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US6020220A Expired / Lapsed US ⏱️ 0.0 years remaining

Compliant semiconductor chip assemblies and methods of making same

Assignee: Adeia Semiconductor Solutions LLC
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Filing: 1996-09-05
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Granted: 2000-02-01
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Expires: 2016-09-05
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Abstract

Abstract A semiconductor chip package assembly is mounted to contact pads on a die. A compliant interposer layer is disposed between the die and a dielectric substrate wiring layer. The contacts on the die are connected to terminals on the compliant interposer layer by means of a compliant, conductive polymer extending through apertures in the interposer layer. Compliancy in the interposer layer and in the conductive polymer permits relative movement of the terminals on the dielectric substrate wiring layer to the contacts on the die and hence relieves the shear forces caused by differential thermal expansion. The arrangement provides a compact packaged structure similar to that achieved through flip-chip bonding, but with markedly increased resistance to thermal cycling damage. Further, the packaged structure allows the standardization of the packages such that several companies can make competing chips that are packaged such that the resultant packaged structures are roughly the same as far as the end user is concerned.

Inventors

  • 👤 Kenneth B. Gilleo
  • 👤 Gary W. Grube
  • 👤 Gaetan Mathieu

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 16:49
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/10; H10W74/111; H10W74/129; H10W70/00; H10W70/60; H10W70/67; H10W70/688; H10W72/00; H10W72/01; H10W72/012; H10W72/01221; H10W72/01225; H10W72/019; H10W72/071; H10W72/072; H10W72/073; H10W72/07331; H10W72/20; H10W72/221; H10W72/222; H10W72/225; H10W72/241; H10W72/251; H10W72/252; H10W72/253; H10W72/30; H10W72/321; H10W72/325; H10W72/351; H10W72/352; H10W72/353; H10W72/354; H10W72/50; H10W72/551; H10W72/552; H10W72/5522; H10W72/90; H10W72/921; H10W72/923; H10W72/941; H10W72/9415; H10W74/15; H10W90/00; H10W90/701; H10W90/721; H10W90/724

