contained in said LDD region of said n-channel TFT, and in said LDD region contained in an active layer of said memory transistor, at a same concentration, and wherein said n-type impurity element is contained in said LDD region of said pixel TFT at a concentration lower than that at which said n-type impurity element is contained in said LDD region of said n-channel TFT, and in said LDD region contained in said active layer of said memory transistor.
Claim 4
Dependent Claim
17 words
A device according to claim 1 , wherein an EL element is formed in said pixel section.
Claim 5
Dependent Claim
14 words
Electronic equipment having the electro-optical device according to claim 1 as a display section.
Claim 6
Dependent Claim
16 words
A device according to claim 1 wherein said display device is incorporated into a video camera.
Claim 7
Dependent Claim
16 words
A device according to claim 1 wherein said display device is incorporated into a digital camera.
Claim 8
Dependent Claim
15 words
A device according to claim 1 wherein said display device is incorporated into a projector.
Claim 9
Dependent Claim
16 words
A device according to claim 1 wherein said display device is incorporated into a projection television.
Claim 10
Dependent Claim
17 words
A device according to claim 1 wherein said display device is incorporated into a goggle type display.
Claim 11
Dependent Claim
16 words
A device according to claim 1 wherein said display device is incorporated into a navigation system.
Claim 12
Dependent Claim
17 words
A device according to claim 1 wherein said display device is incorporated into an acoustic reproduction device.
Claim 13
Dependent Claim
17 words
A device according to claim 1 wherein said display device is incorporated into a note-type personal computer.
Claim 14
Dependent Claim
16 words
A device according to claim 1 wherein said display device is incorporated into a game equipment.
Claim 15
Dependent Claim
17 words
A device according to claim 1 wherein said display device is incorporated into a portable information terminal.
Claim 16
Dependent Claim
17 words
A device according to claim 1 wherein said display device is incorporated into an image reproduction device.
Claim 17
Dependent Claim
83 words
A display device comprising: a driver circuit having an n-channel TFT in which an entire LDD region is formed so as to overlap a gate electrode with a gate insulating film sandwiched therebetween; a pixel having a pixel TFT in which an LDD region is formed so as not to overlap a gate electrode with said gate insulating film sandwiched therebetween; and a memory having a memory transistor, wherein said driver circuit, said pixel and said memory are formed over a same insulator.
Claim 18
Dependent Claim
83 words
A display device comprising: a driver circuit having an n-channel TFT in which an entire LDD region is formed so as to overlap a gate electrode with a gate insulating film sandwiched therebetween; a pixel having a pixel TFT in which an LDD region is formed so as not to overlap a gate electrode with said gate insulating film sandwiched therebetween; and a memory having a memory transistor, wherein said driver circuit, said pixel and said memory are formed over a same insulator.
Claim 19
Dependent Claim
92 words
A device according to claim 16 , wherein an n-type impurity element is contained in said LDD region of said n-channel TFT, and in said LDD region contained in an active layer of said memory transistor, at a same concentration, and wherein said n-type impurity element is contained in said LDD region of said pixel TFT at a concentration lower than that at which said n-type impurity element is contained in said LDD region of said n-channel TFT, and in said LDD region contained in said active layer of said memory transistor.
Claim 20
Dependent Claim
29 words
A device according to claim 16 , wherein the film thickness of the first gate insulating film is thinner than the film thickness of the second gate insulating film.
Claim 21
Dependent Claim
17 words
A device according to claim 16 , wherein an EL element is formed in said pixel section.
Claim 22
Dependent Claim
14 words
Electronic equipment having the electro-optical device according to claim 16 as a display section.
Claim 23
Dependent Claim
16 words
A device according to claim 16 wherein said display device is incorporated into a video camera.
Claim 24
Dependent Claim
16 words
A device according to claim 16 wherein said display device is incorporated into a digital camera.
Claim 25
Dependent Claim
15 words
A device according to claim 16 wherein said display device is incorporated into a projector.
Claim 26
Dependent Claim
16 words
A device according to claim 16 wherein said display device is incorporated into a projection television.
Claim 27
Dependent Claim
17 words
A device according to claim 16 wherein said display device is incorporated into a goggle type display.
Claim 28
Dependent Claim
16 words
A device according to claim 16 wherein said display device is incorporated into a navigation system.
Claim 29
Dependent Claim
17 words
A device according to claim 16 wherein said display device is incorporated into an acoustic reproduction device.
Claim 30
Dependent Claim
17 words
A device according to claim 16 wherein said display device is incorporated into a note-type personal computer.
Claim 31
Dependent Claim
16 words
A device according to claim 16 wherein said display device is incorporated into a game equipment.
Claim 32
Dependent Claim
17 words
A device according to claim 16 wherein said display device is incorporated into a portable information terminal.
