US6828542B2 — System and method for lithography process monitor…

Claim 1

Independent Claim 150 words

An image sensor unit, for use with a highly precise moveable platform, the image sensor unit comprising: a substrate having a wafer-shaped profile; a sensor array, disposed on the wafer-shaped substrate, the sensor array including: a plurality of sensor cells wherein each sensor cell includes an active area to sense light of a predetermined wavelength that is incident thereon; and a film, disposed over the active areas of the plurality of sensor cells and comprised of a material that impedes passage of light of the predetermined wavelength, wherein the film includes a plurality of apertures which are arranged such that an aperture of the plurality of apertures overlies an active area of a corresponding sensor cell to expose a portion of the active area and wherein light of the predetermined wavelength is capable of being sensed by the portion of the active area that is exposed by the corresponding aperture.

Claim 2

Dependent Claim 150 words

An image sensor unit, for use with a highly precise moveable platform, the image sensor unit comprising: a substrate having a wafer-shaped profile; a sensor array, disposed on the wafer-shaped substrate, the sensor array including: a plurality of sensor cells wherein each sensor cell includes an active area to sense light of a predetermined wavelength that is incident thereon; and a film, disposed over the active areas of the plurality of sensor cells and comprised of a material that impedes passage of light of the predetermined wavelength, wherein the film includes a plurality of apertures which are arranged such that an aperture of the plurality of apertures overlies an active area of a corresponding sensor cell to expose a portion of the active area and wherein light of the predetermined wavelength is capable of being sensed by the portion of the active area that is exposed by the corresponding aperture.

Claim 3

Dependent Claim 22 words

The image sensor unit of claim 1 further including a transparent medium, having a predetermined refractive index, disposed on the sensor array.

Claim 4

Dependent Claim 25 words

The image sensor unit of claim 1 further including communications circuitry disposed on the substrate, wherein the communications circuitry is coupled to the sensor array.

Claim 5

Dependent Claim 31 words

The image sensor unit of claim 1 further including at least one battery, disposed on or within a cavity in the wafer-shaped substrate, to provide electrical power to the sensor array.

Claim 6

Dependent Claim 29 words

The image sensor unit of claim 1 wherein the film is disposed between the active areas of the sensor cells and a protective outer layer of the sensor array.

Claim 7

Dependent Claim 24 words

The image sensor unit of claim 1 further including communications circuitry, disposed on the substrate, to provide data to external circuitry using wireless techniques.

Claim 8

Dependent Claim 25 words

The image sensor unit of claim 6 wherein the communications circuitry provides data using wireless techniques during collection of image data by the sensor array.

Claim 9

Dependent Claim 37 words

The image sensor unit of claim 6 further including at least one battery disposed on or within a cavity in the wafer-shaped substrate wherein the battery provides electrical power to the sensor array and the communications circuitry.

Claim 10

Dependent Claim 82 words

The image sensor unit of claim 1 wherein the image sensor unit further includes: data storage circuitry, coupled to the sensor array, to receive and store the data from the sensor array; data compression circuitry, coupled to the data storage circuitry, to compress the data; communications circuitry, coupled to the data compression circuitry, to provide data to external circuitry; and at least one rechargeable battery, to provide electrical power to the data storage circuitry, the data compression circuitry and the communications circuitry.

Claim 11

Dependent Claim 151 words

An image sensor unit, for use with a highly precise moveable platform, the image sensor unit comprising: a wafer-shaped substrate; a sensor array, integrated into the substrate, the sensor array including: a plurality of sensor cells wherein each sensor cell includes an active area to sense light of a predetermined wavelength that is incident thereon; and a film, disposed over the active areas of the plurality of sensor cells and comprised of a material that impedes passage of light of the predetermined wavelength, wherein the film includes a plurality of apertures which are arranged such that an aperture of the plurality of apertures overlies an active area of a corresponding sensor cell to expose a portion of the active area of the corresponding sensor cell and wherein light of the predetermined wavelength is capable of being sensed by the portion of the active area that is exposed by the corresponding aperture.

Claim 12

Dependent Claim 151 words

An image sensor unit, for use with a highly precise moveable platform, the image sensor unit comprising: a wafer-shaped substrate; a sensor array, integrated into the substrate, the sensor array including: a plurality of sensor cells wherein each sensor cell includes an active area to sense light of a predetermined wavelength that is incident thereon; and a film, disposed over the active areas of the plurality of sensor cells and comprised of a material that impedes passage of light of the predetermined wavelength, wherein the film includes a plurality of apertures which are arranged such that an aperture of the plurality of apertures overlies an active area of a corresponding sensor cell to expose a portion of the active area of the corresponding sensor cell and wherein light of the predetermined wavelength is capable of being sensed by the portion of the active area that is exposed by the corresponding aperture.

