US6798529B2 — In-situ method and apparatus for end point detect…

Claim 1

Independent Claim 128 words

A method of monitoring the condition of a semiconductor wafer surface, comprising the steps of: rotating a first sensor about a platen axis at a platen angular velocity ω p ; rotating the wafer about a wafer axis at a wafer angular velocity ω W that is not equal to ω p , thereby allowing the sensor to scan the surface in a pattern that comprises a plurality of loci; collecting a surface reflectance datum from the sensor at each of a plurality of points along each loci; mapping the surface reflectance data to one or more localized zones on the surface; and characterizing the condition of the surface in each of the localized zones based on one or more statistical measures for the reflectance in the zones.

Claim 2

Independent Claim 128 words

A method of monitoring the condition of a semiconductor wafer surface, comprising the steps of: rotating a first sensor about a platen axis at a platen angular velocity ω p ; rotating the wafer about a wafer axis at a wafer angular velocity ω W that is not equal to ω p , thereby allowing the sensor to scan the surface in a pattern that comprises a plurality of loci; collecting a surface reflectance datum from the sensor at each of a plurality of points along each loci; mapping the surface reflectance data to one or more localized zones on the surface; and characterizing the condition of the surface in each of the localized zones based on one or more statistical measures for the reflectance in the zones.

Claim 3

Dependent Claim 16 words

The method of claim 1 , wherein the loci are substantially uniformly distributed across the surface.

Claim 4

Dependent Claim 40 words

The method of claim 1 , wherein the sensor is located a distance r s from the platen axis, the platen axis is displaced from the wafer axis by a distance r cc , and r s ≠r cc .

Claim 5

Dependent Claim 45 words

The method of claim 3 , wherein a second sensor located at a distance r s,2 from the platen axis is rotated about the platen axis at angular velocity ω p , and the surface reflectance data are collected from the first and second sensors.

Claim 6

Dependent Claim 15 words

The method of claim 4 , wherein r s and r s,2 are not collinear.

Claim 7

Dependent Claim 31 words

The method of claim 1 , wherein the platen axis and wafer axis are translated at a non-zero relative sweeping velocity r cc that is perpendicular to both of the axes.

Claim 8

Dependent Claim 171 words

A chemical mechanical polishing (CMP) apparatus comprising: a polishing platen that rotates around a platen axis at a platen angular velocity ω p ; a sensor located on the platen and located at a sensor radius r s from the platen axis; a wafer carrier for holding a wafer in cooperative relationship with the rotating platen while rotating the wafer around a wafer axis at a wafer angular velocity ω W that is not equal to wω p , thereby allowing the sensor to scan the surface in a pattern that comprises a plurality of loci, wherein the loci are substantially uniformly distributed across the surface, the wafer carrier having multiple chambers that allow for independently varying pressure within the chambers that urge against the wafer at corresponding multiple localized zones on the wafer; and a process controller configured to record a surface reflectance datum from the sensor at each of a plurality of points along each loci and maps the surface reflectance data to the localized zones on the surface.

Claim 9

Dependent Claim 171 words

A chemical mechanical polishing (CMP) apparatus comprising: a polishing platen that rotates around a platen axis at a platen angular velocity ω p ; a sensor located on the platen and located at a sensor radius r s from the platen axis; a wafer carrier for holding a wafer in cooperative relationship with the rotating platen while rotating the wafer around a wafer axis at a wafer angular velocity ω W that is not equal to wω p , thereby allowing the sensor to scan the surface in a pattern that comprises a plurality of loci, wherein the loci are substantially uniformly distributed across the surface, the wafer carrier having multiple chambers that allow for independently varying pressure within the chambers that urge against the wafer at corresponding multiple localized zones on the wafer; and a process controller configured to record a surface reflectance datum from the sensor at each of a plurality of points along each loci and maps the surface reflectance data to the localized zones on the surface.

Claim 10

Dependent Claim 27 words

The CMP apparatus of claim 7 , wherein the wafer axis and the platen axis are displaced by distance r cc and r s ≠r cc .

Claim 11

Dependent Claim 27 words

The CMP apparatus of claim 7 , wherein the mapped surface reflectance data are used to control the polishing independently within each of the multiple localized zones.

Claim 12

Dependent Claim 28 words

The CMP apparatus of claim 7 , wherein the mapped surface reflectance data indicate the state of polishing of the wafer within each of the multiple localized zones.

Claim 13

Dependent Claim 53 words

The CMP apparatus of claim 7 , wherein the process controller is further configured to process the mapped surface reflectance data to determine the state of polishing within each of the localized regions, and to selectively vary the pressure independently within each of the multiple chambers responsive to the state of polishing determination.

Claim 14

Dependent Claim 29 words

The CMP apparatus of claim 7 , wherein the multiple chambers are formed in a flexible membrane and comprise a center chamber surrounded by one or more concentric chambers.

