US5541525A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Carrier for testing an unpackaged semiconductor die
Assignee: Micron Technology Inc
•
Filing: 1994-11-14
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Granted: 1996-07-30
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Expires: 2014-11-14
Abstract
Abstract A carrier for testing an unpackaged semiconductor die is provided. The carrier includes: a base; a temporary interconnect for establishing electrical communication between the die and external test circuitry; a retention mechanism for securing the interconnect to the base; and a force distribution mechanism for biasing the die and interconnect together. The interconnect includes a substrate having raised contact members adapted to penetrate bond pads, or tests pads, on the die to form an electrical connection. Conductive traces are formed on the substrate in electrical communication with the raised contact members and connect to external connectors formed on the base. The interconnect is adapted for testing a particular type of die but is interchangeable with other interconnects to permit testing of different types of dice using a universal carrier.
Inventors
- 👤 Alan G. Wood
- 👤 Warren M. Farnworth
- 👤 David R. Hembree
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 09:34
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/04; G01R1/0408; G01R1/0433; G01R1/0441; G01R1/0466; G01R1/0483; G01R31/00; G01R31/28; G01R31/2851; G01R31/2893; H; H05; H05K; H05K3/00; H05K3/40; H05K3/4007; H10; H10P; H10P72/00; H10P72/70; H10P72/74; H10P74/00; H10P74/23; H10W; H10W70/00; H10W70/60; H10W70/62; H10W70/65; H10W70/67; H10W70/68; H10W90/00; H10W90/701; H10W99/00; G01R3/00; G01R31/2855; G01R31/286; G01R31/2863; H05K2201/00; H05K2201/01; H05K2201/0104; H05K2201/0133; H05K2201/03; H05K2201/0332; H05K2201/0335; H05K2201/0347; H05K2201/0364; H05K2201/0367; H05K2201/0388; H05K2201/0394; H05K2201/09; H05K2201/09209; H05K2201/09372; H05K2201/09481; H05K2201/095; H05K2201/09563; H05K2203/00; H05K2203/03; H05K2203/0307; H05K2203/07; H05K2203/0703; H05K2203/0723; H05K3/0058; H05K3/0067; H05K3/42; H05K3/423; H10W70/654; H10W70/655; H10W70/681; H10W72/00; H10W72/071; H10W72/0711; H10W72/075; H10W72/07502; H10W72/07504; H10W72/07531; H10W72/07532; H10W72/07533; H10W72/07551; H10W72/50; H10W90/20; H10W90/24; H10W90/721; H10W90/722
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
143 words
An apparatus for testing an unpackaged semiconductor die comprising: a base formed with sidewalls and a cavity; a plate with a support surface, said plate adapted for attachment to the base such that the support surface is contained within the cavity; an interconnect mounted to the support surface, said interconnect including a substrate and a contact member formed on the substrate adapted to contact a contact location on the die, and a conductive trace in electrical communication with the contact member; an external retention contact mounted to the base and extending into the cavity for contacting the conductive trace as the plate is attached to the base to retain the interconnect on the support surface and to establish electrical communication between the conductive trace and test circuitry; and a force distribution mechanism clipped to the base for biasing the die and interconnect together.
Claim 2
Independent Claim
143 words
An apparatus for testing an unpackaged semiconductor die comprising: a base formed with sidewalls and a cavity; a plate with a support surface, said plate adapted for attachment to the base such that the support surface is contained within the cavity; an interconnect mounted to the support surface, said interconnect including a substrate and a contact member formed on the substrate adapted to contact a contact location on the die, and a conductive trace in electrical communication with the contact member; an external retention contact mounted to the base and extending into the cavity for contacting the conductive trace as the plate is attached to the base to retain the interconnect on the support surface and to establish electrical communication between the conductive trace and test circuitry; and a force distribution mechanism clipped to the base for biasing the die and interconnect together.
Claim 3
Dependent Claim
27 words
The apparatus as claimed in claim 1 and wherein the interconnect is interchangeable with other interconnects to permit testing of different types of die using the carrier.
Claim 4
Dependent Claim
38 words
The apparatus as claimed in claim 1 and wherein the retention contact is adapted to press against the conductive trace on the interconnect at a first end and to electrically connect to test circuitry at a second end.
Claim 5
Dependent Claim
39 words
The apparatus as claimed in claim 1 and wherein the force distribution mechanism includes a pressure plate for contacting the die, a bridge plate attachable to the base and a spring sandwiched between the pressure plate and bridge plate.
Claim 6
Dependent Claim
34 words
The apparatus as claimed in claim 4 and wherein the pressure plate and bridge plate each include an aperture to permit the die to be attached to the pressure plate using an assembly tool.
Claim 7
Dependent Claim
37 words
The apparatus as claimed in claim 1 and wherein the contact member on the interconnect is formed as a mesa with a raised projection adapted to penetrate the contact location on the die to a penetration depth.
Claim 8
Dependent Claim
46 words
The apparatus as claimed in claim 1 and wherein the contact member on the interconnect is formed as a thick film contact using an ultrasonic forging process and the substrate is a material selected from the group consisting of silicon, ceramic, silicon-on-glass, silicon-on sapphire, and germanium.
