US6071177A
Expired / Lapsed
US
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Method and apparatus for determining end point in a polishing process
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1999-03-30
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Granted: 2000-06-06
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Expires: 2019-03-30
Abstract
Abstract A method for determining an end point in a chemical mechanical polishing process by utilizing a dual wavelength interference technique and an apparatus for carrying out such method are provided. In the method, a rotating platen that is equipped with a laser generating source capable of generating laser emissions in two different wavelengths is utilized such that a dual wavelength interference pattern may be received by a laser detector and a greatly expanded period between cycles in a resulting dual wavelength interference pattern may be utilized to determine the end point for material removal in a significantly larger thickness of material. The present invention novel method and apparatus can be utilized not only in monitoring the end point of CMP polishing of a thin oxide layer such as ILD or STI, but also in material removal of larger thickness such as in the planarization process of an IMD layer.
Inventors
- 👤 C. L. Lin
- 👤 Tin Chun Wang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 20:18
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; B24B49/00; B24B49/02; B24B49/12
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
197 words
A method for determining an end point in a polishing process comprising the steps of: providing a sample to be polished, said sample having at least a surface layer and a base layer formed of different materials, said surface layer material is adapted for penetration by a laser beam, an interface formed between said surface layer and said base layer for reflecting said laser beam, providing a polishing platen having installed thereon a polishing pad for removing at least partially said surface layer on said sample, said polishing platen further comprises a laser generator and a laser detector situated therein for sending and receiving emissions toward and from said interface in said sample through a window provided in said polishing pad, rotating said sample and said polishing platen independently and frictionally engaging a top surface of said surface layer on said sample with a top surface of said polishing pad, emitting from said laser generator emissions comprising two different wavelengths toward said interface in said sample and receiving a composite wavelength interference curve in said laser detector, and determining an end point in said composite wavelength interference curve corresponding to a thickness of said surface layer retained.
Claim 2
Independent Claim
197 words
A method for determining an end point in a polishing process comprising the steps of: providing a sample to be polished, said sample having at least a surface layer and a base layer formed of different materials, said surface layer material is adapted for penetration by a laser beam, an interface formed between said surface layer and said base layer for reflecting said laser beam, providing a polishing platen having installed thereon a polishing pad for removing at least partially said surface layer on said sample, said polishing platen further comprises a laser generator and a laser detector situated therein for sending and receiving emissions toward and from said interface in said sample through a window provided in said polishing pad, rotating said sample and said polishing platen independently and frictionally engaging a top surface of said surface layer on said sample with a top surface of said polishing pad, emitting from said laser generator emissions comprising two different wavelengths toward said interface in said sample and receiving a composite wavelength interference curve in said laser detector, and determining an end point in said composite wavelength interference curve corresponding to a thickness of said surface layer retained.
Claim 3
Dependent Claim
22 words
A method for determining an end point in a polishing process according to claim 1, wherein said sample is a semiconductor wafer.
Claim 4
Dependent Claim
49 words
A method for determining an end point in a polishing process according to claim 1, wherein said surface layer on said sample is a silicon oxide layer and said base layer on said sample is formed of a material selected from the group consisting of silicon, polysilicon and metal.
Claim 5
Dependent Claim
51 words
A method for determining an end point in a polishing process according to claim 1, wherein said two different wavelengths emitted by said laser generator having an additive effect in said composite wavelength interference curve when reflected by a top surface of said surface layer and said interface in said sample.
Claim 6
Dependent Claim
42 words
A method for determining an end point in a polishing process according to claim 1, wherein said laser generator comprises two semiconductor diodes each generating an emission at a different wavelength in the range between about 1000 Å and about 10,000 Å.
Claim 7
Dependent Claim
42 words
A method for determining an end point in a polishing process according to claim 1, wherein said laser generator comprises two semiconductor diodes each generating an emission at a different wavelength in the range between about 3500 Å and about 7500 Å.
