US6368896B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of wafer level chip scale packaging
Assignee: Round Rock Research LLC
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Filing: 1999-04-23
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Granted: 2002-04-09
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Expires: 2019-04-23
Abstract
Abstract A chip scale semiconductor package and a method for fabricating the package are provided. The package includes a semiconductor die and a flex circuit bonded to the face of the die. The flex circuit includes a polymer substrate with a dense array of external contacts, and a pattern of conductors in electrical communication with the external contacts. The package also includes interconnects configured to provide separate electrical paths between die contacts (e.g., bond pads), and the conductors on the flex circuit. Several different embodiments of interconnects are provided including: bumps on the die contacts, bonded to the flex circuit conductors with a conductive adhesive layer; polymer bumps on the conductors, or die contacts, applied in a semi-cured state and then fully cured; solder bumps on the die contacts and conductors, bonded to one another using a bonding tool; rivet-like bonded connections between the conductors and die contacts, formed using metal bumps and a wire bonding or ball bonding apparatus; single point bonded connections between the conductors and die contacts, formed with a bonding tool; and wire bonds between the conductors and die contacts.
Inventors
- 👤 Warren M. Farnworth
- 👤 Alan G. Wood
- 👤 Mike Brooks
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 08:39
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/62; H10W70/63; H10W70/635; H10W70/67; H10W70/688; H10W70/65; H10W70/654; H10W70/655; H10W72/00; H10W72/851; H10W72/853; H10W72/865
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
181 words
A method for fabricating semiconductor packages comprising: providing a semiconductor wafer having a face and comprising a plurality of semiconductor dice, each die comprising a plurality of die contacts on the face, a plurality of bumps on the die contacts having a height relative to the face, and a layer on the face electrically insulating the die contacts and the bumps; providing a flex circuit comprising a polymer substrate having a first side and an opposing second side, a plurality of external contacts on the first side, and a plurality of conductors on the second side in electrical communication with the external contacts; depositing a conductive polymer material between the face of the wafer and the flex circuit, the conductive polymer material substantially covering the face of the wafer, the second side of the flex circuit, the conductors on the flex circuit and the bumps on the dice; curing the conductive polymer material under compression to attach the flex circuit to the dice, and form separate electrical paths between the bumps and the conductors; and singulating the dice from the wafer.
Claim 2
Independent Claim
181 words
A method for fabricating semiconductor packages comprising: providing a semiconductor wafer having a face and comprising a plurality of semiconductor dice, each die comprising a plurality of die contacts on the face, a plurality of bumps on the die contacts having a height relative to the face, and a layer on the face electrically insulating the die contacts and the bumps; providing a flex circuit comprising a polymer substrate having a first side and an opposing second side, a plurality of external contacts on the first side, and a plurality of conductors on the second side in electrical communication with the external contacts; depositing a conductive polymer material between the face of the wafer and the flex circuit, the conductive polymer material substantially covering the face of the wafer, the second side of the flex circuit, the conductors on the flex circuit and the bumps on the dice; curing the conductive polymer material under compression to attach the flex circuit to the dice, and form separate electrical paths between the bumps and the conductors; and singulating the dice from the wafer.
Claim 3
Dependent Claim
10 words
The method of claim 1 wherein the bumps comprise solder.
Claim 4
Dependent Claim
17 words
The method of claim 1 wherein the bumps comprise solder and are generally hemispherical, convex or dome-shaped.
Claim 5
Dependent Claim
19 words
The method of claim 1 wherein the height of the bumps is from about 2.5 mils to 30 mils.
Claim 6
Independent Claim
177 words
A method for fabricating semiconductor packages comprising: providing a semiconductor wafer comprising a plurality of semiconductor dice, each die comprising a face and a plurality of die contacts on the face, each die contact comprising a generally hemispherical, convex or dome-shaped solder bump having a diameter and a height relative to the face; providing a flex circuit comprising a polymer substrate, a plurality of external contacts on a first side of the polymer substrate, and a plurality of conductors on an opposing second side of the polymer substrate in electrical communication with the external contacts; forming a conductive polymer layer between the flex circuit and the wafer with the conductors on the flex circuit aligned with the die contacts on the dice; heating and curing the conductive polymer layer under compression to bond the flex circuit to the wafer, and to provide separate electrical paths between the conductors and the die contacts; and singulating the dice into the packages, each package comprising a singulated die and a portion of the flex circuit bonded to the singulated die.
Claim 7
Independent Claim
177 words
A method for fabricating semiconductor packages comprising: providing a semiconductor wafer comprising a plurality of semiconductor dice, each die comprising a face and a plurality of die contacts on the face, each die contact comprising a generally hemispherical, convex or dome-shaped solder bump having a diameter and a height relative to the face; providing a flex circuit comprising a polymer substrate, a plurality of external contacts on a first side of the polymer substrate, and a plurality of conductors on an opposing second side of the polymer substrate in electrical communication with the external contacts; forming a conductive polymer layer between the flex circuit and the wafer with the conductors on the flex circuit aligned with the die contacts on the dice; heating and curing the conductive polymer layer under compression to bond the flex circuit to the wafer, and to provide separate electrical paths between the conductors and the die contacts; and singulating the dice into the packages, each package comprising a singulated die and a portion of the flex circuit bonded to the singulated die.
Claim 8
Dependent Claim
19 words
The method of claim 5 wherein the height of the bump is between about 2.5 mils to 30 mils.
