Patent US6375159B2 successfully refreshed from Google Patents.
US6375159B2
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High laser absorption copper fuse and method for making the same
Assignee: International Business Machines Corp
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Filing: 1999-04-30
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Granted: 2002-04-23
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Expires: 2019-04-30
Abstract
Abstract A high laser absorption copper fuse can minimize the laser energy needed to delete the fuse portion of the conductor. Significantly, this type of fuse structure would allow for formation of copper fuses that can be deleted with appreciably less incident energy, mainly by increasing the absorption of the fuse link at the given incident laser energies. A metal wiring line contains a fuse link segment wherein the fuse link segment is composed of a stack of at least two metals. The underlayer material in the stack of metals is the primary electrical copper conductor, and the overlayer metal, also an electrical conductor, primarily tungsten or titanium-tungsten in composition, has predetermined thickness and optical properties chosen such that the combination of the overlayer metal with the underlayer metal provides for high absorption characteristics to incident infrared energy. Fabrication methods for providing overlaying material to the entire fuse link line, or to selective portions of the fuse link line are presented.
Inventors
- 👤 Timothy H. Daubenspeck
- 👤 William T. Motsiff
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 19:48
CPC Classifications
H; H10; H10D; H10D89/00; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/493; H10W20/494
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
116 words
A radiation absorbing conductor having a top surface and a given conductivity characteristic that can be substantially altered by said radiation, comprising an electrical conductor having a bottom first layer of a first material that is substantially insensitive to said radiation, and a top second layer of a second material that is sensitive to said radiation, wherein said top second layer covers said bottom first layer forming a protective coating over said bottom first layer, and is exposed to said radiation incident on said conductor top surface, such that upon exposure to said radiation, a portion of said bottom first layer and a portion of said top second layer are deleted to form a non-conducting path.
Claim 2
Dependent Claim
116 words
A radiation absorbing conductor having a top surface and a given conductivity characteristic that can be substantially altered by said radiation, comprising an electrical conductor having a bottom first layer of a first material that is substantially insensitive to said radiation, and a top second layer of a second material that is sensitive to said radiation, wherein said top second layer covers said bottom first layer forming a protective coating over said bottom first layer, and is exposed to said radiation incident on said conductor top surface, such that upon exposure to said radiation, a portion of said bottom first layer and a portion of said top second layer are deleted to form a non-conducting path.
Claim 3
Dependent Claim
24 words
The conductor of claim 1 wherein the sensitivity of said second material is to radiation emitted from a laser in an infrared energy spectrum.
Claim 4
Dependent Claim
58 words
The conductor of claim 1 wherein said bottom first material is a primary electrical conductor insensitive to said radiation and said top second material is an electrical conductor of a composition sensitive to said radiation and adapted to absorb said radiation, such that when combined with said primary electrical conductor provides for a high infrared energy absorbing structure.
Claim 5
Dependent Claim
11 words
The conductor of claim 3 wherein said first material is copper.
Claim 6
Dependent Claim
11 words
The conductor of claim 3 wherein said second material is tungsten.
Claim 7
Dependent Claim
13 words
The conductor of claim 3 wherein said second material is a titanium-tungsten composition.
Claim 8
Dependent Claim
15 words
The conductor of claim 6 wherein said titanium-tungsten composition comprises ten percent titanium by weight.
Claim 9
Dependent Claim
22 words
The conductor of claim 2 wherein said infrared energy spectrum comprises energy having wavelengths in the range of 1.0 to 1.4 μm.
Claim 10
Dependent Claim
23 words
The conductor of claim 1 wherein said second material layer provides a protective layer for said first material and a barrier against diffusion.
Claim 11
Dependent Claim
41 words
The conductor of claim 1 wherein said first layer of said first material is greater than or equal to 500 Angstroms in thickness, and said second layer of said second material is greater than or equal to 500 Angstroms in thickness.
Claim 12
Dependent Claim
115 words
A radiation absorbing conductor having a top surface and a given conductivity characteristic that can be substantially altered by said radiation, comprising an electrical conductor having a bottom first layer of copper material that is substantially insensitive to said radiation, and a top second layer of a second material that is sensitive to said radiation, wherein said top second layer covers said bottom first layer forming a protective coating over said bottom first layer, and is exposed to said radiation incident on said conductor top surface, such that upon exposure to said radiation, a portion of said bottom first layer and a portion of said top second layer are deleted to form a non-conducting path.
Claim 13
Dependent Claim
115 words
A radiation absorbing conductor having a top surface and a given conductivity characteristic that can be substantially altered by said radiation, comprising an electrical conductor having a bottom first layer of copper material that is substantially insensitive to said radiation, and a top second layer of a second material that is sensitive to said radiation, wherein said top second layer covers said bottom first layer forming a protective coating over said bottom first layer, and is exposed to said radiation incident on said conductor top surface, such that upon exposure to said radiation, a portion of said bottom first layer and a portion of said top second layer are deleted to form a non-conducting path.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2005-04-22 | 2005-10-22 | 2006-04-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-04-22 | 2009-10-22 | 2010-04-23 | $3760.00 | Window Closed / Lapsed |
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