Method for producing semiconductor device

Claim 1

A method of manufacturing a semiconductor device having at least one thin film transistor, comprising the steps of: forming a semiconductor film to be crystallized on an insulating surface, said semiconductor film having a first portion; disposing a catalyst containing material on the first portion of the semiconductor film, said catalyst being capable of promoting crystallization of said semiconductor film wherein said first portion has a shape lengthened in a first direction; heating said semiconductor film so that a crystal growth proceeds from said first portion uniformly through a second portion of the semiconductor film adjacent to said first portion in a second direction substantially orthogonal to said first direction; patterning said semiconductor film into at least one island after the step of crystallization thereof, said island being formed within said second portion of the semiconductor film; forming source and drain regions in said island with a channel region defined therebetween so that a channel length direction extending between the source and drain regions intersects with said first direction to form an angle; and forming a gate electrode over said channel region.

Claim 2

A method of manufacturing a semiconductor device having at least one thin film transistor, comprising the steps of: forming a semiconductor film to be crystallized on an insulating surface, said semiconductor film having a first portion; disposing a catalyst containing material on the first portion of the semiconductor film, said catalyst being capable of promoting crystallization of said semiconductor film wherein said first portion has a shape lengthened in a first direction; heating said semiconductor film so that a crystal growth proceeds from said first portion uniformly through a second portion of the semiconductor film adjacent to said first portion in a second direction substantially orthogonal to said first direction; patterning said semiconductor film into at least one island after the step of crystallization thereof, said island being formed within said second portion of the semiconductor film; forming source and drain regions in said island with a channel region defined therebetween so that a channel length direction extending between the source and drain regions intersects with said first direction to form an angle; and forming a gate electrode over said channel region.

Claim 7

A method of manufacturing a semiconductor device having at least one thin film transistor, comprising the steps of: disposing a catalyst containing material in contact with a first region of a semiconductor film on an insulating surface of a substrate to be crystallized, said catalyst being capable of promoting crystallization of said semiconductor film; crystallizing said semiconductor film by heating where crystals grow uniformly in a first direction from said first region through a second region of the semiconductor film; patterning said semiconductor film into an island after the step of crystallization thereof wherein said island is formed within said second region; and forming source and drain regions in said island with a channel region defined therebetween so that a channel length direction extending between the source and drain regions intersects with said first direction to form an angle.

Claim 8

A method of manufacturing a semiconductor device having at least one thin film transistor, comprising the steps of: disposing a catalyst containing material in contact with a first region of a semiconductor film on an insulating surface of a substrate to be crystallized, said catalyst being capable of promoting crystallization of said semiconductor film; crystallizing said semiconductor film by heating where crystals grow uniformly in a first direction from said first region through a second region of the semiconductor film; patterning said semiconductor film into an island after the step of crystallization thereof wherein said island is formed within said second region; and forming source and drain regions in said island with a channel region defined therebetween so that a channel length direction extending between the source and drain regions intersects with said first direction to form an angle.

Claim 12

A method of manufacturing a semiconductor device having at least one thin film transistor, comprising the steps of: forming a semiconductor film to be crystallized on an insulating surface, said semiconductor film having a first portion; disposing a catalyst containing material on the first portion of the semiconductor film, said catalyst being capable of promoting crystallization of said semiconductor film wherein said first portion has a shape lengthened in a first direction; heating said semiconductor film so that a crystal growth proceeds from said first portion uniformly through a second portion of the semiconductor film adjacent to said first portion in a second direction substantially orthogonal to said first direction; patterning said semiconductor film into at least one island after the step of crystallization thereof, said island being formed within said second portion of the semiconductor film; introducing phosphorus into said island to form source and drain regions with a channel region defined therebetween so that a channel length direction extending between the source and drain regions intersects with said first direction to form an angle; and activating said phosphorus in said source and drain regions.

Claim 13

A method of manufacturing a semiconductor device having at least one thin film transistor, comprising the steps of: forming a semiconductor film to be crystallized on an insulating surface, said semiconductor film having a first portion; disposing a catalyst containing material on the first portion of the semiconductor film, said catalyst being capable of promoting crystallization of said semiconductor film wherein said first portion has a shape lengthened in a first direction; heating said semiconductor film so that a crystal growth proceeds from said first portion uniformly through a second portion of the semiconductor film adjacent to said first portion in a second direction substantially orthogonal to said first direction; patterning said semiconductor film into at least one island after the step of crystallization thereof, said island being formed within said second portion of the semiconductor film; introducing phosphorus into said island to form source and drain regions with a channel region defined therebetween so that a channel length direction extending between the source and drain regions intersects with said first direction to form an angle; and activating said phosphorus in said source and drain regions.

