US5072116A
Expired / Lapsed
US
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Microprobe preparation thereof and electronic device by use of said microprobe
Assignee: Canon Inc
•
Filing: 1990-11-09
•
Granted: 1991-12-10
•
Expires: 2010-11-09
Abstract
Abstract A microprobe is constituted by a single crystal having an apex portion surrounded by facets having specific place directions and having specific crystal faces. The microprobe is provided on a part of a main surface of a substrate or a part of a thin film formed on the main surface. In one embodiment the microprobe is provided with a source electrode, a gate electrode, a drain electrode and a thin resistance, so as to form an MOS transistor for amplifying the microprobe.
Inventors
- 👤 Hisaaki Kawade
- 👤 Haruki Kawada
- 👤 Kunihiro Sakai
- 👤 Hiroshi Matsuda
- 👤 Yuko Morikawa
- 👤 Yoshihiro Yanagisawa
- 👤 Tetsuya Kaneko
- 👤 Toshimitsu Kawase
- 👤 Hideya Kumomi
- 👤 Hiroyasu Nose
- 👤 Eigo Kawakami
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 06:25
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; G01Q70/00; G01Q70/08; G01Q70/10; G01Q80/00; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/875; Y10S977/878; Y10S977/879
Claims Analysis
Total Claims: 76
Claim 1
Independent Claim
35 words
A microprobe, comprising a single crystal provided on a part selected from the group consisting of one main surface of a substrate and a thin film formed on the one main surface of the substrate.
Claim 2
Dependent Claim
35 words
A microprobe, comprising a single crystal provided on a part selected from the group consisting of one main surface of a substrate and a thin film formed on the one main surface of the substrate.
Claim 3
Dependent Claim
59 words
A microprobe comprising a single crystal provided on a part selected from the group consisting of one main surface of a substrate and a thin film formed on the one main surface of the substrate, said single crystal having an apex portion surrounded by facets having a specific plane direction and said single crystal comprising a specific crystal face.
Claim 4
Dependent Claim
59 words
A microprobe comprising a single crystal provided on a part selected from the group consisting of one main surface of a substrate and a thin film formed on the one main surface of the substrate, said single crystal having an apex portion surrounded by facets having a specific plane direction and said single crystal comprising a specific crystal face.
Claim 5
Dependent Claim
18 words
A microprobe according to claim 1 or claim 2, wherein said single crystal comprises a tungsten single crystal.
Claim 6
Dependent Claim
17 words
A microprobe according to claim 1 or 2, wherein said single crystal comprises a silicon single crystal.
Claim 7
Dependent Claim
19 words
A microprobe according to claim 1 or, claim 2, wherein said microprobe is adapted as a current detecting probe.
Claim 8
Dependent Claim
19 words
A microprobe according to claim 1 or claim 2, further comprising an electrode wiring adjacent to said single crystal.
Claim 9
Dependent Claim
18 words
A microprobe according to claim 1 or claim 2, further comprising an amplifier adjacent to said single crystal.
Claim 10
Dependent Claim
19 words
A microprobe according to claim 1 or claim 2, further comprising a current amplifier adjacent to said single crystal.
Claim 11
Dependent Claim
17 words
A microprobe according to claim 1 or 2, further comprising a plural number of said single crystals.
Claim 12
Dependent Claim
16 words
A microprobe according to claim 1 or 2, wherein said thin film comprises an insulating film.
Claim 13
Dependent Claim
20 words
A microprobe according to claim 1 or 2, further comprising a source electrode, a gate electrode and a drain electrode.
Claim 14
Dependent Claim
17 words
A microprobe according to claim 2, wherein said single crystal has a facet between (411) and (311).
Claim 15
Dependent Claim
14 words
A microprobe according to claim 5 further comprising plural number of said single crystals.
Claim 16
Dependent Claim
14 words
A microprobe according to claim 6 further comprising plural number of said single crystals.
Claim 17
Dependent Claim
14 words
A microprobe according to claim 7 further comprising plural number of said single crystals.
Claim 18
Dependent Claim
14 words
A microprobe according to claim 8 further comprising plural number of said single crystals.
Claim 19
Dependent Claim
14 words
A microprobe according to claim 1 or 2, wherein said substrate comprises a crystal.
Claim 20
Dependent Claim
15 words
A microprobe according to claim 1 or 2, wherein said thin film comprises silicon oxide.
Claim 21
Dependent Claim
23 words
A microprobe according to claim 1 or 2, wherein said substrate comprises a material selected from the group consisting of germanium and silicon.
Claim 22
Dependent Claim
52 words
A microprobe, comprising a single crystal provided on a part selected from the group consisting of one main surface of a substrate and a thin film formed on the one main surface of the substrate, wherein said single crystal comprises a different material than that of the substrate or the thin film.
