US6060894A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Temporary package, method and system for testing semiconductor dice having backside electrodes
Assignee: Micron Technology Inc
•
Filing: 1999-08-02
•
Granted: 2000-05-09
•
Expires: 2019-08-02
Abstract
Abstract A temporary package, a method, and a system for testing a semiconductor die having a backside electrode are provided. The temporary package includes a base for retaining the die; a conductive member for electrically contacting the backside electrode on the die; and terminal contacts in electrical communication with the conductive member. The package also includes a force applying mechanism for biasing the conductive member against the backside electrode. A conductive path between the conductive member and terminal contacts can be through a wire, or through the force applying mechanism. In an alternate embodiment the temporary package includes a base and terminal contacts formed in the configuration of a conventional semiconductor package. A cover for the base can include a metal, carbon filled elastomer, conductive foam, or conductive adhesive conductive member. The conductive member can be adapted to simultaneously contact the backside electrode on the die, and a mating contact on the base in electrical communication with the terminal contact. In addition, the conductive member can function as a heat sink for cooling the die during the test procedures.
Inventors
- 👤 David R. Hembree
- 👤 Salman Akram
- 👤 Warren M. Farnworth
- 👤 James M. Wark
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 19:43
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/2851; G01R31/2886
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
109 words
A temporary package for testing a semiconductor die having a circuit side with a plurality of first contacts thereon, and a backside with a backside electrode thereon, comprising: a base for retaining the die comprising a plurality of terminal contacts configured for electrical communication with a test circuitry; an interconnect on the base comprising a plurality of second contacts configured to electrically contact the first contacts on the circuit side of the die and configured for electrical communication with the test circuitry; and a connection mechanism on the base configured to electrically contact the backside electrode and provide an electrical path to a selected terminal contact on the base.
Claim 2
Dependent Claim
109 words
A temporary package for testing a semiconductor die having a circuit side with a plurality of first contacts thereon, and a backside with a backside electrode thereon, comprising: a base for retaining the die comprising a plurality of terminal contacts configured for electrical communication with a test circuitry; an interconnect on the base comprising a plurality of second contacts configured to electrically contact the first contacts on the circuit side of the die and configured for electrical communication with the test circuitry; and a connection mechanism on the base configured to electrically contact the backside electrode and provide an electrical path to a selected terminal contact on the base.
Claim 3
Dependent Claim
35 words
The package of claim 1 wherein the connection mechanism comprises an electrically conductive plate configured to contact the backside electrode and a wire attached to the plate in electrical communication with the selected terminal contact.
Claim 4
Dependent Claim
35 words
The package of claim 1 wherein the connection mechanism comprises an electrically conductive clamp and spring attachable to the base configured to electrically contact the backside electrode and to bias the die against the interconnect.
Claim 5
Dependent Claim
41 words
The package of claim 1 wherein the connection mechanism comprises an electrically conductive clamp configured to directly contact the selected terminal contact on the base and an electrically conductive spring on the clamp configured to bias the die against the interconnect.
Claim 6
Dependent Claim
25 words
The package of claim 1 wherein the electrical path comprises an electrically conductive force applying mechanism configured to bias the die and the interconnect together.
Claim 7
Dependent Claim
35 words
The package of claim 1 wherein the electrical path comprises an electrically conductive force applying mechanism configured to bias the die and the interconnect together and to contact the selected terminal contact on the base.
Claim 8
Dependent Claim
123 words
A temporary package for testing a semiconductor die having a circuit side with a plurality of first contacts thereon, and a backside with a backside electrode thereon, comprising: a base for retaining the die comprising a plurality of terminal contacts; an interconnect on the base comprising a plurality of second contacts in electrical communication with selected terminal contacts and configured to electrically contact the first contacts on the die; and a force applying mechanism for biasing the die and the interconnect together comprising an electrically conductive clamp attached to the base, and an electrically conductive spring attached to the clamp, the clamp and the string configured to provide an electrical path between the backside electrode and a selected terminal contact on the base.