Claim 9
Dependent Claim
29 words
The apparatus as claimed in claim 1 and wherein the contact member on the interconnect is a microbump contact mounted to a flexible tape and attached to the substrate.
Claim 10
Dependent Claim
182 words
A carrier for testing an unpackaged semiconductor die, comprising: a carrier base having a cavity; a plate with a support surface, said plate adapted for attachment to the base such that the support surface is contained within the cavity; an interconnect mountable to the support surface, said interconnect comprising a substrate having a raised contact member adapted to penetrate a contact location on the die, said interconnect further comprising an electrically conductive trace in electrical communication with the contact member and terminating in a contact pad; an external retention contact attached to the carrier base and extending into the cavity to abut the contact pad as the plate is attached to the base to retain the interconnect and establish electrical communication between the contact member on the interconnect and test circuitry; and a force distribution mechanism for biasing the interconnect and die together, said force distribution mechanism including a pressure plate for abutting the die, a bridge plate clipped to the base and a spring sandwiched between the pressure plate and bridge plate for exerting a biasing force on the pressure plate.
Claim 11
Dependent Claim
182 words
A carrier for testing an unpackaged semiconductor die, comprising: a carrier base having a cavity; a plate with a support surface, said plate adapted for attachment to the base such that the support surface is contained within the cavity; an interconnect mountable to the support surface, said interconnect comprising a substrate having a raised contact member adapted to penetrate a contact location on the die, said interconnect further comprising an electrically conductive trace in electrical communication with the contact member and terminating in a contact pad; an external retention contact attached to the carrier base and extending into the cavity to abut the contact pad as the plate is attached to the base to retain the interconnect and establish electrical communication between the contact member on the interconnect and test circuitry; and a force distribution mechanism for biasing the interconnect and die together, said force distribution mechanism including a pressure plate for abutting the die, a bridge plate clipped to the base and a spring sandwiched between the pressure plate and bridge plate for exerting a biasing force on the pressure plate.
Claim 12
Dependent Claim
31 words
The carrier as claimed in claim 9 and further comprising a second interconnect interchangeable with the interconnect to permit testing of another semiconductor die having a different configuration than the die.
Claim 13
Dependent Claim
37 words
The carrier as claimed in claim 9 and wherein the spring is formed as a spring member selected from the group consisting of wave washer, cylindrically curved washer, belleville washer, compress ion spring, and canted coils spring.
Claim 14
Dependent Claim
28 words
The carrier as claimed in claim 9 and wherein the substrate is formed of silicon and the contact members are formed as raised mesas having raised self-limiting projections.
Claim 15
Dependent Claim
25 words
The carrier as claimed in claim 9 and wherein the contact members have a conical base and a tip formed by an ultrasonic forging process.
Claim 16
Dependent Claim
21 words
The carrier as claimed in claim 9 and wherein the contact members are formed as microbumps mounted on an etched tape.
Claim 17
Dependent Claim
17 words
The carrier as claimed in claim 14 and wherein the contact members include a rough textured surface.
Claim 18
Dependent Claim
186 words
A carrier for testing an unpackaged semiconductor die, comprising: a base having a cavity; a plate with a support surface, said plate adapted for attachment to the base such that the support surface is contained within the cavity; an interconnect placed on the support surface, said interconnect including raised contact members formed on a substrate and a pattern of conductive traces in electrical communication with the raised contact members, with the raised contact members adapted to penetrate contact locations on the die and the interconnect interchangeable with a second interconnect adapted to test a second die; a plurality of external retention contacts attached to the base and extending into the cavity for contacting and retaining the interconnect on the support surface as the plate is attached to the base and for establishing an electrically conductive path between the circuit traces and test circuitry; and a force distribution mechanism removably clipped to the base for exerting a biasing force on the die, said force distribution mechanism including a spring sandwiched between a pressure plate that presses against the die and a bridge clamp attached to the base.
Claim 19
Dependent Claim
186 words
A carrier for testing an unpackaged semiconductor die, comprising: a base having a cavity; a plate with a support surface, said plate adapted for attachment to the base such that the support surface is contained within the cavity; an interconnect placed on the support surface, said interconnect including raised contact members formed on a substrate and a pattern of conductive traces in electrical communication with the raised contact members, with the raised contact members adapted to penetrate contact locations on the die and the interconnect interchangeable with a second interconnect adapted to test a second die; a plurality of external retention contacts attached to the base and extending into the cavity for contacting and retaining the interconnect on the support surface as the plate is attached to the base and for establishing an electrically conductive path between the circuit traces and test circuitry; and a force distribution mechanism removably clipped to the base for exerting a biasing force on the die, said force distribution mechanism including a spring sandwiched between a pressure plate that presses against the die and a bridge clamp attached to the base.
Claim 20
Dependent Claim
24 words
The carrier as claimed in claim 16 and wherein the carrier base includes side walls and the retention contacts mount to the side walls.
Claim 21
Dependent Claim
37 words
The apparatus as claimed in claim 16 and wherein the contact member on the interconnect is formed as a mesa with a raised projection adapted to penetrate the contact location on the die to a penetration depth.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-07-30 | 2000-01-29 | 2000-07-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-07-30 | 2004-01-29 | 2004-07-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-07-30 | 2008-01-29 | 2008-07-30 | $7700.00 | Window Closed / Lapsed |