US4725877A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Metallized semiconductor device including an interface layer
Assignee: Nokia Bell Labs
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Filing: 1986-04-11
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Granted: 1988-02-16
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Expires: 2006-04-11
Abstract
Abstract Structures of alternating amorphous layers of titanium and a semiconductor material serve as effective interface layers between an insulator or semiconductor material and an aluminum metallization material in semiconductor devices. Such structures effectively serve to minimize interdiffusion during device manufacture without undue increase in electrical contact resistance during device operation.
Inventors
- 👤 Daniel Brasen
- 👤 Ronald H. Willens
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:15
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/80; H10D62/83; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/032; H10W20/033; H10D62/85; H10D64/00; H10D64/20; H10D64/23; H10D64/251; H10D64/60; H10D64/62; H10D84/00; H10D84/01; H10D84/0123; H10D84/0126; H10D84/013; H10W20/038; Y; Y10; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12528; Y10T428/12771; Y10T428/12806
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
82 words
Device comprising a body of semiconductor material and an electrical conductor element which consists of a material which comprises aluminum in an amount of at least 90 weight percent, CHARACTERIZED IN THAT, between said body and said conductor element, there is a structure of alternating, essentially amorphous, first and second layers of first material which consists essentially of titanium, and second material which consists essentially of semiconductor material, the thickness of said first layers being less than or equal to 8 nanometers.
Claim 2
Dependent Claim
82 words
Device comprising a body of semiconductor material and an electrical conductor element which consists of a material which comprises aluminum in an amount of at least 90 weight percent, CHARACTERIZED IN THAT, between said body and said conductor element, there is a structure of alternating, essentially amorphous, first and second layers of first material which consists essentially of titanium, and second material which consists essentially of semiconductor material, the thickness of said first layers being less than or equal to 8 nanometers.
Claim 3
Dependent Claim
22 words
Device of claim 1 in which said first material comprises titanium in an amount greater than or equal to 90 weight percent.
Claim 4
Dependent Claim
19 words
Device of claim 1 in which said second material is essentially the same in all of said second layers.
Claim 5
Dependent Claim
12 words
Device of claim 1 in which said body consists essentially of silicon.
Claim 6
Dependent Claim
13 words
Device of claim 1 in which said second material consists essentially of silicon.
Claim 7
Dependent Claim
14 words
Device of claim 1 in which the material of said conductor element comprises copper.
Claim 8
Dependent Claim
14 words
Device of claim 1 in which said second material is essentially in elemental form.
Claim 9
Dependent Claim
14 words
Device of claim 1 in which said second material is essentially in compound form.
Claim 10
Dependent Claim
12 words
Device of claim 1 in which said second material is a mixture.
Claim 11
Dependent Claim
13 words
Device of claim 1 in which said structure is on a source region.
Claim 12
Dependent Claim
13 words
Device of claim 1 in which said structure is on a drain region.
Claim 13
Dependent Claim
14 words
Device of claim 1 in which said structure is on a gate insulating layer.
References Cited (Backward Citations)
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US4017890A
Cited
US4135292A
Cited
JPS56165354A
Cited
JPS5771175A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-02-15 | 1991-08-17 | 1992-02-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-02-15 | 1995-08-17 | 1996-02-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-02-15 | 1999-08-17 | 2000-02-16 | $7700.00 | Window Closed / Lapsed |