US5367253A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Clamped carrier for testing of semiconductor dies
Assignee: Micron Technology Inc
•
Filing: 1993-04-14
•
Granted: 1994-11-22
•
Expires: 2013-04-14
Abstract
Abstract Disclosed is a technique for testing a singularized semiconductor die prior to packaging the die, thereby allowing for the packaging or other use of only known good die. The invention employs a carrier tray which preferably supports several die carriers which individually support a plurality of dies. Bridge clamps press against rigid covers which bias the dies against the contact members. The die carriers include a housing of ceramic or other workable material. Contact pads on the interior of the package are coupled to exterior leads with conductive traces. The back side of a semiconductor die to be tested is removably mounted to a lid, and the bond pads on the die are aligned with the contact pads on the interior of the package. The lid is attached to the package thereby electrically coupling the contact pads with the bond pads on the die. The package has a configuration which facilitates the handling of the carrier so that the carrier can be conveniently used during burn-in and test procedures.
Inventors
- 👤 Alan G. Wood
- 👤 David R. Hembree
- 👤 Warren M. Farnworth
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 21:14
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/2851; G01R31/2893; G01R1/00; G01R1/02; G01R1/04; G01R1/0408; G01R1/0433; G01R1/0441; G01R1/0466; G01R1/0483; H; H05; H05K; H05K3/00; H05K3/40; H05K3/4007; H10; H10P; H10P72/00; H10P72/70; H10P72/74; H10P74/00; H10P74/23; H10W; H10W70/00; H10W70/60; H10W70/62; H10W70/65; H10W70/67; H10W70/68; H10W90/00; H10W90/701; H10W99/00; G01R3/00; G01R31/2855; G01R31/286; G01R31/2863; H05K2201/00; H05K2201/01; H05K2201/0104; H05K2201/0133; H05K2201/03; H05K2201/0332; H05K2201/0335; H05K2201/0347; H05K2201/0364; H05K2201/0367; H05K2201/0388; H05K2201/0394; H05K2201/09; H05K2201/09209; H05K2201/09372; H05K2201/09481; H05K2201/095; H05K2201/09563; H05K2203/00; H05K2203/03; H05K2203/0307; H05K2203/07; H05K2203/0703; H05K2203/0723; H05K3/0058; H05K3/0067; H05K3/42; H05K3/423; H10W70/654; H10W70/655; H10W70/681; H10W90/20; H10W90/24; H10W90/721; H10W90/722
Claims Analysis
Total Claims: 49
Claim 1
Independent Claim
204 words
A method for testing bare semiconductor die, comprising: a) providing a carrier tray, said tray having at least one housing location therein, and having a property of remaining substantially intact from -55° C. to 175° C.; b) providing at least one die receiving housing on said tray, each of said die receiving housing comprising a die receiving cavity, an electrical termination, and conductive traces, said traces forming an electrical pathway between said cavity and said electrical termination; c) providing a bare semiconductor die in said housing as a device under test; d) providing a lid portion to cooperate with each of said die receiving housings, wherein said lid portion and said die receiving housing form first and second opposing members; e) providing a clamping member and using the clamping member to clamp the lid portion to the die receiving housings, the clamping member engaging said carrier tray to secure the lid portion against the die receiving housing and further securing the die within said die receiving housing in electrical communication with said conductive traces; f) performing burn-in and characterization tests on the die while the lid portion is secured against the die receiving housing; and g) removing the die from the die receiving housing.
Claim 2
Independent Claim
204 words
A method for testing bare semiconductor die, comprising: a) providing a carrier tray, said tray having at least one housing location therein, and having a property of remaining substantially intact from -55° C. to 175° C.; b) providing at least one die receiving housing on said tray, each of said die receiving housing comprising a die receiving cavity, an electrical termination, and conductive traces, said traces forming an electrical pathway between said cavity and said electrical termination; c) providing a bare semiconductor die in said housing as a device under test; d) providing a lid portion to cooperate with each of said die receiving housings, wherein said lid portion and said die receiving housing form first and second opposing members; e) providing a clamping member and using the clamping member to clamp the lid portion to the die receiving housings, the clamping member engaging said carrier tray to secure the lid portion against the die receiving housing and further securing the die within said die receiving housing in electrical communication with said conductive traces; f) performing burn-in and characterization tests on the die while the lid portion is secured against the die receiving housing; and g) removing the die from the die receiving housing.