Claim 33
Dependent Claim
17 words
A device according to claim 16 wherein said display device is incorporated into an image reproduction device.
Claim 34
Dependent Claim
131 words
A display device comprising: a driver circuit having an n-channel TFT in which an entire LDD region is formed so as to overlap a gate electrode with a second gate insulating film sandwiched therebetween; a pixel having a pixel TFT in which an LDD region is formed so as not to overlap a gate electrode with said second gate insulating film sandwiched therebetween; and a memory having a memory transistor containing an active layer, a first gate insulating film, a floating gate electrode, a third gate insulating film, and a control gate electrode, wherein said driver circuit, said pixel and said memory are formed over a same insulator, and wherein said third gate insulating film covers said gate electrode of said n-channel TFT and said gate electrode of said pixel TFT.
Claim 35
Dependent Claim
131 words
A display device comprising: a driver circuit having an n-channel TFT in which an entire LDD region is formed so as to overlap a gate electrode with a second gate insulating film sandwiched therebetween; a pixel having a pixel TFT in which an LDD region is formed so as not to overlap a gate electrode with said second gate insulating film sandwiched therebetween; and a memory having a memory transistor containing an active layer, a first gate insulating film, a floating gate electrode, a third gate insulating film, and a control gate electrode, wherein said driver circuit, said pixel and said memory are formed over a same insulator, and wherein said third gate insulating film covers said gate electrode of said n-channel TFT and said gate electrode of said pixel TFT.
Claim 36
Dependent Claim
92 words
A device according to claim 32 , wherein an n-type impurity element is contained in said LDD region of said n-channel TFT, and in said LDD region contained in an active layer of said memory transistor, at a same concentration, and wherein said n-type impurity element is contained in said LDD region of said pixel TFT at a concentration lower than that at which said n-type impurity element is contained in said LDD region of said n-channel TFT, and in said LDD region contained in said active layer of said memory transistor.
Claim 37
Dependent Claim
29 words
A device according to claim 32 , wherein the film thickness of the first gate insulating film is thinner than the film thickness of the second gate insulating film.
Claim 38
Dependent Claim
17 words
A device according to claim 32 , wherein an EL element is formed in said pixel section.
Claim 39
Dependent Claim
14 words
Electronic equipment having the electro-optical device according to claim 32 as a display section.
Claim 40
Dependent Claim
16 words
A device according to claim 32 wherein said display device is incorporated into a video camera.
Claim 41
Dependent Claim
16 words
A device according to claim 32 wherein said display device is incorporated into a digital camera.
Claim 42
Dependent Claim
15 words
A device according to claim 32 wherein said display device is incorporated into a projector.
Claim 43
Dependent Claim
16 words
A device according to claim 32 wherein said display device is incorporated into a projection television.
Claim 44
Dependent Claim
17 words
A device according to claim 32 wherein said display device is incorporated into a goggle type display.
Claim 45
Dependent Claim
16 words
A device according to claim 32 wherein said display device is incorporated into a navigation system.
Claim 46
Dependent Claim
17 words
A device according to claim 32 wherein said display device is incorporated into an acoustic reproduction device.
Claim 47
Dependent Claim
17 words
A device according to claim 32 wherein said display device is incorporated into a note-type personal computer.
Claim 48
Dependent Claim
16 words
A device according to claim 32 wherein said display device is incorporated into a game equipment.
Claim 49
Dependent Claim
17 words
A device according to claim 32 wherein said display device is incorporated into a portable information terminal.
Claim 50
Dependent Claim
17 words
A device according to claim 32 wherein said display device is incorporated into an image reproduction device.
Claim 51
Dependent Claim
144 words
A display device comprising: a driver circuit having an n-channel TFT in which an entire LDD region is formed so as to overlap a gate electrode with a second gate insulating film sandwiched therebetween; a pixel having a pixel TFT in which an LDD region is formed so as not to overlap a gate electrode with said second gate insulating film sandwiched therebetween; and a memory having a memory transistor containing an active layer, a first gate insulating film, a floating gate electrode, a third gate insulating film, and a control gate electrode, wherein said driver circuit, said pixel and said memory are formed over a same insulator, and wherein said floating gate electrode, said gate electrode of said n-channel TFT, and said gate electrode of said pixel TFT are made from a same material, and are covered by said third gate insulating film.
Claim 52
Dependent Claim
144 words
A display device comprising: a driver circuit having an n-channel TFT in which an entire LDD region is formed so as to overlap a gate electrode with a second gate insulating film sandwiched therebetween; a pixel having a pixel TFT in which an LDD region is formed so as not to overlap a gate electrode with said second gate insulating film sandwiched therebetween; and a memory having a memory transistor containing an active layer, a first gate insulating film, a floating gate electrode, a third gate insulating film, and a control gate electrode, wherein said driver circuit, said pixel and said memory are formed over a same insulator, and wherein said floating gate electrode, said gate electrode of said n-channel TFT, and said gate electrode of said pixel TFT are made from a same material, and are covered by said third gate insulating film.
