Patent US4138547A successfully refreshed from Google Patents.
US5439731A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Interconnect structures containing blocked segments to minimize stress migration and electromigration damage
Assignee: Cornell Research Foundation Inc
•
Filing: 1994-03-11
•
Granted: 1995-08-08
•
Expires: 2014-03-11
Abstract
Abstract Interconnect or metallization structures for integrated circuits on semiconductor chips contain blocked conductor segments to limit atomic transport from one segment to another thus minimizing stress migration and electromigration damage. Since the blocked conductor segments prevent atomic transport between two neighboring segments, the total amount of atoms and vacancies available for hillock and void growth in a segment can be controlled by the length of the segment. The conductor segments are made of high electrical conductance metals, such as aluminum, copper or gold based alloys, and are separated by very short segments of a high melting temperature refractory metal or alloy. Because of their high melting temperatures, refractory metals or alloys suppress atomic transport. The interconnect structures can be fabricated by conventional lithographic and deposition techniques.
Inventors
- 👤 Che-Yu Li
- 👤 Peter Borgesen
- 👤 Matt A. Korhonen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 05:01
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/425; H10W20/435; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
237 words
A metal interconnect structure comprising: an insulating substrate; a first plurality of spaced, electrically conductive metal segments formed on said substrate, each having a pair of vertical sides and being separated by a plurality of corresponding gaps between adjacent ones of said first plurality of segments; a refractory metal back-up layer conformally formed over said first plurality of electrically conductive metal segments and said plurality of gaps, wherein said back-up layer includes a plurality of vertical portions adjacent each said vertical side of said first plurality of segments, and a plurality of troughs are formed above said backup layer and said gaps between adjacent ones of said vertical portions; and, a second plurality of electrically conductive metal segments formed in said troughs between and contacting said vertical portions; wherein, said first and second plurality of electrically conductive segments and said plurality of vertical portions of said refractory metal back-up layer form a metal interconnect, and wherein each segment in said first and second plurality of segments has a length which minimizes stress migration and electromigration damage by limiting the amount of vacancies for voids and atoms for hillocks, and each said vertical portion of said refractory metal back-up layer has a width which enables said vertical portion to block atomic transport between adjacent ones of said first and second plurality of electrically conductive segments, while at the same time minimizing electrical resistance through each said vertical portion.
Claim 2
Dependent Claim
237 words
A metal interconnect structure comprising: an insulating substrate; a first plurality of spaced, electrically conductive metal segments formed on said substrate, each having a pair of vertical sides and being separated by a plurality of corresponding gaps between adjacent ones of said first plurality of segments; a refractory metal back-up layer conformally formed over said first plurality of electrically conductive metal segments and said plurality of gaps, wherein said back-up layer includes a plurality of vertical portions adjacent each said vertical side of said first plurality of segments, and a plurality of troughs are formed above said backup layer and said gaps between adjacent ones of said vertical portions; and, a second plurality of electrically conductive metal segments formed in said troughs between and contacting said vertical portions; wherein, said first and second plurality of electrically conductive segments and said plurality of vertical portions of said refractory metal back-up layer form a metal interconnect, and wherein each segment in said first and second plurality of segments has a length which minimizes stress migration and electromigration damage by limiting the amount of vacancies for voids and atoms for hillocks, and each said vertical portion of said refractory metal back-up layer has a width which enables said vertical portion to block atomic transport between adjacent ones of said first and second plurality of electrically conductive segments, while at the same time minimizing electrical resistance through each said vertical portion.
Claim 3
Dependent Claim
18 words
The interconnect structure of claim 1, wherein said back-up layer is formed from refractory metals or their alloys.
Claim 4
Dependent Claim
23 words
The interconnect of claim 2, wherein said refractory metals or their alloys are chosen from the group comprising tungsten, titanium and their alloys.
Claim 5
Dependent Claim
31 words
The interconnect structure of claim 2, wherein said first and second plurality of electrically conductive segments are formed from metals chosen from the group comprising aluminum, copper or gold based alloys.
Claim 6
Dependent Claim
53 words
The interconnect structure of claim 1, wherein each of said plurality of vertical portions has a width in the range of approximately 0.01 micron to 1.0 micron, and each of said first and second pluralities of high electrical conductance metal segments has a length in the range of approximately 5 to 20 microns.
Claim 7
Dependent Claim
105 words
A metal interconnect structure comprising: an insulating substrate; and, at least one metal interconnect formed on said substrate comprising: a plurality of electrically conductive spaced metal segments formed on said substrate; a plurality of gaps formed, one each, between adjacent ones of said plurality of electrically conductive segments; and a plurality of refractory metal segments positioned, one each, in said gaps, and in contacting relationship with adjacent ones of said electrically conductiwe segments, said refractory metal segments acting to block atomic transport between adjacent ones of said electrically conductive segments while still allowing electrical current to flow through adjacent ones of said electrically conductive segments.
Claim 8
Dependent Claim
105 words
A metal interconnect structure comprising: an insulating substrate; and, at least one metal interconnect formed on said substrate comprising: a plurality of electrically conductive spaced metal segments formed on said substrate; a plurality of gaps formed, one each, between adjacent ones of said plurality of electrically conductive segments; and a plurality of refractory metal segments positioned, one each, in said gaps, and in contacting relationship with adjacent ones of said electrically conductiwe segments, said refractory metal segments acting to block atomic transport between adjacent ones of said electrically conductive segments while still allowing electrical current to flow through adjacent ones of said electrically conductive segments.
Claim 9
Dependent Claim
26 words
The interconnect structure of claim 6, wherein said electrically conductive segments are formed of metals selected from the group comprising aluminum, copper or gold based alloys.
Claim 10
Dependent Claim
24 words
The interconnect structure of claim 6, further comprising a back-up refractory metal layer disposed between said substrate and said at least one metal interconnect.
Claim 11
Dependent Claim
47 words
The interconnect structure of claim 13, wherein said electrically conductive metal segments each have a length in the range of approximately 5 to 20 microns and each of said plurality of refractory metal segments has a length in the range of approximately 0.01 micron to 1.0 micron.
Claim 12
Dependent Claim
19 words
The interconnect structure of claim 6, wherein said refractory metal segments are formed from refractory metals or their alloys.
Claim 13
Dependent Claim
25 words
The interconnect structure of claim 10, wherein said refractory metal segments are formed from metals selected from the group comprising tungsten, titanium and their alloys.
References Cited (Backward Citations)
US3780426A
Cited
US4107726A
Cited
US4166279A
Cited
US4438450A
Cited
US4352239A
Cited
US4424251A
Cited
US4524378A
Cited
US4841354A
Cited
US4508749A
Cited
US4884120A
Cited
US4816895A
Cited
US4725877A
Cited
US4884118A
Cited
US4786962A
Cited
US4782380A
Cited
US4774127A
Cited
US4824803A
Cited
US4824716A
Cited
US4970574A
Cited
US5008730A
Cited
US5001541A
Cited
US5252382A
Cited
US5291066A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-08-07 | 1999-02-06 | 1999-08-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-08-07 | 2003-02-06 | 2003-08-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-08-07 | 2007-02-06 | 2007-08-08 | $7700.00 | Window Closed / Lapsed |