US6111301A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Interconnection with integrated corrosion stop
Assignee: International Business Machines Corp
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Filing: 1998-04-24
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Granted: 2000-08-29
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Expires: 2018-04-24
Abstract
Abstract An interconnection structure for a semiconductor circuit is provided employing a conductor structure electrically connected to conductive wiring located on a different level than the conductor structure. The conductor structure comprises a relatively low resistivity metal. A barrier layer of a corrosion resistant metal is located intermediate the relatively low resistivity metal and wiring to thereby separate the wiring and relatively low resistivity metal.
Inventors
- 👤 Anthony K. Stamper
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 11:25
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W42/00; H10W20/40; H10W20/49; H10W20/493
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
109 words
An interconnection structure for a semiconductor circuit comprising: (A) a fuse structure; and (B) conductive wiring located on a different level than said fuse structure; wherein said fuse structure is electrically connected to said conductive wiring and wherein said fuse structure comprises a relatively low resistivity metal; and (C) a conformal barrier layer of a chemical vapor deposited corrosion resistant metal conductively contacting said relatively low resistivity metal and wherein said barrier layer of a corrosion resistant metal is located intermediate said relatively low resistivity metal and said wiring and along the sides of said relatively low resistivity metal thereby separating said wiring from said relatively low resistivity metal.
Claim 2
Dependent Claim
109 words
An interconnection structure for a semiconductor circuit comprising: (A) a fuse structure; and (B) conductive wiring located on a different level than said fuse structure; wherein said fuse structure is electrically connected to said conductive wiring and wherein said fuse structure comprises a relatively low resistivity metal; and (C) a conformal barrier layer of a chemical vapor deposited corrosion resistant metal conductively contacting said relatively low resistivity metal and wherein said barrier layer of a corrosion resistant metal is located intermediate said relatively low resistivity metal and said wiring and along the sides of said relatively low resistivity metal thereby separating said wiring from said relatively low resistivity metal.
Claim 3
Dependent Claim
19 words
The interconnection structure of claim 1 wherein said low resistivity metal is located on top of said barrier layer.
Claim 4
Dependent Claim
28 words
The interconnection structure of claim 2 wherein said fuse structure further comprises adhesion promoting layer or diffusion barrier between said low resistivity metal and said corrosion resistant metal.
Claim 5
Dependent Claim
14 words
The interconnection structure of claim 3 wherein said adhesion promoting layer includes tantalum nitride.
Claim 6
Dependent Claim
13 words
The interconnection structure of claim 1 wherein said low resistivity metal is copper.
Claim 7
Dependent Claim
13 words
The interconnection structure of claim 5 wherein said corrosion resistant metal is tungsten.
Claim 8
Dependent Claim
14 words
The interconnection structure of claim 6 wherein said tungsten is chemical vapor deposited tungsten.
Claim 9
Dependent Claim
13 words
The interconnection structure of claim 1 further comprising via between the different levels.
Claim 10
Dependent Claim
35 words
The interconnection structure of claim 1 wherein the fuse structure is located in a trench in the interconnection structure and said conformal barrier layer is located adjacent the side walls and bottom of the trench.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-08-29 | 2004-02-28 | 2004-08-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-08-29 | 2008-02-28 | 2008-08-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-08-29 | 2012-02-28 | 2012-08-29 | $7700.00 | Window Closed / Lapsed |