Substrate holder

Claim 2

A substrate holder for holding a substrate, comprising: a base portion; a relatively deep first clearance portion extending into said base portion; protrusion means associated with said first clearance portion and fixedly protruded from a surface of said base portion for contacting a surface of the substrate, said protrusion means surrounding and defining an inlet region of said first clearance portion; a relatively shallow second clearance portion adjacent to said protrusion means, said second clearance portion having a greater area than said first clearance portion in a plane perpendicular to a depth direction of said first and second clearance portions; first passage means extending within said base portion for connecting said second clearance portion to the outside of the holder; and second passage means extending within said base portion for connecting said first clearance portion to a vacuum source.

Claim 3

A substrate holder according to claim 1, wherein said protrusion means includes first and second substantially annular, band-like protrusions formed parallel to each other, with said inlet region of said first clearance portion being disposed between said first and second protrusions; the substrate holder further includes a third substantially annular, band-like protrusion formed beside and parallel to one of said first and second protrusions; and said second clearance portion is disposed between said third protrusion and said one of said first and second protrusions.

Claim 4

In an exposure apparatus for printing a predetermined pattern image onto a photosensitive substrate, a substrate holder for holding the substrate, comprising: a base portion; a relatively deep first clearance portion extending into said base portion; protrusion means associated with said first clearance portion and fixedly protruded from a surface of said base portion for contacting a surface of the substrate, said protrusion means surrounding and defining an inlet region of said first clearance portion; a relatively shallow second clearance portion adjacent to said protrusion means, said second clearance portion having a greater area than said first clearance portion in a plane perpendicular to a depth direction of said first and second clearance portions; first passage means extending within said base portion for connecting said second clearance portion to the outside of the holder; and second passage means extending within said base portion for connecting said first clearance portion to a vacuum source; said photosensitive substrate being printed by the pattern image while said first clearance portion is subjected to evacuation.

Claim 5

In an exposure apparatus for printing a predetermined pattern image onto a photosensitive substrate, a substrate holder for holding the substrate, comprising: a base portion; a relatively deep first clearance portion extending into said base portion; protrusion means associated with said first clearance portion and fixedly protruded from a surface of said base portion for contacting a surface of the substrate, said protrusion means surrounding and defining an inlet region of said first clearance portion; a relatively shallow second clearance portion adjacent to said protrusion means, said second clearance portion having a greater area than said first clearance portion in a plane perpendicular to a depth direction of said first and second clearance portions; first passage means extending within said base portion for connecting said second clearance portion to the outside of the holder; and second passage means extending within said base portion for connecting said first clearance portion to a vacuum source; said photosensitive substrate being printed by the pattern image while said first clearance portion is subjected to evacuation.

Claim 6

A substrate holder for holding a substrate, comprising: a base portion; a plurality of relatively deep first clearance portions extending into said base portion; a plurality of protrusion means respectively associated with said plurality of first clearance portions and fixedly protruded from a surface of said base portion for contacting a surface of the substrate; each said protrusion means being elongated along said surface of said base portion and surrounding and defining an inlet region of the associated first clearance portion, and each having adjacent thereto a relatively shallow second clearance portion of greater area than the associated first clearance portion in a plane perpendicular to a depth direction of said first and second clearance portions; and passage means extending within said base portion for connecting each of said first clearance portions to a vacuum source.

Claim 7

A substrate holder for holding a substrate, comprising: a base portion; a plurality of relatively deep first clearance portions extending into said base portion; a plurality of protrusion means respectively associated with said plurality of first clearance portions and fixedly protruded from a surface of said base portion for contacting a surface of the substrate; each said protrusion means being elongated along said surface of said base portion and surrounding and defining an inlet region of the associated first clearance portion, and each having adjacent thereto a relatively shallow second clearance portion of greater area than the associated first clearance portion in a plane perpendicular to a depth direction of said first and second clearance portions; and passage means extending within said base portion for connecting each of said first clearance portions to a vacuum source.

Claim 8

A substrate holder according to claim 4, wherein the second clearance portion adjacent each protrusion means is connected to passage means extending within said base portion for connecting that second clearance portion to the outside of the holder when the substrate is placed on said plurality of protrusion means.

Claim 9

A substrate holder according to claim 4, wherein said plurality of protrusion means are substantially annular and parallel to one another.

Claim 10

A substrate holder according to claim 4, wherein said plurality of protrusion means are disposed in a concentric arrangement.

