US5923408A
Expired / Lapsed
US
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Substrate holding system and exposure apparatus using the same
Assignee: Canon Inc
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Filing: 1997-01-27
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Granted: 1999-07-13
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Expires: 2017-01-27
Abstract
Abstract A substrate holding system for holding a substrate by attraction through a negative pressure, has protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around the primary protrusions, and an arrangement for reducing a local change in shape of the substrate in a portion around the primary protrusion as the substrate is attracted by the negative pressure.
Inventors
- 👤 Yukio Takabayashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 10:09
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7614; G03F7/70; G03F7/70691; G03F7/707; H10P72/7612
Claims Analysis
Total Claims: 40
Claim 1
Independent Claim
102 words
A substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; and means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure, wherein said reducing means comprises a protrusion support formed with a pattern that serves to gradually reduce support rigidity per unit area for attraction of the substrate, radially outwardly from said primary protrusion.
Claim 2
Dependent Claim
102 words
A substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; and means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure, wherein said reducing means comprises a protrusion support formed with a pattern that serves to gradually reduce support rigidity per unit area for attraction of the substrate, radially outwardly from said primary protrusion.
Claim 3
Dependent Claim
24 words
A system according to claim 1, wherein said protrusion support includes a linear protrusion extending in a direction radially outwardly from said primary protrusion.
Claim 4
Dependent Claim
25 words
A system according to claim 1, wherein said protrusion support includes protrusions distributed with a density which decreases with a distance from said primary protrusion.
Claim 5
Dependent Claim
23 words
A system according to claim 1, further comprising a third protrusion of rim-like shape formed at the outermost circumference of said secondary protrusions.
Claim 6
Dependent Claim
92 words
A substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions having a column-like shape and distributed around said primary protrusion; and means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure, wherein said reducing means comprises small protrusions which are defined at free ends of said secondary protrusions, respectively.
Claim 7
Dependent Claim
92 words
A substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions having a column-like shape and distributed around said primary protrusion; and means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure, wherein said reducing means comprises small protrusions which are defined at free ends of said secondary protrusions, respectively.
Claim 8
Dependent Claim
29 words
A system according to claim 5, wherein said small protrusions have one of a column-like shape, a conical shape, a polygonal-rod shape, a pyramid shape, and a semi-spherical shape.
Claim 9
Dependent Claim
17 words
A system according to claim 5, wherein said secondary protrusions comprise a plurality of concentric annular protrusions.
Claim 10
Dependent Claim
99 words
A substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; and means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure, wherein said reducing means serves to make compression flexure of said primary protrusion and compression flexure of said secondary protrusions, as the substrate is attracted, substantially equal to each other.
Claim 11
Dependent Claim
99 words
A substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; and means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure, wherein said reducing means serves to make compression flexure of said primary protrusion and compression flexure of said secondary protrusions, as the substrate is attracted, substantially equal to each other.
Claim 12
Dependent Claim
41 words
A system according to claim 8, wherein, when the effective height is h and the effective load area is A, a value h/A of said primary protrusion and a value h/A of said secondary protrusions are substantially equal to each other.
Claim 13
Dependent Claim
93 words
A substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure; and a third protrusion of rim-like shape formed at the outermost circumference of said secondary protrusions, and wherein said third protrusion has an annular shape.
Claim 14
Dependent Claim
93 words
A substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure; and a third protrusion of rim-like shape formed at the outermost circumference of said secondary protrusions, and wherein said third protrusion has an annular shape.
Claim 15
Dependent Claim
75 words
A substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; and means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure, wherein there are three lifting pins.
Claim 16
Dependent Claim
75 words
A substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; and means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure, wherein there are three lifting pins.
Claim 17
Dependent Claim
89 words
A substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; and means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure, wherein an opening for supply of vacuum for substrate attraction is formed at a free end of said lifting pin.
Claim 18
Dependent Claim
89 words
A substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; and means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure, wherein an opening for supply of vacuum for substrate attraction is formed at a free end of said lifting pin.
Claim 19
Dependent Claim
119 words
An exposure apparatus, comprising, a substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; and means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure, wherein said reducing means comprises a protrusion support formed with a pattern that serves to gradually reduce support rigidity per unit area for attraction of the substrate, radially outwardly from said primary protrusion; and exposure means for exposing a substrate held by said substrate holding means.
Claim 20
Dependent Claim
119 words
An exposure apparatus, comprising, a substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; and means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure, wherein said reducing means comprises a protrusion support formed with a pattern that serves to gradually reduce support rigidity per unit area for attraction of the substrate, radially outwardly from said primary protrusion; and exposure means for exposing a substrate held by said substrate holding means.
Claim 21
Dependent Claim
29 words
An apparatus according to claim 13, wherein the substrate comprises a semiconductor wafer, and said exposure means serves to print a pattern on the wafer through a lithographic process.
Claim 22
Independent Claim
148 words
A device manufacturing method which uses an exposure apparatus comprising: a substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; and means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure, wherein said reducing means comprises a protrusion support formed with a pattern that serves to gradually reduce support rigidity per unit area for attraction of the substrate, radially outwardly from said primary protrusion; and exposure means for exposing a substrate held by said substrate holding means, wherein the substrate comprises a semiconductor wafer, and said exposure means serves to print a pattern on the wafer through a lithographic process.
