US5001541A
Expired / Lapsed
US
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Advanced electromigration resistant interconnect structure and process
Assignee: Texas Instruments Inc
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Filing: 1989-03-22
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Granted: 1991-03-19
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Expires: 2009-03-22
Abstract
Abstract An advanced electromigration resistant lead (34) is formed over an insulator layer (36). The lead (34) is processed from a metallic film having a known grain size. A rapid thermal anneal is conducted to increase the grain size and to reduce the number of triple points. The lead (34) is also engineered to have rounded edges (40) rather than sharp edges. The rounded edges (40) reduce the amount of stress in the lead (34) and help further reduce the effects of electromigration.
Inventors
- 👤 Robert L. Virkus
- 👤 Hoang H. Hoang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 16:55
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/44; H10W20/4403; H10W20/4405; H10W20/435; Y; Y10; Y10S; Y10S438/00; Y10S438/927
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
59 words
An improved semiconductor integrated circuit structure, comprising: a metallic film having a known grain size and a number of triple points; and a lead formed from said film, said lead having a grain size larger than said known grain size and fewer, but a non-zero number of, triple points than said film to lessen electromigration effects in said lead.
Claim 2
Dependent Claim
59 words
An improved semiconductor integrated circuit structure, comprising: a metallic film having a known grain size and a number of triple points; and a lead formed from said film, said lead having a grain size larger than said known grain size and fewer, but a non-zero number of, triple points than said film to lessen electromigration effects in said lead.
Claim 3
Dependent Claim
28 words
The structure of claim 1, wherein said lead has rounded edges along a top surface thereof to reduce stress and to further reduce electromigration effects in said lead.
Claim 4
Dependent Claim
28 words
The structure of claim 1, wherein said lead has rounded edges along a bottom surface thereof to reduce stress and to further reduce electromigration effects in said lead.
Claim 5
Dependent Claim
32 words
The structure of claim 1, wherein said lead has rounded edges along a top surface and a bottom surface thereof to reduce stress and to further reduce electromigration effects in said lead.
Claim 6
Independent Claim
77 words
A method for reducing electromigration effects in an integrated circuit structure formed on a semiconductor substrate, comprising the steps of: forming a lead over an insulator on the substrate from a metallic film having a known grain size; and increasing said known grain size, by exposing said metallic film to a rapid thermal anneal, such that a total number of triple points within said lead is lessened to reduce electromigration effects in the integrated circuit interconnect structure.
Claim 7
Independent Claim
77 words
A method for reducing electromigration effects in an integrated circuit structure formed on a semiconductor substrate, comprising the steps of: forming a lead over an insulator on the substrate from a metallic film having a known grain size; and increasing said known grain size, by exposing said metallic film to a rapid thermal anneal, such that a total number of triple points within said lead is lessened to reduce electromigration effects in the integrated circuit interconnect structure.
Claim 8
Dependent Claim
24 words
The method of claim 5, wherein said step of increasing said known grain size is conducted prior to said step of forming a lead.
Claim 9
Dependent Claim
23 words
The method of claim 5, wherein said step of increasing said known grain size is conducted after said step of forming a lead.
Claim 10
Dependent Claim
47 words
The method of claim 5, wherein the step of exposing said metallic film to a rapid thermal anneal comprises: ramping-up to a temperature of approximately 600° C. in approximately three seconds; holding said temperature for approximately thirty seconds; and ramping-down from said temperature in approximately thirty seconds.
Claim 11
Dependent Claim
22 words
The method of claim 5, further comprising a step of isotropically etching said leads to round edges thereof and reduce stress therein.
Claim 12
Dependent Claim
14 words
The method of claim 9, wherein the step of isotropically etching comprises wet etching.
Claim 13
Dependent Claim
14 words
The method of claim 9, wherein the step of isotropically etching comprises plasma etching.
Claim 14
Dependent Claim
28 words
The method of claim 5, wherein the step of forming leads comprises: forming a photoresist pattern over said film; and etching said film corresponding to said photoresist pattern.
Claim 15
Dependent Claim
77 words
The method of claim 5, wherein the step of forming leads comprises: forming a first photoresist pattern over said insulator; isotropically etching said insulator corresponding to said first pattern to form a rounded trench in said insulator; stripping said photoresist; depositing a metallic film over said insulator and in said rounded trench; forming a second photoresist pattern over said film in said rounded trench; and etching said film corresponding to said second pattern to form said lead.
Claim 16
Dependent Claim
87 words
The method of claim 5, wherein the step of forming leads comprises: depositing a relatively thick layer of photoresist over said insulator; forming a pattern in said photoresist; isotropically etching said insulator corresponding to said pattern to form a rounded trench in said insulator; depositing a metallic film over said photoresist and into said rounded trench such that said film in said trench is separated from said film over said photoresist; and removing said photoresist to lift off said film and form said lead in said trench.
Claim 17
Dependent Claim
23 words
The method of claim 5, further comprising the step of forming a diffusion barrier over said insulator to reduce the likelihood of spiking.
Claim 18
Independent Claim
68 words
A method for defining a shape of a metallic lead to reduce the effects of stress and electromigration in a semiconductor integrated circuit, comprising the steps of: depositing a metallic film over an insulator; patterning said film to form the lead; and processing the lead, by rapid thermal annealing of the lead in a rapid thermal processor, to configure the shape of the lead to reduce electromigration therein.
Claim 19
Independent Claim
68 words
A method for defining a shape of a metallic lead to reduce the effects of stress and electromigration in a semiconductor integrated circuit, comprising the steps of: depositing a metallic film over an insulator; patterning said film to form the lead; and processing the lead, by rapid thermal annealing of the lead in a rapid thermal processor, to configure the shape of the lead to reduce electromigration therein.
Claim 20
Dependent Claim
40 words
The method of claim 16, wherein the step of annealing comprises: ramping-up to a temperature of approximately 600° C. for approximately three seconds; holding said temperature for approximately thirty seconds; and ramping-down to an original temperature in approximately thirty seconds.
Claim 21
Dependent Claim
20 words
The method of claim 16, wherein the step of processing the lead comprises exposing the lead to a laser pulse.
References Cited (Backward Citations)
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