US5179499A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multi-dimensional precision micro-actuator
Assignee: Cornell Research Foundation Inc
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Filing: 1992-04-14
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Granted: 1993-01-12
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Expires: 2012-04-14
Abstract
Abstract Mechanically movable microstructure fabricated from a single crystal such as silicon and actuator structures for providing a high degree of controlled, precision motion of nanometer-scale.
Inventors
- 👤 Noel C. MacDonald
- 👤 Jun J. Yao
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 16:00
CPC Classifications
H; H02; H02N; H02N1/00; H02N1/002; H02N1/006; H02N1/008; B; B82; B82Y; B82Y35/00; G; G01; G01Q; G01Q10/00; G01Q10/04; H01; H01H; H01H1/00; H01H1/0094; H01H1/0036; H01H2001/0068; H01H2001/0078
Claims Analysis
Total Claims: 39
Claim 1
Independent Claim
95 words
A precision microactuator for movable microstructures, comprising: a beam having a longitudinal axis and having a first fixed end and a second remote end; at least one pair of opposed capacitor plates in said beam and dividing said beam into relatively movable axially aligned, longitudinal segments; and means for applying a potential across said plates to cause said relatively movable segments to move with respect to each other to cause said remote end of said beam to move along said longitudinal axis with respect to said fixed end to vary the length of the beam.
Claim 2
Dependent Claim
95 words
A precision microactuator for movable microstructures, comprising: a beam having a longitudinal axis and having a first fixed end and a second remote end; at least one pair of opposed capacitor plates in said beam and dividing said beam into relatively movable axially aligned, longitudinal segments; and means for applying a potential across said plates to cause said relatively movable segments to move with respect to each other to cause said remote end of said beam to move along said longitudinal axis with respect to said fixed end to vary the length of the beam.
Claim 3
Dependent Claim
40 words
The actuator of claim 1, wherein said at least one pair of capacitor plates comprises a plurality of spaced pairs of capacitor plates spaced along said beam and dividing said beam into a corresponding plurality of relatively movable longitudinal segments.
Claim 4
Dependent Claim
15 words
The actuator of claim 1, further including flexible spring bias means connected to said plates.
Claim 5
Dependent Claim
17 words
The actuator of claim 3, wherein said spring bias means comprises end spacer means between said plates.
Claim 6
Dependent Claim
18 words
The actuator of claim 3, wherein said spring bias means comprises connector means connected to said beam segments.
Claim 7
Dependent Claim
19 words
The actuator of claim 3, wherein said spring bias means comprises electrically insulating end spacer means between said plates.
Claim 8
Dependent Claim
20 words
The actuator of claim 3, wherein said spring bias means comprises electrically conductive connector means connected to said beam segments.
Claim 9
Dependent Claim
21 words
The actuator of claim 7, wherein said spring bias means further includes electrically insulating flexible end spacer means between said plates.
Claim 10
Dependent Claim
24 words
The actuator of claim 1, wherein said beam and capacitor plates form a cantilevered microstructure within a cavity formed in an integrated circuit wafer.
Claim 11
Dependent Claim
32 words
The actuator of claim 9, wherein said means for applying a potential across said plates includes electrically conductive connector means connected between selected beam segments and electrical circuit means on said wafer.
Claim 12
Dependent Claim
23 words
The actuator of claim 10, wherein said electrically conductive connector means comprises flexible connector arms which mechanically support and spring bias said microstructure.
Claim 13
Dependent Claim
39 words
The actuator of claim 9, wherein said at least one pair of capacitor plates comprises a plurality of pairs of capacitor plates spaced along said beam and dividing said beam into a corresponding plurality of relatively movable longitudinal segments.
Claim 14
Dependent Claim
24 words
The actuator of claim 12, wherein said means for applying a potential across said plates comprises electrically conductive connector means interconnecting selected beam segments.
Claim 15
Dependent Claim
28 words
The actuator of claim 12, wherein said means for applying a potential across said plates comprises electrically conductive connector means connected between selected beam segments and said wafer.
Claim 16
Dependent Claim
37 words
The actuator of claim 1 wherein said beam and capacitor plates are fabricated from a single-crystal electrically conductive substrate to form a cantilevered microstructure, the beam and capacitor plates being of the same material as the substrate.
Claim 17
Dependent Claim
20 words
The actuator of claim 15, further including a layer of electrically insulating material on selected surface of said capacitor plates.