Claim 8
Dependent Claim
34 words
A method for determining an end point in a polishing process according to claim 1, wherein said composite wavelength interference curve has a period between cycles of waveform of not smaller than 3000 Å.
Claim 9
Dependent Claim
35 words
A method for determining an end point in a polishing process according to claim 1, wherein said composite wavelength interference curve has a period between cycles of waveform of preferably not smaller than 4000 Å.
Claim 10
Dependent Claim
31 words
A method for determining an end point in a polishing process according to claim 1, wherein said two different wavelengths emitted from said laser generator are 4500 Å and 6700 Å.
Claim 11
Dependent Claim
32 words
A method for determining an end point in a polishing process according to claim 1, wherein said polishing platen having a surface area substantially larger than a surface area of said sample.
Claim 12
Independent Claim
165 words
A method for terminating a chemical mechanical polishing (CMP) process conducted on a semiconductor wafer at a preset end point comprising the steps of: providing a semiconductor wafer having an oxide layer on top, said oxide layer and a material layer that is not an oxide situated underneath form an interface thereinbetween, providing a polishing platen equipped with a polishing surface for removing at least partially said oxide layer; a laser generator and a laser detector for sending and receiving emissions to and from said interface in said wafer, rotating said wafer and said polishing platen independently so that a top surface of said oxide layer frictionally engages said polishing surface on the platen, emitting from said laser generator emissions comprising two different wavelengths toward said interface in said wafer and receiving a composite wavelength interference curve in said laser detector, and terminating said rotation between said wafer and said polishing platen when a preset end point in said composite wavelength interference curve is reached.
Claim 13
Independent Claim
165 words
A method for terminating a chemical mechanical polishing (CMP) process conducted on a semiconductor wafer at a preset end point comprising the steps of: providing a semiconductor wafer having an oxide layer on top, said oxide layer and a material layer that is not an oxide situated underneath form an interface thereinbetween, providing a polishing platen equipped with a polishing surface for removing at least partially said oxide layer; a laser generator and a laser detector for sending and receiving emissions to and from said interface in said wafer, rotating said wafer and said polishing platen independently so that a top surface of said oxide layer frictionally engages said polishing surface on the platen, emitting from said laser generator emissions comprising two different wavelengths toward said interface in said wafer and receiving a composite wavelength interference curve in said laser detector, and terminating said rotation between said wafer and said polishing platen when a preset end point in said composite wavelength interference curve is reached.
Claim 14
Dependent Claim
45 words
A method for terminating a chemical mechanical polishing process conducted on a semiconductor wafer at a preset end point according to claim 11, wherein said material layer that is not an oxide situated underneath is selected from the group consisting of silicon, polysilicon and metal.
Claim 15
Dependent Claim
49 words
A method for terminating a chemical mechanical polishing process conducted on a semiconductor wafer at a preset end point according to claim 11, wherein said oxide layer on said semiconductor wafer is an inter-layer dielectric (ILD) layer, a shallow trench isolation (STI) layer or an inter-metal dielectric (IMD) layer.
Claim 16
Dependent Claim
56 words
A method for terminating a chemical mechanical polishing process conducted on a semiconductor wafer at a preset end point according to claim 11, wherein said composite wavelength interference curve is formed by interferences between laser emissions reflected from a top surface of said oxide layer and laser emissions reflected from said interface at two different wavelengths.
Claim 17
Dependent Claim
42 words
A method for terminating a chemical mechanical polishing (CMP) process conducted on a semiconductor wafer at a preset end point according to claim 14, wherein said two different wavelengths are selected in a range between about 3500 Å and about 7500 Å.
Claim 18
Dependent Claim
55 words
A method for terminating a chemical mechanical polishing (CMP) process conducted on a semiconductor wafer at a preset end point according to claim 11, wherein said laser emissions having two different wavelengths produce an additive effect in said composite wavelength interference curve when reflected by a top surface of the oxide layer and said interface.