Claim 23
Dependent Claim
52 words
A microprobe, comprising a single crystal provided on a part selected from the group consisting of one main surface of a substrate and a thin film formed on the one main surface of the substrate, wherein said single crystal comprises a different material than that of the substrate or the thin film.
Claim 24
Dependent Claim
76 words
A microprobe, comprising a single crystal provided on a part selected from the group consisting of one main surface of a substrate and a thin film formed on the one main surface of the substrate, said single crystal having an apex portion surrounded by facets having a specific plane direction and said single crystal comprising a specific crystal face, wherein said single crystal comprises a different material than that of the substrate or the thin film.
Claim 25
Dependent Claim
76 words
A microprobe, comprising a single crystal provided on a part selected from the group consisting of one main surface of a substrate and a thin film formed on the one main surface of the substrate, said single crystal having an apex portion surrounded by facets having a specific plane direction and said single crystal comprising a specific crystal face, wherein said single crystal comprises a different material than that of the substrate or the thin film.
Claim 26
Dependent Claim
17 words
A microprobe according to claim 20 or 21, wherein said single crystal comprises a single tungsten crystal.
Claim 27
Dependent Claim
17 words
A microprobe according to claim 20 or 21, wherein said single crystal comprises a single silicon crystal.
Claim 28
Dependent Claim
23 words
The microprobe according to claim 20 or 21, wherein said different material is selected from the group consisting of silicon and silicon nitride.
Claim 29
Dependent Claim
15 words
A microprobe, according to claim 20 or 21, wherein said substrate comprises a single crystal.
Claim 30
Dependent Claim
15 words
A microprobe according to claim 20 or 21, wherein said thin film comprises silicon oxide.
Claim 31
Dependent Claim
23 words
A microprobe according to claim 20 or 21, wherein said substrate comprises a material selected from the group consisting of germanium and silicon.
Claim 32
Dependent Claim
16 words
A microprobe according to claim 20 or 21, wherein said thin film comprises an insulating film.
Claim 33
Dependent Claim
20 words
A microprobe according to claim 20 or 21, further comprising a source electrode, a gate electrode and a drain electrode.
Claim 34
Dependent Claim
17 words
A microprobe according to claim 21, wherein said single crystal has a facet between (411) and (311).
Claim 35
Dependent Claim
18 words
A microprobe according to claim 20 or 21, wherein said microprobe is adapted as a current detecting probe.
Claim 36
Dependent Claim
19 words
A microprobe according to claim 20 or 21, further comprising an electrode wiring disposed adjacent to said single crystal.
Claim 37
Dependent Claim
18 words
A microprobe according to claim 20 or 21, further comprising an amplifier disposed adjacent to said single crystal.
Claim 38
Dependent Claim
19 words
A microprobe according to claim 20 or 21, further comprising a current amplifier disposed adjacent to said single crystal.
Claim 39
Dependent Claim
13 words
A microprobe according to claim 20 or 21, further comprising plural single crystals.
Claim 40
Dependent Claim
60 words
A microprobe, comprising: a single crystal provided on a part selected from the group consisting of one main surface of a substrate and a thin film formed on the one main surface of the substrate; and a different material than that of the substrate or the thin film, said different material being disposed between said single crystal and said part.
Claim 41
Dependent Claim
60 words
A microprobe, comprising: a single crystal provided on a part selected from the group consisting of one main surface of a substrate and a thin film formed on the one main surface of the substrate; and a different material than that of the substrate or the thin film, said different material being disposed between said single crystal and said part.
Claim 42
Dependent Claim
84 words
A microprobe, comprising: a single crystal provided on a part selected from the group consisting of one main surface of a substrate and a thin film formed on the one main surface of the substrate; and a different material than that of the substrate or the thin film, said different material being disposed between said single crystal and said part, said single crystal having an apex portion surrounded by facets having a specific plane direction and said single crystal comprising a specific crystal face.
Claim 43
Dependent Claim
84 words
A microprobe, comprising: a single crystal provided on a part selected from the group consisting of one main surface of a substrate and a thin film formed on the one main surface of the substrate; and a different material than that of the substrate or the thin film, said different material being disposed between said single crystal and said part, said single crystal having an apex portion surrounded by facets having a specific plane direction and said single crystal comprising a specific crystal face.
Claim 44
Dependent Claim
17 words
A microprobe according to claim 36 or 37, wherein said single crystal comprises a single tungsten crystal.
Claim 45
Dependent Claim
17 words
A microprobe according to claim 36 or 37, wherein said single crystal comprises a single silicon crystal.
Claim 46
Dependent Claim
18 words
A microprobe according to claim 36 or 37, wherein said microprobe is adapted as a current detecting probe.
Claim 47
Dependent Claim
19 words
A microprobe according to claim 36 or 37, further comprising an electrode wiring disposed adjacent to said single crystal.