Claims Analysis

Total Claims: 19
Claim 1
Independent Claim 130 words
A method of making a semiconductor chip package assembly, comprising the steps of: providing a dielectric substrate wiring layer, the dielectric substrate with a first surface having a plurality of conductive bond pads and a second surface having a plurality of conductive terminals, the bond pads being electrically connected to the terminals; providing a semiconductor die having a face surface bearing a plurality of contacts such that the contacts are in rough alignment with respective bond pads on the dielectric substrate; and disposing a compliant interposer layer such that it mechanically couples the first surface of the dielectric substrate to the face surface of the die, wherein the compliant interposer layer is at least partially comprised of a flexible conductive polymer which electrically connects respective aligned contacts and bond pads.
Claim 2
Independent Claim 130 words
A method of making a semiconductor chip package assembly, comprising the steps of: providing a dielectric substrate wiring layer, the dielectric substrate with a first surface having a plurality of conductive bond pads and a second surface having a plurality of conductive terminals, the bond pads being electrically connected to the terminals; providing a semiconductor die having a face surface bearing a plurality of contacts such that the contacts are in rough alignment with respective bond pads on the dielectric substrate; and disposing a compliant interposer layer such that it mechanically couples the first surface of the dielectric substrate to the face surface of the die, wherein the compliant interposer layer is at least partially comprised of a flexible conductive polymer which electrically connects respective aligned contacts and bond pads.
Claim 3
Dependent Claim 36 words
The method as claimed in claim 1, wherein the compliant interposer layer is comprised out of a compliant anisotropic conductive layer which conducts solely in an axial direction from the contacts to their respective bond pads.
Claim 4
Dependent Claim 30 words
The method as claimed in claim 2, further comprising the step of biasing the compliant anisotropic conductive layer in the areas of desired conductance between respective contacts and bond pads.
Claim 5
Dependent Claim 27 words
The method as claimed in claim 2, further comprising the step of biasing the compliant anisotropic conductive layer in the areas of desired conductance between adjacent contacts.
Claim 6
Dependent Claim 30 words
The method as claimed in claim 4, wherein both of the steps of biasing the compliant anisotropic conductive layer include applying heat and pressure to the compliant anisotropic conductive layer.
Claim 7
Dependent Claim 43 words
The method as claimed in claim 1, wherein the compliant interposer layer is comprised of a substantially uniform sheet having a plurality of apertures therethrough, the disposing step further including the step of depositing the compliant conductive polymer within each of the apertures.
Claim 8
Dependent Claim 37 words
The method as claimed in claim 6, wherein the disposing step includes the steps of attaching the complaint interposer layer to the substrate and subsequently attaching the face surface of the die to the compliant interposer layer.
Claim 9
Dependent Claim 56 words
The method as claimed in claim 7, wherein the disposing step further includes the step of depositing the compliant conductive polymer within the apertures subsequent to the step of attaching the compliant interposer layer to the dielectric substrate but prior to the step of attaching the face surface of the die to the compliant interposer layer.
Claim 10
Dependent Claim 38 words
The method as claimed in claim 6, further comprising the step of providing a contact interface on each of the contacts on the die, whereby the contact interface performs the function of ensuring the conductivity of the contact.
Claim 11
Dependent Claim 43 words
The method as claimed in claim 9, wherein the step of providing a contact interface is selected from the group consisting of: (a) electroplating a layer of gold; (b) transfer bumping a bump or post of gold; and (c) applying a conductive adhesive.
Claim 12
Independent Claim 188 words
A method of making a semiconductor chip package assembly, comprising the steps of: providing a dielectric substrate wiring layer, the dielectric substrate with a first surface having a plurality of conductive bond pads and a second surface having a plurality of conductive terminals, the bond pads being electrically connected to the terminals; providing a semiconductor die having a face surface bearing a plurality of contacts such that such contacts are in rough alignment with respective bond pads on the dielectric substrate; disposing a compliant interposer layer comprised of a substantially uniform sheet having a plurality of apertures therethrough such that it mechanically couples the first surface of the dielectric substrate to the face surface of the die, wherein the compliant interposer layer is at least partially comprised of a flexible conductive polymer which electrically connects respective aligned contacts and bond pads, and wherein the compliant conductive polymer is deposited within each of the apertures; providing a contact interface on each of the contacts on the die by ball bonding gold wire to each contact, whereby the contact interface performs the function of ensuring the conductivity of the contact.
Claim 13
Independent Claim 188 words
A method of making a semiconductor chip package assembly, comprising the steps of: providing a dielectric substrate wiring layer, the dielectric substrate with a first surface having a plurality of conductive bond pads and a second surface having a plurality of conductive terminals, the bond pads being electrically connected to the terminals; providing a semiconductor die having a face surface bearing a plurality of contacts such that such contacts are in rough alignment with respective bond pads on the dielectric substrate; disposing a compliant interposer layer comprised of a substantially uniform sheet having a plurality of apertures therethrough such that it mechanically couples the first surface of the dielectric substrate to the face surface of the die, wherein the compliant interposer layer is at least partially comprised of a flexible conductive polymer which electrically connects respective aligned contacts and bond pads, and wherein the compliant conductive polymer is deposited within each of the apertures; providing a contact interface on each of the contacts on the die by ball bonding gold wire to each contact, whereby the contact interface performs the function of ensuring the conductivity of the contact.
Claim 14
Dependent Claim 25 words
The method as claimed in claim 11, wherein the ball bonding step includes the step of creating a wire tail extending from the ball bond.
Claim 15
Dependent Claim 30 words
The method as claimed in claim 12, wherein the wire tail creation step includes the step of ensuring the length of each of the wire tails are approximately the same.
Claim 16
Dependent Claim 43 words
The method as claimed in claim 13, wherein the wire tail extends from the ball bond to a distal end, wherein the wire tail creation step further includes the step of providing a ball-like feature on the distal end of the wire tail.
Claim 17
Dependent Claim 24 words
The method as claimed in claim 14, wherein the ball bonding step further includes the step of shaping the wire into a compliant structure.
Claim 18
Independent Claim 33 words
The method as claimed in claims 14 or 15, wherein the step of attaching the die to the compliant interposer layer further includes biasing the wire tail against the contacts of the die.
Claim 19
Independent Claim 37 words
The method as claimed in claims 14 or 15, further comprising the step of providing a conductive adhesive on at least a portion of the ball bonded wires to increase the spring constant of the bonded wires.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2003-01-31 2003-08-02 2004-02-01 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2007-01-31 2007-08-02 2008-02-01 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2011-01-31 2011-08-02 2012-02-01 $7700.00 Window Closed / Lapsed

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