Claim 13

Dependent Claim 24 words

The image sensor unit of claim 10 further including communications circuitry, disposed on the substrate, to provide data to external circuitry using wireless techniques.

Claim 14

Dependent Claim 33 words

The image sensor unit of claim 10 further including at least one battery disposed on or within a cavity in the wafer-shaped substrate wherein the battery provides electrical power to the sensor array.

Claim 15

Dependent Claim 29 words

The image sensor unit of claim 10 wherein the film is disposed between the active areas of the sensor cells and a protective outer layer of the sensor array.

Claim 16

Dependent Claim 66 words

The image sensor unit of claim 10 wherein the image sensor unit further includes: data compression circuitry, coupled to the sensor array, to compress the data received from the sensor array; communications circuitry, coupled to the data compression circuitry, to provide the compressed data to external circuitry; and at least one rechargeable battery, to provide electrical power to the sensor array and the data compression circuitry.

Claim 17

Dependent Claim 83 words

The image sensor unit of claim 10 wherein the image sensor unit further includes: data storage circuitry, coupled to the sensor array, to receive and store data from the sensor array; data compression circuitry, coupled to the data storage circuitry, to compress the data; communications circuitry, coupled to the data compression circuitry, to provide the compressed data to external circuitry; and at least one rechargeable battery, to provide electrical power to the data storage circuitry, the data compression circuitry and the communications circuitry.

Claim 18

Dependent Claim 19 words

The image sensor unit of claim 10 wherein the sensor cells are charge coupled devices, CMOS devices or photodiodes.

Claim 19

Dependent Claim 25 words

The image sensor unit of claim 10 further including photon-conversion material, disposed over the sensor array and between the film and the plurality of sensors.

Claim 20

Dependent Claim 21 words

The image sensor unit of claim 17 wherein the photon-conversion material is disposed within the plurality of apertures of the film.

Claim 21

Dependent Claim 17 words

The image sensor unit of claim 17 wherein the photon-conversion material is disposed on the sensor array.

Claim 22

Independent Claim 219 words

A system to collect image data which is representative of an aerial image of a mask that is projected on a wafer plane, the system comprising: an optical system to produce the image of the mask on the wafer plane; a moveable platform; an image sensor unit, disposed on the moveable platform, to collect data which is representative of the aerial image of the mask, the image sensor includes: a wafer-shaped substrate; a sensor array, disposed on or in the wafer-shaped substrate, wherein the sensor array is capable of being located in the wafer plane, the sensor array includes: a plurality of sensor cells wherein each sensor cell includes an active area to sense light of a predetermined wavelength that is incident thereon; and a film, disposed over the active areas of the plurality of sensor cells and comprised of a material that impedes passage of light of the predetermined wavelength, wherein the film includes a plurality of apertures which are arranged such that an aperture of the plurality of apertures overlies an active area of a corresponding sensor cell to expose a portion of the active area of the corresponding sensor cell and wherein light of the predetermined wavelength is capable of being sensed by the portion of the active area that is exposed by the corresponding aperture.

Claim 23

Independent Claim 219 words

A system to collect image data which is representative of an aerial image of a mask that is projected on a wafer plane, the system comprising: an optical system to produce the image of the mask on the wafer plane; a moveable platform; an image sensor unit, disposed on the moveable platform, to collect data which is representative of the aerial image of the mask, the image sensor includes: a wafer-shaped substrate; a sensor array, disposed on or in the wafer-shaped substrate, wherein the sensor array is capable of being located in the wafer plane, the sensor array includes: a plurality of sensor cells wherein each sensor cell includes an active area to sense light of a predetermined wavelength that is incident thereon; and a film, disposed over the active areas of the plurality of sensor cells and comprised of a material that impedes passage of light of the predetermined wavelength, wherein the film includes a plurality of apertures which are arranged such that an aperture of the plurality of apertures overlies an active area of a corresponding sensor cell to expose a portion of the active area of the corresponding sensor cell and wherein light of the predetermined wavelength is capable of being sensed by the portion of the active area that is exposed by the corresponding aperture.

Claim 24

Dependent Claim 35 words

The system of claim 20 further including communications circuitry, disposed on the substrate, to image data which is representative of the light sensed by the sensor cells to a data processing unit using wireless techniques.

Claim 25

Dependent Claim 22 words

The system of claim 21 wherein the communications circuitry provides the data during collection of the data by the image sensor unit.

Claim 26

Dependent Claim 35 words

The system of claim 21 further including at least one battery disposed on or within a cavity in the wafer-shaped substrate wherein the battery provides electrical power to the sensor array and the communications circuitry.

Claim 27

Dependent Claim 12 words

The system of claim 20 wherein the mask is a product-type mask.

