US5508533A
Expired / Lapsed
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Semiconductor device and method of fabricating same
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1994-08-05
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Granted: 1996-04-16
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Expires: 2014-08-05
Abstract
Abstract A highly reliable thin-film transistor (TFT) having excellent characteristics. A silicon film is grown laterally by adding a metal element such as nickel to promote crystallization. A crystal grain boundary is formed parallel to a gate electrode and around the center of the gate electrode. Thus, the grain boundary does not exist around the interface between the drain and the channel formation region. At this interface, a large stress is induced by a large electric field. The concentration of the metal element is low around the interface between the drain and the channel formation region. Therefore, the leakage voltage is small. Also, when a reverse voltage is applied to the gate electrode, the leakage current is small.
Inventors
- 👤 Yasuhiko Takemura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 19:24
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/32; H10P14/3242; H10P14/3244; H10P14/3248; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/031; H10D30/0312; H10D30/0314; H10D30/0321; H10D30/60; H10D30/67; H10D30/6704; H10D30/6713; H10D30/6729; H10D30/673; H10D30/6731; H10D30/674; H10D30/6741; H10D30/6743; H10D30/6744; H10D30/6745; H10P14/29; H10P14/2901; H10P14/2922; H10P14/3202; H10P14/3238; H10P14/3241; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P14/36; H10P14/38; H10P14/3802; H10P14/3806
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
174 words
A thin-film transistor comprising: a crystalline silicon film shaped like an island having a top surface and a bottom surface, said silicon film containing a metal element for promoting crystallization, said silicon film having a channel formation region, a source region, and a drain region wherein boundaries are defined between said source region and said channel region, and between said drain region and said channel region; a gate-insulating film for covering at least a part of said crystalline silicon film; a crystal grain boundary formed in said channel formation region and extending perpendicularly to flow of carriers, said grain boundary containing said metal element for promoting said crystallization at a high concentration, said grain boundary extending from said top surface to said bottom surface in said channel forming region and located apart from the boundary between said source region and said channel region, and the boundary between said drain region and said channel region; and a gate electrode formed on said gate-insulating film which is substantially coincident in shape with said channel formation region.
Claim 2
Dependent Claim
174 words
A thin-film transistor comprising: a crystalline silicon film shaped like an island having a top surface and a bottom surface, said silicon film containing a metal element for promoting crystallization, said silicon film having a channel formation region, a source region, and a drain region wherein boundaries are defined between said source region and said channel region, and between said drain region and said channel region; a gate-insulating film for covering at least a part of said crystalline silicon film; a crystal grain boundary formed in said channel formation region and extending perpendicularly to flow of carriers, said grain boundary containing said metal element for promoting said crystallization at a high concentration, said grain boundary extending from said top surface to said bottom surface in said channel forming region and located apart from the boundary between said source region and said channel region, and the boundary between said drain region and said channel region; and a gate electrode formed on said gate-insulating film which is substantially coincident in shape with said channel formation region.
Claim 3
Dependent Claim
21 words
A thin-film transistor of claim 1, wherein said crystal grain boundary is located around a center of said channel formation region.
Claim 4
Dependent Claim
42 words
The thin film transistor of claim 1 wherein the crystals constituting said channel region substantially perpendicularly extend toward said crystal grain boundary from opposite sides thereof whereby said crystal grain boundary defines the boundary between the crystals on the opposite sides thereof.
Claim 5
Dependent Claim
20 words
The thin film transistor of claim 1 wherein said channel region is located on both sides of said grain boundary.
Claim 6
Dependent Claim
88 words
An insulated gate field effect transistor comprising: a semiconductor layer formed on an insulating surface, said semiconductor layer including source, drain and channel regions formed therein; and a gate electrode provided adjacent to said channel region with a gate insulating interposed therebetween, wherein said semiconductor layer contains a crystallization promoting metal element, and a concentration of said metal element at a source and channel boundary and a drain and channel boundary is lower than a concentration of said metal element in a middle portion of said channel region.
Claim 7
Dependent Claim
88 words
An insulated gate field effect transistor comprising: a semiconductor layer formed on an insulating surface, said semiconductor layer including source, drain and channel regions formed therein; and a gate electrode provided adjacent to said channel region with a gate insulating interposed therebetween, wherein said semiconductor layer contains a crystallization promoting metal element, and a concentration of said metal element at a source and channel boundary and a drain and channel boundary is lower than a concentration of said metal element in a middle portion of said channel region.
Claim 8
Dependent Claim
15 words
The insulated gate field effect transistor of claim 5 wherein said semiconductor layer comprises silicon.
Claim 9
Dependent Claim
33 words
The insulated gate field effect transistor of claim 5 wherein said concentration at the source and channel boundary and a drain and channel boundary is not higher than 4×10 18 atoms/cm 3 .
Claim 10
Dependent Claim
35 words
The transistor of claim 5 wherein said metal element is selected from the group consisting of Fe, Co, Ni, Ru, Rh, Pd, Os, Ir, Pt, Sc, Ti, V, Cr, Mn, Cu, Zn, Au and Ag.
Claim 11
Dependent Claim
13 words
The transistor of claim 5 wherein said semiconductor layer comprises a crystalline silicon.
Claim 12
Dependent Claim
118 words
A thin film transistor which has a crystalline semiconductor layer, said semiconductor layer comprising: source and drain regions; and a channel region extending in a first direction between said source and drain regions and having a top surface and a bottom surface and boundaries defined between said source region and said channel region, and between said drain region and said channel region, wherein said channel region has a grain boundary extending from said top surface to said bottom surface in said channel region and located apart from both said boundaries between said channel region and said source and drain regions, said grain boundary extending across said channel region in a second direction substantially perpendicular to said first direction.
Claim 13
Dependent Claim
118 words
A thin film transistor which has a crystalline semiconductor layer, said semiconductor layer comprising: source and drain regions; and a channel region extending in a first direction between said source and drain regions and having a top surface and a bottom surface and boundaries defined between said source region and said channel region, and between said drain region and said channel region, wherein said channel region has a grain boundary extending from said top surface to said bottom surface in said channel region and located apart from both said boundaries between said channel region and said source and drain regions, said grain boundary extending across said channel region in a second direction substantially perpendicular to said first direction.
Claim 14
Dependent Claim
42 words
The thin film transistor of claim 10 wherein at least said channel region contains a metal element selected from the group consisting of Fe, Co, Ni, Ru, Rh, Pd, Os, Ir, Pt, Sc, Ti, V, Cr, Mn, Cu, Zn, Au and Ag.
Claim 15
Dependent Claim
38 words
The thin film transistor of claim 11 wherein a concentration of said metal in the vicinity of said boundaries between said channel region and said source and drain regions is not higher than 4×10 18 atoms/cm 3 .
Claim 16
Dependent Claim
20 words
The thin film transistor of claim 10 wherein said source and drain regions have one of p-type or n-type conductivity.
References Cited (Backward Citations)
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