Claim 48
Dependent Claim
18 words
A microprobe according to claim 36 or 37, further comprising an amplifier disposed adjacent to said single crystal.
Claim 49
Dependent Claim
19 words
A microprobe according to claim 36 or 37, further comprising a current amplifier disposed adjacent to said single crystal.
Claim 50
Dependent Claim
13 words
A microprobe according to claim 36 or 37, further comprising plural single crystals.
Claim 51
Dependent Claim
24 words
A microprobe according to claim 36 or 37, wherein said different material has sufficiently larger nucleation density than the substrate or the thin film.
Claim 52
Dependent Claim
21 words
A microprobe according to claim 45, wherein said different material is selected from the group consisting of silicon and silicon nitride.
Claim 53
Dependent Claim
15 words
A microprobe according to claim 36 or 37, wherein said substrate comprises a single crystal.
Claim 54
Dependent Claim
15 words
A microprobe according to claim 36 or 37, wherein said thin film comprises silicon oxide.
Claim 55
Dependent Claim
23 words
A microprobe according to claim 36 or 37, wherein said substrate comprises a material selected from the group consisting of germanium and silicon.
Claim 56
Dependent Claim
16 words
A microprobe according to claim 36 or 37, wherein said thin film comprises an insulating film.
Claim 57
Dependent Claim
20 words
A microprobe according to claim 36 or 37, further comprising a source electrode, a gate electrode and a drain electrode.
Claim 58
Dependent Claim
17 words
A microprobe according to claim 37, wherein said single crystal has a facet between (411) and (311).
Claim 59
Dependent Claim
40 words
A microprobe, comprising a single crystal provided on a part of a thin film formed on a one main surface of a substrate, wherein a portion of said single crystal is in contact with the main surface of the substrate.
Claim 60
Dependent Claim
40 words
A microprobe, comprising a single crystal provided on a part of a thin film formed on a one main surface of a substrate, wherein a portion of said single crystal is in contact with the main surface of the substrate.
Claim 61
Dependent Claim
63 words
A microprobe, comprising a single crystal provided on a part of a thin film formed on a one main surface of a substrate, said single crystal having an apex portion surrounded by facets having a specific plane direction and said crystal comprising a specific crystal face, wherein a portion of said single crystal is in contact with the main surface of the substrate.
Claim 62
Dependent Claim
63 words
A microprobe, comprising a single crystal provided on a part of a thin film formed on a one main surface of a substrate, said single crystal having an apex portion surrounded by facets having a specific plane direction and said crystal comprising a specific crystal face, wherein a portion of said single crystal is in contact with the main surface of the substrate.
Claim 63
Dependent Claim
17 words
A microprobe according to claim 53 or 54, wherein said single crystal comprises a single tungsten crystal.
Claim 64
Dependent Claim
17 words
A microprobe according to claim 53 or 54, wherein said single crystal comprises a single silicon crystal.
Claim 65
Dependent Claim
18 words
A microprobe according to claim 53 or 54, wherein said microprobe is adapted as a current detecting probe.
Claim 66
Dependent Claim
19 words
A microprobe according to claim 53 or 54, further comprising an electrode wiring disposed adjacent to said single crystal.
Claim 67
Dependent Claim
18 words
A microprobe according to claim 53 or 54, further comprising an amplifier disposed adjacent to said single crystal.
Claim 68
Dependent Claim
19 words
A microprobe according to claim 53 or 54, further comprising a current amplifier disposed adjacent to said single crystal.
Claim 69
Dependent Claim
13 words
A microprobe according to claim 53 or 54, further comprising plural single crystals.
Claim 70
Dependent Claim
15 words
A microprobe according to claim 53 or 54, wherein said substrate comprises a single crystal.
Claim 71
Dependent Claim
20 words
A microprobe according to claim 53 or 54, wherein said single crystal has the same crystal direction as the substrate.
Claim 72
Dependent Claim
15 words
A microprobe according to claim 53 or 54, wherein said thin film comprises silicon oxide.
Claim 73
Dependent Claim
23 words
A microprobe according to claim 53 or 54, wherein said substrate comprises a material selected from the group consisting of germanium and silicon.
Claim 74
Dependent Claim
16 words
A microprobe according to claim 53 or 54, wherein said thin film comprises an insulating film.
Claim 75
Dependent Claim
20 words
A microprobe according to claim 53 or 54, further comprising a source electrode, a gate electrode and a drain electrode.
Claim 76
Dependent Claim
17 words
A microprobe according to claim 54, wherein said single crystal has a facet between (411) and (311).
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1994-12-09 | 1995-06-10 | 1995-12-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-12-09 | 1999-06-10 | 1999-12-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-12-09 | 2003-06-10 | 2003-12-10 | $7700.00 | Window Closed / Lapsed |