Claim 24

A method of manufacturing a semiconductor device comprising the steps of: forming a semiconductor film comprising amorphous silicon over a substrate formed a blocking film thereon; disposing a material containing an element in contact with at least a first region of said semiconductor film, said element being capable of promoting crystallization of said semiconductor film; heating said semiconductor film; irradiating laser light to said semiconductor film; patterning said semiconductor film to form at least one semiconductor island; forming a gate insulating film on said semiconductor island; forming a gate electrode on said gate insulating film; doping at least one of an n-type impurity and a p-type impurity into said semiconductor island to form at least a source region and a drain region with a channel region defined therebetween; and activating said one of the n-type impurity and the p-type impurity in said source region and said drain region, wherein said semiconductor film is crystallized by said heating and said irradiating, so that crystals grow in a first direction from said first region; and a channel length direction extending between said source region and said drain region intersects with said first direction to form an angle.

Claim 25

A method of manufacturing a semiconductor device comprising the steps of: forming a semiconductor film comprising amorphous silicon over a substrate formed a blocking film thereon; disposing a material containing an element in contact with at least a first region of said semiconductor film, said element being capable of promoting crystallization of said semiconductor film; heating said semiconductor film; irradiating laser light to said semiconductor film; patterning said semiconductor film to form at least one semiconductor island; forming a gate insulating film on said semiconductor island; forming a gate electrode on said gate insulating film; doping at least one of an n-type impurity and a p-type impurity into said semiconductor island to form at least a source region and a drain region with a channel region defined therebetween; and activating said one of the n-type impurity and the p-type impurity in said source region and said drain region, wherein said semiconductor film is crystallized by said heating and said irradiating, so that crystals grow in a first direction from said first region; and a channel length direction extending between said source region and said drain region intersects with said first direction to form an angle.

Claim 29

A method of manufacturing a semiconductor device comprising the steps of: forming a semiconductor film comprising amorphous silicon over a substrate formed a blocking film thereon; disposing a material containing an element in contact with at least a first region of said semiconductor film, said element being capable of promoting crystallization of said semiconductor film; heating said semiconductor film; irradiating laser light to said semiconductor film; patterning said semiconductor film to form at least one semiconductor island; forming a gate insulating film on said semiconductor island; forming a gate electrode on said gate insulating film; doping at least one of an n-type impurity and a p-type impurity into said semiconductor island to form at least a source region and a drain region with a channel region defined therebetween; activating said one of the n-type impurity and the p-type impurity in said source region and said drain region; forming an interlayer insulating film to cover said gate insulating film and said gate electrode; forming a contact hole through at least said gate insulating film and said interlayer insulating film to expose a portion of said source region or said drain region; and forming an electrode in contact with said source region or said drain region at said portion, wherein said semiconductor film is crystallized by said heating and said irradiating, so that crystals grow in a first direction from said first region; and a channel length direction extending between said source region and said drain region intersects with said first direction to form an angle.

Claim 30

A method of manufacturing a semiconductor device comprising the steps of: forming a semiconductor film comprising amorphous silicon over a substrate formed a blocking film thereon; disposing a material containing an element in contact with at least a first region of said semiconductor film, said element being capable of promoting crystallization of said semiconductor film; heating said semiconductor film; irradiating laser light to said semiconductor film; patterning said semiconductor film to form at least one semiconductor island; forming a gate insulating film on said semiconductor island; forming a gate electrode on said gate insulating film; doping at least one of an n-type impurity and a p-type impurity into said semiconductor island to form at least a source region and a drain region with a channel region defined therebetween; activating said one of the n-type impurity and the p-type impurity in said source region and said drain region; forming an interlayer insulating film to cover said gate insulating film and said gate electrode; forming a contact hole through at least said gate insulating film and said interlayer insulating film to expose a portion of said source region or said drain region; and forming an electrode in contact with said source region or said drain region at said portion, wherein said semiconductor film is crystallized by said heating and said irradiating, so that crystals grow in a first direction from said first region; and a channel length direction extending between said source region and said drain region intersects with said first direction to form an angle.

Claim 34

A method of manufacturing a semiconductor device comprising the steps of: forming a semiconductor film comprising amorphous silicon over a substrate formed a blocking film thereon; disposing a material containing an element in contact with at least a first region of said semiconductor film, said element being capable of promoting crystallization of said semiconductor film; crystallizing said semiconductor film by heating, so that crystals grow in a first direction from said first region; patterning said semiconductor film to form at least one semiconductor island; forming a gate insulating film on said semiconductor island; forming a gate electrode on said gate insulating film; doping at least one of an n-type impurity and a p-type impurity into said semiconductor island to form at least a source region and a drain region with a channel region defined therebetween; and activating said one of the n-type impurity and the p-type impurity in said source region and said drain region, wherein a channel length direction extending between said source region and said drain region intersects with said first direction to form an angle.