Claim 15

Dependent Claim 21 words

The CMP apparatus of claim 7 , wherein the multiple chambers comprise a center circular chamber and three annular, concentric chambers.

Claim 16

Dependent Claim 66 words

The CMP apparatus of claim 7 , wherein the sensor comprises at least one fiber optic sensor having a bundle of transmit and receive optical fibers terminating at a sensor tip, a light source which transmits light through the transmit optical fibers to the surface of the wafer, and a photodetector which receives reflected light from the surface of the wafer through the receive optical fibers.

Claim 17

Dependent Claim 24 words

The CMP apparatus of claim 14 , wherein the transmit and receive optical fibers are oriented substantially normal to the surface of the wafer.

Claim 18

Dependent Claim 40 words

The CMP apparatus of claim 14 , wherein the sensor tip is spaced apart from the surface of the wafer to form a gap, and the size of the gap is in the range of about 200 to 250 mils.

Claim 19

Dependent Claim 26 words

The CMP apparatus of claim 14 , wherein the light source is a light emitting diode which emits light at a wavelength of about 880 nm.

Claim 20

Dependent Claim 29 words

The CMP apparatus of claim 7 , wherein the materials on the surface of the wafer are any one of, or a combination of, conductive, insulating or barrier materials.

Claim 21

Dependent Claim 19 words

The CMP apparatus of claim 17 , wherein the materials may be patterned on the surface of the wafer.

Claim 22

Dependent Claim 17 words

The CMP apparatus of claim 7 , wherein the sensor scans through the center of the wafer.

Claim 23

Dependent Claim 43 words

The CMP apparatus of claim 7 , wherein the wafer axis and/or the platen axis are translatable in a direction perpendicular to the axes such that the platent axis and wafer axis are moved relative to each other with a non-zero sweeping velocity.

Claim 24

Independent Claim 152 words

A method of chemical mechanical polishing (CMP) of a semiconductor wafer in a CMP machine, comprising the steps of: urging a polishing pad against the semiconductor wafer carried on a wafer carrier, the wafer carrier having multiple chambers that allow for independently varying pressure within the chambers that urge against a wafer at corresponding localized zones on the wafer; scanning a sensor across the surface is a pattern that comprises a plurality of loci; collecting a surface reflectance datum from the sensor at each of a plurality of points along each loci; mapping the surface reflectance data to the localized zones; characterizing the condition of the surface in each of the localized zones based on one or more statistical analyzes of the data mapped to each localized zone; and independently adjusting the pressure within one or more of the chambers responsive to the surface condition Within each of the corresponding localized zones.

Claim 25

Independent Claim 152 words

A method of chemical mechanical polishing (CMP) of a semiconductor wafer in a CMP machine, comprising the steps of: urging a polishing pad against the semiconductor wafer carried on a wafer carrier, the wafer carrier having multiple chambers that allow for independently varying pressure within the chambers that urge against a wafer at corresponding localized zones on the wafer; scanning a sensor across the surface is a pattern that comprises a plurality of loci; collecting a surface reflectance datum from the sensor at each of a plurality of points along each loci; mapping the surface reflectance data to the localized zones; characterizing the condition of the surface in each of the localized zones based on one or more statistical analyzes of the data mapped to each localized zone; and independently adjusting the pressure within one or more of the chambers responsive to the surface condition Within each of the corresponding localized zones.

Claim 26

Dependent Claim 40 words

The method of claim 22 , wherein the step of independently adjusting further comprises: reducing or stopping the chemical mechanical polishing independently within each localized zone when the statistical measures indicate a change in the surface condition in that zone.

Claim 27

Dependent Claim 50 words

The method of claim 23 , wherein the chemical mechanical polishing is reduced or stopped in a zone when one or more of the standard deviation, the standard deviation to mean ratio, and the age of the surface reflectance data within a localized zone indicate the onset of an endpoint.

Claim 28

Dependent Claim 32 words

The method of claim 23 , wherein the chemical mechanical polishing is reduced or stopped in a localized zone when the change in reflectance in that zone exceeds a predetermined threshold value.

Claim 29

Dependent Claim 64 words

The method of claim 22 , wherein the step of independently adjusting further comprises: reducing or stopping the chemical mechanical polishing, independently within each localized zone according to the one or more statistical measures wherein the statistical measures are selected from the mean, standard deviation, variance, range and ratios or other mathematical combinations thereof, of the surface reflectance data mapped to the localized zone.

Claim 30

Dependent Claim 61 words

The method of claim 22 , further comprising: calculating the variance in the surface reflectance data; determining the degree of topographical variations in the surface reflectance data on the surface of the wafer based on the variance of the data at the localized zones; and controlling the polishing process at the localized zones on the wafer responsive to the topographical variations.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2007-09-28	2008-03-29	2008-09-28	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2011-09-28	2012-03-29	2012-09-28	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2015-09-28	2016-03-29	2016-09-28	$7700.00	Window Closed / Lapsed

In-situ method and apparatus for end point detection in chemical mechanical polishing

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