Patent US5640133A successfully refreshed from Google Patents.
US5640133A
Expired / Lapsed
US
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Capacitance based tunable micromechanical resonators
Assignee: Cornell Research Foundation Inc
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Filing: 1995-06-23
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Granted: 1997-06-17
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Expires: 2015-06-23
Abstract
Abstract A tunable electromicromechanical resonator structure incorporates an electrostatic actuator which permits reduction or enhancement of the resonant frequency of the structure. The actuator consists of two sets of opposed electrode fingers, each set having a multiplicity of spaced, parallel fingers. One set is mounted on a movable portion of the resonator structure and one set is mounted on an adjacent fixed base on substrate, with the fingers in opposed relationship and their adjacent ends spaced apart by a gap. An adjustable bias voltage across the sets of electrodes adjusts the resonant frequency of the movable structure.
Inventors
- 👤 Noel C. MacDonald
- 👤 Fred M. Bertsch
- 👤 Kevin A. Shaw
- 👤 Scott G. Adams
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 05:00
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/02244; H03H9/02393; H03H9/02417; H03H9/02425; H02; H02N; H02N1/00; H02N1/002; H02N1/006; H02N1/008; H03H9/46; H03H2009/02488; H03H2009/02496
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
93 words
A micromechanical actuator, comprising a micromechanical structure having a first stationary component and a second component relatively movable with respect to said first component; a first set of spaced-apart, substantially parallel comb-type electrode fingers mounted on said first component; a second set of spaced-apart, substantially parallel comb-type electrode fingers mounted on said second component, said fingers of said first and second sets being coplanar and in opposed, nonoverlapping relationship with a gap therebetween; and a bias voltage source connected across said first and second sets of electrodes to produce an electrostatic field therebetween.
Claim 2
Dependent Claim
93 words
A micromechanical actuator, comprising a micromechanical structure having a first stationary component and a second component relatively movable with respect to said first component; a first set of spaced-apart, substantially parallel comb-type electrode fingers mounted on said first component; a second set of spaced-apart, substantially parallel comb-type electrode fingers mounted on said second component, said fingers of said first and second sets being coplanar and in opposed, nonoverlapping relationship with a gap therebetween; and a bias voltage source connected across said first and second sets of electrodes to produce an electrostatic field therebetween.
Claim 3
Dependent Claim
11 words
The actuator of claim 1, wherein said voltage source is variable.
Claim 4
Dependent Claim
23 words
The actuator of claim 2, wherein said second component is movable along an axis, and wherein said gap is parallel to said axis.
Claim 5
Dependent Claim
23 words
The actuator of claim 3, wherein said electrode fingers of said first set are offset from said electrode fingers of said second set.
Claim 6
Dependent Claim
23 words
The actuator of claim 3, wherein said electrode fingers of said first set are aligned with said electrode fingers of said second set.
Claim 7
Dependent Claim
47 words
The actuator of claim 3, wherein said second component is a movable beam mounted within a cavity in a single crystal silicon substrate, said first set of electrode fingers being integral with said substrate and said second set of electrode fingers being integral with said movable beam.
Claim 8
Dependent Claim
24 words
The actuator of claim 6, wherein said relatively movable component has a natural mechanical stiffness, said voltage source being variable to adjust said stiffness.
Claim 9
Dependent Claim
51 words
The actuator of claim 6, wherein said beam is mounted for motion by at least one spring arms secured to said substrate, said movable beam, spring arm and second set of electrodes being movable at a natural frequency of resonance, said voltage source being adjustable to adjust said frequency of resonance.
Claim 10
Dependent Claim
33 words
The actuator of claim 8, wherein said electrode fingers of said first set are aligned with said electrode fingers of said second set, said voltage source being variable to increase said resonant frequency.
Claim 11
Dependent Claim
33 words
The actuator of claim 8, wherein said electrode fingers of said first set are offset from said electrode fingers of said second set, said voltage source being variable to reduce said resonant frequency.
Claim 12
Dependent Claim
23 words
The actuator of claim 10, wherein said voltage source provides a sufficiently high bias to said actuator to produce a double well potential.
Claim 13
Dependent Claim
113 words
An electromicromechanical resonator, comprising: a substrate; a micromechanical beam structure having micron-scale dimensions movable with respect to said substrate along an axis; spring arms connected between said beam and said substrate, said spring arms and movable beam having a rest position and having a natural resonant frequency; first and second electrostatic actuators, each actuator having a first set of finger electrodes mounted on said beam, and each actuator having a second set of finger electrodes mounted on said substrate, said first and second sets of electrodes each actuator being opposed and non-overlapping to provide a gap therebetween; and an adjustable bias voltage connected across each set of electrodes to adjust said resonant frequency.
Claim 14
Dependent Claim
113 words
An electromicromechanical resonator, comprising: a substrate; a micromechanical beam structure having micron-scale dimensions movable with respect to said substrate along an axis; spring arms connected between said beam and said substrate, said spring arms and movable beam having a rest position and having a natural resonant frequency; first and second electrostatic actuators, each actuator having a first set of finger electrodes mounted on said beam, and each actuator having a second set of finger electrodes mounted on said substrate, said first and second sets of electrodes each actuator being opposed and non-overlapping to provide a gap therebetween; and an adjustable bias voltage connected across each set of electrodes to adjust said resonant frequency.
Claim 15
Dependent Claim
30 words
The resonator of claim 12, wherein the electrodes of said first set of finger electrodes for each actuator are aligned with corresponding electrodes of the second set of finger electrodes.
Claim 16
Dependent Claim
30 words
The resonator of claim 12, wherein the electrodes of said first set of finger electrodes for each actuator are offset from corresponding electrodes of the second set of finger electrodes.
Claim 17
Dependent Claim
29 words
The resonator of claim 12, wherein said first and second actuators are coplanar and symmetrical, whereby said actuators provide no net force on said beam in the rest position.
Claim 18
Dependent Claim
22 words
The resonator of claim 15, further including drive means for moving said beam at a frequency at or near said natural frequency.
Claim 19
Dependent Claim
13 words
The resonator of claim 12, wherein said gap is parallel to said axis.
Claim 20
Dependent Claim
13 words
The resonator of claim 12, wherein said gap is perpendicular to said axis.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-06-16 | 2000-12-16 | 2001-06-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-06-16 | 2004-12-16 | 2005-06-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-06-16 | 2008-12-16 | 2009-06-17 | $7700.00 | Window Closed / Lapsed |