Claim 3
Dependent Claim
25 words
Method as described in claim 1, further characterized by: providing said lid portion as a unitary lid for a plurality of said die receiving housings.
Claim 4
Dependent Claim
24 words
Method as described in claim 1, further characterized by: providing said lid portion as a separate lid for each of said die receiving housings.
Claim 5
Dependent Claim
51 words
Method as described in claim 1, further characterized by: providing an interconnect member, the interconnect member containing at least a portion of said conductive traces, and the interconnect member further being in contact with electrical connections on the semiconductor die when the lid portion is secured against the die receiving housing.
Claim 6
Dependent Claim
30 words
The method of claim 1 wherein said lid has a hole therein, and said die is secured to said lid with a vacuum force through said hole to said lid.
Claim 7
Dependent Claim
26 words
The method as described in claim 1, further characterized by: removably bonding the die to the die receiving housing prior to said clamping the lid portion.
Claim 8
Dependent Claim
24 words
Method as described in claim 6, further characterized by: providing said lid portion as a separate lid for each of said die receiving housings.
Claim 9
Dependent Claim
75 words
The method as described in claim 1, further characterized by: a) providing said lid portion as a separate lid for each of said die receiving housings; b) the die being removably secured to the lid prior to said clamping the lid portion; and c) aligning the lid portion, with the die secured to the lid portion, so as to align the die within the die receiving housing in said electrical communication with said conductive traces.
Claim 10
Dependent Claim
30 words
The method of claim 8 wherein said lid has a hole therein, and said die is secured to said lid with a vacuum force through said hole to said lid.
Claim 11
Dependent Claim
27 words
The method as described in claim 1, further characterized by: the die being removably secured to the die receiving housing prior to said clamping the lid portion.
Claim 12
Dependent Claim
26 words
The method as described in claim 1, further characterized by: removably bonding the die to the die receiving housing prior to said clamping the lid portion.
Claim 13
Dependent Claim
49 words
The method as described in claim 1, further characterized by: providing a pad to bias the die against said conductive traces, said pad being elastically resilient, thereby biasing against the die received in the die receiving cavity with the contacts after the first and second plates have been mated.
Claim 14
Dependent Claim
27 words
The method as described in claim 1, further characterized by: providing a carrier tray with a property of remaining substantially intact from -10° C. to 125° C.
Claim 15
Independent Claim
201 words
A method for testing bare semiconductor die, comprising: a) providing a carrier tray, said tray having at least one housing location therein; b) providing at least one die receiving housing on said tray, each die receiving housing comprising a die receiving cavity, an electrical termination, and conductive traces, said traces forming an electrical pathway between said cavity and said electrical termination; c) providing a bare semiconductor die in said housing as a device under test; d) providing a lid portion to cooperate with each of said die receiving housings, wherein said lid portion and said die receiving housing form first and second opposing members; e) providing an interconnect having a plurality of conductive traces thereon; f) attaching said die to said interconnect such that said traces on said interconnect electrically couple said bond pads with said conductive traces; g) providing a clamping member, the clamping member engaging said carrier tray to secure the lid portion against the die receiving housing and further securing the die within said die receiving housing in electrical communication with said conductive traces; h) electrically analyzing the die for adherence to predetermined specifications; i) separating said lid from said housing and removing said die from said housing.
Claim 16
Independent Claim
201 words
A method for testing bare semiconductor die, comprising: a) providing a carrier tray, said tray having at least one housing location therein; b) providing at least one die receiving housing on said tray, each die receiving housing comprising a die receiving cavity, an electrical termination, and conductive traces, said traces forming an electrical pathway between said cavity and said electrical termination; c) providing a bare semiconductor die in said housing as a device under test; d) providing a lid portion to cooperate with each of said die receiving housings, wherein said lid portion and said die receiving housing form first and second opposing members; e) providing an interconnect having a plurality of conductive traces thereon; f) attaching said die to said interconnect such that said traces on said interconnect electrically couple said bond pads with said conductive traces; g) providing a clamping member, the clamping member engaging said carrier tray to secure the lid portion against the die receiving housing and further securing the die within said die receiving housing in electrical communication with said conductive traces; h) electrically analyzing the die for adherence to predetermined specifications; i) separating said lid from said housing and removing said die from said housing.