Claim 11

A substrate holder according to claim 3, wherein a height of said protrusion means is 10 to 20 μm.

Claim 12

A substrate holder according to claim 4, wherein a height of said protrusion means is 10 to 20 μm.

Claim 13

A substrate holder for holding a substrate, comprising: a base portion; a relatively deep first clearance portion extending into said base portion; protrusion means associated with said first clearance portion and fixedly protruded from a surface of said base portion for contacting a surface of the substrate, said protrusion means surrounding and defining an inlet region of said first clearance portion, and a height of said protrusion means being 10 to 20 μm; a relatively shallow second clearance portion adjacent to said protrusion means, said second clearance portion having a greater area than said first clearance portion in a plane perpendicular to a depth direction of said first and second clearance portions; and passage means extending within said base portion for connecting said first clearance portion to a vacuum source.

Claim 14

A substrate holder for holding a substrate, comprising: a base portion; a relatively deep first clearance portion extending into said base portion; protrusion means associated with said first clearance portion and fixedly protruded from a surface of said base portion for contacting a surface of the substrate, said protrusion means surrounding and defining an inlet region of said first clearance portion, and a height of said protrusion means being 10 to 20 μm; a relatively shallow second clearance portion adjacent to said protrusion means, said second clearance portion having a greater area than said first clearance portion in a plane perpendicular to a depth direction of said first and second clearance portions; and passage means extending within said base portion for connecting said first clearance portion to a vacuum source.

Claim 15

A substrate holder according to claim 10, wherein said second clearance portion is connected to passage means extending within said base portion and communicating between said second clearance portion and the outside of the holder.

Claim 16

A substrate holder according to claim 10, wherein said protrusion means includes a plurality of protrusions which are parallel to one another.

Claim 17

A substrate holder according to claim 12, wherein said protrusions are disposed in a concentric arrangement.

Claim 18

A substrate holder for holding a substrate, comprising: a base portion; a relatively deep first clearance portion extending into said base portion; a protrusion portion associated with said first clearance portion and fixedly protruded from a surface of said base portion for contacting a surface of the substrate, said protrusion portion surrounding and defining an inlet region of said first clearance portion; a relatively shallow second clearance portion adjacent to said protrusion portion, said second clearance portion having a greater area than said first clearance portion in a plane perpendicular to a depth direction of said first and second clearance portions; a first passage extending within said base portion for connecting said second clearance portion to the outside of the holder; and a second passage extending within said base portion for connecting said first clearance portion to a vacuum source.

Claim 19

A substrate holder for holding a substrate, comprising: a base portion; a relatively deep first clearance portion extending into said base portion; a protrusion portion associated with said first clearance portion and fixedly protruded from a surface of said base portion for contacting a surface of the substrate, said protrusion portion surrounding and defining an inlet region of said first clearance portion; a relatively shallow second clearance portion adjacent to said protrusion portion, said second clearance portion having a greater area than said first clearance portion in a plane perpendicular to a depth direction of said first and second clearance portions; a first passage extending within said base portion for connecting said second clearance portion to the outside of the holder; and a second passage extending within said base portion for connecting said first clearance portion to a vacuum source.

Claim 20

A substrate holder according to claim 14, wherein said protrusion portion includes first and second substantially annular, band-like protrusions formed parallel to each other, with said inlet region of said first clearance portion being disposed between said first and second protrusions; the substrate holder further includes a third substantially annular, band-like protrusion formed beside and parallel to one of said first and second protrusions; and said second clearance portion is disposed between said third protrusion and said one of said first and second protrusions.

Claim 21

In an exposure apparatus for printing a predetermined pattern image onto a photosensitive substrate, a substrate holder for holding the substrate, comprising: a base portion; a relatively deep first clearance portion extending into said base portion; a protrusion portion associated with said first clearance portion and fixedly protruded from a surface of said base portion for contacting a surface of the substrate, said protrusion portion surrounding and defining an inlet region of said first clearance portion; a relatively shallow second clearance portion adjacent to said protrusion portion, said second clearance portion having a greater area than said first clearance portion in a plane perpendicular to a depth direction of said first and second clearance portions; a first passage extending within said base portion for connecting said second clearance portion to the outside of the holder; and a second passage extending within said base portion for connecting said first clearance portion to a vacuum source; said photosensitive substrate being printed by the pattern image while said first clearance portion is subjected to evacuation.