Claim 35

A method of manufacturing a semiconductor device comprising the steps of: forming a semiconductor film comprising amorphous silicon over a substrate formed a blocking film thereon; disposing a material containing an element in contact with at least a first region of said semiconductor film, said element being capable of promoting crystallization of said semiconductor film; crystallizing said semiconductor film by heating, so that crystals grow in a first direction from said first region; patterning said semiconductor film to form at least one semiconductor island; forming a gate insulating film on said semiconductor island; forming a gate electrode on said gate insulating film; doping at least one of an n-type impurity and a p-type impurity into said semiconductor island to form at least a source region and a drain region with a channel region defined therebetween; and activating said one of the n-type impurity and the p-type impurity in said source region and said drain region, wherein a channel length direction extending between said source region and said drain region intersects with said first direction to form an angle.

Claim 39

A method of manufacturing a semiconductor device comprising the steps of: forming a semiconductor film comprising amorphous silicon over a substrate formed a blocking film thereon; disposing a material containing an element in contact with at least a first region of said semiconductor film, said element being capable of promoting crystallization of said semiconductor film; crystallizing said semiconductor film by heating, so that crystals grow in a first direction from said first region; patterning said semiconductor film to form at least one semiconductor island; forming a gate insulating film on said semiconductor island; forming a gate electrode on said gate insulating film; doping at least one of an n-type impurity and a p-type impurity into said semiconductor island to form at least a source region and a drain region with a channel region defined therebetween; activating said one of the n-type impurity and the p-type impurity in said source region and said drain region; forming an interlayer insulating film to cover said gate insulating film and said gate electrode; forming a contact hole through at least said gate insulating film and said interlayer insulating film to expose a portion of said source region or said drain region; and forming an electrode in contact with said source region or said drain region at said portion, wherein a channel length direction extending between said source region and said drain region intersects with said first direction to form an angle.

Claim 40

A method of manufacturing a semiconductor device comprising the steps of: forming a semiconductor film comprising amorphous silicon over a substrate formed a blocking film thereon; disposing a material containing an element in contact with at least a first region of said semiconductor film, said element being capable of promoting crystallization of said semiconductor film; crystallizing said semiconductor film by heating, so that crystals grow in a first direction from said first region; patterning said semiconductor film to form at least one semiconductor island; forming a gate insulating film on said semiconductor island; forming a gate electrode on said gate insulating film; doping at least one of an n-type impurity and a p-type impurity into said semiconductor island to form at least a source region and a drain region with a channel region defined therebetween; activating said one of the n-type impurity and the p-type impurity in said source region and said drain region; forming an interlayer insulating film to cover said gate insulating film and said gate electrode; forming a contact hole through at least said gate insulating film and said interlayer insulating film to expose a portion of said source region or said drain region; and forming an electrode in contact with said source region or said drain region at said portion, wherein a channel length direction extending between said source region and said drain region intersects with said first direction to form an angle.

Claim 44

A method of manufacturing a semiconductor device comprising the steps of: forming a semiconductor film comprising amorphous silicon over a substrate formed a blocking film thereon; disposing a material containing an element in contact with at least a first region of said semiconductor film, said element being capable of promoting crystallization of said semiconductor film; heating said semiconductor film; irradiating laser light to said semiconductor film; patterning said semiconductor film to form at least one semiconductor island; forming an insulating film on said semiconductor island; forming a film comprising a metal layer and a metal compound layer on said insulating film; and forming a source region and a drain region in said semiconductor island with a channel region defined therebetween, wherein said semiconductor film is crystallized by said heating and said irradiating, so that crystals grow in a first direction from said first region; and a channel length direction extending between said source region and said drain region intersects with said first direction to form an angle.

Claim 45

A method of manufacturing a semiconductor device comprising the steps of: forming a semiconductor film comprising amorphous silicon over a substrate formed a blocking film thereon; disposing a material containing an element in contact with at least a first region of said semiconductor film, said element being capable of promoting crystallization of said semiconductor film; heating said semiconductor film; irradiating laser light to said semiconductor film; patterning said semiconductor film to form at least one semiconductor island; forming an insulating film on said semiconductor island; forming a film comprising a metal layer and a metal compound layer on said insulating film; and forming a source region and a drain region in said semiconductor island with a channel region defined therebetween, wherein said semiconductor film is crystallized by said heating and said irradiating, so that crystals grow in a first direction from said first region; and a channel length direction extending between said source region and said drain region intersects with said first direction to form an angle.