Claim 9
Dependent Claim
25 words
The method of claim 5 wherein the providing the semiconductor wafer step comprises forming the solder bumps on the die contacts using a deposition process.
Claim 10
Dependent Claim
21 words
The method of claim 5 wherein the singulated die and the portion of the flex circuit have a same peripheral outline.
Claim 11
Independent Claim
228 words
A method for fabricating semiconductor packages comprising: providing a semiconductor wafer comprising a face, an electrical insulating layer on the face, and a plurality of semiconductor dice comprising a plurality of die contacts on the face; depositing a plurality of solder bumps on the die contacts having a height relative to the face with the electrical insulating layer electrically insulating the bumps; providing a flex circuit comprising a polymer substrate, a plurality of external contacts on a first side of the polymer substrate, and a plurality of conductors on an opposing second side of the polymer substrate in electrical communication with the external contacts; placing a conductive polymer layer in a viscous condition on the second side of the polymer substrate and on the conductors; placing the flex circuit on the wafer with the bumps on the dice aligned with the conductors on the flex circuit; compressing the conductive polymer layer between the face of the wafer and the polymer substrate; heating and curing the conductive polymer layer during the compressing step to bond the flex circuit to the dice and to provide separate electrical paths between the conductors and the die contacts; and singulating the wafer into the packages, each package comprising a singulated die and a portion of the flex circuit bonded to the singulated die having a peripheral outline matching that of the singulated die.
Claim 12
Independent Claim
228 words
A method for fabricating semiconductor packages comprising: providing a semiconductor wafer comprising a face, an electrical insulating layer on the face, and a plurality of semiconductor dice comprising a plurality of die contacts on the face; depositing a plurality of solder bumps on the die contacts having a height relative to the face with the electrical insulating layer electrically insulating the bumps; providing a flex circuit comprising a polymer substrate, a plurality of external contacts on a first side of the polymer substrate, and a plurality of conductors on an opposing second side of the polymer substrate in electrical communication with the external contacts; placing a conductive polymer layer in a viscous condition on the second side of the polymer substrate and on the conductors; placing the flex circuit on the wafer with the bumps on the dice aligned with the conductors on the flex circuit; compressing the conductive polymer layer between the face of the wafer and the polymer substrate; heating and curing the conductive polymer layer during the compressing step to bond the flex circuit to the dice and to provide separate electrical paths between the conductors and the die contacts; and singulating the wafer into the packages, each package comprising a singulated die and a portion of the flex circuit bonded to the singulated die having a peripheral outline matching that of the singulated die.
Claim 13
Dependent Claim
17 words
The method of claim 9 wherein the solder bumps have a generally hemispherical, convex or dome shape.
Claim 14
Dependent Claim
15 words
The method of claim 9 wherein the conductive polymer layer comprises an anisotropic adhesive material.
Claim 15
Dependent Claim
13 words
The method of claim 9 further comprising forming balls on the external contacts.
Claim 16
Dependent Claim
20 words
The method of claim 9 wherein the height of the solder bumps is between about 2.5 mils to 30 mils.
Claim 17
Dependent Claim
20 words
The method of claim 9 wherein a diameter of the solder bumps is between about 2.5 mils to 30 mils.
Claim 18
Independent Claim
188 words
A method for fabricating semiconductor chip scale packages comprising: providing a semiconductor wafer having a face and comprising a plurality of semiconductor dice, each die comprising a plurality of die contacts on the face and a plurality of bumps on the die contacts having a height relative to the face; providing a flex circuit comprising a polymer substrate, a plurality of external contacts on a first side of the polymer substrate, and a plurality of conductors on an opposing second side of the polymer substrate in electrical communication with the external contacts; placing an anisotropic adhesive on the conductors and on the second side; aligning the conductors to the bumps; compressing and heating the anisotropic adhesive between the wafer and the polymer substrate; and singulating the wafer into the packages, each package comprising a singulated die and a portion of the flex circuit bonded to the singulated die with the anisotropic adhesive providing electrical paths between the conductors on the portion of the flex circuit, and the bumps on the singulated die, and with the singulated die and the portion of the flex circuit having substantially matching outlines.
Claim 19
Independent Claim
188 words
A method for fabricating semiconductor chip scale packages comprising: providing a semiconductor wafer having a face and comprising a plurality of semiconductor dice, each die comprising a plurality of die contacts on the face and a plurality of bumps on the die contacts having a height relative to the face; providing a flex circuit comprising a polymer substrate, a plurality of external contacts on a first side of the polymer substrate, and a plurality of conductors on an opposing second side of the polymer substrate in electrical communication with the external contacts; placing an anisotropic adhesive on the conductors and on the second side; aligning the conductors to the bumps; compressing and heating the anisotropic adhesive between the wafer and the polymer substrate; and singulating the wafer into the packages, each package comprising a singulated die and a portion of the flex circuit bonded to the singulated die with the anisotropic adhesive providing electrical paths between the conductors on the portion of the flex circuit, and the bumps on the singulated die, and with the singulated die and the portion of the flex circuit having substantially matching outlines.
Claim 20
Dependent Claim
16 words
The method of claim 15 wherein the bumps have a generally hemispherical, convex or dome shape.
Claim 21
Dependent Claim
10 words
The method of claim 15 wherein the bumps comprise solder.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-04-08 | 2005-10-08 | 2006-04-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-04-08 | 2009-10-08 | 2010-04-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-04-08 | 2013-10-08 | 2014-04-09 | $7700.00 | Window Closed / Lapsed |