Claim 28

Dependent Claim 27 words

The system of claim 20 wherein the aerial image produced on the wafer plane is the same or substantially the same image produced on a product wafer.

Claim 29

Dependent Claim 78 words

The system of claim 20 further including: a data processing unit configured to receive the data which is representative of the aerial image; and wherein the moveable platform moves in first and second directions to a plurality of discrete locations relative to the aerial image wherein at each discrete location, the sensor cells sample the light incident on the exposed portion of the active area and wherein the processing unit uses the data to generate an aerial image.

Claim 30

Dependent Claim 31 words

The system of claim 26 wherein the distance between the plurality of discrete locations in the first direction is less than or equal to the width or diameter of the apertures.

Claim 31

Dependent Claim 31 words

The system of claim 26 wherein the distance between the plurality of discrete locations in the second direction is less than or equal to the width or diameter of the apertures.

Claim 32

Dependent Claim 18 words

The system of claim 26 wherein the processing unit interleaves the image data to generate the aerial image.

Claim 33

Dependent Claim 23 words

The system of claim 26 wherein the image sensor unit collects data which is representative of the aerial image in a raster-type manner.

Claim 34

Dependent Claim 24 words

The system of claim 26 wherein the image sensor unit collects image data which is representative of the aerial image in a vector-type manner.

Claim 35

Dependent Claim 188 words

An image sensor unit which is capable of collecting image data which is representative of an aerial image of a mask that is projected on a wafer plane by a lithographic unit, the image sensor unit comprising: a sensor array, disposed on or in the moveable platform of the lithographic unit, wherein the sensor array is capable of being located in the wafer plane, the sensor array includes: a plurality of sensor cells wherein each sensor cell includes an active area to sense fight of a predetermined wavelength that is incident thereon; and a film, disposed over the active areas of the plurality of sensor cells and comprised of a material that impedes passage of light of the predetermined wavelength, wherein the film includes a plurality of apertures which are arranged such that an aperture of the plurality of apertures overlies an active area of a corresponding sensor cell to expose a portion of the active area of the corresponding sensor cell and wherein light of the predetermined wavelength is capable of being sensed by the portion of the active area that is exposed by the corresponding aperture.

Claim 36

Dependent Claim 188 words

An image sensor unit which is capable of collecting image data which is representative of an aerial image of a mask that is projected on a wafer plane by a lithographic unit, the image sensor unit comprising: a sensor array, disposed on or in the moveable platform of the lithographic unit, wherein the sensor array is capable of being located in the wafer plane, the sensor array includes: a plurality of sensor cells wherein each sensor cell includes an active area to sense fight of a predetermined wavelength that is incident thereon; and a film, disposed over the active areas of the plurality of sensor cells and comprised of a material that impedes passage of light of the predetermined wavelength, wherein the film includes a plurality of apertures which are arranged such that an aperture of the plurality of apertures overlies an active area of a corresponding sensor cell to expose a portion of the active area of the corresponding sensor cell and wherein light of the predetermined wavelength is capable of being sensed by the portion of the active area that is exposed by the corresponding aperture.

Claim 37

Dependent Claim 14 words

The image sensor unit of claim 32 wherein the mask is a product-type mask.

Claim 38

Dependent Claim 29 words

The image sensor unit of claim 33 wherein the aerial image produced on the wafer plane is the same or substantially the same image produced on a product wafer.

Claim 39

Dependent Claim 19 words

The image sensor unit of claim 32 wherein the sensor cells are charge coupled devices, CMOS devices or photodiodes.

Claim 40

Dependent Claim 58 words

The image sensor unit of claim 32 wherein the sensor array is capable of moving between a plurality of discrete locations, relative to the aerial image, in first and second directions while disposed on the moveable platform, and wherein the sensor cells sample the light incident on the exposed portion of the active area at each discrete location.

Claim 41

Dependent Claim 33 words

The image sensor unit of claim 32 wherein the distance between the plurality of discrete locations in the first direction is less than or equal to the width or diameter of the apertures.

Claim 42

Dependent Claim 33 words

The image sensor unit of claim 32 wherein the distance between the plurality of discrete locations in the second direction is less than or equal to the width or diameter of the apertures.

Claim 43

Dependent Claim 25 words

The image sensor unit of claim 32 wherein the image sensor unit collects data which is representative of the aerial image in a raster-type manner.

Claim 44

Dependent Claim 26 words

The image sensor unit of claim 32 wherein the image sensor unit collects image data which is representative of the aerial image in a vector-type manner.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2007-12-07	2008-06-07	2008-12-07	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2011-12-07	2012-06-07	2012-12-07	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2015-12-07	2016-06-07	2016-12-07	$7700.00	Window Closed / Lapsed

System and method for lithography process monitoring and control

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