Claim 49

A method of manufacturing a semiconductor device comprising the steps of: forming a semiconductor film comprising amorphous silicon over a substrate formed a blocking film thereon; disposing a material containing an element in contact with at least a first region of said semiconductor film, said element being capable of promoting crystallization of said semiconductor film; heating said semiconductor film; irradiating laser light to said semiconductor film; patterning said semiconductor film to form at least one semiconductor island; forming an insulating film on said semiconductor island; forming a film comprising a metal layer and a metal compound layer on a portion of said insulating film; forming a source region and a drain region in said semiconductor island with a channel region defined therebetween; forming an interlayer insulating film to cover said gate insulating film and said film comprising the metal layer and the metal compound layer; forming a contact hole through at least said insulating film and said interlayer insulating film to expose a portion of said source region or said drain region; and forming an electrode in contact with said source region or said drain region at said portion, wherein said semiconductor film is crystallized by said heating and said irradiating, so that crystals grow in a first direction from said first region; and a channel length direction extending between said source region and said drain region intersects with said first direction to form an angle.

Claim 50

A method of manufacturing a semiconductor device comprising the steps of: forming a semiconductor film comprising amorphous silicon over a substrate formed a blocking film thereon; disposing a material containing an element in contact with at least a first region of said semiconductor film, said element being capable of promoting crystallization of said semiconductor film; heating said semiconductor film; irradiating laser light to said semiconductor film; patterning said semiconductor film to form at least one semiconductor island; forming an insulating film on said semiconductor island; forming a film comprising a metal layer and a metal compound layer on a portion of said insulating film; forming a source region and a drain region in said semiconductor island with a channel region defined therebetween; forming an interlayer insulating film to cover said gate insulating film and said film comprising the metal layer and the metal compound layer; forming a contact hole through at least said insulating film and said interlayer insulating film to expose a portion of said source region or said drain region; and forming an electrode in contact with said source region or said drain region at said portion, wherein said semiconductor film is crystallized by said heating and said irradiating, so that crystals grow in a first direction from said first region; and a channel length direction extending between said source region and said drain region intersects with said first direction to form an angle.

Claim 54

A method of manufacturing a semiconductor device comprising the steps of: forming a semiconductor film comprising amorphous silicon over a substrate formed a blocking film thereon; disposing a material containing an element in contact with at least a first region of said semiconductor film, said element being capable of promoting crystallization of said semiconductor film; crystallizing said semiconductor film by heating, so that crystals grow in a first direction from said first region; patterning said semiconductor film to form at least one semiconductor island; forming an insulating film on said semiconductor island; forming a film comprising a metal layer and a metal compound layer on a portion of said insulating film; and forming a source region and a drain region in said semiconductor island with a channel region defined therebetween, wherein a channel length direction extending between said source region and said drain region intersects with said first direction to form an angle.

Claim 55

A method of manufacturing a semiconductor device comprising the steps of: forming a semiconductor film comprising amorphous silicon over a substrate formed a blocking film thereon; disposing a material containing an element in contact with at least a first region of said semiconductor film, said element being capable of promoting crystallization of said semiconductor film; crystallizing said semiconductor film by heating, so that crystals grow in a first direction from said first region; patterning said semiconductor film to form at least one semiconductor island; forming an insulating film on said semiconductor island; forming a film comprising a metal layer and a metal compound layer on a portion of said insulating film; and forming a source region and a drain region in said semiconductor island with a channel region defined therebetween, wherein a channel length direction extending between said source region and said drain region intersects with said first direction to form an angle.

Claim 59

A method of manufacturing a semiconductor device comprising the steps of: forming a semiconductor film comprising amorphous silicon over a substrate formed a blocking film thereon; disposing a material containing an element in contact with at least a first region of said semiconductor film, said element being capable of promoting crystallization of said semiconductor film; crystallizing said semiconductor film by heating, so that crystals grow in a first direction from said first region; patterning said semiconductor film to form at least one semiconductor island; forming an insulating film on said semiconductor island; forming a film which functions as a mask on a portion of said insulating film; doping at least one of an n-type impurity and a p-type impurity into said semiconductor island using said film as the mask to form at least a source region and a drain region with a channel region defined therebetween; and activating said one of the n-type impurity and the p-type impurity in said source region and said drain region, wherein a channel length direction extending between said source region and said drain region intersects with said first direction to form an angle.

Claim 60

A method of manufacturing a semiconductor device comprising the steps of: forming a semiconductor film comprising amorphous silicon over a substrate formed a blocking film thereon; disposing a material containing an element in contact with at least a first region of said semiconductor film, said element being capable of promoting crystallization of said semiconductor film; crystallizing said semiconductor film by heating, so that crystals grow in a first direction from said first region; patterning said semiconductor film to form at least one semiconductor island; forming an insulating film on said semiconductor island; forming a film which functions as a mask on a portion of said insulating film; doping at least one of an n-type impurity and a p-type impurity into said semiconductor island using said film as the mask to form at least a source region and a drain region with a channel region defined therebetween; and activating said one of the n-type impurity and the p-type impurity in said source region and said drain region, wherein a channel length direction extending between said source region and said drain region intersects with said first direction to form an angle.