US5872633A
Expired / Lapsed
US
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Methods and apparatus for detecting removal of thin film layers during planarization
Assignee: Novellus Systems Inc
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Filing: 1997-02-12
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Granted: 1999-02-16
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Expires: 2017-02-12
Abstract
Abstract The present invention provides methods and apparatus which permit the in-process, in-situ, substantially real time measurement of the actual thickness of a surface layer of a work piece, e.g., a semiconductor wafer. A probe is disposed proximate to the outer perimeter of a polishing pad on a CMP table such that the probe establishes optical contact with the wafer surface as a portion of the wafer extends beyond the outer perimeter of the polishing pad. A nozzle may be provided to apply a stream of compressed air at the disk surface under inspection to thereby remove excess slurry from the local region of the workpiece being inspected. A broad band light source is employed in conjunction with a fiber optic cable to direct light at the wafer surface. A bifurcated probe is employed such that the light applied to the workpiece surface is reflected back to and captured by a corresponding optical sensor connected to a fiber optic cable. The captured reflected light received by the receptor sensor and fiber optic cable assembly is applied to a photospectrum meter which analyzes the reflected light. An output signal from the photospectrum meter is transmitted to a processor which includes a smart algorithm configured to calculate the thickness of the surface layer. Alternatively, the reflective characteristics of the semiconductor layers may affect the nature of the reflected signal; changes in the reflected signal can be detected to indicate when a metallic layer has been removed from an oxide layer.
Inventors
- 👤 Paul Holzapfel
- 👤 James Schlueter
- 👤 Chris Karlsrud
- 👤 Warren Lin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 14:49
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; B24B49/00; G; G01; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0625; H; H10; H10P; H10P74/00; H10P74/23; H10P74/238; H10P74/20; H10P74/203
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
197 words
In a planarization system configured to process a semiconductor wafer initially having at least a first material layer formed over a second material layer, a method for detecting the removal of said first material layer from said semiconductor wafer during operation of said planarization system, said method comprising the steps of: directing a broadband input interrogation signal at a portion of said first material layer, said broadband input interrogation signal having a plurality of wavelength components; detecting a reflected portion of said broadband input interrogation signal reflected directly from said first material layer; analyzing characteristics of said reflected portion of said broadband input interrogation signal; directing a second broadband input interrogation signal at a portion of said second material layer after removal of said first material layer, said second broadband input interrogation signal having a plurality of wavelength components; detecting a reflected signal produced in response to said second broadband input interrogation signal; analyzing characteristics of said reflected signal; and indicating removal of said first material layer from said semiconductor wafer in response to characteristics of said reflected signal, where characteristics of said reflected signal differ from characteristics of said reflected portion of said input interrogation signal.
Claim 2
Dependent Claim
197 words
In a planarization system configured to process a semiconductor wafer initially having at least a first material layer formed over a second material layer, a method for detecting the removal of said first material layer from said semiconductor wafer during operation of said planarization system, said method comprising the steps of: directing a broadband input interrogation signal at a portion of said first material layer, said broadband input interrogation signal having a plurality of wavelength components; detecting a reflected portion of said broadband input interrogation signal reflected directly from said first material layer; analyzing characteristics of said reflected portion of said broadband input interrogation signal; directing a second broadband input interrogation signal at a portion of said second material layer after removal of said first material layer, said second broadband input interrogation signal having a plurality of wavelength components; detecting a reflected signal produced in response to said second broadband input interrogation signal; analyzing characteristics of said reflected signal; and indicating removal of said first material layer from said semiconductor wafer in response to characteristics of said reflected signal, where characteristics of said reflected signal differ from characteristics of said reflected portion of said input interrogation signal.
Claim 3
Dependent Claim
19 words
A method according to claim 1, wherein said indicating step is performed when said reflected signal has sinusoidal characteristics.
Claim 4
Dependent Claim
28 words
A method according to claim 1, further comprising the step of displaying a human readable output indicative of removal of said first material layer from said semiconductor wafer.
Claim 5
Dependent Claim
25 words
A method according to claim 1, further comprising the step of adjusting an operational parameter of said planarization system in response to said indicating step.
Claim 6
Independent Claim
188 words
An apparatus for detecting removal of a first material layer initially formed over a second material layer on a semiconductor wafer during a planarization procedure, said apparatus comprising: means for generating input signal for establishing optical communication with a surface of said semiconductor wafer during said planarization procedure; said broadband input interrogation signal having a plurality of wavelength components; a receptor configured to receive a reflected signal produced in response to said input signal, said reflected directly from said first material layer, and said receptor being further configured to receive a reflected signal produced in response to a second broadband input interrogation signal directed at said material layer after removal of said first material layer, said second broadband input interrogation signal having a plurality of wavelength components; and a processor configured to process said reflected portion of said broadband input interrogation signal to thereby produce a first output signal having a first characteristic indicative of the presence of said first material layer and to process said reflected signal to thereby produce a second output signal having a second characteristic indicative of the exposure of said second material layer.
