US4166279A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electromigration resistance in gold thin film conductors
Assignee: International Business Machines Corp
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Filing: 1977-12-30
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Granted: 1979-08-28
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Expires: 1997-12-30
Abstract
Abstract A method and resulting structure for forming narrow intermetallic stripes which will carry high currents on bodies such as semiconductors, integrated circuits, and magnetic bubble structures, is set forth. The conductive stripe includes gold with at least one transition metal from the group niobium, zirconium and hafnium. The gold and at least one transition metal are deposited onto a supporting body. The deposited metallic material is then annealed at a temperature between about 200° C. and 500° C. for a time sufficient to form a gold-transition metal compound within a gold matrix. The conductive stripes are formed by masking and removing portions of the annealed metallic material to produce conductive stripes which may have a width of 6×10 -4 inches or less. These stripes have significantly improved electromigration performance and do not have significantly increased resistance.
Inventors
- 👤 Amitava Gangulee
- 👤 Paul S. Ho
- 👤 James K. Howard
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 00:53
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/40; H10P14/412; H01; H01B; H01B5/00; H01B5/14; H01F; H01F10/00; H01F10/06; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/44; H10W20/4403; H10W20/4432; H10W20/4435
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
47 words
A minimum physical dimensional current conductive stripe having a top surface and a bottom surface supported upon a substrate comprising: gold and at least one region within the stripe containing an intermetallic compound of gold and a transition metal from the group of niobium, zirconium and hafnium.
Claim 2
Dependent Claim
47 words
A minimum physical dimensional current conductive stripe having a top surface and a bottom surface supported upon a substrate comprising: gold and at least one region within the stripe containing an intermetallic compound of gold and a transition metal from the group of niobium, zirconium and hafnium.
Claim 3
Dependent Claim
18 words
The current conductive stripe of claim 1 wherein the minimal physical dimension is less than 6×10 -4 inches.
Claim 4
Dependent Claim
13 words
The current conductive stripe of claim 1 wherein the transition metal is zirconium.
Claim 5
Dependent Claim
13 words
The current conductive stripe of claim 1 wherein the transition metal is niobium.
Claim 6
Dependent Claim
62 words
The current conductive stripe of claim 1 wherein a first region containing said intermetallic compound forms a first layer and further including a second region within the gold stripe containing said intermetallic compound, said first layer incorporating said bottom surface of said stripe and said second region containing said intermetallic compound forming a layer which incorporates said top surface of said stripe.
Claim 7
Dependent Claim
24 words
The conductive strip of claim 1 wherein said region containing the intermetallic compound forms a layer which incorporates said bottom surface of said stripe.
Claim 8
Dependent Claim
12 words
The conductive stripe of claim 5 wherein the transition metal is zirconium.
Claim 9
Dependent Claim
12 words
The conductive stripe of claim 5 wherein the transition metal is niobium.
Claim 10
Dependent Claim
12 words
The conductive stripe of claim 6 wherein the transition metal is zirconium.
Claim 11
Dependent Claim
12 words
The conductive stripe of claim 6 wherein the transition metal is niobium.
Claim 12
Dependent Claim
60 words
An integrated circuit structure comprising a plurality of semiconductor devices electrically connected by means of current conductive stripes, said stripes having a top surface and a bottom surface and being composed of gold and at least one region within the gold stripe containing an intermetallic compound of gold and a transition metal from the group of niobium, zirconium and hafnium.
Claim 13
Dependent Claim
60 words
An integrated circuit structure comprising a plurality of semiconductor devices electrically connected by means of current conductive stripes, said stripes having a top surface and a bottom surface and being composed of gold and at least one region within the gold stripe containing an intermetallic compound of gold and a transition metal from the group of niobium, zirconium and hafnium.
Claim 14
Dependent Claim
13 words
The integrated circuit structure of claim 11 wherein the transition metal is zirconium.
Claim 15
Dependent Claim
13 words
The integrated circuit structure of claim 11 wherein the transition metal is niobium.
Claim 16
Dependent Claim
66 words
The integrated circuit structure of claim 11 wherein a first region of said stripes containing said intermetallic compound forms a first layer and further including a second region within the gold stripes containing said intermetallic compound, said first layer which incorporates said bottom surface of said stripes and said second region of said intermetallic compound forming a layer which incorporates said top surface of said stripes.
Claim 17
Dependent Claim
24 words
The integrated circuit structure of claim 11 wherein said region of said stripes forms a layer which incorporates said bottom surface of said stripe.
Claim 18
Dependent Claim
13 words
The integrated circuit structure of claim 14 wherein the transition metal is zirconium.
Claim 19
Dependent Claim
13 words
The integrated circuit structure of claim 14 wherein the transition metal is niobium.
Claim 20
Dependent Claim
13 words
The integrated circuit structure of claim 15 wherein the transition metal is zirconium.
Claim 21
Dependent Claim
13 words
The integrated circuit structure of claim 15 wherein the transition metal is niobium.
References Cited (Backward Citations)
US2886499A
Cited
US3396454A
Cited
US3478415A
Cited
US3662454A
Cited
US3717563A
Cited
US4017890A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-08-27 | 1983-02-26 | 1983-08-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-08-27 | 1987-02-26 | 1987-08-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-08-27 | 1991-02-26 | 1991-08-28 | $7700.00 | Window Closed / Lapsed |