Claim 19
Dependent Claim
43 words
A method for terminating a chemical mechanical polishing (CMP) process conducted on a semiconductor wafer at a preset end point according to claim 11, wherein said composite wavelength interference curve has a period between cycles of waveform of not smaller than 3000 Å.
Claim 20
Dependent Claim
44 words
A method for terminating a chemical mechanical polishing (CMP) process conducted on a semiconductor wafer at a preset end point according to claim 11, wherein said composite wavelength interference curve has a period between cycles of waveform of preferably not smaller than 4000 Å.
Claim 21
Dependent Claim
40 words
A method for terminating a chemical mechanical polishing (CMP) process conducted on a semiconductor wafer at a preset end point according to claim 11, wherein said two different wavelengths emitted from said laser generator are 4500 Å and 6700 Å.
Claim 22
Dependent Claim
41 words
A method for terminating a chemical mechanical polishing (CMP) process conducted on a semiconductor wafer at a preset end point according to claim 11, wherein said wafer and said polishing platen are rotated independently in the same clockwise or counterclockwise direction.
Claim 23
Independent Claim
127 words
An apparatus for determining an end point in a chemical mechanical polishing (CMP) process comprising: a polishing platen having a polishing pad intimately joined thereon, said polishing platen further comprises a laser generator and a laser detector installed therein for sending and receiving laser emissions through a window provided in said polishing pad, said laser generator generates emissions at two different wavelengths toward a sample positioned on said polishing platen producing a composite wavelength interference curve for receiving by said laser detector for determining a polishing end point, means for rotating said polishing platen, means for rotating a sample holder for holding a sample thereon and pressing a surface of said sample for frictionally engaging the polishing surface on said platen until said end point is reached.
Claim 24
Independent Claim
127 words
An apparatus for determining an end point in a chemical mechanical polishing (CMP) process comprising: a polishing platen having a polishing pad intimately joined thereon, said polishing platen further comprises a laser generator and a laser detector installed therein for sending and receiving laser emissions through a window provided in said polishing pad, said laser generator generates emissions at two different wavelengths toward a sample positioned on said polishing platen producing a composite wavelength interference curve for receiving by said laser detector for determining a polishing end point, means for rotating said polishing platen, means for rotating a sample holder for holding a sample thereon and pressing a surface of said sample for frictionally engaging the polishing surface on said platen until said end point is reached.
Claim 25
Dependent Claim
24 words
An apparatus for determining an end point in a chemical mechanical polishing process according to claim 21, wherein said sample is a semiconductor wafer.
Claim 26
Dependent Claim
35 words
An apparatus for determining an end point in a chemical mechanical polishing process according to claim 21, wherein said laser generator comprises two semiconductor diodes such that laser emissions at two different wavelengths are generated.
Claim 27
Dependent Claim
39 words
An apparatus for determining an end point in a chemical mechanical polishing process according to claim 21, wherein said laser generator generates laser emissions at two different wavelengths in a range between about 3500 Å and about 7500 Å.
Claim 28
Dependent Claim
34 words
An apparatus for determining an end point in a chemical mechanical polishing process according to claim 21, wherein said laser generator generates laser emissions at two different wavelengths of 4500 Å and 6700 Å.
Claim 29
Dependent Claim
30 words
An apparatus for determining an end point in a chemical mechanical polishing process according to claim 21, wherein the sample comprises an oxide layer formed over silicon, polysilicon or metal.
Claim 30
Dependent Claim
36 words
An apparatus for determining an end point in a chemical mechanical polishing process according to claim 21, wherein said composite wavelength interference curve has a period between cycles of waveform of not smaller than 3000 Å.
Claim 31
Dependent Claim
37 words
An apparatus for determining an end point in a chemical mechanical polishing process according to claim 21, wherein said composite wavelength interference curve has a period between cycles of waveform of preferably not smaller than 4000 Å.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-06-06 | 2003-12-06 | 2004-06-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-06-06 | 2007-12-06 | 2008-06-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-06-06 | 2011-12-06 | 2012-06-06 | $7700.00 | Window Closed / Lapsed |