US5025346A
Expired / Lapsed
US
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Laterally driven resonant microstructures
Assignee: University of California
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Filing: 1989-02-17
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Granted: 1991-06-18
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Expires: 2009-02-17
Abstract
Abstract A microbridge device for use as a sensor or an actuator is driven parallel to a substrate as a resonant microstructure. The microstructure comprises a stationary thin-film electrode secured to the substrate and located in a plane above it. A movable plate overlaying the substrate is suspended above it. The movable plate and electrode are patterned to provide for each at least one comb with fingers interdigitated with those of the other.
Inventors
- 👤 William C. Tang
- 👤 Roger T. Howe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 19:57
CPC Classifications
B; B81; B81B; B81B3/00; B81B3/0018; B81B3/0021; G; G01; G01C; G01C19/00; G01C19/56; G01C19/5719; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/0802; G01P15/097; G03; G03F; G03F7/00; H; H02; H02N; H02N1/00; H02N1/002; H02N1/006; H02N1/008; H03; H03H; H03H9/00; H03H9/02; H03H9/02244; H03H9/02259; H03H9/02275; H03H9/24; H03H9/2405; H03H9/2431; B81B2201/00; B81B2201/03; B81B2201/033; G01P2015/0805; G01P2015/0808; G01P2015/0811; G01P2015/0814; H03H2009/02488; H03H2009/02496; Y; Y10; Y10S; Y10S73/00; Y10S73/01
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
61 words
A linear, lateral-drive structure including in combination: a substrate, a stationary thin-film electrode secured to said substrate and located in a plane thereabove, a movable plate overlying said substrate and suspended by flexible supporting arms above said substrate, said movable plate and electrode being patterned to provide for each at least one comb with fingers interdigitated with those of the other.
Claim 2
Dependent Claim
61 words
A linear, lateral-drive structure including in combination: a substrate, a stationary thin-film electrode secured to said substrate and located in a plane thereabove, a movable plate overlying said substrate and suspended by flexible supporting arms above said substrate, said movable plate and electrode being patterned to provide for each at least one comb with fingers interdigitated with those of the other.
Claim 3
Dependent Claim
14 words
The structure of claim 1 wherein the motion of said movable plate is linear.
Claim 4
Dependent Claim
14 words
The structure of claim 1 wherein the motion of said movable plate is torsional.
Claim 5
Dependent Claim
16 words
The structure of claim 1 having a set of folded beams supporting a linear resonant plate.
Claim 6
Dependent Claim
15 words
The said folded beams in claim 4 are anchored near the center of the stucture.
Claim 7
Dependent Claim
20 words
The structure of claim 1 having a spiral, anchored at the center of the structure, supporting a torsional resonant plate.
Claim 8
Dependent Claim
14 words
The structure of claim 1 having a serpentine spring, supporting a torsional resonant plate.
Claim 9
Dependent Claim
15 words
The said serpentine spring in claim 7 is anchored at the center of the structure.
Claim 10
Dependent Claim
15 words
The comb structure of claim 1 having comb fingers which are segments of concentric arcs.
Claim 11
Dependent Claim
44 words
A resonant microstructure for use as a sensor or an actuator, including in combination: a silicon substrate, a movable plate, suspended above and anchored to such substrate, and lateral-drive means for driving said plate electrostatically in a plane parallel to and above said substrate.
Claim 12
Dependent Claim
44 words
A resonant microstructure for use as a sensor or an actuator, including in combination: a silicon substrate, a movable plate, suspended above and anchored to such substrate, and lateral-drive means for driving said plate electrostatically in a plane parallel to and above said substrate.
Claim 13
Dependent Claim
22 words
The microstructure of claim 10 wherein said lateral-drive means comprises a lateral comb structure for driving said plate with induced electrostatic forces.
Claim 14
Dependent Claim
55 words
A lateral-drive structure including in combination: a silicon substrate, a stationary electrode secured to and elevated above said substrate comprising a plurality of comb fingers, and a movable plate suspended by flexible supporting arms in the same plane as said stationary electrodes and comprising a comb with a plurality of fingers on said stationary electrodes.
Claim 15
Dependent Claim
55 words
A lateral-drive structure including in combination: a silicon substrate, a stationary electrode secured to and elevated above said substrate comprising a plurality of comb fingers, and a movable plate suspended by flexible supporting arms in the same plane as said stationary electrodes and comprising a comb with a plurality of fingers on said stationary electrodes.
Claim 16
Dependent Claim
13 words
The structure of claim 12 wherein motion of said movable plate is linear.
Claim 17
Dependent Claim
14 words
The structure of claim 12 wherein the motion of said movable plate is torsional.
Claim 18
Dependent Claim
16 words
The structure of claim 12 having a set of folded beams supporting a linear resonant plate.
Claim 19
Dependent Claim
15 words
The said folded beams in claim 15 are anchored near the center of the structure.
Claim 20
Dependent Claim
20 words
The structure of claim 15 having a spiral, anchored at the center of the structure, supporting a torsional resonant plate.
Claim 21
Dependent Claim
14 words
The structure of claim 12 having a serpentine spring, supporting a torsional resonant plate.
Claim 22
Dependent Claim
15 words
The said serpentine spring in claim 18 is anchored at the center of the structure.
Claim 23
Dependent Claim
15 words
The comb structure of claim 12 having comb fingers which are segments of concentric arcs.
References Cited (Backward Citations)
US3221256A
Cited
US4030347A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-06-17 | 1994-12-17 | 1995-06-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-06-17 | 1998-12-17 | 1999-06-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-06-17 | 2002-12-17 | 2003-06-18 | $7700.00 | Window Closed / Lapsed |