Claim 18
Dependent Claim
32 words
The actuator of claim 16, further including flexible spring bias means fabricated from said electrically insulating material and connected between opposed capacitor plates for maintaining said plates in a predetermined spaced relationship.
Claim 19
Dependent Claim
28 words
The actuator of claim 17, further including electrically conductive connector means connected to corresponding segments of said beam, said connector means forming a part of said cantilevered microstructure.
Claim 20
Dependent Claim
18 words
The actuator of claim 18, wherein said connector means are fabricated from the same material as the substrate.
Claim 21
Dependent Claim
26 words
The actuator of claim 18, wherein said connector means are flexible and provide additional spring bias means for maintaining said plates in said predetermined spaced relationship.
Claim 22
Dependent Claim
12 words
The actuator of claim 15, wherein said substrate is single crystal silicon.
Claim 23
Dependent Claim
20 words
The actuator of claim 22, further including a layer of electrically insulating nitride on selected surfaces of said capacitor plates.
Claim 24
Dependent Claim
29 words
The actuator of claim 22, further including spring bias means fabricated from said electrically insulating nitride material and connected to bias said capacitor plates toward a predetermined spaced relationship.
Claim 25
Dependent Claim
28 words
The actuator of claim 23, further including flexible, electrically conductive connector means fabricated from said single crystal silicon substrate material and providing electrical connections to said capacitor plates.
Claim 26
Dependent Claim
86 words
The actuator of claim 1, further including: a plurality of beams each having a first fixed end and a second remote end and at least one pair of opposed capacitor plates in each of said beam to divide each beam into relatively movable, axially aligned, longitudinal segments, said second ends of said beams being connected to a common beam area; and means for applying potentials across selected pairs of opposed capacitor plates to vary the lengths of corresponding beams and to controllably move said common area.
Claim 27
Dependent Claim
21 words
The actuator of claim 25, wherein said plurality of beams extend radially outwardly in a common plane from said common area.
Claim 28
Dependent Claim
33 words
The actuator of claim 25, further including substrate means, said first fixed ends of said beams being mounted on said substrate and said common beam area being movable with respect to said substrate.
Claim 29
Dependent Claim
45 words
The actuator of claim 27, further including opposed upper and lower nanometer-scale tip means incorporated in said common area and on said substrate, respectively, in vertical axial alignment, movement of said common area moving said upper tip means with respect to said lower tip means.
Claim 30
Dependent Claim
28 words
The actuator of claim 27, further including switch means mounted on said common area and on said substrate, whereby motion of said common area operates said switch means.
Claim 31
Dependent Claim
25 words
The actuator of claim 27, wherein said means applying potentials across selected pairs of opposed capacitor plates includes integrated control circuit means on said substrate.
Claim 32
Dependent Claim
31 words
The actuator of claim 27 wherein said means applying potentials across selected pairs of opposed capacitor plates includes flexible electrically conductive connector means extending between said substrate and selected beam segments.
Claim 33
Dependent Claim
42 words
The actuator of claim 27, wherein said at least one pair of opposed capacitor plates in each beam comprises plural spaced pairs of capacitor plates spaced along each beam and dividing the beam into a corresponding plurality of relatively movable longitudinal segments.
Claim 34
Dependent Claim
22 words
The actuator of claim 32, further including flexible spring bias means urging each pair of capacitor plates toward a predetermined spaced relationship.
Claim 35
Dependent Claim
25 words
The actuator of claim 33, wherein said flexible spring bias means includes spacer means connected between opposed plates of each said pair of capacitor plates.
Claim 36
Dependent Claim
21 words
The actuator of claim 33, wherein said flexible spring bias means includes electrically conductive connector means connected to selected beam segments.
Claim 37
Dependent Claim
21 words
The actuator of claim 1, wherein said capacitor plates are electrically conductive opposed, generally concave plates having facing generally concave surfaces.
Claim 38
Dependent Claim
33 words
The actuator of claim 36, further including insulator means covering said facing surfaces, said insulator means extending beyond said plates at opposite ends thereof to form flexible spring-biased spacers for said capacitor plates.
Claim 39
Dependent Claim
28 words
The actuator of claim 1, further including first switch means secured on said remote end of said beam for relative motion with respect to a second switch means.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-01-12 | 1996-07-13 | 1997-01-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-01-12 | 2000-07-13 | 2001-01-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-01-12 | 2004-07-13 | 2005-01-12 | $7700.00 | Window Closed / Lapsed |