Claim 53
Dependent Claim
92 words
A device according to claim 48 , wherein an n-type impurity element is contained in said LDD region of said n-channel TFT, and in said LDD region contained in an active layer of said memory transistor, at a same concentration, and wherein said n-type impurity element is contained in said LDD region of said pixel TFT at a concentration lower than that at which said n-type impurity element is contained in said LDD region of said n-channel TFT, and in said LDD region contained in said active layer of said memory transistor.
Claim 54
Dependent Claim
29 words
A device according to claim 48 , wherein the film thickness of the first gate insulating film is thinner than the film thickness of the second gate insulating film.
Claim 55
Dependent Claim
17 words
A device according to claim 48 , wherein an EL element is formed in said pixel section.
Claim 56
Dependent Claim
14 words
Electronic equipment having the electro-optical device according to claim 48 as a display section.
Claim 57
Dependent Claim
16 words
A device according to claim 48 wherein said display device is incorporated into a video camera.
Claim 58
Dependent Claim
16 words
A device according to claim 48 wherein said display device is incorporated into a digital camera.
Claim 59
Dependent Claim
15 words
A device according to claim 48 wherein said display device is incorporated into a projector.
Claim 60
Dependent Claim
16 words
A device according to claim 48 wherein said display device is incorporated into a projection television.
Claim 61
Dependent Claim
17 words
A device according to claim 48 wherein said display device is incorporated into a goggle type display.
Claim 62
Dependent Claim
16 words
A device according to claim 48 wherein said display device is incorporated into a navigation system.
Claim 63
Dependent Claim
17 words
A device according to claim 48 wherein said display device is incorporated into an acoustic reproduction device.
Claim 64
Dependent Claim
17 words
A device according to claim 48 wherein said display device is incorporated into a note-type personal computer.
Claim 65
Dependent Claim
16 words
A device according to claim 48 wherein said display device is incorporated into a game equipment.
Claim 66
Dependent Claim
17 words
A device according to claim 48 wherein said display device is incorporated into a portable information terminal.
Claim 67
Dependent Claim
17 words
A device according to claim 48 wherein said display device is incorporated into an image reproduction device.
Claim 68
Dependent Claim
126 words
A display device comprising: a driver circuit having an n-channel TFT in which an entire LDD region is formed so as to overlap a gate electrode with a second gate insulating film sandwiched therebetween; a pixel having a pixel TFT in which an LDD region is formed so as not to overlap a gate electrode with said second gate insulating film sandwiched therebetween; and a memory having a memory transistor containing an active layer, a first gate insulating film, a floating gate electrode, a third gate insulating film, and a control gate electrode, wherein said driver circuit, said pixel and said memory are formed over a same insulator, and wherein said third gate insulating film comprises an oxide of a material forming said floating gate electrode.
Claim 69
Dependent Claim
126 words
A display device comprising: a driver circuit having an n-channel TFT in which an entire LDD region is formed so as to overlap a gate electrode with a second gate insulating film sandwiched therebetween; a pixel having a pixel TFT in which an LDD region is formed so as not to overlap a gate electrode with said second gate insulating film sandwiched therebetween; and a memory having a memory transistor containing an active layer, a first gate insulating film, a floating gate electrode, a third gate insulating film, and a control gate electrode, wherein said driver circuit, said pixel and said memory are formed over a same insulator, and wherein said third gate insulating film comprises an oxide of a material forming said floating gate electrode.
Claim 70
Dependent Claim
92 words
A device according to claim 64 , wherein an n-type impurity element is contained in said LDD region of said n-channel TFT, and in said LDD region contained in an active layer of said memory transistor, at a same concentration, and wherein said n-type impurity element is contained in said LDD region of said pixel TFT at a concentration lower than that at which said n-type impurity element is contained in said LDD region of said n-channel TFT, and in said LDD region contained in said active layer of said memory transistor.
Claim 71
Dependent Claim
29 words
A device according to claim 64 , wherein the film thickness of the first gate insulating film is thinner than the film thickness of the second gate insulating film.
Claim 72
Dependent Claim
17 words
A device according to claim 64 , wherein an EL element is formed in said pixel section.
Claim 73
Dependent Claim
14 words
Electronic equipment having the electro-optical device according to claim 64 as a display section.
Claim 74
Dependent Claim
16 words
A device according to claim 64 wherein said display device is incorporated into a video camera.
Claim 75
Dependent Claim
16 words
A device according to claim 64 wherein said display device is incorporated into a digital camera.
Claim 76
Dependent Claim
15 words
A device according to claim 64 wherein said display device is incorporated into a projector.
