US5608257A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fuse element for effective laser blow in an integrated circuit device
Assignee: Infineon Technologies AG
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Filing: 1995-06-07
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Granted: 1997-03-04
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Expires: 2015-06-07
Abstract
Abstract In an integrated circuit having interconnecting lines formed on an insulated layer deposited on a semiconductor substrate which provide connections between elements integral to the integrated circuit, a fuse structure programmable by a laser beam that includes: a melt-away elongated fuse link joining two segments of an interconnecting line; a plurality of fins integral and coplanar to the fuse link, each of the fins transversally extending away from the fuse link for absorbing energy emitted by the laser beam; and a reflecting plate positioned underneath the fuse link to reflect energy provided by the laser beam back into the fuse link, such that both the combination of the fins and the reflecting plate reduces the energy emitted by the laser beam required to blow the fuse structure.
Inventors
- 👤 Pei-Ing P. Lee
- 👤 Frank Prein
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 15:59
CPC Classifications
H; H10; H10D; H10D84/00; H10D84/01; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/493; H10W20/494
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
86 words
In an integrated circuit having a plurality of interconnection lines providing connections between elements integral to the integrated circuit, a fuse structure programmable by a laser beam, comprising: a melt-away elongated fuse link connecting two segments of one of said interconnection lines; and at least one fin integral and coplanar to the fuse link and transversely extending from the fuse link, wherein said fuse link, said at least one fin, and said two segments of one of said interconnection lines are formed of the same layer.
Claim 2
Dependent Claim
86 words
In an integrated circuit having a plurality of interconnection lines providing connections between elements integral to the integrated circuit, a fuse structure programmable by a laser beam, comprising: a melt-away elongated fuse link connecting two segments of one of said interconnection lines; and at least one fin integral and coplanar to the fuse link and transversely extending from the fuse link, wherein said fuse link, said at least one fin, and said two segments of one of said interconnection lines are formed of the same layer.
Claim 3
Dependent Claim
25 words
The fuse structure as recited in claim 1, wherein a plurality of said at least one fin divides said fuse link into fuse link sections.
Claim 4
Dependent Claim
29 words
The fuse structure as recited in claim 2, wherein the width of at least one of said fuse link sections is narrower than the width of said fuse link.
Claim 5
Dependent Claim
23 words
The fuse structure as recited in claim 1, wherein said at least one fin extends in a direction perpendicular to said fuse link.
Claim 6
Dependent Claim
31 words
The fuse structure as recited in claim 1, further comprising at least one dummy fuse link positioned in close proximity to said fuse link but electrically isolated from said fuse link.
Claim 7
Dependent Claim
26 words
The fuse structure as recited in claim 1, further comprising a reflecting plate positioned underneath said fuse link, for reflecting energy provided by said laser beam.
Claim 8
Dependent Claim
25 words
The fuse structure as recited in claim 1, wherein said fuse link and said at least one fin are made of a high conductivity metal.
Claim 9
Dependent Claim
27 words
The fuse structure as recited in claim 7, wherein said high conductivity metal is selected from the group that includes aluminum, copper, polysilicon, silicide and alloys therefrom.
Claim 10
Dependent Claim
126 words
In an integrated circuit having interconnecting lines providing connections between elements integral to the integrated circuit, a fuse structure programmable by a laser beam, comprising: a melt away elongated fuse link joining two segments of an interconnecting line; a plurality of fins integral and coplanar to the fuse link, each of said fins transversely extending from the fuse link and; a reflecting plate positioned underneath said fuse link, for reflecting energy provided by the laser beam back into the fuse link, wherein said fins and said reflecting plate reduce the energy emitted by the laser beam required to blow the fuse structure, wherein said fuse link, each of said fins, and said two segments of one of said interconnection lines are formed of the same layer.
Claim 11
Dependent Claim
126 words
In an integrated circuit having interconnecting lines providing connections between elements integral to the integrated circuit, a fuse structure programmable by a laser beam, comprising: a melt away elongated fuse link joining two segments of an interconnecting line; a plurality of fins integral and coplanar to the fuse link, each of said fins transversely extending from the fuse link and; a reflecting plate positioned underneath said fuse link, for reflecting energy provided by the laser beam back into the fuse link, wherein said fins and said reflecting plate reduce the energy emitted by the laser beam required to blow the fuse structure, wherein said fuse link, each of said fins, and said two segments of one of said interconnection lines are formed of the same layer.
Claim 12
Dependent Claim
22 words
The fuse structure as recited in claim 9, wherein a plurality of said fins divide said fuse link into fuse link sections.
Claim 13
Dependent Claim
29 words
The fuse structure as recited in claim 9, wherein the width of at least one of said fuse link sections is narrower than the width of said fuse link.
Claim 14
Dependent Claim
23 words
The fuse structure as recited in claim 9, wherein said at least one fin extends in a direction perpendicular to said fuse link.
Claim 15
Dependent Claim
31 words
The fuse structure as recited in claim 9, further comprising at least one dummy fuse link positioned in close proximity to said fuse link but electrically isolated from said fuse link.
Claim 16
Dependent Claim
25 words
The fuse structure as recited in claim 9, wherein said fuse link and said at least one fin are made of a high conductivity metal.
Claim 17
Dependent Claim
27 words
The fuse structure as recited in claim 14, wherein said high conductivity metal is selected from the group that includes aluminum, copper, polysilicon, silicide and alloys therefrom.
Claim 18
Dependent Claim
26 words
The fuse structure as recited in claim 9, wherein said reflective plate is a concave upper surface, thereby focusing the reflected beam into the fuse link.
Claim 19
Dependent Claim
16 words
The fuse structure as recited in claim 9, wherein said reflective plate is a flat plate.
Claim 20
Dependent Claim
19 words
The fuse structure as recited in claim 9, wherein said reflective plate is made using a chemical-mechanical polish process.
Claim 21
Dependent Claim
18 words
The fuse structure as recited in claim 9, wherein said reflective plate is made using a reactive-ion-etch process.
Claim 22
Dependent Claim
18 words
The fuse structure as recited in claim 9, wherein said reflective plate is made using a lift-off process.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-03-03 | 2000-09-02 | 2001-03-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-03-03 | 2004-09-02 | 2005-03-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-03-03 | 2008-09-02 | 2009-03-04 | $7700.00 | Window Closed / Lapsed |