Claim 17
Dependent Claim
77 words
The method as described in claim 14, further characterized by: a) placing said interconnect in said die receiving housing and connecting said interconnect to the conductive traces on the die receiving housing; b) placing said die on said interconnect so as to align said traces on said interconnect to electrically couple said bond pads with said conductive traces; and c) placing said lid over said die, with the die being interposed between said lid and said interconnect.
Claim 18
Dependent Claim
77 words
The method as described in claim 15, further characterized by: a) providing said lid portion as a separate lid for each of said die receiving housings; b) the die being removably secured to the lid prior to said clamping the lid portion; and c) aligning the lid portion, with the die secured to the lid portion, so as to align the die within the die receiving housing in said electrical communication with said traces on said interconnect.
Claim 19
Dependent Claim
42 words
The method as described in claim 14, further characterized by: a) removably bonding the die to the die receiving housing prior to said clamping the lid portion; and b) subsequent to testing the die, removing from said first opposing member after testing.
Claim 20
Dependent Claim
30 words
The method of claim 14 wherein said lid has a hole therein, and said die is secured to said lid with a vacuum force through said hole to said lid.
Claim 21
Dependent Claim
26 words
The method as described in claim 14, further characterized by: removably bonding the die to the die receiving housing prior to said clamping the lid portion.
Claim 22
Dependent Claim
27 words
Method as described in claim 19, further characterized by: providing said lid portion as a separate lid for each of a plurality of said die receiving housings.
Claim 23
Dependent Claim
75 words
The method as described in claim 14, further characterized by: a) providing said lid portion as a separate lid for each of said die receiving housings; b) the die being removably secured to the lid prior to said clamping the lid portion; and c) aligning the lid portion, with the die secured to the lid portion, so as to align the die within the die receiving housing in said electrical communication with said conductive traces.
Claim 24
Dependent Claim
30 words
The method of claim 21 wherein said lid has a hole therein, and said die is secured to said lid with a vacuum force through said hole to said lid.
Claim 25
Dependent Claim
27 words
The method as described in claim 14, further characterized by: the die being removably secured to the die receiving housing prior to said clamping the lid portion.
Claim 26
Dependent Claim
26 words
The method as described in claim 14, further characterized by: removably bonding the die to the die receiving housing prior to said clamping the lid portion.
Claim 27
Dependent Claim
49 words
The method as described in claim 14, further characterized by: providing a pad to bias the die against said conductive traces, said pad being elastically resilient, thereby biasing against the die received in the die receiving cavity with the contacts after the first and second plates have been mated.
Claim 28
Dependent Claim
89 words
Method as described in claim 4, further characterized by: providing said interconnect member as a separate unit from the die receiving housing, thereby allowing dies with different patterns of bondpads to be aligned with a version of said interconnect member custom made for that die, with several variants of said interconnect member being mating with the same die cavity plate, thereby facilitating said performing burn-in and characterization tests on the die by permitting the same die receiving housing to be used with said dies with different patterns of bondpads.
Claim 29
Dependent Claim
80 words
Method as described in claim 14, further characterized by: providing said interconnect as a separate unit from the die receiving housing, thereby allowing dies with different patterns of bondpads to be aligned with a version of said interconnect custom made for that die, with several variants of said interconnect being mating with the same die cavity plate, thereby facilitating said electrical analysis by permitting the same die receiving housing to be used with said dies with different patterns of bondpads.
Claim 30
Independent Claim
296 words
A method for testing bare semiconductor die, comprising: a) providing a carrier tray, said tray having at least one housing location therein; b) providing at least one die receiving housing on said tray, each of said die receiving housing comprising a die receiving cavity, an electrical termination, a plurality of electrical contacts in the cavity for engaging contact points on the die and conductive traces, said traces forming an electrical pathway between said electrical contacts and said electrical termination; c) providing a bare semiconductor die in said housing as a device under test; d) providing a lid portion to cooperate with each of said die receiving housings, wherein said lid portion and said die receiving housing form first and second opposing members; e) providing a clamping component which comprises a flexible biasing member, and using the clamping component to clamp the lid portion to the die receiving housings, the clamping component engaging said carrier tray to secure the lid portion against the die receiving housing and further securing the die within said die receiving housing in electrical communication with said conductive traces, the flexible biasing member resulting in the clamping component cooperating with the lid portion to bias the die within the die receiving housings into contact with said traces, said biasing of the die being normal to a major surface of the die, so that said clamping of the lid portion to the die receiving housing results in a force applied between the die and the electrical contacts which is sufficient to establish ohmic contact with contact points on the die and the electrical contacts; f) performing burn-in and characterization tests on the die while the lid portion is secured against the die receiving housing; and g) removing the die from the die receiving housing.