Claim 77
Dependent Claim
16 words
A device according to claim 64 wherein said display device is incorporated into a projection television.
Claim 78
Dependent Claim
17 words
A device according to claim 64 wherein said display device is incorporated into a goggle type display.
Claim 79
Dependent Claim
16 words
A device according to claim 64 wherein said display device is incorporated into a navigation system.
Claim 80
Dependent Claim
17 words
A device according to claim 64 wherein said display device is incorporated into an acoustic reproduction device.
Claim 81
Dependent Claim
17 words
A device according to claim 64 wherein said display device is incorporated into a note-type personal computer.
Claim 82
Dependent Claim
16 words
A device according to claim 64 wherein said display device is incorporated into a game equipment.
Claim 83
Dependent Claim
17 words
A device according to claim 64 wherein said display device is incorporated into a portable information terminal.
Claim 84
Dependent Claim
17 words
A device according to claim 64 wherein said display device is incorporated into an image reproduction device.
Claim 85
Dependent Claim
152 words
A display device comprising: a driver circuit having an n-channel TFT in which an entire LDD region is formed so as to overlap a gate electrode with a second gate insulating film sandwiched therebetween; a pixel having a pixel TFT in which an LDD region is formed so as not to overlap a gate electrode with said second gate insulating film sandwiched therebetween; and a memory having a memory transistor containing an active layer, a first gate insulating film, a floating gate electrode, a third gate insulating film, and a control gate electrode, wherein said driver circuit, said pixel and said memory are formed over a same insulator, and wherein said floating gate electrode, said gate electrode of said n-channel TFT, and said gate electrode of said pixel TFT are made from a same material, and said third gate insulating film comprises an oxide of a material forming said floating gate electrode.
Claim 86
Dependent Claim
152 words
A display device comprising: a driver circuit having an n-channel TFT in which an entire LDD region is formed so as to overlap a gate electrode with a second gate insulating film sandwiched therebetween; a pixel having a pixel TFT in which an LDD region is formed so as not to overlap a gate electrode with said second gate insulating film sandwiched therebetween; and a memory having a memory transistor containing an active layer, a first gate insulating film, a floating gate electrode, a third gate insulating film, and a control gate electrode, wherein said driver circuit, said pixel and said memory are formed over a same insulator, and wherein said floating gate electrode, said gate electrode of said n-channel TFT, and said gate electrode of said pixel TFT are made from a same material, and said third gate insulating film comprises an oxide of a material forming said floating gate electrode.
Claim 87
Dependent Claim
92 words
A device according to claim 80 , wherein an n-type impurity element is contained in said LDD region of said n-channel TFT, and in said LDD region contained in an active layer of said memory transistor, at a same concentration, and wherein said n-type impurity element is contained in said LDD region of said pixel TFT at a concentration lower than that at which said n-type impurity element is contained in said LDD region of said n-channel TFT, and in said LDD region contained in said active layer of said memory transistor.
Claim 88
Dependent Claim
29 words
A device according to claim 80 , wherein the film thickness of the first gate insulating film is thinner than the film thickness of the second gate insulating film.
Claim 89
Dependent Claim
17 words
A device according to claim 80 , wherein an EL element is formed in said pixel section.
Claim 90
Dependent Claim
14 words
Electronic equipment having the electro-optical device according to claim 80 as a display section.
Claim 91
Dependent Claim
16 words
A device according to claim 80 wherein said display device is incorporated into a video camera.
Claim 92
Dependent Claim
16 words
A device according to claim 80 wherein said display device is incorporated into a digital camera.
Claim 93
Dependent Claim
15 words
A device according to claim 80 wherein said display device is incorporated into a projector.
Claim 94
Dependent Claim
16 words
A device according to claim 80 wherein said display device is incorporated into a projection television.
Claim 95
Dependent Claim
17 words
A device according to claim 80 wherein said display device is incorporated into a goggle type display.
Claim 96
Dependent Claim
16 words
A device according to claim 80 wherein said display device is incorporated into a navigation system.
Claim 97
Dependent Claim
17 words
A device according to claim 80 wherein said display device is incorporated into an acoustic reproduction device.
Claim 98
Dependent Claim
17 words
A device according to claim 80 wherein said display device is incorporated into a note-type personal computer.
Claim 99
Dependent Claim
16 words
A device according to claim 80 wherein said display device is incorporated into a game equipment.
Claim 100
Dependent Claim
17 words
A device according to claim 80 wherein said display device is incorporated into a portable information terminal.
Claim 101
Dependent Claim
17 words
A device according to claim 80 wherein said display device is incorporated into an image reproduction device.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-12-23 | 2006-06-24 | 2006-12-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-12-23 | 2010-06-24 | 2010-12-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-12-23 | 2014-06-24 | 2014-12-24 | $7700.00 | Window Closed / Lapsed |