Claim 23
Independent Claim
148 words
A device manufacturing method which uses an exposure apparatus comprising: a substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; and means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure, wherein said reducing means comprises a protrusion support formed with a pattern that serves to gradually reduce support rigidity per unit area for attraction of the substrate, radially outwardly from said primary protrusion; and exposure means for exposing a substrate held by said substrate holding means, wherein the substrate comprises a semiconductor wafer, and said exposure means serves to print a pattern on the wafer through a lithographic process.
Claim 24
Dependent Claim
92 words
A substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; and means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure, wherein said reducing means functions in the point that the height of said primary protrusion is lower than that of said secondary protrusions.
Claim 25
Dependent Claim
92 words
A substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; and means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure, wherein said reducing means functions in the point that the height of said primary protrusion is lower than that of said secondary protrusions.
Claim 26
Dependent Claim
37 words
A system according to claim 16, wherein the height of said primary protrusion is so determined that a clearance is defined between the top face of said primary protrusion and the substrate as the substrate is attracted.
Claim 27
Dependent Claim
88 words
A substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; and means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure, wherein said reducing means functions in the point that the top face of said primary protrusion has a slant.
Claim 28
Dependent Claim
88 words
A substrate holding system for holding a substrate by attraction through a negative pressure, comprising: protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; and means for reducing a local change in shape of the substrate in a portion around said primary protrusion as the substrate is attracted by the negative pressure, wherein said reducing means functions in the point that the top face of said primary protrusion has a slant.
Claim 29
Dependent Claim
74 words
A substrate holding system for holding a substrate by attraction through a negative pressure, said system comprising: a plurality of protrusions for supporting the substrate, said protrusions including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; and a protrusion support having a pattern that gradually reduces support rigidity per unit area for attraction of the substrate, radially outwardly from said primary protrusion.
Claim 30
Dependent Claim
74 words
A substrate holding system for holding a substrate by attraction through a negative pressure, said system comprising: a plurality of protrusions for supporting the substrate, said protrusions including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion; and a protrusion support having a pattern that gradually reduces support rigidity per unit area for attraction of the substrate, radially outwardly from said primary protrusion.
Claim 31
Dependent Claim
24 words
A system according to claim 19, wherein said protrusion support includes a linear protrusion extending in a direction radially outwardly from said primary protrusion.
Claim 32
Dependent Claim
25 words
A system according to claim 19, wherein said protrusion support includes protrusions distributed with a density which decreases with a distance from said primary protrusion.
Claim 33
Dependent Claim
88 words
A substrate holding system for holding a substrate by attraction through a negative pressure, said system comprising: a plurality of protrusions for supporting the substrate, said protrusions including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions having a column-like shape and distributed around said primary protrusion; and small protrusions defined at free ends of said secondary protrusions, respectively, wherein said small protrusions have one of a column-like shape, a conical shape, a polygonal-rod shape, a pyramid shape, and a semi-spherical shape.
Claim 34
Dependent Claim
88 words
A substrate holding system for holding a substrate by attraction through a negative pressure, said system comprising: a plurality of protrusions for supporting the substrate, said protrusions including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions having a column-like shape and distributed around said primary protrusion; and small protrusions defined at free ends of said secondary protrusions, respectively, wherein said small protrusions have one of a column-like shape, a conical shape, a polygonal-rod shape, a pyramid shape, and a semi-spherical shape.
Claim 35
Dependent Claim
73 words
A substrate holding system for holding a substrate by attraction through a negative pressure, said system comprising: a plurality of protrusions for supporting the substrate, said protrusions including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion, wherein compression flexure of said primary protrusion and compression flexure of said secondary protrusions, as the substrate is attracted, are substantially equal to each other.
Claim 36
Dependent Claim
73 words
A substrate holding system for holding a substrate by attraction through a negative pressure, said system comprising: a plurality of protrusions for supporting the substrate, said protrusions including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion, wherein compression flexure of said primary protrusion and compression flexure of said secondary protrusions, as the substrate is attracted, are substantially equal to each other.
Claim 37
Dependent Claim
63 words
A substrate holding system for holding a substrate by attraction through a negative pressure, said system comprising: a plurality of protrusions for supporting the substrate, said protrusions including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion, wherein the height of said primary protrusion is less than that of said secondary protrusions.
Claim 38
Dependent Claim
63 words
A substrate holding system for holding a substrate by attraction through a negative pressure, said system comprising: a plurality of protrusions for supporting the substrate, said protrusions including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion, wherein the height of said primary protrusion is less than that of said secondary protrusions.
Claim 39
Dependent Claim
59 words
A substrate holding system for holding a substrate by attraction through a negative pressure, said system comprising: a plurality of protrusions for supporting the substrate, said protrusions including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion, wherein the top face of said primary protrusion has a slant.
Claim 40
Dependent Claim
59 words
A substrate holding system for holding a substrate by attraction through a negative pressure, said system comprising: a plurality of protrusions for supporting the substrate, said protrusions including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around said primary protrusion, wherein the top face of said primary protrusion has a slant.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-07-12 | 2003-01-11 | 2003-07-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-07-12 | 2007-01-11 | 2007-07-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-07-12 | 2011-01-11 | 2011-07-13 | $7700.00 | Window Closed / Lapsed |