Claim 9
Dependent Claim
123 words
A temporary package for testing a semiconductor die having a circuit side with a plurality of first contacts thereon, and a backside with a backside electrode thereon, comprising: a base for retaining the die comprising a plurality of terminal contacts; an interconnect on the base comprising a plurality of second contacts in electrical communication with selected terminal contacts and configured to electrically contact the first contacts on the die; and a force applying mechanism for biasing the die and the interconnect together comprising an electrically conductive clamp attached to the base, and an electrically conductive spring attached to the clamp, the clamp and the string configured to provide an electrical path between the backside electrode and a selected terminal contact on the base.
Claim 10
Dependent Claim
25 words
The package of claim 7 wherein the force applying mechanism further comprises an electrically conductive plate configured to contact the spring and the backside electrode.
Claim 11
Dependent Claim
14 words
The package of claim 7 wherein the clams and the spring comprise a metal.
Claim 12
Dependent Claim
35 words
The package of claim 7 wherein the force applying mechanism comprises an electrically conductive plate for contacting the backside electrode and a wire attached to the plate in electrical communication with the selected terminal contact.
Claim 13
Dependent Claim
15 words
The package of claim 7 wherein the clamp attaches to an opening in the base.
Claim 14
Dependent Claim
33 words
The package of claim 7 wherein the force applying mechanism comprises a plate for contacting the backside electrode, and a wire forming the electrical path between the plate and the selected terminal contact.
Claim 15
Dependent Claim
133 words
A temporary package for testing a semiconductor die having a circuit side with a plurality of first contacts thereon, and a backside with a backside electrode thereon, comprising: a base for retaining the die comprising a plurality of terminal contacts configured for electrical communication with test circuitry, and a contact pad in electrical communication with a selected terminal contact; an interconnect on the base comprising a plurality of second contacts in electrical communication with selected terminal contacts and configured to electrically contact the first contacts on the circuit side of the die; and a force applying mechanism for biasing the die and the interconnect together, the mechanism comprising an electrically conductive clamp and an electrically conductive spring attached to the base in electrical contact with the contact pad and with the backside electrode.
Claim 16
Dependent Claim
133 words
A temporary package for testing a semiconductor die having a circuit side with a plurality of first contacts thereon, and a backside with a backside electrode thereon, comprising: a base for retaining the die comprising a plurality of terminal contacts configured for electrical communication with test circuitry, and a contact pad in electrical communication with a selected terminal contact; an interconnect on the base comprising a plurality of second contacts in electrical communication with selected terminal contacts and configured to electrically contact the first contacts on the circuit side of the die; and a force applying mechanism for biasing the die and the interconnect together, the mechanism comprising an electrically conductive clamp and an electrically conductive spring attached to the base in electrical contact with the contact pad and with the backside electrode.
Claim 17
Dependent Claim
19 words
The package of claim 13 and further comprising an electrically conductive plate between the spring and the backside electrode.
Claim 18
Dependent Claim
27 words
The package of claim 14 wherein the conductive plate comprises a material selected from the group consisting of metal, carbon filled elastomer, conductive adhesive and conductive foam.
Claim 19
Independent Claim
162 words
A method for testing a semiconductor die having a first side with a plurality of first contacts thereon and a second side with a backside electrode thereon comprising: providing a temporary package for the die comprising a plurality of terminal contacts configured for electrical communication with test circuitry, an interconnect comprising a plurality of second contacts in electrical communication with selected terminal contacts configured to electrically contact the first contacts on the die, and a force applying mechanism configured to bias the die and the interconnect together, the mechanism in electrical communication with a selected terminal contact and configured to electrically contact the backside electrode to provide an electrical path from the selected terminal contact to the backside electrode; applying test signals through the selected terminal contacts and the second contacts on the interconnect to the first contacts on the die; and applying test signals through the selected terminal contact and the force applying mechanism to the backside electrode on the die.
Claim 20
Independent Claim
162 words
A method for testing a semiconductor die having a first side with a plurality of first contacts thereon and a second side with a backside electrode thereon comprising: providing a temporary package for the die comprising a plurality of terminal contacts configured for electrical communication with test circuitry, an interconnect comprising a plurality of second contacts in electrical communication with selected terminal contacts configured to electrically contact the first contacts on the die, and a force applying mechanism configured to bias the die and the interconnect together, the mechanism in electrical communication with a selected terminal contact and configured to electrically contact the backside electrode to provide an electrical path from the selected terminal contact to the backside electrode; applying test signals through the selected terminal contacts and the second contacts on the interconnect to the first contacts on the die; and applying test signals through the selected terminal contact and the force applying mechanism to the backside electrode on the die.