Claim 22

In an exposure apparatus for printing a predetermined pattern image onto a photosensitive substrate, a substrate holder for holding the substrate, comprising: a base portion; a relatively deep first clearance portion extending into said base portion; a protrusion portion associated with said first clearance portion and fixedly protruded from a surface of said base portion for contacting a surface of the substrate, said protrusion portion surrounding and defining an inlet region of said first clearance portion; a relatively shallow second clearance portion adjacent to said protrusion portion, said second clearance portion having a greater area than said first clearance portion in a plane perpendicular to a depth direction of said first and second clearance portions; a first passage extending within said base portion for connecting said second clearance portion to the outside of the holder; and a second passage extending within said base portion for connecting said first clearance portion to a vacuum source; said photosensitive substrate being printed by the pattern image while said first clearance portion is subjected to evacuation.

Claim 23

A substrate holder according to claim 16, wherein a height of said protrusion portion is 10 to 20 μm.

Claim 24

A substrate holder for holding a substrate, comprising: a base portion; a plurality of relatively deep first clearance portions extending into said base portion; a plurality of protrusion portions respectively associated with said plurality of first clearance portions and fixedly protruded from a surface of said base portion for contacting a surface of the substrate; each said protrusion portion being elongated along said surface of said base portion and surrounding and defining an inlet region of the associated first clearance portion, and each having adjacent thereto a relatively shallow second clearance portion of greater area than the associated first clearance portion in a plane perpendicular to a depth direction of said first and second clearance portions; and passages extending within said base portion for connecting each of said first clearance portions to a vacuum source.

Claim 25

A substrate holder for holding a substrate, comprising: a base portion; a plurality of relatively deep first clearance portions extending into said base portion; a plurality of protrusion portions respectively associated with said plurality of first clearance portions and fixedly protruded from a surface of said base portion for contacting a surface of the substrate; each said protrusion portion being elongated along said surface of said base portion and surrounding and defining an inlet region of the associated first clearance portion, and each having adjacent thereto a relatively shallow second clearance portion of greater area than the associated first clearance portion in a plane perpendicular to a depth direction of said first and second clearance portions; and passages extending within said base portion for connecting each of said first clearance portions to a vacuum source.

Claim 26

A substrate holder according to claim 18, wherein the second clearance portion adjacent each protrusion portion is connected to a passage extending within said base portion for connecting that second clearance portion to the outside of the holder.

Claim 27

A substrate holder according to claim 18, wherein said plurality of protrusion portions are substantially annular and parallel to one another.

Claim 28

A substrate holder according to claim 18, wherein said plurality of protrusion portions are disposed in a concentric arrangement.

Claim 29

A substrate holder according to claim 18, wherein a height of said protrusion portions is 10 to 20 μm.

Claim 30

A substrate holder for holding a substrate, comprising: a base portion; a relatively deep first clearance portion extending into said base portion; a protrusion portion associated with said first clearance portion and fixedly protruded from a surface of said base portion for contacting a surface of the substrate, said protrusion portion surrounding and defining an inlet region of said first clearance portion, and a height of said protrusion portion being 10 to 20 μm; a relatively shallow second clearance portion adjacent to said protrusion portion, said second clearance portion having a greater area than said first clearance portion in a plane perpendicular to a depth direction of said first and second clearance portions; and a passage extending within said base portion for connecting said first clearance portion to a vacuum source.

Claim 31

A substrate holder for holding a substrate, comprising: a base portion; a relatively deep first clearance portion extending into said base portion; a protrusion portion associated with said first clearance portion and fixedly protruded from a surface of said base portion for contacting a surface of the substrate, said protrusion portion surrounding and defining an inlet region of said first clearance portion, and a height of said protrusion portion being 10 to 20 μm; a relatively shallow second clearance portion adjacent to said protrusion portion, said second clearance portion having a greater area than said first clearance portion in a plane perpendicular to a depth direction of said first and second clearance portions; and a passage extending within said base portion for connecting said first clearance portion to a vacuum source.

Claim 32

A substrate holder according to claim 23, wherein said second clearance portion is connected to a passage extending within said base portion and communicating between said second clearance portion and the outside of the holder.

Claim 33

A substrate holder according to claim 23, wherein said protrusion portion includes a plurality of protrusions which are parallel to one another.

Claim 34

A substrate holder according to claim 25, wherein said protrusions are disposed in a concentric arrangement.