Claim 31
Independent Claim
296 words
A method for testing bare semiconductor die, comprising: a) providing a carrier tray, said tray having at least one housing location therein; b) providing at least one die receiving housing on said tray, each of said die receiving housing comprising a die receiving cavity, an electrical termination, a plurality of electrical contacts in the cavity for engaging contact points on the die and conductive traces, said traces forming an electrical pathway between said electrical contacts and said electrical termination; c) providing a bare semiconductor die in said housing as a device under test; d) providing a lid portion to cooperate with each of said die receiving housings, wherein said lid portion and said die receiving housing form first and second opposing members; e) providing a clamping component which comprises a flexible biasing member, and using the clamping component to clamp the lid portion to the die receiving housings, the clamping component engaging said carrier tray to secure the lid portion against the die receiving housing and further securing the die within said die receiving housing in electrical communication with said conductive traces, the flexible biasing member resulting in the clamping component cooperating with the lid portion to bias the die within the die receiving housings into contact with said traces, said biasing of the die being normal to a major surface of the die, so that said clamping of the lid portion to the die receiving housing results in a force applied between the die and the electrical contacts which is sufficient to establish ohmic contact with contact points on the die and the electrical contacts; f) performing burn-in and characterization tests on the die while the lid portion is secured against the die receiving housing; and g) removing the die from the die receiving housing.
Claim 32
Dependent Claim
69 words
Method as described in claim 28, further characterized by: positioning said biasing member so as to extend from a substantially rigid portion of the clamping component and supported by a tab on the rigid portion, the biasing member being interspaced between the substantially rigid portion and the lid portion, wherein said biasing member exerts its force against the lid portion when the clamping component is engaging said carrier tray.
Claim 33
Dependent Claim
17 words
Method as described in claim 28, further characterized by providing said biasing member as a leaf spring.
Claim 34
Dependent Claim
25 words
Method as described in claim 28, further characterized by: providing said lid portion as a unitary lid for a plurality of said die receiving housings.
Claim 35
Dependent Claim
24 words
Method as described in claim 28, further characterized by: providing said lid portion as a separate lid for each of said die receiving housings.
Claim 36
Dependent Claim
63 words
Method as described in claim 28, further characterized by: providing an interconnect member, the interconnect member containing at least a portion of said conductive traces, and the interconnect member further including said plurality of electrical contacts, said plurality of electrical contacts on said interconnect member being in contact with said contact points when the lid portion is secured against the die receiving housing.
Claim 37
Dependent Claim
89 words
Method as described in claim 33, further characterized by: providing said interconnect member as a separate unit from the die receiving housing, thereby allowing dies with different patterns of bondpads to be aligned with a version of said interconnect member custom made for that die, with several variants of said interconnect member being mating with the same die cavity plate, thereby facilitating said performing burn-in and characterization tests on the die by permitting the same die receiving housing to be used with said dies with different patterns of bondpads.
Claim 38
Dependent Claim
30 words
The method of claim 28 wherein said lid has a hole therein, and said die is secured to said lid with a vacuum force through said hole to said lid.
Claim 39
Dependent Claim
25 words
The method as described in claim 28, further characterized by: providing said lid portion as a separate lid for each of said die receiving housings.
Claim 40
Dependent Claim
77 words
The method as described in claim 28, further characterized by: a) providing said lid portion as a separate lid for each of said die receiving housings; b) the die being removably secured to the lid prior to said clamping the lid portion; and c) aligning the lid portion, with the die secured to the lid portion, so as to align the die within the die receiving housing in said electrical communication with said plurality of electrical contacts.
Claim 41
Dependent Claim
30 words
The method of claim 37 wherein said lid has a hole therein, and said die is secured to said lid with a vacuum force through said hole to said lid.
Claim 42
Dependent Claim
26 words
The method as described in claim 28, further characterized by: removably bonding the die to the die receiving housing prior to said clamping the lid portion.
