Patent US5804458A successfully refreshed from Google Patents.
US5095752A
Expired / Lapsed
US
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Capacitance type accelerometer
Assignee: Hitachi Ltd
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Filing: 1989-10-31
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Granted: 1992-03-17
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Expires: 2009-10-31
Abstract
Abstract A capacitance type accelerometer, having a fist silicon plate formed a movable electrode which is moved according to acceleration, two second silicon plates which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films which are respectively disposed between the first silicon plate except the movable electrode and the two second silicon plates and stick the first silicon plate except the movable electrode and the two second silicon plates together. And further, a capacitance type accelerometer, having, a silicon plate forming a movable electrode which is moved according to acceleration, glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are connected to both sides of the silicon plate except the movable electrode and lead wires which are respectively connected to the conductive layers through a groove formed between the silicon plate and the glass plates.
Inventors
- 👤 Seiko Suzuki
- 👤 Shigeki Tsuchitani
- 👤 Masayuki Miki
- 👤 Masahiro Matsumoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 06:42
CPC Classifications
B; B81; B81C; B81C1/00; B81C1/00015; B81C1/00261; B81C1/00301; G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/0802; G01P15/125; G01P15/13; G01P15/131; B81B; B81B2201/00; B81B2201/02; B81B2201/0228; B81B2201/0235; B81B2207/00; B81B2207/09; B81B2207/091; B81B2207/094; B81B2207/095; B81B2207/096; G01P2015/0805; G01P2015/0822; G01P2015/0825; G01P2015/0828
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
86 words
A capacitance type accelerometer, having: a silicon plate including a portion formed as a movable electrode which is moved according to acceleration; glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are connected to both sides of the silicon plate except the movable electrode; and lead wires which are respectively connected to the conductive layers through at least one preformed groove provided in at least one of the silicon plate and the glass plates.
Claim 2
Dependent Claim
86 words
A capacitance type accelerometer, having: a silicon plate including a portion formed as a movable electrode which is moved according to acceleration; glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are connected to both sides of the silicon plate except the movable electrode; and lead wires which are respectively connected to the conductive layers through at least one preformed groove provided in at least one of the silicon plate and the glass plates.
Claim 3
Dependent Claim
18 words
A capacitance type accelerometer as defined in claim 1, wherein; the groove is formed on the silicon plate.
Claim 4
Dependent Claim
18 words
A capacitance type accelerometer as defined in claim 1, wherein; the groove is formed on the glass plates.
Claim 5
Dependent Claim
18 words
A capacitance type accelerometer as defined in claim 1, wherein; the groove is filled with a non-conductive material.
Claim 6
Dependent Claim
96 words
A capacitive type accelerometer having: a silicon plate including a portion formed as a movable electrode which is moved according to acceleration; glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are connected to both sides of the silicon plate except the movable electrode; lead wires which are respectively connected to the conductive layers through at least one groove formed in at least one of the silicon plate and the glass plates; and silicon plates respectively covering each outside surface of the glass plates.
Claim 7
Dependent Claim
96 words
A capacitive type accelerometer having: a silicon plate including a portion formed as a movable electrode which is moved according to acceleration; glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are connected to both sides of the silicon plate except the movable electrode; lead wires which are respectively connected to the conductive layers through at least one groove formed in at least one of the silicon plate and the glass plates; and silicon plates respectively covering each outside surface of the glass plates.
Claim 8
Dependent Claim
24 words
A capacitance type accelerometer as defined in claim 5, further having; conductive paste electrically connecting one of the lead wires to a connecting terminal.
Claim 9
Dependent Claim
82 words
A capacitance type accelerometer, having: a silicon plate including a portion formed as a movable electrode which is moved according to accelerating force; glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are anodic-bonded to both sides of the silicon plate except the movable electrode; and lead wires which are respectively connected to the conductive layer and are respectively fed out of the glass plate through a hole formed thereon.
Claim 10
Dependent Claim
82 words
A capacitance type accelerometer, having: a silicon plate including a portion formed as a movable electrode which is moved according to accelerating force; glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are anodic-bonded to both sides of the silicon plate except the movable electrode; and lead wires which are respectively connected to the conductive layer and are respectively fed out of the glass plate through a hole formed thereon.
Claim 11
Dependent Claim
123 words
A capacitance type accelerometer, having: a silicon plate including a portion formed as a movable electrode which is moved according to acceleration; thermal oxide films which are respectively formed on the silicon plate except the movable electrode; polycrystal silicon layer formed on the thermal oxide films; glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are connected to both sides of the silicon plate through the thermal oxide films and the polycrystal silicon layer except the movable electrode; and thin lead wires which respectively connect lead out terminals to the conductive layers through portions between the thermal oxide films and the glass plates and are connected to the polycrystal silicon layer.
Claim 12
Dependent Claim
123 words
A capacitance type accelerometer, having: a silicon plate including a portion formed as a movable electrode which is moved according to acceleration; thermal oxide films which are respectively formed on the silicon plate except the movable electrode; polycrystal silicon layer formed on the thermal oxide films; glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are connected to both sides of the silicon plate through the thermal oxide films and the polycrystal silicon layer except the movable electrode; and thin lead wires which respectively connect lead out terminals to the conductive layers through portions between the thermal oxide films and the glass plates and are connected to the polycrystal silicon layer.
Claim 13
Dependent Claim
132 words
A capacitance type accelerometer comprising: a silicon plate including a portion formed as a movable electrode which is moved in response to acceleration; first and second plate members disposed on opposite sides of the silicon plate and being spaced at least from the movable electrode portion of the silicon plate, the plate members being connected to the silicon plate other than in the region of the movable electrode portion; wherein the first and second plate members are glass plate members, each glass plate member having a conductive layer mounted thereon and disposed in opposition to the movable electrode portion of the silicon plate; and lead wires respectively connected to the conductive layers through at least one preformed groove provided in at least one of the silicon plate and the glass plate members.
Claim 14
Dependent Claim
132 words
A capacitance type accelerometer comprising: a silicon plate including a portion formed as a movable electrode which is moved in response to acceleration; first and second plate members disposed on opposite sides of the silicon plate and being spaced at least from the movable electrode portion of the silicon plate, the plate members being connected to the silicon plate other than in the region of the movable electrode portion; wherein the first and second plate members are glass plate members, each glass plate member having a conductive layer mounted thereon and disposed in opposition to the movable electrode portion of the silicon plate; and lead wires respectively connected to the conductive layers through at least one preformed groove provided in at least one of the silicon plate and the glass plate members.
Claim 15
Dependent Claim
21 words
A capacitance type accelerometer according to claim 9, further comprising silicon plates respectively covering each outside surface of the glass plates.
Claim 16
Dependent Claim
17 words
A capacitance type accelerometer according to claim 9, wherein the groove is filled with a non-conductive material.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-03-17 | 1995-09-16 | 1996-03-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-03-17 | 1999-09-16 | 2000-03-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-03-17 | 2003-09-16 | 2004-03-17 | $7700.00 | Window Closed / Lapsed |