Claim 21
Dependent Claim
20 words
The method of claim 16 wherein the force applying mechanism comprises an electrically conductive clamp and an electrically conductive spring.
Claim 22
Dependent Claim
39 words
The method of claim 16 wherein the force applying mechanism comprises an electrically conductive clamp and an electrically conductive spring, the clamp configured to electrically engage a contact on the base in electrical communication with the selected terminal contact.
Claim 23
Dependent Claim
27 words
The method of claim 16 wherein the force applying mechanism comprises an electrically conductive plate attached to a wire in electrical communication with the selected terminal contact.
Claim 24
Independent Claim
142 words
A method for testing a semiconductor die having a first side with a plurality of first contacts thereon and a second side with a backside electrode thereon comprising: providing a test circuitry configured to apply test signals to the die; providing a temporary package for the die comprising: a base for retaining the die comprising a terminal contact in electrical communication with the test circuitry, and a contact pad in electrical communication with the terminal contact; a clamp and a spring attached to the base in electrical contact with the contact pad; and a conductive plate pressed against the backside electrode by the spring; assembling the die in the temporary package; placing the terminal contact on the temporary package in electrical communication with the test circuitry; and applying test signals through the terminal contact and the conductive plate to the backside electrode.
Claim 25
Independent Claim
142 words
A method for testing a semiconductor die having a first side with a plurality of first contacts thereon and a second side with a backside electrode thereon comprising: providing a test circuitry configured to apply test signals to the die; providing a temporary package for the die comprising: a base for retaining the die comprising a terminal contact in electrical communication with the test circuitry, and a contact pad in electrical communication with the terminal contact; a clamp and a spring attached to the base in electrical contact with the contact pad; and a conductive plate pressed against the backside electrode by the spring; assembling the die in the temporary package; placing the terminal contact on the temporary package in electrical communication with the test circuitry; and applying test signals through the terminal contact and the conductive plate to the backside electrode.
Claim 26
Dependent Claim
18 words
The method of claim 20 wherein the clamp includes a tab configured to electrically contact the contact pad.
Claim 27
Independent Claim
139 words
A system for testing a semiconductor die having a first side with a plurality of first contacts thereon and a second side with a backside electrode thereon comprising: a testing apparatus in electrical communication with test circuitry configured to apply test signals to the die; and a temporary package for the die comprising a base for retaining the die, a plurality of terminal contacts on the base, a contact on the base in electrical communication with a selected terminal contact, an interconnect on the base comprising a plurality of second contacts in electrical communication with selected terminal contacts and configured to electrically contact the first contacts on the die, a force applying mechanism configured to bias the die and the interconnect together and configured to electrically contact the contact and the backside electrode to provide a conductive path therebetween.
Claim 28
Independent Claim
139 words
A system for testing a semiconductor die having a first side with a plurality of first contacts thereon and a second side with a backside electrode thereon comprising: a testing apparatus in electrical communication with test circuitry configured to apply test signals to the die; and a temporary package for the die comprising a base for retaining the die, a plurality of terminal contacts on the base, a contact on the base in electrical communication with a selected terminal contact, an interconnect on the base comprising a plurality of second contacts in electrical communication with selected terminal contacts and configured to electrically contact the first contacts on the die, a force applying mechanism configured to bias the die and the interconnect together and configured to electrically contact the contact and the backside electrode to provide a conductive path therebetween.
Claim 29
Dependent Claim
24 words
The system of claim 22 wherein the force applying mechanism comprises a spring member and an electrically conductive plate for contacting the backside electrode.
Claim 30
Dependent Claim
13 words
The system of claim 22 wherein the testing apparatus comprises a burn-in board.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-05-09 | 2003-11-08 | 2004-05-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-05-09 | 2007-11-08 | 2008-05-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-05-09 | 2011-11-08 | 2012-05-09 | $7700.00 | Window Closed / Lapsed |