Claim 7
Independent Claim
188 words
An apparatus for detecting removal of a first material layer initially formed over a second material layer on a semiconductor wafer during a planarization procedure, said apparatus comprising: means for generating input signal for establishing optical communication with a surface of said semiconductor wafer during said planarization procedure; said broadband input interrogation signal having a plurality of wavelength components; a receptor configured to receive a reflected signal produced in response to said input signal, said reflected directly from said first material layer, and said receptor being further configured to receive a reflected signal produced in response to a second broadband input interrogation signal directed at said material layer after removal of said first material layer, said second broadband input interrogation signal having a plurality of wavelength components; and a processor configured to process said reflected portion of said broadband input interrogation signal to thereby produce a first output signal having a first characteristic indicative of the presence of said first material layer and to process said reflected signal to thereby produce a second output signal having a second characteristic indicative of the exposure of said second material layer.
Claim 8
Dependent Claim
52 words
An apparatus according to claim 5, wherein said means for generating comprises a substantially white light source and wherein each of said broadband input interrogation signal and said second broadband input interrogation signal is a broadband light signal having a plurality of wavelength components within the range of 350 to 2000 nanometers.
Claim 9
Dependent Claim
21 words
An apparatus according to claim 5, wherein said processor produces said first output signal when said reflected signal exhibits monotonic characteristics.
Claim 10
Dependent Claim
21 words
An apparatus according to claim 5, wherein said processor produces said second output signal when said reflected signal has sinusoidal characteristics.
Claim 11
Dependent Claim
29 words
An apparatus according to claim 5, further comprising a display terminal for displaying a human readable output indicative of removal of said first material layer from said semiconductor wafer.
Claim 12
Dependent Claim
47 words
An apparatus according to claim 5, wherein said semiconductor wafer has a planar surface and said means for generating is positioned such that said broadband input interrogation signal is directed toward said semiconductor wafer at an angle between 80 and 110 degrees relative to said upper surface.
Claim 13
Dependent Claim
26 words
An apparatus according to claim 5, wherein said first material layer comprises a material selected from the group consisting of copper, tungsten, titanium, and titanium nitride.
Claim 14
Dependent Claim
15 words
An apparatus according to claim 5, wherein said second material layer comprises an oxide composition.
Claim 15
Independent Claim
133 words
A method for detecting removal of a first material layer initially formed above a second material layer on a semiconductor wafer, said method comprising the steps of: applying a broadband input interrogation signal to an exposed surface of said first material layer; detecting a reflected signal soley associated with a portion of said broadband input interrogation signal reflected from said first material layer; conducting a planarization procedure on said semiconductor wafer to thereby remove said first material layer; detecting a second reflected signal reflected from said second material layer and produced in response to said broadband input interrogation signal, said second material layer having different optical reflective characteristics relative to said first material layer; and indicating removal of said first material layer from said semiconductor wafer in response to said second reflected signal.
Claim 16
Independent Claim
133 words
A method for detecting removal of a first material layer initially formed above a second material layer on a semiconductor wafer, said method comprising the steps of: applying a broadband input interrogation signal to an exposed surface of said first material layer; detecting a reflected signal soley associated with a portion of said broadband input interrogation signal reflected from said first material layer; conducting a planarization procedure on said semiconductor wafer to thereby remove said first material layer; detecting a second reflected signal reflected from said second material layer and produced in response to said broadband input interrogation signal, said second material layer having different optical reflective characteristics relative to said first material layer; and indicating removal of said first material layer from said semiconductor wafer in response to said second reflected signal.
Claim 17
Dependent Claim
21 words
A method according to claim 13, further comprising the step of halting said planarization procedure in response to said indicating step.
Claim 18
Dependent Claim
24 words
A method according to claim 13, wherein said first material layer comprises a metallic composition and said second material layer comprises an oxide composition.
Claim 19
Dependent Claim
28 words
A method according to claim 13, further comprising the step of analyzing characteristics of said second reflected signal to thereby indicate the presence of said first material layer.
Claim 20
Dependent Claim
27 words
A method according to claim 13, further comprising the step of analyzing characteristics of said reflected signal to thereby indicate the presence of said first material layer.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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