Claim 43
Dependent Claim
49 words
The method as described in claim 28, further characterized by: providing a pad to bias the die against said conductive traces, said pad being elastically resilient, thereby biasing against the die received in the die receiving cavity with the contacts after the first and second plates have been mated.
Claim 44
Dependent Claim
27 words
The method as described in claim 28, further characterized by: providing a carrier tray with a property of remaining substantially intact from -10° C. to 125° C.
Claim 45
Dependent Claim
27 words
The method as described in claim 28, further characterized by: providing a carrier tray with a property of remaining substantially intact from -55° C. to 175° C.
Claim 46
Independent Claim
299 words
A method for testing bare semiconductor die, comprising: a) providing a carrier tray, said tray having at least one housing location therein; b) providing at least one die receiving housing on said tray, each of said die receiving housing comprising a die receiving cavity and an electrical termination; c) providing an interconnect in the die receiving cavity, the interconnect having a plurality of conductive traces thereon, a plurality of electrical contacts for engaging contact points on the die, said traces forming an electrical pathway between said electrical contacts and said electrical termination; d) providing a bare semiconductor die in said housing as a device under test; e) providing a lid portion to cooperate with each of said die receiving housings, wherein said lid portion and said die receiving housing from first and second opposing members; f) providing a clamping component which comprises a flexible biasing member, and using the clamping component to clamp the lid portion to the die receiving housings, the clamping component engaging said carrier tray to secure the lid portion against the die receiving housing and further securing the die within said die receiving housing in electrical communication with said conductive traces, the flexible biasing member resulting in the clamping component cooperating with the lid portion to bias the die within the die receiving housings into contact with said traces, said biasing of the die being normal to a major surface of the die, so that said clamping of the lid portion to the die receiving housing results in a force applied between the die and the electrical contacts which is sufficient to establish ohmic contact with contact points on the die and the electrical contacts; g) electrically analyzing the die for adherence to predetermined specifications; and h) removing the die from the die receiving housing.
Claim 47
Independent Claim
299 words
A method for testing bare semiconductor die, comprising: a) providing a carrier tray, said tray having at least one housing location therein; b) providing at least one die receiving housing on said tray, each of said die receiving housing comprising a die receiving cavity and an electrical termination; c) providing an interconnect in the die receiving cavity, the interconnect having a plurality of conductive traces thereon, a plurality of electrical contacts for engaging contact points on the die, said traces forming an electrical pathway between said electrical contacts and said electrical termination; d) providing a bare semiconductor die in said housing as a device under test; e) providing a lid portion to cooperate with each of said die receiving housings, wherein said lid portion and said die receiving housing from first and second opposing members; f) providing a clamping component which comprises a flexible biasing member, and using the clamping component to clamp the lid portion to the die receiving housings, the clamping component engaging said carrier tray to secure the lid portion against the die receiving housing and further securing the die within said die receiving housing in electrical communication with said conductive traces, the flexible biasing member resulting in the clamping component cooperating with the lid portion to bias the die within the die receiving housings into contact with said traces, said biasing of the die being normal to a major surface of the die, so that said clamping of the lid portion to the die receiving housing results in a force applied between the die and the electrical contacts which is sufficient to establish ohmic contact with contact points on the die and the electrical contacts; g) electrically analyzing the die for adherence to predetermined specifications; and h) removing the die from the die receiving housing.
Claim 48
Dependent Claim
80 words
Method as described in claim 43, further characterized by: providing said interconnect as a separate unit from the die receiving housing, thereby allowing dies with different patterns of bondpads to be aligned with a version of said interconnect custom made for that die, with several variants of said interconnect being mating with the same die cavity plate, thereby facilitating said electrical analysis by permitting the same die receiving housing to be used with said dies with different patterns of bondpads.
Claim 49
Dependent Claim
69 words
Method as described in claim 43, further characterized by: positioning said biasing member so as to extend from a substantially rigid portion of the clamping component and supported by a tab on the rigid portion, the biasing member being interspaced between the substantially rigid portion and the lid portion, wherein said biasing member exerts its force against the lid portion when the clamping component is engaging said carrier tray.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-21 | 1998-05-23 | 1998-11-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-21 | 2002-05-23 | 2002-11-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-21 | 2006-05-23 | 2006-11-22 | $7700.00 | Window Closed / Lapsed |